Table surface cleaning mechanism of thin film etching machine

Abstract

The utility model discloses a table top cleaning mechanism of a film etching machine, which relates to the technical field of etching machines and comprises a first supporting seat and a second supporting seat, the first supporting seat and the second supporting seat are mounted on two sides of a table top of the etching machine, a connecting plate is movably arranged between the first supporting seat and the second supporting seat, and a fixing plate is fixedly mounted at the end of the connecting plate. A cleaning plate is fixedly installed at one end of the fixing plate, the bottom end of the cleaning plate is fixedly connected with a scraping plate, the scraping plate makes contact with the table top, and a cleaning component is arranged on one side of the cleaning plate and makes contact with the surface of the scraping plate. According to the cleaning device, impurities on the table top can be cleaned through the cleaning plate and the scraping plate which can move transversely, meanwhile, a group of cleaning strips which can move longitudinally are arranged between the cleaning plate and the scraping plate, and the cleaning strips make contact with the surface of the scraping plate and move, so that the impurities on the scraping plate are effectively cleaned; the cleanliness of the surface of the scraper is guaranteed, and the later cleaning quality is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of etching machines, in particular to a table cleaning mechanism of a thin film etching machine. Background Art

[0002] An etcher is a process testing instrument used in the field of electronics and communications technology. It etches away the excess parts of silicon wafers. Plasma etching is the most common form of dry etching. Its principle is that the gas exposed to the electron area forms plasma. The resulting ionized gas and the gas composed of released high-energy electrons form plasma or ions. When the ionized gas atoms are accelerated by the electric field, they release enough force and surface expulsion force to tightly adhere to the material or etch the surface.

[0003] At present, the table cleaning mechanism of the existing thin film etcher on the market has the following shortcomings in actual use: some sticky impurities on the table of the etcher will be collected by the cleaning plate, and some will remain on the cleaning plate. In order to improve the cleaning quality between the cleaning plate and the table, the cleaning plate needs to be wiped again later, which is a cumbersome operation. Therefore, we propose a table cleaning mechanism for a thin film etcher. Utility Model Content

[0004] The purpose of the utility model is to solve the defects in the prior art and to propose a table cleaning mechanism for a thin film etching machine.

[0005] In order to achieve the above purpose, the present invention adopts the following technical solutions:

[0006] A table cleaning mechanism for a thin film etcher includes a support seat 1 and a support seat 2, wherein the support seat 1 and the support seat 2 are installed on both sides of the table of the etcher, a connecting plate is movably arranged between the support seat 1 and the support seat 2, a fixing plate is fixedly installed at the end of the connecting plate, a cleaning plate is fixedly installed at one end of the fixing plate, a scraper is fixedly connected to the bottom end of the cleaning plate, the scraper is in contact with the table, a cleaning component is arranged on one side of the cleaning plate, and the cleaning component is in contact with the surface of the scraper.

[0007] As an optimal technical solution of the present utility model, the cleaning component includes an electric guide rail, which is horizontally installed in the middle of the cleaning plate. A transmission connection bracket is installed on the electric guide rail. An electric push cylinder and motor 2 are respectively installed on both sides of the bracket. The output end of the electric push cylinder passes through the bracket and is interconnected with the tail of motor 2.

[0008] As an optimal technical solution of the present invention, the output end of the motor 2 is fixedly connected to a connecting rod, the connecting rod is curved, one end of the connecting rod is fixedly connected to a cleaning strip, the cleaning strip is made of rubber, the cleaning strip is arc-shaped, and the bottom end of the cleaning strip is fixedly installed with a collection tank.

[0009] As an optimal technical solution of the present invention, a limit groove is provided on the support seat 1, a motor 1 is installed on the end of the support seat 2, a screw is provided in the middle of the support seat 2, and the output end of the motor 1 passes through the support seat 2 and is connected to the end of its screw.

[0010] As a preferred technical solution of the present invention, the middle part of the screw is threadedly connected to the movable block, one end of the movable block is interconnected with one end of the connecting plate, and the other end of the connecting plate is fixedly installed with a limit block.

