Elevated transport vehicle

Abstract

The utility model provides an overhead transport vehicle which comprises a hoisting device, a walking driving device, a damping device, a sensing device and a control device, the walking driving device is configured to be capable of moving along a track, and the damping device is connected between the hoisting device and the walking driving device and comprises a plurality of magnetorheological fluid dampers distributed in a plane shape; the sensing device detects the vibration of the hoisting device, and the control device controls the damping force of the magnetorheological fluid damper based on the vibration detected by the sensing device, so that the hoisting device is damped. In the process that the elevated transport vehicle moves along the track to carry the wafer box, the magnetorheological fluid damper can achieve damping on the hoisting device in multiple directions, so that the elevated transport vehicle can stably carry the wafer box, damage to wafers due to vibration is avoided, the product yield is increased, and meanwhile the service life of the elevated transport vehicle is prolonged.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to an overhead transport vehicle. Background Art

[0002] The Automated Material Handling System (AMHS) for semiconductor integrated circuits consists of an overhead hoist transport (OHT) that travels along tracks on the mounting surface and an overhead buffer (OHB). The OHB is a storage shed used to store front opening unified pods (FOUPs), while the AMHS transports the FOUPs to their destination, which includes the OHB and process equipment.

[0003] In the related art, when an overhead transport vehicle moves along a track to transport a FOUP to a destination site, the overhead transport vehicle is prone to vibration, which in turn causes the FOUP to shake, thereby causing damage to the wafer and reducing product yield.

[0004] In view of the existence of the above technical problems, the present application provides a new elevated transport vehicle to at least partially solve the above problems. Utility Model Content

[0005] The Summary of the Utility Model introduces a series of simplified concepts that will be further described in the Detailed Description of the Implementation Method. The Summary of the Utility Model of this application is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0006] In response to the current problems, this application provides an elevated transport vehicle, comprising:

[0007] a lifting device configured to hold the material;

[0008] A travel drive device configured to move along the track;

[0009] a shock absorbing device connected between the lifting device and the travel drive device;

[0010] a sensing device for detecting vibration of the lifting device;

[0011] A control device, the sensing device and the shock absorbing device are both connected to the control device; wherein

[0012] The shock absorbing device includes a plurality of magnetorheological fluid dampers, and the control device is capable of controlling the damping force of the magnetorheological fluid dampers based on the vibration detected by the sensing device to reduce the vibration of the lifting device;

[0013] The plurality of magnetorheological fluid dampers are distributed in a planar shape on a projection surface between the hoisting device and the travel drive device.

[0014] In some embodiments of the present application, the magnetorheological fluid damper includes:

[0015] The cavity comprises a first chamber filled with magnetorheological fluid;

[0016] a first piston configured to reciprocate within the first chamber;

[0017] a piston rod, wherein a first end of the piston rod is located in the first chamber and connected to the first piston, and a second end of the piston rod is located outside the first chamber and connected to the travel drive device;

[0018] a coil, configured to generate a magnetic field when energized, wherein the magnetic field can act on the magnetorheological fluid, wherein controlling the damping force of the magnetorheological fluid damper comprises controlling the current flowing through the coil;

[0019] The first piston is provided with a through hole, and the through hole communicates with the space of the first chamber located on both sides of the first piston.

[0020] In some embodiments of the present application, the magnetorheological fluid damper further includes:

[0021] a second piston configured to reciprocate within the cavity;

[0022] The cavity is divided into a first chamber and a second chamber by the second piston, and the second chamber is filled with gas.

[0023] In some embodiments of the present application, the gas includes nitrogen or an inert gas.

[0024] In some embodiments of the present application, the shock absorbing device further includes a resetter, which is configured to move the first piston away from both ends of the first chamber.

[0025] In some embodiments of the present application, the resetter includes a spring, one end of the spring is connected to the cavity, and the other end of the spring is connected to the second end of the piston rod.

[0026] In some embodiments of the present application, the lifting device includes a housing and a clamping unit, and the clamping unit is used to clamp the material;

[0027] One end of the cavity away from the piston rod is connected to the housing.

[0028] In some embodiments of the present application, the lifting device includes a housing and a clamping unit, and the clamping unit is used to clamp the material;

[0029] The sensor device is arranged on the shell.

