Chip grinding and cleaning device
By introducing a precipitation filter plate and filter mesh into the chip grinding device, the problem of chip loss due to manual grinding instability during the grinding process is solved, and the chip safety and cost savings are achieved.
Patent Information
- Application Number
- CN202422017447.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-20
- Publication Date
- 2025-08-19
- Estimated Expiration
- 2034-08-20
AI Technical Summary
During the chip grinding process, the chip is easily washed away by water flow due to unstable manual grinding, resulting in sample loss and increasing losses to enterprises and customers.
A chip grinding and cleaning device is designed, including a base, a grinding disc, a precipitation filter plate and a filter screen. The precipitation filter plate is arranged on the grinding disc, and the second drain hole is arranged in communication with the first drain hole. The falling chip is intercepted by the precipitation filter plate, and the chip is further protected by the filter screen.
Effectively avoid chip loss during grinding, improve chip safety, save costs, and ensure the safety and efficiency of chip grinding.
Smart Images
Figure CN223236003U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of chip grinding and cleaning, in particular to a chip grinding and cleaning device. Background Art
[0002] Semiconductor integrated circuit chips represent the rapid development of modern electronics and microelectronics, and are a vital component and hallmark of modern scientific and technological progress. With the advancement of semiconductor integrated circuit chip technology, the chip manufacturing process node size has become increasingly smaller, reaching 5nm to 7nm. With this rapid advancement in chip technology, failure analysis is crucial, directly impacting the progress of chip design and development, as well as the quality and yield of wafer manufacturing and modern packaging.
[0003] In semiconductor integrated circuit chip failure analysis, grinding and polishing techniques are often used for sample preparation. Manual grinding is often employed during chip grinding and sample preparation. Engineers use their fingers to hold the chip against sandpaper while grinding. This method is simple, fast, and efficient. However, during the grinding process, the chip can be held loose, causing it to easily fall off the grinding wheel under the impact of the water flow and then drain through the grinding wheel's drainage system. This can result in serious sample loss, especially if the chip sample is a unique product for the customer (with no backup sample). This can lead to significant compensation costs for the company, resulting in irreparable losses for both the company and the customer, and increased costs.
[0004] Therefore, it is urgent to design a chip grinding and cleaning device to solve the above technical problems. Utility Model Content
[0005] The purpose of the utility model is to provide a chip grinding and cleaning device to solve the problem of chip loss during the grinding process in the prior art, improve the safety of the chip during the grinding process, and save costs.
[0006] To achieve this purpose, the present invention adopts the following technical solutions:
[0007] The utility model provides a chip grinding and cleaning device, comprising:
[0008] A base is provided with a water tank,
[0009] a grinding disc, the grinding disc being disposed in the water tank and configured to grind chips;
[0010] a first drainage hole, the first drainage hole being arranged at the bottom of the water tank;
[0011] A sedimentation filter disc is sleeved on the grinding disc, and a gap is provided between the outer wall of the sedimentation filter disc and the inner wall of the water tank; a second drainage hole is provided on the sedimentation filter disc, and the second drainage hole is connected to the first drainage hole through the gap; and the second drainage hole is provided on the side wall of the sedimentation filter disc.
[0012] As an optional technical solution for a chip grinding and cleaning device, the sedimentation filter disk has a top edge and a bottom wall, and the top edge is connected to the bottom wall through the side wall of the sedimentation filter disk; the distance between the second drainage hole and the top edge is set to M, and the distance between the second drainage hole and the bottom wall is set to N, and the ratio of M / N is set between 1.5 and 3.0.
[0013] As an optional technical solution for a chip grinding and cleaning device, the bottom wall is provided with a mounting hole, and the grinding disc is connected to the sedimentation filter disc through the mounting hole.
[0014] As an optional technical solution for a chip grinding and cleaning device, the grinding disc includes a turntable and a connecting shaft, one end of the connecting shaft is fixedly connected to the bottom of the water tank, and the other end is rotatably connected to the turntable so that the turntable can rotate relative to the connecting shaft.
[0015] As an optional technical solution for a chip grinding and cleaning device, the other end of the connecting shaft is detachably connected to the turntable.
[0016] As an optional technical solution for a chip grinding and cleaning device, the mounting hole is sleeved on the connecting shaft, and a limiting portion is provided on the connecting shaft, and the limiting portion is supported on the bottom wall of the sedimentation filter disk.