[0011] As a preferred technical solution of the present invention, the position of the limit block corresponds to the position of the limit slot, the limit block is embedded in the limit slot, and the limit block is slidably connected to the limit slot.

[0012] As a preferred technical solution of the present invention, the scraper is inclined and moves horizontally on the table.

[0013] Compared with the prior art, the beneficial effect of the present invention is that impurities on the table surface can be cleaned by the cleaning plate and scraper that can move laterally, and at the same time a group of cleaning strips that can move longitudinally are arranged between the cleaning plate and the scraper. The cleaning strips contact and move with the surface of the scraper, thereby effectively cleaning the impurities on the scraper, ensuring the cleanliness of the scraper surface and improving the subsequent cleaning quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation to the present invention.

[0015] Figure 1 This is a schematic diagram of the overall structure of a table cleaning mechanism of a thin film etching machine proposed in the present invention;

[0016] Figure 2 This is a structural diagram of the connecting plate of a table cleaning mechanism of a thin film etching machine proposed by the present invention;

[0017] Figure 3 This is an enlarged schematic diagram of the structure at point A of the table cleaning mechanism of a thin film etching machine proposed in the present invention.

[0018] In the figure: 1. Support base 1; 2. Support base 2; 3. Motor 1; 4. Screw; 5. Movable block; 6. Connecting plate; 7. Limit block; 8. Limit slot; 9. Fixed plate; 10. Cleaning plate; 11. Scraper; 12. Electric push cylinder; 13. Electric guide rail; 14. Motor 2; 15. Cleaning strip; 16. Collecting tank; 17. Connecting rod; 18. Bracket. DETAILED DESCRIPTION

[0019] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings in the embodiments of the present invention;

[0020] Reference Figure 1-3 A table cleaning mechanism for a thin film etching machine includes a support base 1 and a support base 2. The support base 1 and the support base 2 are installed on both sides of the table of the etcher. A connecting plate 6 is movably arranged between the support base 1 and the support base 2. A fixing plate 9 is fixedly installed at the end of the connecting plate 6. A cleaning plate 10 is fixedly installed at one end of the fixing plate 9. The bottom end of the cleaning plate 10 is fixedly connected to a scraper 11. The scraper 11 is in contact with the table. A cleaning component is arranged on one side of the cleaning plate 10, and the cleaning component is in contact with the surface of the scraper 11.

[0021] The cleaning component includes an electric guide rail 13, which is horizontally installed in the middle of the cleaning plate 10. A transmission connection bracket 18 is installed on the electric guide rail 13. The electric push cylinder 12 and the motor 2 14 are respectively installed on both sides of the bracket 18. The output end of the electric push cylinder 12 passes through the bracket 18 and is interconnected with the tail of the motor 2 14.

[0022] The output end of motor 2 14 is fixedly connected to a connecting rod 17, which is curved. One end of the connecting rod 17 is fixedly connected to a cleaning strip 15, which is made of rubber and has an arc shape. A collecting groove 16 is fixedly installed at the bottom end of the cleaning strip 15. The cleaning strip 15 made of rubber material 15 can effectively prevent the scraper 11 from being scratched due to friction with the scraper 11. The collected impurities can fall into the collecting groove 16. When the cleaning strip 15 is not needed, the motor 2 14 can be started to drive the connecting rod 17 and the cleaning strip 15 to flip over. At this time, the cleaning strip 15 does not contact the scraper 11, so that the scraper 11 can complete the cleaning of the impurities on the table.

[0023] A limiting groove 8 is provided on the support seat 1, a motor 3 is installed at the end of the support seat 2, a screw 4 is provided in the middle of the support seat 2, and the output end of the motor 3 passes through the support seat 2 2 and is connected to the end of its screw 4.

[0024] The middle portion of the screw rod 4 is threadedly connected to the movable block 5 , one end of the movable block 5 is connected to one end of the connecting plate 6 , and the other end of the connecting plate 6 is fixedly mounted with a limit block 7 .

[0025] The position of the limit block 7 corresponds to the position of the limit groove 8. The limit block 7 is embedded in the limit groove 8. The limit block 7 is slidably connected to the limit groove 8. The limit block 7 is used to limit the connecting plate 6. As the screw 4 drives the connecting plate 6 to move, it is limited by the limit block 7, so that the screw 4 cannot drive the connecting rod 6 to rotate. Therefore, the connecting plate 6 moves horizontally, that is, drives the cleaning plate 10 and the scraper 11 to move.

