VOC waste gas treatment device

Abstract

The utility model discloses a VOC waste gas treatment device and relates to the field of waste gas treatment. The VOC waste gas treatment device comprises a gas inlet pipe, an adsorption chamber, a zeolite rotating wheel and a gas outlet pipe, wherein activated carbon for adsorbing waste gas is arranged in the adsorption chamber; zeolite for adsorbing waste gas is arranged in the zeolite rotating wheel; the adsorption chamber is communicated with the gas inlet pipe through a first gas inlet pipe, the zeolite rotating wheel is communicated with the gas inlet pipe through a second gas inlet pipe, and valves are respectively arranged on the first gas inlet pipe and the second gas inlet pipe; the adsorption chamber and the zeolite rotating wheel are respectively communicated with a gas outlet pipe through pipelines; a control assembly is arranged on the gas inlet pipe, the control assembly can detect the waste gas concentration value and prestores a preset value, and the control assembly opens the valve on the first gas inlet pipe or the valve on the second gas inlet pipe according to comparison of the waste gas concentration value and the preset value. According to the device, a proper treatment mode is selected according to the waste gas concentration, energy waste is reduced, meanwhile, generation of activated carbon pollutants is reduced, and the energy-saving and environment-friendly effects in the VOC waste gas treatment process are improved.

Description

Technical Field

[0001] The utility model relates to the field of waste gas treatment, and in particular to a VOC waste gas treatment device. Background Art

[0002] Semiconductor process exhaust contains a large amount of volatile organic compounds (VOCs). These VOCs primarily include benzene, toluene, xylene, aldehydes, hydrocarbons, ketones, esters, aromatic hydrocarbons, and heterocyclic compounds. Most VOCs are toxic, posing a health risk to humans and the environment, potentially harming plant and animal life. Therefore, VOC waste gas treatment is essential.

[0003] For high-concentration VOC waste gas, most of it is usually discharged after adsorption by a zeolite wheel, and a small part of the waste gas is heated by a heat exchanger and then desorbed by a zeolite wheel again. After desorption, it is sent to a combustion furnace for high-temperature cracking and then discharged; for low-concentration VOC waste gas, an activated carbon adsorption chamber is often used for adsorption treatment. When the activated carbon adsorption is saturated, it needs to be replaced in time.

[0004] Existing VOC waste gas treatment devices cannot flexibly adopt appropriate treatment methods for VOC waste gases of different concentrations. If a method of treating high-concentration VOC waste gas is used when the waste gas concentration is low, it is easy to lead to high energy consumption and increase the treatment cost; if a method of treating low-concentration VOC waste gas is used when the waste gas concentration is high, the activated carbon needs to be replaced frequently, resulting in low treatment efficiency and high labor costs. Utility Model Content

[0005] The purpose of the present utility model is to provide a VOC waste gas treatment device, which can select a suitable waste gas treatment method according to the waste gas concentration, reduce energy waste, and reduce the generation of activated carbon pollutants, thereby improving the energy-saving and environmental protection effect in the VOC waste gas treatment process.

[0006] The embodiment of the present utility model is achieved as follows:

[0007] On the one hand, the utility model provides a VOC waste gas treatment device, including an air inlet pipe, an adsorption chamber, a zeolite rotor and an air outlet pipe, wherein the adsorption chamber is provided with activated carbon for adsorbing waste gas; the zeolite rotor is provided with zeolite for adsorbing waste gas; the adsorption chamber is connected with the air inlet pipe through a first air inlet pipe, and the zeolite rotor is connected with the air inlet pipe through a second air inlet pipe, and valves are respectively provided on the first air inlet pipe and the second air inlet pipe; the adsorption chamber and the zeolite rotor are respectively connected to the air outlet pipe through pipes; a control component is provided on the air inlet pipe, and the control component can detect the exhaust gas concentration value; a preset value is pre-stored in the control component, and the control component can open the valve on the first air inlet pipe or the valve on the second air inlet pipe according to the comparison between the exhaust gas concentration value and the preset value.