[0017] As an optional technical solution for a chip grinding and cleaning device, the top edge of the sedimentation filter disc protrudes from the grinding surface of the turntable.
[0018] As an optional technical solution for a chip grinding and cleaning device, the chip grinding and cleaning device further includes a filter screen, which is inserted into the first drainage hole; the filter screen has a filter hole, and the size of the filter hole is smaller than the size of the chip.
[0019] As an optional technical solution for a chip grinding and cleaning device, the first drainage hole and the filter screen are both provided in plurality, and the first drainage hole and the filter screen are provided in a one-to-one correspondence, and the plurality of filter screens are integrally formed.
[0020] As an optional technical solution for a chip grinding and cleaning device, the sedimentation filter disc is a chrome-coated metal part, and the filter screen is a stainless steel part.
[0021] The beneficial effects of the present invention include at least:
[0022] The utility model provides a chip grinding and cleaning device, comprising a base, a grinding disc, a first drain hole, and a sedimentation filter disc. A water tank is provided on the base. The grinding disc is disposed within the water tank and is configured to grind chips. The first drain hole is provided at the bottom of the water tank. The sedimentation filter disc is sleeved onto the grinding disc, with a gap provided between the outer wall of the sedimentation filter disc and the inner wall of the water tank. A second drain hole is provided on the sedimentation filter disc, the second drain hole being connected to the first drain hole via the gap. The second drain hole is provided on the side wall of the sedimentation filter disc.
[0023] As described above, when the staff is grinding the chip on the grinding disk, if the chip is washed away by the water flow and falls outside the grinding disk due to the staff's mistake, the sedimentation filter disk is set at this time, and the sedimentation filter disk is set on the grinding disk, so that the sedimentation filter disk can intercept the chip, thereby preventing the chip from being directly washed into the water tank by the water flow, solving the problem of chip loss during the grinding process, improving the safety of the chip, avoiding losses to both the company and the customer, and achieving the purpose of cost saving. BRIEF DESCRIPTION OF THE DRAWINGS
[0024] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the description of the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without paying any creative work.
[0025] Figure 1 This is a schematic structural diagram of a chip polishing and cleaning device provided by an embodiment of the present utility model;
[0026] Figure 2 This is a schematic diagram of the assembly of the sediment filter disc, the grinding disc, and the water tank provided in an embodiment of the present utility model;
[0027] Figure 3 This is a schematic structural diagram of a sedimentation filter disc provided by an embodiment of the present utility model;
[0028] Figure 4 It is a structural schematic diagram of the filter screen provided by an embodiment of the present utility model.
[0029] Reference numerals
[0030] 100, base; 110, water spray assembly; 120, water flow control knob; 130, start switch; 140, speed control knob; 150, water flow switch; 160, emergency stop switch;
[0031] 200, water tank; 210, first drain hole;
[0032] 300, grinding disc; 310, rotating disc; 320, connecting shaft;
[0033] 400, sedimentation filter plate; 410, top edge; 420, bottom wall; 430, second drainage hole; 440, mounting hole;
[0034] 500, gap;
[0035] 600, filter screen; 610, filter hole. DETAILED DESCRIPTION
[0036] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.
[0037] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.
[0038] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.
[0039] In the description of the present utility model, it should be noted that the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the utility model product is usually placed when in use. They are only for the convenience of describing the utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, the terms "first", "second", "third", etc. are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In the description of the present utility model, unless otherwise specified, "multiple" means two or more.
[0040] It should also be noted that, in the description of this utility model, unless otherwise specified or limited, the terms "disposed" and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.
[0041] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.
[0042] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.
[0043] This embodiment provides a chip grinding and cleaning device to solve the problem of chip loss during the grinding process in the prior art, improve the safety of the chip during the grinding process, and save costs.
[0044] like Figure 1-Figure 4 As shown, the chip grinding and cleaning device mainly includes a base 100, a grinding disc 300, a first drain hole 210 and a sedimentation filter disc 400. Among them, a water tank 200 is provided on the base 100. The grinding disc 300 is arranged in the water tank 200, and the grinding disc 300 is configured to grind the chip (not shown in the figure). The first drain hole 210 is set at the bottom of the water tank 200. The sedimentation filter disc 400 is sleeved on the grinding disc 300, and a gap 500 is provided between the outer wall of the sedimentation filter disc 400 and the inner wall of the water tank 200; a second drain hole 430 is opened on the sedimentation filter disc 400, and the second drain hole 430 is connected to the first drain hole 210 through the gap 500; and the second drain hole 430 is provided on the side wall of the sedimentation filter disc 400.
