Two-stroke driving platform deck for vacuum system and vacuum transmission cavity

Abstract

The utility model relates to the technical field of semiconductor device production, and provides a two-stroke driving platform deck for a vacuum system and a vacuum transmission cavity, the driving platform deck comprises a first-section driving mechanism and a second-section driving mechanism, and the second-section driving mechanism comprises a base, a corrugated pipe, a sealing cylinder, a supporting cylinder and a driving device; the corrugated pipe is connected with the base and the vacuum cavity; the sealing cylinder is connected with the base, and the supporting cylinder is arranged on the inner side of the sealing cylinder and connected with a second rotating nut at the moving tail end of the driving device. The base is fixedly connected with the movable end of a driving mechanism. According to the wafer storage box, a two-stroke structure is arranged, and the stroke design of the preset height of the wafer bearing table is realized in a relatively small space, so that the initial height of the wafer bearing table is effectively reduced, the stroke of up-and-down movement of the wafer bearing table is increased, the storage amount of wafers in the storage box is increased under the condition that the position of a mechanical arm for taking and placing the wafers is fixed, and the wafer storage efficiency is improved. The storage efficiency of the storage box is improved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor device production, and in particular to a two-stage driving carrier and a vacuum transmission chamber for a vacuum system. Background Art

[0002] In the vacuum transfer chamber, the wafer carrier needs to be controlled to move up and down. A wafer storage box is placed on the wafer carrier. After the wafer carrier rises to a certain height, the robot can clamp the wafer from the wafer storage box, or place the wafer into the wafer storage box.

[0003] like Figure 4 As shown, in the prior art, a single power transmission system is used to realize the up and down movement of the wafer carrier. Since the height area between the robot and the power transmission system is limited and the height position of the robot arm is fixed, it can only perform telescopic movement in the same horizontal plane to transfer wafers, resulting in the initial position of the wafer carrier being too high. The storage box placed on the wafer carrier will have insufficient height for the up and down movement of the wafer carrier, which will lead to limited wafers stored in the storage box and too low storage efficiency. Utility Model Content

[0004] In order to increase the vertical movement range of the wafer carrier when the height area between the operating table where the wafer carrier is located and the power transmission system is limited, an embodiment of the present application provides a two-stage travel drive carrier for a vacuum system.

[0005] A first aspect of an embodiment of the present application provides a two-stage drive stage for a vacuum system, comprising: a first-stage drive mechanism and a second-stage drive mechanism;

[0006] The two-stage driving mechanism includes: a base, a bellows, a sealing cylinder and a supporting cylinder, and a driving device arranged on the base, a second rotating nut is arranged at the movable end of the driving device, and a wafer carrying platform is arranged at the upper end of the supporting cylinder;

[0007] One end of the bellows is connected to the base, and the other end is connected to the vacuum chamber and sealed with the vacuum chamber; the sealing cylinder is arranged inside the bellows and is integrally formed with the bellows, and the supporting cylinder is slidably arranged inside the sealing cylinder and is connected to the second rotating nut;

[0008] The base is fixedly connected to the movable end of the first driving mechanism to drive the sealing cylinder and the support cylinder to move following the movable end of the first driving mechanism, and the straight line where the movable end of the first driving mechanism is located is parallel to the straight line where the second rotating nut is located.

[0009] In one implementation, the driving device includes a second driving electric cylinder, a coupling, and a second ball screw;

[0010] The second driving electric cylinder is installed on the base, one end of the coupling is connected to the output shaft of the second driving electric cylinder, and the other end is connected to the second ball screw, and the second rotating nut is movably set on the second ball screw.

[0011] In one implementation, the driving device further includes a first bearing seat, and a first bearing and a second bearing clamped on the first bearing seat, the first bearing being located above the second bearing, the sealing cylinder being clamped on the top of the first bearing seat, and the bottom being disposed on the base;

[0012] The second rotating nut is fixedly connected to the supporting cylinder, a first elastic retaining ring is provided between the second rotating nut and the first bearing, a first pressure plate is fixedly connected to one end of the first bearing seat close to the second bearing, the first pressure plate abuts against the bottom of the second bearing, the second ball screw is located at the bottom of the second bearing and is connected to a locking nut, the locking nut is locked to the bottom of the second bearing;

[0013] The second ball screw passes through the second rotating nut, the first elastic ring, the first bearing, the second bearing and the locking nut in sequence and is connected to the other end of the coupling.

[0014] In one implementation, a slide groove is provided on the inner wall of the sealing cylinder, and a third slider is provided on the outer wall of the supporting cylinder, and the third slider is slidably connected to the slide groove.

