Silane liquid transportation device

Abstract

The utility model discloses a silane liquid transportation device which comprises a tank car, a silane cooler, a compressor, an air cooler and a Freon storage tank. A tank body is arranged on the tank car, a silane cooler is fixedly arranged at the top of the tank body, a gas outlet of the tank body is communicated with a thermal medium inlet of the silane cooler, and a thermal medium outlet of the silane cooler is communicated with a liquid inlet of the tank body. The device has the advantages that the device is simple in structure and easy to implement, double-layer vacuum cold insulation of the tank body is achieved, the cold insulation effect is good, it can be guaranteed that silane in the tank body of the tank car is in a liquid state all the time, and the gasification overpressure phenomenon cannot occur; further, the pressure of the silane in the tank body of the transportation tank car is always kept in a low-pressure state, and compared with high-pressure gaseous silane transportation, the safety is better; and the single transportation volume of the tank car can reach 21-23 tons, the liquid transportation volume is far greater than the gas transportation volume, and the transportation cost is reduced.

Description

Technical field:

[0001] The utility model relates to the technical field of silane liquid transportation, in particular to a silane liquid transportation device. Background technology:

[0002] Silane gas, a gas source for silicon components, is used in the manufacture of high-purity polycrystalline silicon, single-crystal silicon, and silicon-carbon cathodes. It is widely used in industries such as integrated circuits, biomedicine, photovoltaics, display panels, semiconductors, microelectronics, and optoelectronics. Due to its high purity and ability to achieve precise control, it has become an irreplaceable specialty gas required by these industries. With the continuous development of the chemical industry and the expansion of downstream industries within the gas sector, the demand for silane gas is increasing year by year.

[0003] Silane gas is a colorless, highly reactive, and compressible gas at room temperature and pressure. However, its unique pyrophoric and explosive properties make it a highly dangerous gas, posing a significant safety risk during transportation. The existing filling and transportation technology involves vaporizing and pressurizing silane and filling it into cylinders or cluster trucks for transportation. However, transporting gaseous silane carries risks such as high transportation costs, small transportation volumes, and high pressure in transport containers. Currently, the transportation of liquid silane increases the single filling volume and reduces transportation costs; however, liquid silane is highly flammable and explosive. When it is loaded into an existing tank truck, the high temperature during transportation will cause the silane to vaporize, resulting in high pressure inside the tank, which increases the risk of leakage. Once leaked, it may cause fire or explosion, posing a serious threat to human life and property safety. This makes the safety and efficiency of its storage and transportation a technical challenge that the industry urgently needs to solve. Utility model content:

[0004] The purpose of the utility model is to provide a silane liquid transportation device which has a simple structure, better safety and reduced transportation cost.

[0005] The utility model is implemented by the following technical solution: The purpose of this patent is to provide a silane liquid transportation device, which includes a tank truck, a silane cooler, a compressor, an air cooler and a Freon storage tank; a tank body is provided on the tank truck, the silane cooler is fixedly provided on the top of the tank body, the air outlet of the tank body is connected to the heat medium inlet of the silane cooler, and the heat medium outlet of the silane cooler is connected to the liquid inlet of the tank body;

[0006] The cold medium outlet of the silane cooler is connected to the air inlet of the compressor, the air outlet of the compressor is connected to the air inlet of the air cooler, the liquid outlet of the air cooler is connected to the liquid inlet of the Freon storage tank, and the liquid outlet of the Freon storage tank is connected to the cold medium inlet of the silane cooler.

[0007] Furthermore, a throttle valve group is provided on the connecting pipe between the Freon storage tank and the silane cooler.

[0008] Furthermore, the tank body includes an outer tank and an inner tank, the outer tank is fixedly mounted on the outside of the inner tank, a vacuum insulation cavity is provided between the inner tank and the outer tank, and the interior of the vacuum insulation cavity is filled with perlite.

[0009] Advantages of this utility model:

[0010] The transport device disclosed by the utility model has a simple structure and is easy to implement. The tank body is double-layered and vacuum-insulated, and the insulation effect is good. In addition, a silane cooler is provided on the tank truck, which can ensure that the silane in the tank body of the tank truck is always in a liquid state and does not cause gasification overpressure. This ensures that the silane pressure in the tank body of the transport tank truck is always maintained at a low pressure state, which is safer than the transportation of high-pressure gaseous silane. In addition, the tank truck disclosed by the utility model can transport up to 21 to 23 tons per trip, and the liquid transport volume is much greater than the gas transport volume, thereby reducing the transportation cost. Description of the drawings:

[0011] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0012] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0013] Figure 2 Schematic diagram of the tank structure.