[0045] Based on the above design, when the staff is grinding the chip on the grinding disc 300, if the chip is washed away by the water flow and falls outside the grinding disc 300 due to the staff's mistake, the sedimentation filter disc 400 is set, and the sedimentation filter disc 400 is set on the grinding disc 300, so that the sedimentation filter disc 400 can intercept the chip, thereby preventing the chip from being directly washed into the water tank 200 by the water flow, solving the problem of chip loss during the grinding process, improving the safety of the chip, avoiding losses to both the company and the customer, and achieving the purpose of cost saving.
[0046] By setting the first drainage hole 210 and the second drainage hole 430, the water flow for grinding the chip can flow through the second drainage hole 430 in the sedimentation filter plate 400 through the gap 500 and finally be discharged from the first drainage hole 210, thereby avoiding the phenomenon of water overflowing due to long-term accumulation in the sedimentation filter plate 400, thereby improving the working efficiency and safety of chip grinding.
[0047] Furthermore, the sedimentation filter disc 400 in this embodiment has a top edge 410 and a bottom wall 420, and the top edge 410 is connected to the bottom wall 420 through the side wall of the sedimentation filter disc 400; the distance between the second drainage hole 430 and the top edge 410 is set to M, the distance between the second drainage hole 430 and the bottom wall 420 is set to N, and the ratio of M / N is set to between 1.5 and 3.0. This can avoid the risk of the second drainage hole 430 being too close to the bottom wall 420, causing the chip to be directly washed out of the sedimentation filter disc 400 by the water flow, and can also avoid the second drainage hole 430 being too high, which affects the drainage effect. In other words, in this embodiment, the ratio of M / N is set to between 1.5 and 3.0. This can ensure that the chip is intercepted by the sedimentation filter disc 400, while also improving the drainage efficiency as much as possible, thereby preventing water from overflowing.
[0048] For example, the ratio of M / N in this embodiment can be set to 1.5, 2.0, 2.5, 3.0, and so on.
[0049] In some embodiments, a multi-mesh filter can be provided in the second drainage hole 430 , thereby improving the security of chip interception and saving costs without affecting the water flow efficiency.
[0050] like Figure 2-Figure 3 As shown, in this embodiment, the bottom wall 420 is provided with a mounting hole 440, and the grinding disc 300 is connected to the sedimentation filter disc 400 through the mounting hole 440, thereby realizing a detachable connection between the grinding disc 300 and the sedimentation filter disc 400, which is convenient for the subsequent maintenance, cleaning and replacement of the sedimentation filter disc 400.
[0051] Furthermore, the grinding disc 300 in this embodiment includes a rotating disc 310 and a connecting shaft 320. One end of the connecting shaft 320 is fixedly connected to the bottom of the water tank 200, and the other end is rotatably connected to the rotating disc 310, so that the rotating disc 310 can rotate relative to the connecting shaft 320. The other end of the connecting shaft 320 is detachably connected to the rotating disc 310. When the sediment filter disc 400 needs to be attached, the operator can remove the rotating disc 310 from the connecting shaft 320, then fit the mounting hole 440 of the sediment filter disc 400 onto the connecting shaft 320, and finally install the rotating disc 310 onto the connecting shaft 320. This is convenient and efficient.
[0052] It is understandable that the driving assembly for driving the turntable 310 to rotate is not shown in this embodiment, and the technical solution of the driving assembly driving the turntable 310 to rotate to achieve chip grinding belongs to the existing technology. Therefore, this embodiment will not elaborate on this.
[0053] Furthermore, the mounting hole 440 in this embodiment is sleeved on the connecting shaft 320, and a limiting portion (not shown) is provided on the connecting shaft 320, which is supported by the bottom wall 420 of the sedimentation filter tray 400. The provision of the limiting portion can improve the stability and reliability of the sedimentation filter tray 400 and prevent the sedimentation filter tray 400 from falling off.
[0054] In addition, in some embodiments, a card slot can be provided on the limiting portion, and the card slot on the limiting portion can be snap-connected with the hole wall of the mounting hole 440 of the sedimentation filter disk 400 to improve the stability and reliability of the connection between the connecting shaft 320 and the sedimentation filter disk 400.