[0015] In one implementation, a plurality of vertically arranged axial sealing rings are provided between the sealing cylinder and the supporting cylinder, and a spacer is provided between two adjacent axial sealing rings.

[0016] In one implementation, a first-stage drive mechanism includes: an electric cylinder mounting base, a first driving electric cylinder, an electric cylinder synchronous wheel, a ball screw synchronous wheel, a synchronous belt, and a first ball screw, wherein the movable end of the first-stage drive mechanism is a first rotating nut movably disposed on the first ball screw;

[0017] The first driving electric cylinder and the first ball screw are installed on one side of the electric cylinder mounting base, and the electric cylinder synchronous wheel and the ball screw synchronous wheel are installed on the other side of the electric cylinder mounting base;

[0018] The electric cylinder synchronous wheel is connected to the output end of the first driving electric cylinder, the ball screw synchronous wheel is connected to one end of the first ball screw, and the electric cylinder synchronous wheel and the ball screw synchronous wheel are connected through the synchronous belt transmission.

[0019] In one implementation, it also includes a connecting seat; the one-section driving mechanism also includes a guide rail mounting seat vertically mounted on the electric cylinder mounting seat, and a guide rail arranged on the guide rail mounting seat, and the end of the guide rail mounting seat away from the electric cylinder mounting seat is connected to the outer wall of the vacuum chamber; one end of the connecting seat is connected to the first rotating nut, and the other end is connected to the base, and the base is slidably connected to the guide rail through the connecting seat.

[0020] In one implementation, a second bearing seat is mounted on the electric cylinder mounting seat, a third bearing and a fourth bearing are mounted in the second bearing seat, the third bearing is located above the fourth bearing, and a second pressure plate is fixedly connected to one end of the second bearing seat close to the fourth bearing, and the second pressure plate abuts against the bottom of the fourth bearing;

[0021] A third bearing seat is also installed on the guide rail mounting seat, and a fifth bearing is installed in the third bearing seat. One end of the first ball screw is connected to the fifth bearing, and the other end passes through the first rotating nut, the connecting seat, the third bearing, the fourth bearing and the second pressure plate in sequence to be connected to the ball screw synchronous wheel.

[0022] In one implementation, a connecting flange is further included, which is integrally formed on the bellows and is sealed to the vacuum chamber.

[0023] A second aspect of an embodiment of the present application provides a vacuum transmission chamber, which includes a two-stage driving platform for a vacuum system provided in the first aspect of the embodiment of the present application.

[0024] An embodiment of the present application provides a two-stage driving platform and a vacuum transmission chamber for a vacuum system, wherein the driving platform includes: a first-stage driving mechanism and a second-stage driving mechanism, the second-stage driving mechanism includes: a base, a bellows, a sealing cylinder and a supporting cylinder, and a driving device arranged on the base, the movable end of the driving device is provided with a second rotating nut, and the upper end of the supporting cylinder is provided with a wafer carrier; one end of the bellows is connected to the base, and the other end is connected to the vacuum chamber and is sealed with the vacuum chamber; the sealing cylinder is arranged inside the bellows and is integrally formed with the bellows; the supporting cylinder is slidably arranged on the inside of the sealing cylinder, and the supporting cylinder is connected to the second rotating nut; the base is fixedly connected to the movable end of the first-stage driving mechanism to drive the sealing cylinder and the supporting cylinder to move following the movable end of the first-stage driving mechanism, and the straight line where the motion trajectory of the movable end of the first-stage driving mechanism is parallel to the straight line where the motion trajectory of the second rotating nut is located.

[0025] The technical solution provided in the embodiment of the present application realizes the stroke design of the wafer carrier at a predetermined height in a relatively small space by setting a two-stage stroke structure, thereby effectively reducing the initial height of the wafer carrier, and increasing the up and down movement stroke of the wafer carrier in the case of a limited height area between the robot and the power transmission system, thereby effectively increasing the storage capacity of the wafers in the storage box and improving the storage efficiency of the storage box when the position of the robot for taking and placing the wafers is fixed. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solution of the present application, the following is a brief introduction to the drawings required for use in the embodiments. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0027] Figure 1 A schematic diagram of the overall structure of a first state of a two-stage driving stage for a vacuum system provided in an embodiment of the present application;

[0028] Figure 2 for Figure 1 Schematic cross-sectional view of the structure;

[0029] Figure 3 A diagram illustrating the motion stroke of a two-stage driving stage for a vacuum system provided in an embodiment of the present application;

[0030] Figure 4 This is a diagram illustrating the motion stroke of a driving platform in the prior art;