[0008] Optionally, the VOC waste gas treatment device also includes an activated carbon regeneration device, which includes a heat exchanger, and air can enter the heat exchanger through a pipe; the heat exchanger is respectively connected to the exhaust pipe and the adsorption chamber pipe; it also includes a desorption fan, a preheating plate exchanger and a combustion furnace connected in sequence through pipes, one side of the desorption fan is connected to the adsorption chamber through a pipe, and one end of the preheating plate exchanger is connected to the heat exchanger through a pipe; the air transfers heat energy to the adsorption chamber through the heat exchanger to make the activated carbon volatilize organic gas; the organic gas enters the combustion furnace through the desorption fan and the preheating plate exchanger, the combustion furnace is used to heat and decompose the organic gas, and the hot exhaust gas generated by the combustion furnace is discharged into the exhaust pipe through the preheating plate exchanger and the heat exchanger.

[0009] Optionally, the activated carbon regeneration device further includes a heater, which is disposed between the heat exchanger and the adsorption chamber and is connected to the adsorption chamber and the heat exchanger through pipelines, respectively.

[0010] Optionally, the activated carbon regeneration device further includes a fresh air filter, the fresh air filter is connected to the heat exchanger via a pipeline, and the fresh air filter is connected to an external pipeline for allowing air to enter.

[0011] Optionally, a cooling component and a temperature probe are provided in the adsorption chamber, and the cooling component and the temperature probe are respectively connected to the control component signal; the temperature probe is used to detect the real-time temperature value in the adsorption chamber. When the real-time temperature value is greater than the preset temperature value, the control component drives the cooling component to cool the adsorption chamber.

[0012] Optionally, a flame arrester is provided on the pipeline connecting the adsorption chamber and the desorption blower; a flame arrester is provided on the pipeline connecting the adsorption chamber and the heat exchanger.

[0013] Optionally, the zeolite rotor is connected to the heat exchanger through a pipeline, and the gas discharged from the zeolite rotor enters the cooling process of the heat exchanger for preheating, and the preheated gas enters the desorption fan for desorption treatment. After desorption treatment, it enters the preheating plate cooling process for preheating and then enters the combustion furnace for heating and decomposition.

[0014] Optionally, a third air inlet pipe is further provided at the connection between the air inlet pipe, the first air inlet pipe and the second air inlet pipe, and a primary fan is provided on the third air inlet pipe.

[0015] Optionally, a secondary fan is provided on the pipe connecting the adsorption chamber and the air outlet pipe; and a secondary fan is provided on the pipe connecting the zeolite wheel and the air outlet pipe.

[0016] Optionally, the adsorption chamber comprises at least one.

[0017] The beneficial effects of the utility model include:

[0018] The present application provides a VOC waste gas treatment device, including an air inlet pipe, an adsorption chamber, a zeolite rotor and an air outlet pipe, wherein the adsorption chamber is provided with activated carbon for adsorbing waste gas; the zeolite rotor is provided with zeolite for adsorbing waste gas; the adsorption chamber is connected to the air inlet pipe through a first air inlet pipe, and the zeolite rotor is connected to the air inlet pipe through a second air inlet pipe, and valves are respectively provided on the first air inlet pipe and the second air inlet pipe; the adsorption chamber and the zeolite rotor are respectively connected to the air outlet pipe through pipes; a control component is provided on the air inlet pipe, and the control component can detect the exhaust gas concentration value; a preset value is pre-stored in the control component, and the control component can open the valve on the first air inlet pipe or the valve on the second air inlet pipe according to the comparison between the exhaust gas concentration value and the preset value. The above-mentioned VOC waste gas treatment device selects the appropriate exhaust gas treatment method according to the exhaust gas concentration, reduces energy waste, and at the same time reduces the generation of activated carbon pollutants, thereby improving the energy-saving and environmental protection effect in the VOC exhaust gas treatment process. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0020] Figure 1 This is a schematic diagram of the treatment process of the VOC waste gas treatment device provided by an embodiment of the utility model;

[0021] Figure 2 This is the second schematic diagram of the treatment process of the VOC waste gas treatment device provided by the embodiment of the utility model;

[0022] Figure 3 This is a schematic diagram of the treatment process of the activated carbon regeneration device of the VOC waste gas treatment device provided in an embodiment of the utility model.

