Height-adjustable air inlet device

Abstract

The utility model provides a height-adjustable air inlet device, which relates to the technical field of etching and comprises an air nozzle and an electrostatic chuck which are arranged up and down, the air nozzle is mounted in the middle of an air inlet disc, and four electric motor lifters for controlling the air inlet disc to lift are uniformly distributed on the outer side of the air inlet disc along the circumferential direction. A metal corrugated pipe is arranged at the bottom of the outer edge of the air inlet disc, the electrostatic chuck is arranged in the vacuum cavity, a cylinder base used for supporting is arranged at the bottom of the electrostatic chuck, an annular base is arranged at the upper end of the vacuum cavity, and the four electric motor lifters are installed on the top face of the annular base. The upper end and the lower end of the metal corrugated pipe are in sealed connection with the bottom face of the air inlet disc and the top face of the inner side of the annular base respectively, and an inner cavity of the metal corrugated pipe communicates with an inner cavity of the vacuum cavity. According to the electric lifter, lifting of the gas nozzle can be directly achieved, the metal corrugated pipe is elastic and telescopic, when the gas inlet disc stops, auxiliary supporting can be conducted on the gas inlet disc, and therefore stability can be improved while the distance between gas inlet and the electrostatic chuck is adjusted and controlled.

Description

Technical Field

[0001] The utility model relates to the technical field of etching, in particular to a height-adjustable air intake device. Background Art

[0002] Etching, also known as etching in English, is a critical step in semiconductor manufacturing, microelectronic IC manufacturing, and micro-nano manufacturing. Etching, in a narrower sense, is essentially photolithographic etching. The photoresist is first exposed through photolithography, and then the desired portions are etched away using other methods. Etching selectively removes unwanted material from the silicon wafer surface using chemical or physical methods. Its fundamental goal is to accurately replicate the mask pattern on the resist-coated silicon wafer.

[0003] During the etching process, different etching processes require different distances between the air inlet and the electrostatic chuck. Currently, the air inlet height is usually adjusted by adding or removing gaskets at the bottom of the adapter chamber to achieve the control of the distance between the air inlet and the electrostatic chuck. When a higher height is required, the number of gaskets is increased, and when a smaller height is required, the number of gaskets is reduced. This method is not only time-consuming but also inconvenient. Utility Model Content

[0004] In order to solve the above problems, the utility model discloses a height-adjustable air intake device.

[0005] The specific plan is as follows:

[0006] A height-adjustable air intake device, characterized in that it includes a gas nozzle and an electrostatic suction cup arranged in an upper and lower position, wherein the gas nozzle is installed in the middle of the air intake disk, wherein four electric motor lifters for controlling its lifting are evenly distributed in the circumferential direction on the outer side of the air intake disk, and a metal bellows is provided at the bottom of the outer edge of the air intake disk, the electrostatic suction cup is placed in a vacuum chamber, and a cylindrical seat for support is provided at the bottom thereof, an annular base is provided at the upper end of the cavity wall of the vacuum chamber, and four electric motor lifters are installed on the top surface of the annular base, the upper and lower ends of the metal bellows are respectively sealed with the bottom surface of the air intake disk and the inner top surface of the annular base, and its inner cavity is connected to the vacuum chamber.

[0007] Furthermore, the upper and lower ends of the metal bellows are respectively welded to the air inlet disk and the annular base.

[0008] Furthermore, an air inlet pipe for connecting to an external flexible pipeline is provided on one side of the top of the gas nozzle.

[0009] Furthermore, a mounting hole for mounting a gas nozzle is provided in the middle of the air inlet disc.

[0010] Furthermore, the slider of the electric motor lifter is fixed on the outer side of the air intake plate.

[0011] Furthermore, the inner cavity of the cylindrical seat is connected to the atmosphere.

[0012] The beneficial effect of the present invention is that the air intake height is adjusted by combining a metal bellows and an electric lifter. On the one hand, the electric lifter can directly realize the lifting and lowering of the gas nozzle. On the other hand, since the metal bellows is elastic and retractable, it can provide auxiliary support to the air intake disk when it stops, thereby realizing the distance control between the air intake and the electrostatic suction cup while improving stability. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 This is a top view of the application.

[0014] Figure 2 for Figure 1 Cross-sectional view of AA in the figure.

[0015] Figure 3 Schematic diagram of the raised state.

[0016] Figure 4 Schematic diagram of the descending state.

[0017] List of reference numerals:

[0018] 1-gas nozzle, 2-electrostatic suction cup, 3-air inlet plate, 4-electric motor lifter, 5-metal bellows, 6-vacuum chamber, 7-cylindrical seat, 8-annular base, 9-air inlet pipe. DETAILED DESCRIPTION

[0019] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. It should be understood that the following specific embodiments are only used to illustrate the present invention and are not used to limit the scope of the present invention.