[0031] Figure 5 A schematic diagram of the overall structure of a second state of a two-stage driving stage for a vacuum system provided in an embodiment of the present application;

[0032] Figure 6 for Figure 5 Schematic cross-sectional view of the structure;

[0033] Figure 7 A schematic diagram of the overall structure of a third state of a two-stage driving stage for a vacuum system provided in an embodiment of the present application;

[0034] Figure 8 for Figure 7 The first local structural intention of the structure;

[0035] Figure 9 for Figure 8 the local structural intent of the structure;

[0036] Figure 10 for Figure 7 The second local structural intention of the structure;

[0037] Figure 11 for Figure 7 The third local structural intention of the structure;

[0038] Figure 12 for Figure 7 The fourth partial structural intention of the structure;

[0039] Figure 13 The structural intention of the bellows provided in the embodiment of the present application;

[0040] Figure 14 This is a schematic cross-sectional view of the bellows and sealing cylinder provided in an embodiment of the present application.

[0041] In the figure: 1-a first-stage drive mechanism, 11-electric cylinder mounting seat, 12-first driving electric cylinder, 13-electric cylinder synchronous wheel, 14-first ball screw, 15-ball screw synchronous wheel, 16-synchronous belt, 17-first rotating nut, 18-guide rail mounting seat, 19-guide rail, 110-second bearing seat, 111-third bearing, 112-fourth bearing, 113-second pressure plate, 114-third bearing seat, 115-fifth bearing, 116-first retaining spring, 7-second retaining spring, 2-two-stage drive mechanism, 21-base, 22-corrugation Tube, 23-sealing cylinder, 24-support cylinder, 241-third slider, 25-driving device, 251-second driving electric cylinder, 252-coupling, 253-second ball screw, 254-first bearing seat, 255-first bearing, 256-second bearing, 257-first elastic retaining ring, 258-first pressure plate, 259-locking nut, 26-second rotating nut, 27-connecting flange, 28-sliding support block, 3-connecting seat, 4-axial sealing ring, 5-spacer, 100-vacuum chamber, 200-wafer carrier. DETAILED DESCRIPTION

[0042] In order to increase the vertical movement range of the wafer carrier 200 when the height area between the robot and the power transmission system is limited, the embodiment of the present application provides a two-stage travel drive carrier and a vacuum transmission chamber for a vacuum system.

[0043] In a first aspect, the present invention provides a two-stage driving stage for a vacuum system, such as Figure 2 As shown, the driving platform includes: a first-stage driving mechanism 1 and a second-stage driving mechanism 2; wherein, the second-stage driving mechanism 2 includes: a base 21, a bellows 22, a sealing cylinder 23 and a supporting cylinder 24, as well as a driving device 25 arranged on the base 21, the movable end of the driving device 25 is provided with a second rotating nut 26, and the upper end of the supporting cylinder 24 is provided with a wafer carrier 200.

[0044] Specifically, one end of the bellows 22 is connected to the base 21, and the other end is connected to the vacuum chamber 100, and the bellows 22 is sealed and connected to the vacuum chamber 100; the sealing cylinder 23 is arranged inside the bellows 22 and is integrally formed with the bellows 22. Specifically, the bottom of the sealing cylinder 23 is integrally formed with the bottom of the bellows 22.

[0045] Among them, such as Figure 6 and 11 As shown, a sealing connection flange 6 is provided between the bellows 22 and the vacuum chamber 100. Specifically, the connection flange 27 is integrally formed on the bellows 22 and is sealed to the vacuum chamber 100, thereby ensuring the sealing between the bellows 22 and the vacuum chamber 100. The bellows 22 is connected to the base 21, as shown in FIG. Figure 14 As shown, the sealing cylinder 23 is inside the bellows 22, wherein the sealing cylinder 23 can enter the vacuum chamber 100 through the through hole connecting the bellows 22 and the vacuum chamber 100, and the supporting cylinder 24 is slidably arranged on the inner side of the sealing cylinder 23, and the supporting cylinder 24 is connected to the second rotating nut 26.

[0046] The base 21 is fixedly connected to the movable end of a section of the driving mechanism 1 to drive the sealing cylinder 23 and the supporting cylinder 24 to move along with the movable end of a section of the driving mechanism 1, and the straight line where the motion trajectory of the movable end of a section of the driving mechanism 1 is located is parallel to the straight line where the motion trajectory of the second rotating nut 26 is located.