[0023] Icons: 100-VOC waste gas treatment device; 110-air inlet pipe; 111-third air inlet pipe; 120-adsorption chamber; 121-first air inlet pipe; 130-zeolite rotor; 131-second air inlet pipe; 140-air outlet pipe; 150-valve; 160-control component; 170-activated carbon regeneration device; 171-heat exchanger; 172-desorption fan; 173-preheating plate exchanger; 174-combustion furnace; 175-heater; 176-fresh air filter; 181-primary fan; 182-secondary fan; 183-blower; 184-check valve. DETAILED DESCRIPTION

[0024] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.

[0026] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0027] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is typically placed when in use. These terms are intended solely to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0028] Furthermore, terms such as "horizontal" and "vertical" do not necessarily mean that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.

[0029] It should also be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0030] Please refer to Figure 1 The present embodiment provides a VOC waste gas treatment device 100, including an air inlet pipe 110, an adsorption chamber 120, a zeolite rotor 130 and an air outlet pipe 140. The adsorption chamber 120 is provided with activated carbon for adsorbing waste gas; the zeolite rotor 130 is provided with zeolite for adsorbing waste gas; the adsorption chamber 120 is connected to the air inlet pipe 110 through a first air inlet pipe 121, and the zeolite rotor 130 is connected to the air inlet pipe 110 through a second air inlet pipe 131. The first air inlet pipe 121 and A valve 150 is provided on the second air inlet pipe 131; the adsorption chamber 120 and the zeolite wheel 130 are connected to the air outlet pipe 140 through pipes respectively; a control component 160 is provided on the air inlet pipe 110, and the control component 160 can detect the exhaust gas concentration value; a preset value is pre-stored in the control component 160, and the control component 160 can open the valve 150 on the first air inlet pipe 121 or the valve 150 on the second air inlet pipe 131 according to the comparison between the exhaust gas concentration value and the preset value.

[0031] Specifically, if Figure 1 As shown, the present application provides a VOC waste gas treatment device 100, which includes an air inlet pipe 110, and VOC waste gas can enter the interior of the device through the air inlet pipe 110. The VOC waste gas treatment device 100 has an adsorption chamber 120 and a zeolite rotor 130 inside. The adsorption chamber 120 is provided with activated carbon, which can adsorb the waste gas, and the treatment efficiency can reach more than 90%. Zeolite is provided in the zeolite rotor 130. Zeolite is a mineral with high porosity and good adsorption properties. It can adsorb and store organic compounds to achieve adsorption of VOC waste gas, and the treatment efficiency can reach more than 90%. The gas treated by the adsorption chamber 120 and the zeolite rotor 130 is discharged into the air through the outlet pipe 140, which greatly reduces the VOC concentration, thereby reducing the damage and impact of the gas on the human body and the environment.

[0032] Existing waste gas treatment devices usually only adsorb waste gas through an adsorption chamber, or only treat waste gas through a zeolite wheel. When the waste gas is introduced, if the waste gas concentration is too high, the saturation cycle of the activated carbon in the adsorption chamber is shortened and it needs to be replaced frequently. The loading amount of activated carbon is large, so the adsorption efficiency is low, and the labor cost and material cost of the transportation and replacement process are increased. If the waste gas concentration is low, using a zeolite wheel for waste gas adsorption requires a lot of energy consumption, which increases the treatment cost.