[0055] like Figure 2 As shown, the top edge 410 of the sedimentation filter disc 400 in this embodiment protrudes from the grinding surface of the turntable 310. If a worker accidentally loses a ground chip, the chip will be thrown out by the centrifugal force of the high-speed rotating turntable 310. The top edge 410 of the sedimentation filter disc 400 protrudes from the grinding surface of the turntable 310, so that the thrown chip can be blocked by the sedimentation filter disc 400, preventing the chip from being thrown into the gap 500 between the sedimentation filter disc 400 and the water tank 200, thereby improving the safety of chip interception.
[0056] Illustratively, the sedimentation filter disc 400 in this embodiment may be configured to be bowl-shaped.
[0057] For example, the top edge 410 of the sedimentation filter plate 400 in this embodiment is circular, and the diameter of the top edge 410 can be set to between 28cm and 35cm. The top of the water tank 200 can also be set to be circular, and the top diameter of the water tank 200 can be set to between 30cm and 40cm.
[0058] like Figure 1 and Figure 4 As shown, in this embodiment, the chip polishing and cleaning device further includes a filter 600, which is inserted into the first drain hole 210. The filter 600 has a filter hole 610 that is smaller than the chip. With the filter 600, if the chip is washed away by water through the second drain hole 430, the filter 600 can serve as a second protective barrier to intercept the chip, further improving chip safety and saving costs.
[0059] It should be noted that before grinding, polishing and cleaning the chip, it is necessary to confirm that the filter 600 is clean and empty. In this way, during the subsequent manual grinding and chip sample preparation process, if a chip is accidentally washed into the gap 500 by water, the filter 600 will act as a second protective barrier to intercept the chip. At this time, it can be directly confirmed that the intercepted chip is the chip that the staff accidentally dropped and not other samples, thereby improving work efficiency and ensuring absolute safety during the chip grinding process.
[0060] Optionally, in this embodiment, multiple first drain holes 210 and filter screens 600 are provided, with each first drain hole 210 corresponding to each filter screen 600. Multiple filter screens 600 are integrally formed. This improves water flow efficiency, prevents water from overflowing in the sink 200, and enhances safety. It also improves efficiency when removing and placing the filter screen 600, enabling a single insertion and removal of the filter screen 600. This avoids the phenomenon of chips falling outside the filter screen 600 due to multiple removals, thereby enhancing chip safety.
[0061] Optionally, each filter screen 600 in this embodiment can be configured to be in an inverted cone shape, and the maximum inner diameter of each filter screen 600 is configured to be between 1 cm and 2 cm.
[0062] It is understood that the selection of the second drainage hole 430 of the sediment filter disc 400 and the selection of the pore size of the filter hole 610 of the filter screen 600 are both very important. They can be designed based on the size of the chips to be ground. In theory, the smaller the pore size, the better, but too small a pore size will affect the smooth flow of water.
[0063] This embodiment can be designed according to the size of most grinding chips. Multiple sedimentation filter plates 400 with different pore sizes of the second drainage holes 430 can be designed, and multiple filter nets 600 with different pore sizes of the filter holes 610 can be designed to provide flexible use when grinding different chips.
[0064] Illustratively, the sedimentation filter disc 400 in this embodiment is a chrome-coated metal part, and the filter screen 600 is a stainless steel part.
[0065] Specifically, in the process of manually grinding the chip, chemicals (aluminum oxide, silicon oxide, diamond) are used to assist in the polishing process. Aluminum oxide is an amphoteric oxide, and silicon oxide is an acidic oxide. Therefore, the material requirements for the sedimentation filter disc 400 and the filter screen 600 are relatively high, and they need to be corrosion-resistant and wear-resistant. Stainless steel is a common corrosion-resistant and wear-resistant material, and it is low in cost and easy to obtain. Therefore, the sedimentation filter disc 400 and the filter screen 600 in this embodiment are both made of stainless steel, and the sedimentation filter disc 400 is coated with chromium metal to further improve corrosion resistance. This extends the service life of the sedimentation filter disc 400 and the filter screen 600, reduces the frequency of replacement, and saves costs.
