Water cooling assembly for rapidly cooling furnace body

Abstract

The utility model relates to the technical field of furnace body cooling, in particular to a water-cooling assembly for rapidly cooling a furnace body, which comprises a water-cooling housing and a housing cover, and the housing cover covers the water-cooling housing; a heat exchange air outlet pipe is fixed to the middle in the water cooling shell cover, a water cooling cavity is formed between the heat exchange air outlet pipe and the water cooling shell cover, the heat exchange air outlet pipe downwards extends out of the position below the water cooling shell cover, a water inlet is formed in one side of the water cooling shell cover, a water outlet far away from the water inlet is formed in the other side of the water cooling shell cover, and the water inlet and the water outlet are both communicated with the water cooling cavity. A ventilation opening is formed in the middle of the upper end of the shell cover; the water cooling and air cooling combined heat exchange effect is achieved in the furnace body, the heat exchange efficiency of the furnace body is effectively improved, and the water cooling assembly is directly placed on the furnace body for use, so that the water cooling assembly can be conveniently disassembled and assembled, and the use efficiency of the furnace body is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of furnace body cooling, in particular to a water cooling component for rapidly cooling a furnace body. Background Art

[0002] In the rapid cooling heat treatment process of semiconductors, the furnace cooling speed affects the wafer film quality and production efficiency. A fast cooling furnace helps shorten process time, ensure wafer film quality, and reduce production costs. In the temperature calibration industry, for example, a fast heating and cooling intelligent dry body furnace can be used in industries that require on-site temperature calibration, such as pharmaceuticals, machinery, ships, chemicals, biological products, power plants and substations, steel mills, measurement and testing, and scientific research. Rapid heating and cooling can greatly save the calibration personnel's time, increase the temperature verification speed, and improve labor efficiency.

[0003] In the prior art, in order to quickly cool down the furnace body, air cooling is often used, that is, the heat of the furnace body is taken away by the flow of air. This cooling method based solely on air cooling is relatively slow, so how to effectively accelerate the cooling efficiency of the furnace body needs to be improved. Moreover, the existing cooling device often needs to be disassembled and assembled when cooling the furnace body. If the disassembly and assembly is inconvenient, the practical efficiency of the furnace body will be affected. Utility Model Content

[0004] The utility model provides a water cooling component for rapidly cooling a furnace body, which is beneficial to quickly and effectively accelerating the cooling efficiency of the furnace body.

[0005] In order to solve the problems of the prior art, the utility model discloses a water-cooling assembly for rapidly cooling a furnace body, comprising a water-cooling shell and a shell cover, wherein the shell cover is covered on the water-cooling shell;

[0006] A heat exchange outlet pipe is fixed in the middle of the water-cooling shell cover, a water-cooling cavity is provided between the heat exchange outlet pipe and the water-cooling shell cover, and the heat exchange outlet pipe extends downward out of the bottom of the water-cooling shell cover, a water inlet is provided on one side of the water-cooling shell cover, and a water outlet away from the water inlet is provided on the other side of the water-cooling shell cover, the water inlet and the water outlet are both communicated with the water-cooling cavity, a sealing gasket is provided on the water-cooling cavity, a vent is provided in the middle of the upper end of the shell cover, and a fan corresponding to the vent above and below is provided on the upper end of the shell cover.

[0007] Furthermore, a handle is fixed to the upper end of the water-cooling shell.

[0008] Furthermore, first upper threaded holes are formed around the upper end of the shell cover, first lower threaded holes are formed around the upper end of the water-cooling shell cover, and a first threaded rod is threadedly connected between the first upper threaded hole and the first lower threaded hole.

[0009] Furthermore, the fan has four upper corners with second upper threaded holes, the cover has four upper second lower threaded holes close to the vents, and a second threaded rod is threadedly connected between the second upper threaded holes and the second lower threaded holes.

[0010] Furthermore, L-shaped support rods are fixed around the periphery of the shell, and balance support plates are fixed at the lower ends of the L-shaped support rods.