[0033] In order to solve the above problems and achieve flexible and efficient waste gas treatment, such as Figure 1 As shown, the present application further provides a control component 160 on the air inlet pipe 110, and valves 150 are correspondingly provided on the first air inlet pipe 121 and the second air inlet pipe 131, and the valves 150 are electrically connected to the control component 160. The control component 160 can detect the exhaust gas concentration value entering the air inlet pipe 110 and compare the exhaust gas concentration value with the preset concentration value. When the exhaust gas concentration value is lower than the preset concentration value, the adsorption chamber 120 can be used to adsorb the exhaust gas. At this time, the control component 160 controls the valve 150 on the first air inlet pipe 121 to open and the valve 150 on the second air inlet pipe 131 to close, and the exhaust gas enters the adsorption chamber 120 through the air inlet pipe 110 and the first air inlet pipe 121. The gas adsorbed and processed by the adsorption chamber 120 is discharged to the outside through the outlet pipe 140; when the exhaust gas concentration value is higher than the preset concentration value, it can be The zeolite rotor 130 is used to adsorb the exhaust gas. At this time, the control component 160 controls the valve 150 on the first air inlet pipe 121 to close and the valve 150 on the second air inlet pipe 131 to open. The exhaust gas enters the zeolite rotor 130 through the air inlet pipe 110 and the second air inlet pipe 131. The gas adsorbed by the zeolite rotor 130 is discharged to the outside through the outlet pipe 140. Through such a setting, the appropriate exhaust gas treatment method can be selected according to the exhaust gas concentration, which reduces energy waste and reduces the generation of activated carbon pollutants. Therefore, the energy-saving and environmental protection effect in the VOC exhaust gas treatment process is improved.

[0034] It should be noted that, in one embodiment of the present application, first, in order to improve the exhaust gas quality efficiency of the VOC exhaust gas treatment device 100, the adsorption chamber 120 includes at least one. Figure 1 As shown, the adsorption chambers 120 include two, and the exhaust gas entering through the air inlet pipe 110 is adsorbed by the two adsorption chambers 120, thereby improving adsorption efficiency. Of course, in addition to the adsorption chambers 120, at least one zeolite rotor 130 may also be included to further improve the exhaust gas quality efficiency of the VOC exhaust gas treatment device 100. This application does not impose any restrictions on the specific number of adsorption chambers 120 and zeolite rotors 130, as long as the adsorption treatment efficiency of the VOC exhaust gas is guaranteed.

[0035] Second, if Figure 2 As shown, in order to improve the adsorption efficiency and treatment speed of VOC waste gas, a third air inlet pipe 111 is further provided at the connection between the air inlet pipe 110 and the first air inlet pipe 121 and the second air inlet pipe 131. The third air inlet pipe 111 is provided with a primary fan 181. After the VOC waste gas enters the third air inlet pipe 111 from the air inlet pipe 110, the primary fan 181 can blow the VOC waste gas into the first air inlet pipe 121 or the second air inlet pipe 131. Preferably, the third air inlet pipe 111 is also provided with a valve 150 and a check valve 184. The valve 150 is located between the air inlet pipe 110 and the primary fan 181 to allow the VOC waste gas to enter or block the VOC waste gas; the check valve 184 is located on the side of the primary fan 181 facing away from the valve 150.

[0036] Third, if Figure 2 As shown, in order to improve the adsorption efficiency and speed of VOC waste gas treatment, a secondary fan 182 is provided on the pipe connecting the adsorption chamber 120 and the outlet pipe 140; a secondary fan 182 is also provided on the pipe connecting the zeolite rotor 130 and the outlet pipe 140. The provision of the secondary fan 182 allows the gas treated by adsorption in the adsorption chamber 120 and the zeolite rotor 130 to be quickly discharged to the outlet pipe 140. Preferably, a valve 150 and a check valve 184 are further provided between the second fan and the zeolite rotor 130, and between the second fan and the adsorption chamber 120. The check valve 184 is provided on the side of the second fan close to the outlet pipe 140.

[0037] Fourth, if Figure 2 As shown, in order to improve the control efficiency of gas flow, preferably, valves 150 are provided on the pipelines of the VOC waste gas treatment device 100 to control the flow of gas.

[0038] The VOC waste gas treatment device 100 selects a suitable waste gas treatment method according to the waste gas concentration, thereby reducing energy waste and reducing the generation of activated carbon pollutants, thereby improving the energy-saving and environmental protection effects during the VOC waste gas treatment process.