[0020] As shown in the figure, a height-adjustable air intake device includes a gas nozzle 1 and an electrostatic chuck 2, each mounted vertically. The gas nozzle 1 is mounted in the middle of the air intake disc 3. Four electric motor lifters 4 are distributed circumferentially around the outer side of the air intake disc 3 to control its elevation. A metal bellows 5 is provided at the bottom of the air intake disc 3. The electrostatic chuck 2 is placed within a vacuum chamber 6, with a cylindrical base 7 at its bottom for support. An annular base 8 is provided at the upper end of the wall of the vacuum chamber 6, and four electric motor lifters 4 are mounted on the top surface of the annular base 8. The upper and lower ends of the metal bellows 5 are sealed to the bottom surface of the air intake disc 3 and the inner top surface of the annular base 8, respectively, and the inner cavity of the metal bellows 5 is connected to the vacuum chamber 6. During operation, the height of the air intake disc is adjusted by the electric lifters. During the adjustment process, the upper and lower ends of the metal bellows remain in close contact with the air intake disc and the annular base, thereby achieving the distance control between the air intake disc and the electrostatic chuck while ensuring the stability of the vacuum environment.

[0021] In this embodiment, the upper and lower ends of the metal bellows 5 are welded to the air inlet disk 3 and the annular base 8, respectively. The outer edge of the annular base is square, and the inner through-hole is a circular hole that matches the metal bellows 5. This ensures a stable seal between the upper and lower ends of the metal bellows, the air inlet disk, and the annular base, ensuring a high degree of vacuum.

[0022] In this embodiment, an air inlet pipe 9 for connecting to an external flexible pipeline is provided on one side of the top of the gas nozzle 1, and the nozzle of the gas nozzle is arranged downward. The air inlet pipe supplies air to the nozzle through the external flexible pipeline without affecting the lifting of the air inlet plate.

[0023] In this embodiment, a mounting hole for mounting the gas nozzle 1 is provided in the middle of the air intake disc 3 , so that the nozzle can be stably mounted in the middle of the air intake disc.

[0024] In this embodiment, the slider of the electric motor lifter 4 is fixed to the outside of the air intake plate 3, and the electric motor lifter drives the air intake plate to move up and down via the slider.

[0025] In this embodiment, the inner cavity of the cylindrical seat 7 is communicated with the atmosphere.

[0026] The steps for this application are:

[0027] Before etching, the distance between the air intake and the electrostatic chuck is first confirmed according to the process requirements. Then, the air intake plate is synchronously controlled to the required height through the sliders of the four electric lifters. Then, the etching gas is introduced into the cavity through the gas nozzle from the air intake pipe to debug the etching process. Finally, the air intake height is adjusted to meet the process requirements.

[0028] This application adopts a combination of a metal bellows and an electric lifter to adjust the air intake height, wherein the electric lifter can directly realize the lifting and lowering of the gas nozzle. The metal bellows is elastic and retractable, and its upper and lower ends are always close to the air intake disk and the annular base, which not only ensures the vacuum degree, but also provides auxiliary support for the air intake disk when the height stops.

[0029] The technical means disclosed in the solutions of the present invention are not limited to those disclosed in the above-mentioned embodiments, but also include technical solutions composed of any combination of the above-mentioned technical features. It should be noted that those skilled in the art may make various improvements and modifications without departing from the principles of the present invention, and such improvements and modifications are also considered to be within the scope of protection of the present invention.

Claims

1. A height-adjustable air intake device, characterized in that: The invention comprises a gas nozzle (1) and an electrostatic suction cup (2) arranged in an upper and lower manner, wherein the gas nozzle (1) is installed in the middle of the air inlet disc (3), and four electric motor lifters (4) for controlling the lifting of the air inlet disc (3) are evenly distributed on the outer side of the air inlet disc (3) along the circumferential direction, and a metal bellows (5) is provided at the bottom of the air inlet disc (3), and the electrostatic suction cup (2) is placed in a vacuum cavity (6), and a cylindrical seat (7) for support is provided at the bottom thereof, and an annular base (8) is provided at the upper end of the cavity wall of the vacuum cavity (6), and four electric motor lifters (4) are installed on the top surface of the annular base (8), and the upper and lower ends of the metal bellows (5) are sealed with the bottom surface of the air inlet disc (3) and the inner top surface of the annular base (8) respectively, and the inner cavity thereof is communicated with the vacuum cavity (6).

2. The height-adjustable air intake device according to claim 1, characterized in that: The upper and lower ends of the metal bellows (5) are respectively welded to the air inlet disk (3) and the annular base (8).

3. The height-adjustable air intake device according to claim 1, characterized in that: An air inlet pipe (9) for connecting to an external flexible pipeline is provided on one side of the top of the gas nozzle (1).

4. The height-adjustable air intake device according to claim 1, characterized in that: A mounting hole for mounting the gas nozzle (1) is provided in the middle of the air inlet disc (3).

5. The height-adjustable air intake device according to claim 1, characterized in that: The slider of the electric motor lifter (4) is fixed on the outside of the air intake disc (3).

6. The height-adjustable air intake device according to claim 1, characterized in that: The inner cavity of the cylindrical seat (7) is communicated with the atmosphere.

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