[0011] Furthermore, the vents correspond to the heat exchange air outlet pipe in the upper and lower parts.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] 1. The heat exchange outlet pipe is inserted into the furnace body, and then cold water is passed into the water-cooling cavity. After the cold water exchanges heat with the heat exchange outlet pipe, the fan blows air into the heat exchange outlet pipe. After the heat exchange outlet pipe exchanges heat with the cold water, the cold air is blown into the furnace body, thereby achieving a combined heat exchange effect of water cooling and air cooling in the furnace body, which is beneficial to effectively improve the heat exchange efficiency of the furnace body. Moreover, the water cooling component is directly placed on the furnace body for use, so it can be easily disassembled and assembled, which is beneficial to ensure the use efficiency of the furnace body.

[0014] 2. The water cooling assembly is supported by an L-shaped support leg, which facilitates the placement of idle water cooling assemblies to prevent them from tipping over when not in use. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the explosion structure of the water-cooling shell cover of the utility model;

[0017] Figure 3 This is a schematic diagram of the overall assembly process structure of the utility model;

[0018] Figure 4 This is a schematic diagram of the overall water cooling working structure of the utility model.

[0019] Figure 1-4 Middle: water-cooling shell 1, shell cover 2, heat exchange air outlet duct 3, fan 4, handle rod 5, L-shaped support rod 6, balance support plate 7, water inlet 8, water outlet 9, water-cooling chamber 10, sealing gasket 11, first upper threaded hole 12, first threaded rod 13, first lower threaded hole 14, second upper threaded hole 15, second threaded rod 16, second lower threaded hole 17. DETAILED DESCRIPTION

[0020] A water-cooling component for rapidly cooling a furnace body:

[0021] like Figure 1-4As shown, in this embodiment, it includes a water-cooled shell 1 and a shell cover 2, the shell cover 2 is covered on the top of the water-cooled shell 1, and a heat exchange outlet pipe 3 is fixed in the middle of the water-cooled shell 1. A water-cooled cavity 10 is provided between the heat exchange outlet pipe 3 and the water-cooled shell 1, and the heat exchange outlet pipe 3 extends downward from the bottom of the water-cooled shell 1, a water inlet 8 is provided on one side of the water-cooled shell 1, and a water outlet 9 away from the water inlet 8 is provided on the other side of the water-cooled shell 1, the water inlet 8 and the water outlet 9 are both communicated with the water-cooled cavity 10, a vent 18 is provided in the middle of the upper end of the shell cover 2, and a fan 4 corresponding to the vent 18 above and below is provided at the upper end of the shell cover 2, and the vent 18 corresponds to the heat exchange outlet pipe 3 above and below.

[0022] When the furnace body is cooled by the water cooling assembly, the heat exchange outlet pipe 3 is inserted into the furnace body, and the water cooling shell 1 covers the furnace mouth of the furnace body, and then cold water is introduced into the water cooling chamber 10 through the water inlet 8. After the cold water exchanges heat with the heat exchange outlet pipe 3, the heat-exchanged water is discharged through the water outlet 9, and then the air is blown into the heat exchange outlet pipe 3 by the operation of the fan 4. The heat exchange outlet pipe 3 blows cold air into the furnace body after heat exchange with the cold water, thereby realizing the combined heat exchange effect of water cooling and air cooling in the furnace body, which is beneficial to effectively improve the heat exchange efficiency of the furnace body.

[0023] like Figure 3 As shown, in this embodiment, a handle bar 5 is fixed to the upper end of the water-cooling shell 1.

[0024] Moreover, the water-cooling assembly is directly placed on the furnace body for use. The water-cooling assembly can be safely lifted up and down by holding the handle rod 5 to avoid burns caused by getting the hand too close to the furnace body. The operation process is more convenient. The water-cooling shell cover 1 is directly supported by the furnace body, and the heat exchange air outlet pipe 3 is directly inserted into the furnace body. Therefore, the water-cooling assembly can be conveniently disassembled and assembled, which is beneficial to ensuring the use efficiency of the furnace body.

[0025] like Figure 1 As shown, in this embodiment, L-shaped support rods 6 are fixed around the periphery of the housing 1 , and balancing support plates 7 are fixed at the lower ends of the L-shaped support rods 6 .

[0026] By providing L-shaped legs to support the water-cooling assembly, when the water-cooling assembly is removed from the furnace body, the water-cooling assembly can be conveniently supported by the balance support plate 7 below the L-shaped legs when placed idle, so as to prevent the water-cooling assembly from tipping over when placed idle.