[0026] The scraper 11 is inclined and moves laterally on the table surface. The scraper 11 is used to collect and process the adhesive impurities on the table surface.

[0027] During use, first, support base 1 and support base 2 are mounted opposite each other on the table, and the limit blocks 7 and movable blocks 5 at both ends of the connecting plate 6 are mounted on the limit slots 8 and the screw 4, respectively. At this time, the screw 4 and movable blocks 5 are movably connected to each other, and the motor 1 is driven by the motor 1 to drive the screw 4 to rotate. Since the limit block 7 at one end of the connecting plate 6 is embedded in the limit slot 8, the connecting plate 6 moves horizontally on the table. At this time, the scraper 11 on the connecting plate 6 contacts the table to collect and clean the adhered impurities on the table. Later, when cleaning the impurity residue on the surface of the scraper 11, the motor 2 is started to drive the connecting rod 17 to flip, so that the cleaning strip 15 at the end of the connecting rod 17 contacts the scraper 11. The electric guide rail 13 is then started to drive the cleaning strip 15 to move longitudinally, so that the cleaning strip 15 can further clean the impurities on the scraper 11, and the collected impurities can fall into the collection tank 16.

Claims

1. A table cleaning mechanism for a thin film etching machine, characterized in that: The invention comprises a support seat 1 (1) and a support seat 2 (2), wherein the support seat 1 (1) and the support seat 2 (2) are installed on both sides of the table of the etching machine, a connecting plate (6) is movably arranged between the support seat 1 (1) and the support seat 2 (2), a fixing plate (9) is fixedly installed at the end of the connecting plate (6), a cleaning plate (10) is fixedly installed at one end of the fixing plate (9), a scraper (11) is fixedly connected to the bottom end of the cleaning plate (10), the scraper (11) is in contact with the table, a cleaning component is arranged on one side of the cleaning plate (10), and the cleaning component is in contact with the surface of the scraper (11).

2. The table cleaning mechanism of a thin film etching machine according to claim 1, characterized in that: The cleaning component includes an electric guide rail (13), which is horizontally installed in the middle of the cleaning plate (10). A transmission connection bracket (18) is installed on the electric guide rail (13). An electric push cylinder (12) and a second motor (14) are installed on both sides of the bracket (18). The output end of the electric push cylinder (12) passes through the bracket (18) and is interconnected with the tail of the second motor (14).

3. The table cleaning mechanism of a thin film etching machine according to claim 2, characterized in that: The output end of the second motor (14) is fixedly connected to a connecting rod (17), the connecting rod (17) is curved, one end of the connecting rod (17) is fixedly connected to a cleaning bar (15), the cleaning bar (15) is made of rubber, the cleaning bar (15) is arc-shaped, and a collecting trough (16) is fixedly installed at the bottom end of the cleaning bar (15).

4. The table cleaning mechanism of a thin film etching machine according to claim 1, characterized in that: A limiting groove (8) is provided on the support seat 1 (1), a motor 1 (3) is installed at the end of the support seat 2 (2), a screw rod (4) is provided in the middle of the support seat 2 (2), and the output end of the motor 1 (3) passes through the support seat 2 (2) and is connected to the end of its screw rod (4).

5. The table cleaning mechanism of a thin film etching machine according to claim 4, characterized in that: The middle portion of the screw rod (4) is threadedly connected to a movable block (5), one end of the movable block (5) is connected to one end of the connecting plate (6), and the other end of the connecting plate (6) is fixedly mounted with a limit block (7).

6. The table cleaning mechanism of a thin film etching machine according to claim 5, characterized in that: The position of the limiting block (7) corresponds to the position of the limiting groove (8), the limiting block (7) is embedded in the limiting groove (8), and the limiting block (7) is slidably connected to the limiting groove (8).

7. The table cleaning mechanism of a thin film etching machine according to claim 1, characterized in that: The scraper (11) is inclined, and the scraper (11) moves laterally on the table.

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