[0047] In practical applications, the driving stage includes at least three states, such as Figure 1 and Figure 2 As shown, the driving platform is in the first state. At this time, a section of the driving mechanism 1 is in the initial state, that is, the height of the first rotating nut 17 of the section of the driving mechanism 1 is in the lowest state, so that the height of the base 21 fixedly connected to the first rotating nut 17 is in the lowest state, and the driving device 25 is in the initial state. In this way, the height of the wafer carrier 200 is in the lowest state.

[0048] like Figure 5 and Figure 6 As shown, the driving platform is in the second state. At this time, the height of the first rotating nut 17 of a section of the driving mechanism 1 is in the highest state, so that the height of the base 21 fixedly connected to the first rotating nut 17 is in the highest state, and the driving device 25 is in the initial state. In this way, the height of the wafer carrier 200 is between the lowest position and the highest position.

[0049] like Figure 7As shown, the driving platform is in the third state. At this time, the height of the first rotating nut 17 of a section of the driving mechanism 1 is at the highest state, so that the height of the base 21 fixedly connected to the first rotating nut 17 is at the highest state, and the second rotating nut 26 at the moving end of the driving device 25 is at the highest position. In this way, the height of the wafer carrier 200 is at the highest position.

[0050] In an embodiment of the present application, when raising the height of the wafer carrier 200, the height of the wafer carrier 200 is preferably raised through a first-stage driving mechanism 1. For example, when the required lifting height of the wafer carrier 200 is less than or equal to the movement stroke of a first-stage driving mechanism 1, it is only necessary to control the movement of a first-stage driving mechanism 1. When the required lifting height of the wafer carrier 200 is greater than the movement stroke of a first-stage driving mechanism 1, the base 21 is first raised through a first-stage driving mechanism 1, and then the height of the second rotating nut 26 is provided through the driving device 25.

[0051] Of course, the height lifting method of the wafer carrier 200 is not limited to the above-mentioned priority control of a driving mechanism 1. In actual application, the driving device 25 can be preferentially controlled according to design requirements, or a driving mechanism 1 and a driving device 25 can be controlled simultaneously according to a certain stroke ratio.

[0052] In order to more clearly illustrate the technical effects of the technical solutions of the embodiments of the present application, Figure 3 As shown, the technical solution provided by the embodiment of the present application realizes the stroke design of the wafer carrier 200 at a predetermined height in a relatively small (small height dimension) space by setting a two-stage stroke structure. Figure 4 Compared with the existing control scheme shown in the embodiment of the present application, the technical solution provided by the embodiment of the present application can increase the up and down movement range of the wafer carrier when the height area between the robot arm and the power transmission system is limited, thereby increasing the storage capacity of wafers by increasing the movement range of the wafer carrier when the position of the robot arm for taking and placing wafers is fixed.

[0053] In some embodiments of this application, Figure 2 、 Figure 6 and Figure 7 As shown, the driving device 25 includes a second driving electric cylinder 251, a coupling 252 and a second ball screw 253; wherein, the second driving electric cylinder 251 is installed on the base 21, one end of the coupling 252 is connected to the output shaft of the second driving electric cylinder 251, and the other end of the coupling 252 is connected to the second ball screw 253, and the second rotating nut 26 is movably set on the second ball screw 253. In this way, when the second driving electric cylinder 251 moves, the rotational power is transmitted to the second ball screw 25 through the coupling 252 set on the output shaft of the second driving electric cylinder, thereby realizing the height control of the second rotating nut 26.

[0054] It should be noted that in order to stably install the coupling 252, as Figure 1 、 Figure 2 、 Figure 5 、 Figure 6 、 Figure 7 and Figure 11 The base 21 includes an upper plate and a lower plate, and a connecting plate connecting the upper plate and the lower plate, and the coupling 252 is provided between the upper plate and the lower plate.

[0055] Specifically, such as Figure 8 As shown, the driving device 25 also includes a first bearing seat 254, and a first bearing 255 and a second bearing 256 clamped on the first bearing seat 254, wherein the first bearing 255 is an angular contact bearing, the second bearing 256 is a deep groove ball bearing, the first bearing 255 is located above the second bearing 256, the first bearing seat 254 is clamped with the sealing cylinder 23 above, and the bottom is set on the base 21; the second rotating nut 26 is fixedly connected to the support cylinder 24, and a first elastic stop is set between the second rotating nut 26 and the first bearing 255. Ring 257, one end of the first bearing seat 254 close to the second bearing 256 is fixedly connected with the first pressure plate 258, the first pressure plate 258 is in contact with the bottom of the second bearing 256, the second ball screw 253 is located at the bottom of the second bearing 256 and is connected with a locking nut 259, the locking nut 259 is locked to the bottom of the second bearing 256, and the second ball screw 253 passes through the second rotating nut 26, the first elastic retaining ring 257, the first bearing 255, the second bearing 256 and the locking nut 259 in sequence and is connected to the other end of the coupling 252.

