Batching device for photoresist diluent production

Abstract

The utility model discloses a batching device for producing a photoresist diluent, which relates to the technical field of photoresist and comprises a base, a mounting frame arranged on one side of the top of the base, a batching tank group arranged on the top of the mounting frame, a plurality of groups of quantification components arranged at the bottom of the batching tank group, and connecting components arranged at the output ends of the plurality of groups of quantification components, the cleaning part is arranged at one end of the connecting part, and the reaction kettle is arranged at the other end of the connecting part; the batching device for producing the photoresist diluent can be used for quickly blending raw materials, is accurate in dosage control and can be used for cleaning a pipeline after the raw materials are blended every time.

Description

Technical Field

[0001] The utility model relates to the technical field of photoresist, in particular to a batching device for producing photoresist diluent. Background Art

[0002] Photoresist thinner is a chemical whose main function is to dilute the photoresist so that it can be better coated on the chip surface. Due to the characteristics of photoresist, it must be coated on the chip surface very accurately, otherwise it will affect the performance of the circuit. Photoresist thinner is created to solve this problem. The main components of photoresist thinner include organic solvents and additives. When using photoresist thinner, you need to pay attention to its chemical stability and purity to ensure that the performance of the photoresist is not affected. Therefore, the preparation of photoresist thinner requires strict control of the amount of added materials. The existing preparation process is usually controlled by technicians and is inefficient. Therefore, an automated photoresist thinner production dispensing device is needed.

[0003] According to application number CN201511024522.6, a liquid dispensing machine is provided, which includes several feed boxes, each of which is provided with a feed hopper at the bottom end, the discharge end of the feed hopper is connected to the feed end of the feed pipe, the discharge end of the feed pipe is connected to the storage box, the storage box is connected to the storage hopper, the discharge end of the storage hopper is connected to the feed end of the guide pipe, the discharge end of the guide pipe is connected to the feed end of the merging pipe, and the discharge end of the merging pipe is connected to the reactor; it also includes a switch for controlling the connection and disconnection between the storage hopper and the guide pipe, a first solenoid valve for controlling the opening and closing of the feed pipe, a liquid level sensor for sensing the liquid level inside the storage hopper, and a first controller.

[0004] The above-mentioned document can save manpower by automatically completing the batching of liquid raw materials, and improve the speed and efficiency of liquid batching. However, there are problems such as the inability to accurately control the liquid flow rate and the inaccurate batching percentage. Utility Model Content

[0005] Based on this, the purpose of the present invention is to provide a dosing device for producing photoresist diluent to solve the technical problems raised in the above background technology.

[0006] To achieve the above objectives, the present invention provides the following technical solutions:

[0007] A dosing device for producing photoresist diluent includes a base, a mounting frame arranged on one side of the top of the base, a dosing tank group arranged on the top of the mounting frame, multiple groups of quantification components arranged at the bottom of the dosing tank group, connecting components arranged at the output ends of the multiple groups of quantification components, a cleaning component arranged at one end of the connecting component, and a reactor arranged at the other end of the connecting component.

[0008] Preferably, the mounting frame is a double-layer structure, including several oblique mounting plates arranged above the bottom layer and an annular frame arranged on the top layer.

[0009] Preferably, the batching tank group includes a sealed tank arranged inside the annular frame and a check valve arranged at the bottom of the sealed tank.

[0010] Preferably, the quantifying component includes a first inclined tube arranged at the top of the inclined mounting plate and connected to the discharge end of the check valve at one end, an auger rod arranged inside the first inclined tube, and a servo motor arranged at one end of the first inclined tube and connected to the central axis of the auger rod at the execution end.

[0011] Preferably, the connecting component includes a first arc-shaped tube provided at the discharge end of the quantifying component, and a second inclined tube obliquely connecting all of the first arc-shaped tubes.

[0012] Preferably, the cleaning component includes a liquid storage tank arranged at one end of the top of the base, a pump arranged on one side of the liquid storage tank, a conducting tube with one end connected to the bottom of the liquid storage tank and the other end connected to the input end of the pump, a second arc tube with one end connected to the output end of the pump and the other end connected to the higher end of the second inclined tube, a third arc tube arranged at the lower end of the second inclined tube, and a first solenoid valve arranged at the outlet end of the third arc tube.