[0039] In one embodiment of the present application, Figure 3As shown, the VOC waste gas treatment device 100 also includes an activated carbon regeneration device 170, which includes a heat exchanger 171. Air can enter the heat exchanger 171 through a pipe; the heat exchanger 171 is connected to the outlet pipe 140 and the adsorption chamber 120 pipe respectively; it also includes a desorption fan 172, a preheating plate exchanger 173 and a combustion furnace 174 connected in sequence through pipes, one side of the desorption fan 172 is connected to the adsorption chamber 120 through a pipe, and one end of the preheating plate exchanger 173 is connected to the heat exchanger 171 through a pipe; the air transfers heat energy to the adsorption chamber 120 through the heat exchanger 171 to make the activated carbon volatilize organic gas; the organic gas enters the combustion furnace 174 through the desorption fan 172 and the preheating plate exchanger 173. The combustion furnace 174 is used to heat and decompose the organic gas, and the hot exhaust gas generated by the combustion furnace 174 is discharged into the outlet pipe 140 through the preheating plate exchanger 173 and the heat exchanger 171.

[0040] Specifically, in existing waste gas treatment devices, activated carbon needs to be replaced promptly after saturation. However, the activated carbon loading volume is large, and replacing the activated carbon requires a lot of labor and material costs, thereby increasing treatment costs and reducing treatment efficiency. In order to reduce the frequency of activated carbon replacement, thereby improving treatment efficiency and reducing treatment costs, the VOC waste gas treatment device 100 of the present application also includes an activated carbon regeneration device 170.

[0041] like Figure 3 As shown, the activated carbon regeneration device consists of an adsorption channel and a desorption channel. The adsorption channel is provided at the outlet of the adsorption chamber 120, and the desorption channel is provided at the inlet of the adsorption chamber 120. The adsorption channel includes a heat exchanger 171, one side of which is connected to the air through a pipe. Preferably, a valve 150 is also provided on the pipe. The desorption channel includes a desorption fan 172, a preheating plate exchanger 173, and a combustion furnace 174 connected in sequence through pipes. Under the action of the desorption fan, air can enter the heat exchanger 171 through the pipe. When the combustion furnace 174 is turned on, the hot exhaust gas generated by the combustion furnace 174 can enter the preheating plate exchanger 173 and the heat exchanger 171 in sequence to provide heat as a heat source. At this time, after the heat exchange, the air transfers heat energy to the adsorption chamber 120, heating the temperature of the activated carbon to above the boiling point of the adsorbed VOC waste gas, causing the organic gas adsorbed by the activated carbon to volatilize, thereby regenerating the activated carbon. The volatilized organic gas enters the combustion furnace 174 after heat exchange through the preheating plate 173 . The organic waste gas can be cracked at high temperature in the combustion furnace 174 and then discharged through the outlet pipe 140 .

[0042] It should be noted that, in one embodiment of the present application, first, Figure 3As shown, the activated carbon regeneration device 170 further includes a heater 175 , which is disposed between the heat exchanger 171 and the adsorption chamber 120 , and is communicated with the adsorption chamber 120 and the heat exchanger 171 through pipelines, respectively.

[0043] Specifically, in order to ensure that the activated carbon can effectively volatilize the organic gas and improve the regeneration efficiency and reliability of the activated carbon, a heater 175 is also provided between the heat exchanger 171 and the adsorption chamber 120. The air exchanged through the heat exchanger 171 is heated by the heater 175 and then enters the adsorption chamber 120 to ensure that the temperature of the activated carbon is heated to above the boiling point of the adsorbed VOC waste gas, thereby avoiding poor desorption efficiency of the organic gas due to insufficient air temperature.

[0044] Second, if Figure 3 As shown, the activated carbon regeneration device 170 further includes a fresh air filter 176 , which is connected to the heat exchanger 171 via a pipeline. The fresh air filter 176 is connected to an external pipeline for allowing air to enter.

[0045] Specifically, the activated carbon regeneration device 170 also includes a fresh air filter 176, which is connected to an external pipe for allowing air to enter. The air is filtered by the fresh air filter 176 and then passed into the heat exchanger 171 for heat exchange to avoid impurities in the air entering, thereby further improving the regeneration efficiency and reliability of the activated carbon.

[0046] Third, a cooling component and a temperature probe (not shown in the figure) are provided in the adsorption chamber 120, and the cooling component and the temperature probe are respectively connected to the control component 160 by signal; the temperature probe is used to detect the real-time temperature value in the adsorption chamber 120. When the real-time temperature value is greater than the preset temperature value, the control component 160 drives the cooling component to cool the adsorption chamber 120.