[0014] Tank truck 1, silane cooler 2, compressor 3, air cooler 4, Freon storage tank 5, tank body 6, outer tank 61, inner tank 62, vacuum insulation chamber 63, perlite 64, throttle valve group 7. Specific implementation method:

[0015] Example: Figure 1-2As shown, a silane liquid transportation device includes a tank truck 1, a silane cooler 2, a compressor 3, an air cooler 4 and a Freon storage tank 5; a tank body 6 is provided on the tank truck 1, and a silane cooler 2 is fixedly provided on the top of the tank body 6. The air outlet of the tank body 6 is connected to the heat medium inlet of the silane cooler 2, and the heat medium outlet of the silane cooler 2 is connected to the liquid inlet of the tank body 6, which can ensure that the silane in the tank body 6 is always in a liquid state and does not cause gasification overpressure, thereby ensuring that the tank body is in a liquid state during transportation. The silane pressure in 6 is always maintained at a low pressure state, which is safer than the transportation of high-pressure gaseous silane; the cold medium outlet of the silane cooler 2 is connected to the air inlet of the compressor 3, the air outlet of the compressor 3 is connected to the air inlet of the air cooler 4, the liquid outlet of the air cooler 4 is connected to the liquid inlet of the Freon storage tank 5, and the liquid outlet of the Freon storage tank 5 is connected to the cold medium inlet of the silane cooler 2. A throttle valve group 7 is provided on the connecting pipe between the Freon storage tank 5 and the silane cooler 2.

[0016] The tank body 6 includes an outer tank 61 and an inner tank 62. The outer tank 61 is fixedly mounted on the outside of the inner tank 62. A vacuum insulation cavity 63 is provided between the inner tank 62 and the outer tank 61. The interior of the vacuum insulation cavity 63 is filled with perlite 64, which has a good cold preservation effect.

[0017] The tank truck 1 in the transportation device of the present invention costs about RMB 500,000, and the above-mentioned condensing equipment costs about RMB 150,000 to 200,000.

[0018] The price of the existing torpedo truck tube bundle for storing and transporting silane gas is about RMB 950,000. Obviously, the cost of the silane liquid transport device of the present invention is much cheaper.

[0019] Working principle: When the tank body 6 starts to be filled, the compressor 3, the air cooler 4 and the throttle valve group 7 are turned on; after the Freon gas is compressed by the compressor 3, it is cooled into Freon liquid through the air cooler 4 and enters the Freon storage tank 5, and then the Freon liquid is decompressed and cooled to -48~-52℃ through the throttle valve group 7, and then enters the silane cooler 2 to exchange heat with the vaporized silane in the tank body 6 to liquefy the silane, and the pressure in the tank body 6 is always kept below 0.7MPa; during the subsequent transportation by the tank truck 1, the compressor 3, the air cooler 4 and the throttle valve group 7 are always kept in the open state to maintain the pressure in the tank body 6 stable.

[0020] The maximum filling capacity of silane gas transportation is 4.2 tons of silane per truck. The transportation device of the utility model can transport 21 to 23 tons of silane liquid per truck. The transportation capacity of silane liquid is more than 5 times that of silane gas. According to the transportation cost of 5 to 10 yuan per kilometer, for a transportation distance of 1,000 kilometers, the transportation cost of silane gas for transporting the same quality of silane is 25,000 to 50,000 yuan, and the transportation cost of silane liquid is 5,000 to 10,000 yuan; thus, the transportation cost of silane is greatly reduced.

[0021] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A silane liquid transport device, characterized in that: It includes a tank truck, a silane cooler, a compressor, an air cooler and a Freon storage tank; a tank body is provided on the tank truck, the silane cooler is fixedly provided on the top of the tank body, the air outlet of the tank body is communicated with the heat medium inlet of the silane cooler, and the heat medium outlet of the silane cooler is communicated with the liquid inlet of the tank body; The cold medium outlet of the silane cooler is connected to the air inlet of the compressor, the air outlet of the compressor is connected to the air inlet of the air cooler, the liquid outlet of the air cooler is connected to the liquid inlet of the Freon storage tank, and the liquid outlet of the Freon storage tank is connected to the cold medium inlet of the silane cooler.

2. A silane liquid transport device according to claim 1, characterized in that: A throttle valve group is provided on the connecting pipe between the Freon storage tank and the silane cooler.

3. A silane liquid transport device according to claim 1, characterized in that: The tank body comprises an outer tank and an inner tank. The outer tank is fixedly sleeved on the outer side of the inner tank. A vacuum insulation cavity is provided between the inner tank and the outer tank. The interior of the vacuum insulation cavity is filled with perlite.

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