[0013] Preferably, the reactor includes a fourth arc tube provided at the lower end of the second inclined tube, a second solenoid valve connecting the outlet end of the fourth arc tube and the feed port of the reactor, and a control panel provided on the side of the reactor.

[0014] In summary, this technical solution has the following beneficial effects:

[0015] In this embodiment, the raw materials in the sealed tank can be taken out through the inclined design of the auger tube, and the material is discharged through the higher end of the auger tube. Gravity can be used to avoid dosage errors caused by insufficient filling of the auger tube during discharge, as well as excess dosage overflowing from the auger tube. By precisely controlling the number of rotations of the servo motor, the discharge dosage can be precisely controlled.

[0016] By connecting the inclined pipes for the discharge and limiting the order of discharge, the liquid of the previous discharge can be brought into the reactor by using the liquid of the next discharge, thereby reducing the mass loss of raw materials during the transportation process. Cleaning elements are set at both ends of the inclined pipes for the discharge, so that the inclined pipes for the discharge can be cleaned after one batching to prevent residual liquid from affecting the next round of batching. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is the axonometric drawing of the overall structure of the utility model;

[0018] Figure 2 It is a flip axonometric drawing of the overall structure of the utility model;

[0019] Figure 3 This is a side view of the overall structure of the utility model;

[0020] Figure 4 It is a cross-sectional view of some components of the present invention.

[0021] Description of the drawings: 10. Base; 11. Mounting frame; 12. Dosing tank group; 13. Quantification component; 14. Connecting component; 15. Cleaning component; 16. Reactor; 111. Inclined mounting plate; 112. Ring frame; 121. Sealing tank; 122. Check valve; 131. First inclined tube; 132. Auger rod; 133. Servo motor; 141. First arc tube; 142. Second inclined tube; 151. Liquid storage tank; 152. Pump; 153. Conducting tube; 154. Second arc tube; 155. Third arc tube; 156. First solenoid valve; 161. Fourth arc tube; 162. Second solenoid valve; 163. Control panel. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present invention will be described clearly and completely below with reference to the accompanying drawings in the embodiments of the present invention.

[0023] Example

[0024] Please refer to the attached Figure 1 、 2 As shown in Figure 3, a dosing device for producing photoresist diluent includes a base 10, a mounting frame 11 provided on one side of the top of the base 10, a dosing tank group 12 provided on the top of the mounting frame 11, multiple groups of quantification components 13 provided at the bottom of the dosing tank group 12, a connecting component 14 provided at the output end of the multiple groups of quantification components 13, a cleaning component 15 provided at one end of the connecting component 14, and a reactor 16 provided at the other end of the connecting component 14; the mounting frame 11 is a double-layer structure, including several inclined mounting plates 111 provided above the bottom layer, and an annular frame 112 provided on the top layer; the dosing tank group 12 includes a sealing tank 121 provided inside the annular frame 112, and a check valve 122 provided at the bottom of the sealing tank 121.

[0025] It should be noted that, since the chemical agent used to prepare the photoresist diluent is volatile, in order to prevent volatilization loss and harm to personnel health caused by chemical volatilization, a sealed tank 121 is used to temporarily store the raw materials. The sealed tank 121 is connected to the quantification component 13 via a flange, and the tank body of different materials can be replaced as needed; the sealed tank 121 has heat preservation capacity, which preheats the raw material chemicals inside to improve the mixing efficiency during preparation;

[0026] Furthermore, before preparing the photoresist diluent, a sealing tank 121 of suitable material is selected according to the raw material chemicals to be used, and is mounted on the mounting frame 11 through the annular frame 112;

[0027] Furthermore, the check valve 122 at the bottom of the sealing tank 121 is connected to the first inclined pipe 131 via a flange installation;

[0028] Furthermore, the raw material chemicals are respectively added into each sealed tank 121, and the heat preservation function of the sealed tank 121 is activated to keep the raw material chemicals warm.

[0029] Please refer to the attached Figure 1 、 2 As shown in Figures 4 and 5, the quantifying component 13 includes a first inclined tube 131 provided at the top of the inclined mounting plate 111 and one end of which is connected to the discharge end of the check valve 122, an auger rod 132 provided inside the first inclined tube 131, and a servo motor 133 provided at one end of the first inclined tube 131 and the execution end of which is connected to the central axis of the auger rod 132; the connecting component 14 includes a first arc tube 141 provided at the discharge end of the quantifying component 13, a second inclined tube 142 obliquely connected to all the first arc tubes 141; the reactor 16 includes a fourth arc tube 161 provided at the lower end of the second inclined tube 142, a second solenoid valve 162 connecting the outlet end of the fourth arc tube 161 and the feed port of the reactor 16, and a control panel 163 provided on the side of the reactor 16.