[0047] Specifically, because activated carbon regeneration requires heating the activated carbon to a temperature above the boiling point of the adsorbed VOC waste gas, the organic gases adsorbed by the activated carbon are volatilized. However, as the temperature rises, the risk of spontaneous combustion of the activated carbon increases, and fire may occur at any time. Therefore, a cooling component and a temperature probe are also installed in the adsorption chamber 120. The temperature probe is used to detect the real-time temperature value in the adsorption chamber 120. When the real-time temperature value exceeds the preset temperature value, the control component 160 drives the cooling component to cool the adsorption chamber 120 to prevent the activated carbon from spontaneously combusting due to excessive temperature.

[0048] Preferably, the cooling assembly can be a nitrogen spray assembly, a fire sprinkler assembly, or both. When the temperature in the adsorption chamber 120 is too high, the cooling assembly can spray nitrogen to reduce the temperature. If the temperature does not drop significantly after a period of time, fire water can be sprayed.

[0049] Fourth, if the activated carbon spontaneously combusts due to the high temperature in the adsorption chamber 120, a flame arrester (not shown in the figure) is provided on the pipeline connecting the adsorption chamber 120 and the desorption blower 172; a flame arrester (not shown in the figure) is provided on the pipeline connecting the adsorption chamber 120 and the heat exchanger 171. The flame arrester can prevent the spread of flames, thereby improving the safety and reliability of the VOC waste gas treatment device 100.

[0050] In one embodiment of the present application, Figure 1 As shown, the zeolite rotor 130 is connected to the heat exchanger 171 through a pipeline. The gas discharged from the zeolite rotor 130 enters the heat exchanger 171 for preheating in the cooling process. The preheated gas enters the desorption fan 172 for desorption treatment. After desorption treatment, it enters the preheating plate exchanger 173 for preheating in the cooling process and then enters the combustion furnace 174 for heating and decomposition.

[0051] Specifically, if Figure 1 As shown, in order to further improve the waste gas treatment efficiency of the VOC waste gas treatment device 100. The outlet of the zeolite rotor 130 is connected to the heat exchanger 171 through a pipeline. Most of the gas adsorbed by the zeolite rotor 130 is discharged from the outlet pipe 140. A small part of the gas exchanges heat energy through the heat exchanger 171 and enters the desorption fan 172 for desorption treatment. After desorption treatment, it enters the preheating plate exchanger 173 for preheating in the cooling process and then enters the combustion furnace 174 for heating and decomposition. The gas after heating and decomposition is discharged from the outlet pipe 140. At this time, the gas treatment efficiency can reach more than 95%. Preferably, in order to facilitate the control of the flow of gas, a check valve 184 is also provided between the desorption fan 172 and the preheating plate exchanger 173, and a blower 183 is provided between the combustion furnace 174 and the outlet pipe 140.

[0052] It should be noted that in order to reduce the production cost of the VOC waste gas treatment device 100 and improve space utilization, the desorption fan 172, preheating plate exchanger 173 and combustion furnace 174 connected to the outlet of the zeolite wheel 130 are shared with the heat exchanger 171, desorption fan 172, preheating plate exchanger 173 and combustion furnace 174 used in the activated carbon regeneration device 170 respectively.

[0053] The above description is merely an optional embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

[0054] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any appropriate manner without contradiction. In order to avoid unnecessary repetition, the present invention will not further describe various possible combinations.