[0056] It should be noted that if Figure 8 As shown, the bottom of the sealing cylinder 23 is integrally formed with the bottom of the bellows 22, the bottom of the bellows 22 exceeds the bottom of the sealing cylinder 23, and the inner diameter of the sealing cylinder 23 is smaller than the inner diameter of the bellows 22. During the actual installation process, the first bearing seat 254 enters from the bottom of the bellows 22, and the outer ring step of the first bearing seat 254 clamps the bottom of the sealing cylinder 23, and then the base 21 is connected to the bottom of the bellows 22, and the upper part of the base 21 abuts against the lower part of the first bearing seat 254. In this way, the first bearing seat 254 forms an installation form in which the upper part clamps the sealing cylinder 23, and the bottom is set on the base 21. In order to improve the stability of the first bearing seat 254, the first bearing seat 254 can also be a first bearing seat 254 outer ring step clamps the bottom of the sealing cylinder 23 during the actual installation process, and the bottom of the first bearing seat 254 is connected to the base 21.

[0057] It should be noted that the first elastic retaining ring 257 can be fixedly arranged below the second rotating nut 26 and can move with the second rotating nut 26, or the first elastic retaining ring 257 can be fixedly arranged above the first bearing 255, or elastic structures are provided on both the second rotating nut 26 and the first bearing 255 to form the first elastic retaining ring 257, so that when the second rotating nut 26 drops above the first bearing 255, the first elastic retaining ring 257 plays a buffering role to avoid collision between the second rotating nut 26 and the first bearing 255.

[0058] In order to ensure the stable movement of the supporting cylinder 24, a sliding groove is provided on the inner wall of the sealing cylinder 23. Figure 10 As shown, a third slider 241 is provided on the outer wall of the support cylinder 24, and the third slider 241 is slidably connected to the slide groove. In this way, the support cylinder 24 is supported by the sealing cylinder 23 without direct contact between the support cylinder 24 and the sealing cylinder 23.

[0059] In order to improve the sealing performance of the vacuum chamber 100, Figure 10 As shown, a plurality of vertically arranged axial sealing rings 4 are provided between the sealing cylinder 23 and the supporting cylinder 24, and the axial sealing rings can be deformed under pressure, so that the axial sealing rings are tightly fitted with the inner wall of the sealing cylinder 23, thereby ensuring the sealing between the sealing cylinder 23 and the supporting cylinder 24, and improving the sealing of the vacuum chamber 100, and a spacer 5 is provided between two adjacent axial sealing rings 4. In actual application, a small gap is retained between the spacer 5 and the inner wall of the sealing cylinder 23. For example, they are installed in a clearance fit manner. In this way, the auxiliary support of the supporting cylinder 24 by the spacer 5 can not only ensure the relative movement between the sealing cylinder 23 and the supporting cylinder 24, but also achieve the sealing effect of the vacuum chamber 100.

[0060] In some embodiments of the present application, during the movement of the second rotating nut 26, in order to prevent the upper end of the second ball screw 253 from shaking in the support cylinder 24, causing the second rotating nut 26 to shake, such as Figure 6 and Figure 7As shown, a sliding support block 28 is fixedly provided at the upper end of the second ball screw 253. Specifically, the outer side of the sliding support block 28 is a ring that adapts to the interior of the support cylinder 24, and there is a clearance fit between the sliding support block 28 and the inner wall of the support cylinder 24. In this way, the support cylinder 24 can perform lifting and lowering movements in the vertical direction relative to the sliding support block 28, and during the movement of the second rotating nut 26, the clearance fit between the sliding support block 28 and the inner wall of the support cylinder 24 can prevent the upper end of the second ball screw 253 from shaking, thereby avoiding the problem of shaking of the second ball screw 253 during movement, and a third retaining spring that clamps the second ball screw 253 is provided above the sliding support block 28, and the third retaining spring presses the sliding support block 28 below, thereby ensuring that the sliding support block 28 is stably set on the second ball screw 253.