[0066] Of course, the operator can also select other corrosion-resistant and wear-resistant metals to manufacture the sedimentation filter disc 400 and the filter screen 600 according to actual needs, which will not be described here one by one.
[0067] like Figure 1 As shown, in this embodiment, a water spray assembly 110 and a water flow control knob 120 are provided on the base 100 for spraying water on the grinding disc 300 to clean the chip. The water flow control knob 120 is used to control the water flow, thereby improving the flexibility and applicability of the chip grinding and cleaning device.
[0068] The base 100 is also equipped with a start switch 130, a speed knob 140, and a water flow switch 150. The start switch 130 is used to control the start and stop of the chip polishing and cleaning device, the speed knob 140 is used to control the rotation speed of the turntable 310, and the water flow switch 150 is used to control the water flow in the water spray assembly 110. The base 100 is also equipped with an emergency stop switch 160. In the event of an emergency, the operator can press the emergency stop switch 160 to cut off the water flow and stop the turntable 310.
[0069] Obviously, the above are only preferred embodiments of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments, and substitutions are possible for those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments and may include many other equivalent embodiments without departing from the scope of the present invention. The scope of the present invention is determined by the scope of the appended claims.
[0070] Note that throughout this specification, references to terms such as "some embodiments" and "other embodiments" indicate that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. Throughout this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Claims
1. Chip grinding and cleaning device, characterized in that, include: A base (100) is provided with a water tank (200), a grinding disc (300), the grinding disc (300) being disposed in the water tank (200), and the grinding disc (300) being configured to grind chips; a first drainage hole (210), the first drainage hole (210) being provided at the bottom of the water tank (200); A sedimentation filter disc (400) is sleeved on the grinding disc (300), and a gap (500) is provided between the outer wall of the sedimentation filter disc (400) and the inner wall of the water tank (200); a second drainage hole (430) is provided on the sedimentation filter disc (400), and the second drainage hole (430) is connected to the first drainage hole (210) through the gap (500); and the second drainage hole (430) is provided on the side wall of the sedimentation filter disc (400).
2. The chip polishing and cleaning device according to claim 1, characterized in that: The sedimentation filter disc (400) has a top edge (410) and a bottom wall (420), wherein the top edge (410) is connected to the bottom wall (420) through the side wall of the sedimentation filter disc (400); the distance between the second drainage hole (430) and the top edge (410) is set to M, the distance between the second drainage hole (430) and the bottom wall (420) is set to N, and the ratio of M / N is set to between 1.5 and 3.
0.
3. The chip polishing and cleaning device according to claim 2, characterized in that: The bottom wall (420) is provided with a mounting hole (440), and the grinding disc (300) is connected to the sediment filter disc (400) through the mounting hole (440).
4. The chip polishing and cleaning device according to claim 3, characterized in that: The grinding disc (300) comprises a rotating disc (310) and a connecting shaft (320), wherein one end of the connecting shaft (320) is fixedly connected to the bottom of the water tank (200), and the other end is rotatably connected to the rotating disc (310), so that the rotating disc (310) can rotate relative to the connecting shaft (320).
5. The chip polishing and cleaning device according to claim 4, characterized in that: The other end of the connecting shaft (320) is detachably connected to the rotating disk (310).
6. The chip polishing and cleaning device according to claim 5, characterized in that: The mounting hole (440) is sleeved on the connecting shaft (320), and a limiting portion is provided on the connecting shaft (320), and the limiting portion is supported on the bottom wall (420) of the sedimentation filter disc (400).
7. The chip polishing and cleaning device according to claim 4, characterized in that: The top edge (410) of the sediment filter disc (400) protrudes from the grinding surface of the rotating disc (310).
8. The chip polishing and cleaning device according to claim 1, characterized in that: The chip grinding and cleaning device further comprises a filter screen (600), wherein the filter screen (600) is inserted into the first drainage hole (210); the filter screen (600) has a filter hole (610), and the size of the filter hole (610) is smaller than the size of the chip.
9. The chip polishing and cleaning device according to claim 8, characterized in that: The first drainage hole (210) and the filter screen (600) are both provided in plurality, and the first drainage hole (210) and the filter screen (600) are provided in a one-to-one correspondence, and the plurality of filter screens (600) are integrally formed.
10. The chip polishing and cleaning device according to claim 8, characterized in that: The sediment filter disc (400) is a chrome-coated metal part, and the filter screen (600) is a stainless steel part.