Claims

1. A VOC waste gas treatment device, characterized in that: The invention comprises an air inlet pipe (110), an adsorption chamber (120), a zeolite rotor (130) and an air outlet pipe (140), wherein the adsorption chamber (120) is provided with activated carbon for adsorbing exhaust gas; the zeolite rotor (130) is provided with zeolite for adsorbing exhaust gas; the adsorption chamber (120) is connected to the air inlet pipe (110) through a first air inlet pipe (121), and the zeolite rotor (130) is connected to the air inlet pipe (110) through a second air inlet pipe (131), and the first air inlet pipe (121) and the second air inlet pipe (131) are respectively provided with A valve (150) is provided; the adsorption chamber (120) and the zeolite rotor (130) are respectively connected to the exhaust pipe (140) through pipelines; a control component (160) is provided on the exhaust pipe (110), and the control component (160) can detect the exhaust gas concentration value; a preset value is pre-stored in the control component (160), and the control component (160) can open the valve (150) on the first exhaust pipe (121) or the valve (150) on the second exhaust pipe (131) according to the comparison between the exhaust gas concentration value and the preset value.

2. The VOC waste gas treatment device according to claim 1, characterized in that: The VOC waste gas treatment device (100) further includes an activated carbon regeneration device (170), the activated carbon regeneration device (170) includes a heat exchanger (171), air can enter the heat exchanger (171) through a pipeline; the heat exchanger (171) is respectively connected to the outlet pipe (140) and the adsorption chamber (120) through a pipeline; and further includes a desorption fan (172), a preheating plate (173) and a combustion furnace (174) connected in sequence through pipelines, one side of the desorption fan (172) is connected to the adsorption chamber (120) through a pipeline, the One end of the preheating plate exchanger (173) is connected to the heat exchanger (171) through a pipeline; the air transfers heat energy from the heat exchanger (171) to the adsorption chamber (120) to make the activated carbon volatilize organic gas; the organic gas enters the combustion furnace (174) through the desorption fan (172) and the preheating plate exchanger (173); the combustion furnace (174) is used to heat and decompose the organic gas, and the hot exhaust gas generated by the combustion furnace (174) is discharged into the outlet pipe (140) through the preheating plate exchanger (173) and the heat exchanger (171).

3. The VOC waste gas treatment device according to claim 2, characterized in that: The activated carbon regeneration device (170) further includes a heater (175), which is disposed between the heat exchanger (171) and the adsorption chamber (120), and is connected to the adsorption chamber (120) and the heat exchanger (171) via pipelines.

4. The VOC waste gas treatment device according to claim 2, characterized in that: The activated carbon regeneration device (170) further includes a fresh air filter (176), wherein the fresh air filter (176) is connected to the heat exchanger (171) via a pipeline, and the fresh air filter (176) is connected to an external pipeline for introducing air.

5. The VOC waste gas treatment device according to claim 2, characterized in that: A cooling component and a temperature probe are provided in the adsorption chamber (120), and the cooling component and the temperature probe are respectively connected to the control component (160) by signal; the temperature probe is used to detect the real-time temperature value in the adsorption chamber (120); when the real-time temperature value is greater than a preset temperature value, the control component (160) drives the cooling component to cool the adsorption chamber (120).

6. The VOC waste gas treatment device according to claim 5, characterized in that: A flame arrester is provided on the pipeline connecting the adsorption chamber (120) and the desorption blower (172); and a flame arrester is provided on the pipeline connecting the adsorption chamber (120) and the heat exchanger (171).

7. The VOC waste gas treatment device according to claim 2, characterized in that: The zeolite rotor (130) is connected to the heat exchanger (171) through a pipeline. The gas discharged from the zeolite rotor (130) enters the heat exchanger (171) for preheating in the cooling process. The preheated gas enters the desorption fan (172) for desorption treatment. After the desorption treatment, the gas enters the preheating plate exchanger (173) for preheating in the cooling process and then enters the combustion furnace (174) for heating and decomposition.

8. The VOC waste gas treatment device according to claim 1, characterized in that: A third air inlet pipe (111) is also provided at the connection between the air inlet pipe (110), the first air inlet pipe (121) and the second air inlet pipe (131), and a primary fan (181) is provided on the third air inlet pipe (111).

9. The VOC waste gas treatment device according to claim 1, characterized in that: A secondary fan (182) is provided on the pipe connecting the adsorption chamber (120) and the air outlet pipe (140); and a secondary fan (182) is provided on the pipe connecting the zeolite wheel (130) and the air outlet pipe (140).

10. The VOC waste gas treatment device according to claim 1, characterized in that: The adsorption chamber (120) includes at least one.

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