[0061] like Figure 2 、 Figure 6 and Figure 7 As shown, a first-stage drive mechanism 1 includes: an electric cylinder mounting base 11, a first driving electric cylinder 12, an electric cylinder synchronous pulley 13, a ball screw synchronous pulley 15, a synchronous belt 16 and a first ball screw 14. The movable end of the first-stage drive mechanism 1 is a first rotating nut 17 movably arranged on the first ball screw 14; wherein, the first driving electric cylinder 12 and the first ball screw 14 are mounted on one side of the electric cylinder mounting base 11, that is, on the side facing the vacuum chamber 100, and the electric cylinder synchronous pulley 13 and the ball screw synchronous pulley 15 are mounted on the other side of the electric cylinder mounting base 11.

[0062] Among them, the electric cylinder synchronous wheel 13 is connected to the output end of the first driving electric cylinder 12, the ball screw synchronous wheel 15 is connected to one end of the first ball screw 14, and the electric cylinder synchronous wheel 13 and the ball screw synchronous wheel 15 are connected through a synchronous belt 16.

[0063] When it is necessary to control the movement of the first rotating nut 17, the first driving electric cylinder 12 is started to drive the electric cylinder synchronous wheel 13 to rotate, and then the ball screw synchronous wheel 15 is driven by the synchronous belt 16, and the movement of the first rotating nut 17 is controlled under the drive of the first ball screw 14.

[0064] In actual application, the transmission method between the first driving electric cylinder 12 and the first ball screw 14 is not limited to the wheel-type synchronous belt method, and other transmission methods can also be used, such as sprocket and transmission chain methods; for example, gear transmission methods.

[0065] It should be noted that, in actual application, it is not limited to the use of the first driving electric cylinder 12 and the first ball screw 14 to achieve height control of the base 21. A linear motor can also be directly used as a driving mechanism 1. For example, the primary of the linear motor is set in the vertical direction, and the secondary of the linear motor is connected to the base 21.

[0066] like Figure 2 、 Figure 6 and Figure 7 As shown, in some embodiments of the present application, the driving platform further includes a connecting seat 3; a section of the driving mechanism 1 further includes a guide rail mounting seat 18 vertically mounted on the electric cylinder mounting seat 11, and a guide rail 19 provided on the guide rail mounting seat 18; wherein, as Figure 6 As shown, one end of the guide rail mounting base 18 away from the electric cylinder mounting base 11 is connected to the outer wall of the vacuum chamber 100; one end of the connecting base 3 is connected to the first rotating nut 17, and the other end is connected to the base 21, and the base 21 is slidably connected to the guide rail 19 through the connecting base 3. It should be noted that the connecting base 3 includes a first structure connected to the first rotating nut 17, a second structure connected to the base 21, and a third structure slidably connected to the guide rail 19, wherein the first structure can also be set as a circular hole or semicircular hole structure that can be sleeved on the first ball screw 14. In actual application, the first structure, the second structure and the third structure can be three independent structures, or they can be formed as one piece. The first structure, the second structure and the third structure are different functional partitions of the same physical structure, or the first structure and the second structure can be an integral structure, and the third structure exists independently. For example, the first structure and the second structure are connecting rods or connecting blocks, and the third structure is a slider provided on the connecting rod or connecting block.

[0067] like Figure 8 As shown, a second bearing seat 110 is installed on the electric cylinder mounting seat 11, and a third bearing 111 and a fourth bearing 112 are installed in the second bearing seat 110, wherein the third bearing 111 is an angular contact bearing, and the fourth bearing 112 is a deep groove ball bearing. The third bearing 111 is located above the fourth bearing 112, and a second pressure plate 113 is fixedly connected to one end of the second bearing seat 110 close to the fourth bearing 112, and the second pressure plate 113 is against the bottom of the fourth bearing 112.

[0068] It should be noted that, in actual application, a second elastic retaining ring may be provided between the connecting seat 3 and the third bearing 111. The second elastic retaining ring may be fixedly provided below the connecting seat 3 and may move with the connecting seat 3. Alternatively, the connecting seat 3 may be fixedly provided above the third bearing 111. Alternatively, elastic structures may be provided on both the connecting seat 3 and the third bearing 111 to form a second elastic retaining ring. When the connecting seat 3 drops above the third bearing 111, the second elastic retaining ring may act as a buffer to avoid collision between the connecting seat 3 and the third bearing 111.

[0069] like Figure 8As shown, a third bearing seat 114 is also installed on the guide rail mounting seat 18, and a fifth bearing 115 is installed in the third bearing seat 114, wherein the fifth bearing 115 is a deep groove ball bearing, one end of the first ball screw 14 is connected to the fifth bearing 115, and the other end passes through the first rotating nut 17, the connecting seat 3, the third bearing 111, the fourth bearing 112 and the second pressure plate 113 in sequence to connect with the ball screw synchronous wheel 15 Figure 12 .