[0030] It should be noted that the first inclined tube 131 has a lower end for liquid inlet and a higher end for liquid outlet. This design ensures that the first inclined tube 131 is always filled with liquid, avoiding flow errors caused by insufficient liquid filling. The outer diameter of the auger rod 132 is in close contact with the inner diameter of the first inclined tube 131, so that it can push out the liquid when it rotates. The second inclined tube 142 also has a lower end for material outlet, preventing chemicals from entering the pump 152 and causing damage. When batching, the principle is followed that the earlier the chemical is discharged, the closer it is to the discharge end of the second inclined tube 142. In this way, the next chemical discharged can carry out the residual liquid of the chemical discharged earlier from the second inclined tube 142, reducing quality loss.

[0031] Furthermore, when it is necessary to start batching, the quantifying component 13 near the discharge end of the second inclined tube 142 starts the servo motor 133 thereon, driving the auger rod 132 inside the first inclined tube 131 to rotate;

[0032] Furthermore, the auger rod 132 rotates continuously to bring out the chemical agent in the sealed tank 121, and during this process, the check valve 122 prevents the chemical agent from flowing back;

[0033] Furthermore, the chemical carried out by the auger rod 132 enters the second inclined tube 142 through the first arc tube 141 and flows toward the lower end of the second inclined tube 142 under the action of gravity.

[0034] Furthermore, the second solenoid valve 162 is opened, and the chemical flows into the reactor 16 through the fourth arc tube 161. The temperature, stirring speed and other functions in the reactor 16 are controlled by the control panel 163 to prepare the photoresist diluent;

[0035] Furthermore, the servo motors 133 are started in sequence from near to far, ensuring that the servo motor 133 farthest from the reactor 16 stops last, and the chemicals in the sealed tanks 121 are introduced into the reactor 16 according to the formulated dosage.

[0036] Please refer to the attached Figure 1 、 2 As shown in Figure 3, the cleaning component 15 includes a liquid storage tank 151 provided at one end of the top of the base 10, a pump 152 provided on one side of the liquid storage tank 151, a conducting tube 153 having one end connected to the bottom of the liquid storage tank 151 and the other end connected to the input end of the pump 152, a second arc tube 154 having one end connected to the output end of the pump 152 and the other end connected to the higher end of the second inclined tube 142, a third arc tube 155 provided at the lower end of the second inclined tube 142, and a first solenoid valve 156 provided at the outlet end of the third arc tube 155.

[0037] It should be noted that, due to the stickiness of some chemicals, the chemicals remaining in the second inclined tube 142 will continuously affect the mass percentage of the next mixing step. Therefore, in this embodiment, an additional cleaning component 15 is provided to clean the common second inclined tube 142 after each mixing step. Since the first inclined tube 131 and the first curved tube 141 are dedicated channels for each chemical, frequent cleaning is not required.

[0038] Furthermore, when one dispensing process is completed, the second solenoid valve 162 is closed, and then the first solenoid valve 156 is opened;

[0039] Furthermore, the pump 152 is started to pump out the cleaning liquid in the liquid storage tank 151 through the conducting pipe 153, and then pumps the cleaning liquid into the second inclined pipe 142 through the second arc-shaped pipe 154;

[0040] Furthermore, the cleaning liquid passes through the second inclined pipe 142, flows out of the first electromagnetic valve 156 through the third arc pipe 155, and is collected and processed by external receiving equipment.