[0027] like Figure 2 As shown, in this embodiment, a sealing gasket 11 is provided on the water-cooling chamber 10 .

[0028] By arranging a sealing gasket 11 at the upper end of the water-cooling chamber 10, and covering the shell cover 2 on the water-cooling shell 1, and pressing the sealing gasket 11 between the shell cover 2 and the water-cooling shell 1, the water-cooling assembly can be prevented from leaking at the connection between the shell cover 2 and the water-cooling shell 1.

[0029] like Figure 1 、 2 As shown, in this embodiment, first upper threaded holes 12 are formed around the upper end of the shell cover 2, and first lower threaded holes 14 are formed around the upper end of the water-cooling shell cover 1. A first threaded rod 13 is threadedly connected between the first upper threaded hole 12 and the first lower threaded hole 14.

[0030] The first upper threaded hole 12 and the first lower threaded hole 14 are threadedly connected by the first threaded rod 13, so that the shell cover 2 can be firmly covered on the water-cooling shell 1, and after removing the first threaded rod 13, the shell cover 2 can be easily removed from the water-cooling shell 1 for maintenance.

[0031] like Figure 1 、 2 As shown, in this embodiment, the four corners of the upper end of the fan 4 are each provided with a second upper threaded hole 15, and the upper end of the shell cover 2 is provided with four second lower threaded holes 17 that are all close to the ventilation port 18, and a second threaded rod 16 is threadedly connected between the second upper threaded hole 15 and the second lower threaded hole 17.

[0032] The second upper threaded hole 15 and the second lower threaded hole 17 are threadedly connected by the second threaded rod 16 , so that the fan 4 can be firmly fixed on the housing cover 2 . After the second threaded rod 16 is removed, the fan 4 can also be easily disassembled and maintained.

Claims

1. A water-cooling assembly for rapidly cooling a furnace, comprising a water-cooling shell (1) and a shell cover (2), wherein the shell cover (2) covers the water-cooling shell (1), and is characterized in that: A heat exchange air outlet pipe (3) is fixed in the middle of the water-cooling shell (1), a water cooling cavity (10) is provided between the heat exchange air outlet pipe (3) and the water-cooling shell (1), and the heat exchange air outlet pipe (3) extends downward from the bottom of the water-cooling shell (1), a water inlet (8) is provided on one side of the water-cooling shell (1), and a water outlet (9) away from the water inlet (8) is provided on the other side of the water-cooling shell (1), the water inlet (8) and the water outlet (9) are both communicated with the water cooling cavity (10), a sealing gasket (11) is provided on the water cooling cavity (10), a vent (18) is provided in the middle of the upper end of the shell cover (2), and a fan (4) corresponding to the vent (18) above and below is provided on the upper end of the shell cover (2).

2. The water cooling assembly for rapidly cooling a furnace according to claim 1, characterized in that: A handle bar (5) is fixed to the upper end of the water-cooling shell (1).

3. The water cooling assembly for rapidly cooling a furnace according to claim 1, characterized in that: The upper end of the shell cover (2) is provided with first upper threaded holes (12) on all sides, the upper end of the water-cooling shell cover (1) is provided with first lower threaded holes (14) on all sides, and a first threaded rod (13) is threadedly connected between the first upper threaded hole (12) and the first lower threaded hole (14).

4. The water cooling assembly for rapidly cooling a furnace according to claim 1, characterized in that: The fan (4) has four upper corners with second upper threaded holes (15), the housing cover (2) has four upper second threaded holes (17) close to the ventilation opening (18), and a second threaded rod (16) is threadedly connected between the second upper threaded holes (15) and the second lower threaded holes (17).

5. The water cooling assembly for rapidly cooling a furnace according to claim 1, characterized in that: L-shaped support rods (6) are fixed to the periphery of the shell (1), and a balancing support plate (7) is fixed to the lower end of each L-shaped support rod (6).

6. The water cooling assembly for rapidly cooling a furnace according to claim 1, characterized in that: The vent (18) corresponds to the heat exchange air outlet pipe (3) in upper and lower directions.

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