[0070] In actual application, in order to ensure the connection stability between the third bearing seat 114 and the fifth bearing 115, as shown in FIG. Figure 9 As shown, a first retaining spring 116 that can be clamped to the outer ring of the fifth bearing seat 115 is provided on the third bearing seat 114 , wherein there are two first retaining springs 116 , which are respectively located above and below the fifth bearing 115 .

[0071] In addition, in order to ensure the connection stability between the first ball screw 14 and the fifth bearing 115 and to prevent the first ball screw 14 from being separated from the second bearing seat 110, as shown in FIG. Figure 9 As shown, a second retaining spring 117 is further provided above the fifth bearing 115 to engage the first ball screw 14, thereby preventing the first ball screw 14 from being disengaged from the inner ring of the fifth bearing 115. A second aspect of an embodiment of the present application provides a vacuum transmission chamber, comprising a two-stage drive stage for a vacuum system provided in the first aspect of the embodiment of the present application.

[0072] The embodiment of the present application provides a two-stage drive carrier and a vacuum transfer chamber for a vacuum system, wherein the drive carrier includes: a first-stage drive mechanism 1 and a second-stage drive mechanism 2, the second-stage drive mechanism 2 including: a base 21, a bellows 22, a sealing cylinder 23 and a support cylinder 24, and a drive device 25 provided on the base 21, the movable end of the drive device 25 is provided with a second rotating nut 26, and the upper end of the support cylinder 24 is provided with a wafer carrier 200; one end of the bellows 22 is connected to the base 21, and the other end is connected to the vacuum chamber 10 0 and is sealed and connected to the vacuum chamber 100; the sealing cylinder 23 is arranged inside the bellows 22 and is integrally formed with the bellows 22; the supporting cylinder 24 is slidably arranged inside the sealing cylinder 23, and the supporting cylinder 24 is connected to the second rotating nut 26; the base 21 is fixedly connected to the movable end of a section of the driving mechanism 1 to drive the sealing cylinder 23 and the supporting cylinder 24 to move with the movable end of a section of the driving mechanism 1, and the straight line where the motion trajectory of the movable end of the section of the driving mechanism 1 is located is parallel to the straight line where the motion trajectory of the second rotating nut 26 is located.

[0073] The technical solution provided in the embodiment of the present application realizes the stroke design of the wafer carrier 200 at a predetermined height in a relatively small space by setting a two-stage stroke structure, thereby effectively reducing the initial height of the wafer carrier 200, and increasing the up and down movement stroke of the wafer carrier 200 in the case of a limited height area between the robot and the power transmission system, thereby effectively increasing the storage capacity of the wafers in the storage box and improving the storage efficiency of the storage box when the position of the robot for taking and placing the wafers is fixed.

[0074] The above specific implementation methods further illustrate the purpose, technical solutions and beneficial effects of this application in detail. It should be understood that the above are only specific implementation methods of this application and are not intended to limit the scope of protection of this application. Any modifications, equivalent replacements, improvements, etc. made on the basis of the technical solutions of this application should be included in the scope of protection of this application.

Claims

1. A two-stage driving stage for a vacuum system, characterized in that: include: a first-stage driving mechanism (1) and a second-stage driving mechanism (2); The two-stage driving mechanism (2) comprises: a base (21), a bellows (22), a sealing cylinder (23) and a supporting cylinder (24), and a driving device (25) arranged on the base (21), a second rotating nut (26) being arranged at the movable end of the driving device (25), and a wafer carrying platform (200) being arranged at the upper end of the supporting cylinder (24); One end of the bellows (22) is connected to the base (21), and the other end is connected to the vacuum chamber (100) and is sealed with the vacuum chamber (100); the sealing cylinder (23) is arranged inside the bellows (22) and is integrally formed with the bellows (22); the supporting cylinder (24) is slidably arranged inside the sealing cylinder (23), and the supporting cylinder (24) is connected to the second rotating nut (26); The base (21) is fixedly connected to the movable end of the first section driving mechanism (1) to drive the sealing cylinder (23) and the supporting cylinder (24) to move following the movable end of the first section driving mechanism (1), and the straight line where the movable end of the first section driving mechanism (1) is located is parallel to the straight line where the movable end of the first section driving mechanism (1) is located.

2. A two-stage driving stage for a vacuum system according to claim 1, characterized in that: The driving device (25) includes a second driving electric cylinder (251), a coupling (252) and a second ball screw (253); The second driving electric cylinder (251) is mounted on the base (21), one end of the coupling (252) is connected to the output shaft of the second driving electric cylinder (251), and the other end is connected to the second ball screw (253), and the second rotating nut (26) is movably arranged on the second ball screw (253).