[0041] The working principle of this utility model is:

[0042] First, before preparing the photoresist diluent, according to the raw material chemicals to be used, a sealed tank 121 of suitable material is selected, which is installed on the mounting frame 11 through the annular frame 112, and the check valve 122 at the bottom of the sealed tank 121 is connected to the first inclined tube 131 through a flange installation, and the raw material chemicals are respectively added to each sealed tank 121, and the insulation function of the sealed tank 121 is started to keep the raw material chemicals warm; when it is necessary to start dispensing, the quantification component 13 near the discharge end of the second inclined tube 142 starts the servo motor 133 thereon, drives the auger rod 132 inside the first inclined tube 131 to rotate, and the auger rod 132 rotates continuously to bring out the chemicals in the sealed tank 121. During this process, the check valve 122 prevents the chemicals from flowing back, and the chemicals brought out by the auger rod 132 enter the second inclined tube 142 through the first arc tube 141, and are discharged to the second inclined tube 142 under the action of gravity. Chemicals flow from the lower end of the second inclined tube 142, the second solenoid valve 162 is opened, and the chemicals flow into the reactor 16 through the fourth curved tube 161. The temperature, stirring speed, and other functions in the reactor 16 are controlled by the control panel 163 to prepare the photoresist diluent. The servo motors 133 are started in sequence from near to far, ensuring that the servo motor 133 farthest from the reactor 16 stops last. The chemicals in the sealed tanks 121 are introduced into the reactor 16 according to the prescribed dosage. When a preparation process is completed, the second solenoid valve 162 is closed, and the first solenoid valve 156 is opened. The pump 152 is started, and the cleaning liquid in the liquid storage tank 151 is pumped out through the conducting tube 153. The cleaning liquid is then pumped into the second inclined tube 142 through the second curved tube 154. The cleaning liquid flows through the second inclined tube 142, flows out of the first solenoid valve 156 through the third curved tube 155, and is collected and treated by external receiving equipment.

[0043] The above embodiments are only for illustrating the technical idea of the present invention and cannot be used to limit the protection scope of the present invention. Any changes made on the basis of the technical solution in accordance with the technical idea proposed by the present invention shall fall within the protection scope of the present invention.

Claims

1. A dosing device for producing a photoresist diluent, comprising a base (10), characterized in that: A mounting frame (11) is provided on one side of the top of the base (10); a batching tank group (12) is provided on the top of the mounting frame (11); a plurality of quantification components (13) are provided at the bottom of the batching tank group (12); a connecting component (14) is provided at the output end of the plurality of quantification components (13); a cleaning component (15) is provided at one end of the connecting component (14); and a reaction kettle (16) is provided at the other end of the connecting component (14).

2. A dosing device for producing photoresist diluent according to claim 1, characterized in that: The mounting frame (11) is a double-layer structure, comprising a plurality of oblique mounting plates (111) arranged above the bottom layer and an annular frame (112) arranged on the top layer.

3. A dosing device for producing photoresist diluent according to claim 2, characterized in that: The ingredient tank group (12) comprises a sealed tank (121) arranged inside the annular frame (112) and a check valve (122) arranged at the bottom of the sealed tank (121).

4. A dosing device for producing photoresist diluent according to claim 3, characterized in that: The quantifying component (13) comprises a first inclined tube (131) arranged on the top of the inclined mounting plate (111) and having one end connected to the discharge end of the check valve (122), an auger rod (132) arranged inside the first inclined tube (131), and a servo motor (133) arranged at one end of the first inclined tube (131) and having an execution end connected to the central axis of the auger rod (132).

5. A dosing device for producing photoresist diluent according to claim 1, characterized in that: The connecting component (14) comprises a first arc-shaped tube (141) provided at the discharge end of the quantifying component (13), and a second inclined tube (142) obliquely connected to all the first arc-shaped tubes (141).

6. A dosing device for producing photoresist diluent according to claim 5, characterized in that: The cleaning component (15) comprises a liquid storage tank (151) arranged at one end of the top of the base (10), a pump (152) arranged at one side of the liquid storage tank (151), a conducting tube (153) having one end connected to the bottom of the liquid storage tank (151) and the other end connected to the input end of the pump (152), a second arc tube (154) having one end connected to the output end of the pump (152) and the other end connected to the higher end of the second inclined tube (142), a third arc tube (155) arranged at the lower end of the second inclined tube (142), and a first solenoid valve (156) arranged at the outlet end of the third arc tube (155).

7. A dosing device for producing photoresist diluent according to claim 5, characterized in that: The reactor (16) includes a fourth arc-shaped tube (161) arranged at the lower end of the second inclined tube (142), a second solenoid valve (162) connecting the outlet end of the fourth arc-shaped tube (161) and the feed inlet of the reactor (16), and a control panel (163) arranged on the side of the reactor (16).

Images