3. The two-stage driving stage for a vacuum system according to claim 2, characterized in that: The driving device (25) further includes a first bearing seat (254), and a first bearing (255) and a second bearing (256) clamped on the first bearing seat (254), wherein the first bearing (255) is located above the second bearing (256); the sealing cylinder (23) is clamped on the top of the first bearing seat (254), and the bottom is arranged on the base (21); The second rotating nut (26) is fixedly connected to the supporting cylinder (24); a first elastic retaining ring (257) is provided between the second rotating nut (26) and the first bearing (255); a first pressure plate (258) is fixedly connected to one end of the first bearing seat (254) close to the second bearing (256); the first pressure plate (258) abuts against the bottom of the second bearing (256); the second ball screw (253) is located at the bottom of the second bearing (256) and is connected to a locking nut (259); the locking nut (259) is locked to the bottom of the second bearing (256); The second ball screw (253) passes through the second rotating nut (26), the first elastic retaining ring (257), the first bearing (255), the second bearing (256) and the locking nut (259) in sequence and is connected to the other end of the coupling (252).

4. The two-stage driving stage for a vacuum system according to claim 1, characterized in that: A sliding groove is provided on the inner wall of the sealing cylinder (23), and a third sliding block (241) is provided on the outer wall of the supporting cylinder (24). The third sliding block (241) is slidably connected to the sliding groove.

5. The two-stage driving stage for a vacuum system according to claim 1, characterized in that: A plurality of axial sealing rings (4) arranged in a vertical direction are provided between the sealing cylinder (23) and the supporting cylinder (24), and a spacer (5) is provided between two adjacent axial sealing rings (4).

6. The two-stage driving stage for a vacuum system according to claim 1, characterized in that: A first-stage driving mechanism (1) comprises: an electric cylinder mounting seat (11), a first driving electric cylinder (12), an electric cylinder synchronous wheel (13), a ball screw synchronous wheel (15), a synchronous belt (16), and a first ball screw (14); a movable end of the first-stage driving mechanism (1) is a first rotating nut (17) movably arranged on the first ball screw (14); The first driving electric cylinder (12) and the first ball screw (14) are mounted on one side of the electric cylinder mounting base (11), and the electric cylinder synchronous wheel (13) and the ball screw synchronous wheel (15) are mounted on the other side of the electric cylinder mounting base (11); The electric cylinder synchronous wheel (13) is connected to the output end of the first driving electric cylinder (12), the ball screw synchronous wheel (15) is connected to one end of the first ball screw (14), and the electric cylinder synchronous wheel (13) and the ball screw synchronous wheel (15) are connected by transmission through the synchronous belt (16).

7. The two-stage driving stage for a vacuum system according to claim 6, characterized in that: Also includes a connecting seat (3); The one-stage driving mechanism (1) further comprises a guide rail mounting seat (18) vertically mounted on the electric cylinder mounting seat (11), and a guide rail (19) arranged on the guide rail mounting seat (18), wherein one end of the guide rail mounting seat (18) away from the electric cylinder mounting seat (11) is connected to the outer wall of the vacuum chamber (100); one end of the connecting seat (3) is connected to the first rotating nut (17), and the other end is connected to the base (21), and the base (21) is slidably connected to the guide rail (19) through the connecting seat (3).

8. The two-stage driving stage for a vacuum system according to claim 7, characterized in that: A second bearing seat (110) is installed on the electric cylinder mounting seat (11), a third bearing (111) and a fourth bearing (112) are installed in the second bearing seat (110), the third bearing (111) is located above the fourth bearing (112), and a second pressing plate (113) is fixedly connected to one end of the second bearing seat (110) close to the fourth bearing (112), and the second pressing plate (113) abuts against the bottom of the fourth bearing (112); A third bearing seat (114) is also installed on the guide rail mounting seat (18), and a fifth bearing (115) is installed in the third bearing seat (114). One end of the first ball screw (14) is connected to the fifth bearing (115), and the other end passes through the first rotating nut (17), the connecting seat (3), the third bearing (111), the fourth bearing (112) and the second pressure plate (113) in sequence to be connected to the ball screw synchronous wheel (15).

9. The two-stage driving stage for a vacuum system according to claim 1, characterized in that: It also includes a connecting flange (27), which is integrally formed on the bellows (22) and is sealed and connected to the vacuum chamber (100).

10. A vacuum transmission chamber, characterized in that: The vacuum transmission chamber includes a two-stage driving platform for a vacuum system according to any one of claims 1 to 9.

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