[0030] In some embodiments of the present application, the sensing device includes at least one of a displacement sensor, a velocity sensor, and an acceleration sensor.

[0031] In some embodiments of the present application, the travel drive device includes a base, and a wheel assembly connected to the base;

[0032] The second end of the piston rod is connected to the base.

[0033] According to the overhead transport vehicle of the embodiment of the present application, the lifting device and the travel drive device are connected by a magnetorheological fluid damper. When the overhead transport vehicle moves along the track to transport materials, the magnetorheological fluid damper can achieve shock absorption in multiple directions for the lifting device, so that the overhead transport vehicle can transport materials smoothly, avoid damage to the materials due to vibration, improve product yield, and at the same time increase the service life of the overhead transport vehicle. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] The following drawings of the present application are used as part of the present application for understanding the present application. The drawings show embodiments of the present application and their descriptions, which are used to explain the principle of the present application.

[0035] Figure 1 A schematic structural diagram of an elevated transport vehicle according to an embodiment of the present application is shown.

[0036] Figure 2 A partially enlarged view of an elevated transport vehicle according to an embodiment of the present application is shown.

[0037] Figure 3 A partially enlarged view of an elevated transport vehicle according to an embodiment of the present application is shown.

[0038] Figure 4 A schematic structural diagram of a magnetorheological fluid damper according to an embodiment of the present application is shown.

[0039] Figure 5 A cross-sectional view of a first piston according to an embodiment of the present application is shown.

[0040] In the attached figure:

[0041] 110 Magnetorheological fluid damper;

[0042] 111 cavity;

[0043] 1111 first chamber;

[0044] 1112 Second Chamber;

[0045] 112 first piston;

[0046] 113 piston rod;

[0047] 114 coil;

[0048] 115 through hole;

[0049] 116 second piston;

[0050] 117 wire;

[0051] 118 damper base;

[0052] 119 elastic member;

[0053] 120 tracks;

[0054] 131 lifting device;

[0055] 1311 housing;

[0056] 1312 clamping unit;

[0057] 132 Travel drive device;

[0058] 1321 base;

[0059] 1322 wheel assembly;

[0060] 133 pedestal;

[0061] 140 sensing device;

[0062] 150 control devices;

[0063] 200 materials. DETAILED DESCRIPTION

[0064] In the following description, a large number of specific details are provided to provide a more thorough understanding of the present application. However, it will be apparent to those skilled in the art that the present application can be implemented without one or more of these details. In other examples, some technical features well known in the art are not described in order to avoid confusion with the present application.

[0065] It should be understood that the present application can be implemented in various forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided to make the disclosure thorough and complete and to fully convey the scope of the present application to those skilled in the art. In the drawings, the dimensions and relative sizes of layers and regions may be exaggerated for clarity. Like reference numerals throughout represent like elements.

[0066] It should be understood that when an element or layer is referred to as being "on," "adjacent to," "connected to," or "coupled to" another element or layer, it may be directly on, adjacent to, connected to, or coupled to the other element or layer, or there may be intervening elements or layers. Conversely, when an element is referred to as being "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" another element or layer, there may be no intervening elements or layers. It should be understood that although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers, and / or parts, these elements, components, regions, layers, and / or parts should not be limited by these terms. These terms are merely used to distinguish one element, component, region, layer, or part from another element, component, region, layer, or part. Therefore, without departing from the teachings of the present application, the first element, component, region, layer, or part discussed below may be represented as a second element, component, region, layer, or part.

[0067] Spatially relative terms such as "under," "beneath," "below," "under," "above," "above," etc., may be used herein for convenience of description to describe the relationship of one element or feature shown in the figures to other elements or features. It should be understood that the spatially relative terms are intended to include different orientations of the device in use and operation in addition to the orientations shown in the figures. For example, if the device in the drawings is flipped, then the elements or features described as "under" or "beneath" or "beneath" the other elements will be oriented as "over" the other elements or features. Thus, the exemplary terms "under" and "under" may include both the upper and lower orientations. The device may be oriented otherwise (rotated 90 degrees or in other orientations) and the spatial descriptors used herein are interpreted accordingly.

[0068] The purpose of the terms used herein is only to describe specific embodiments and is not intended to limit the present application. When used herein, the singular forms "a", "an", and "the" are intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "comprising" and / or "including", when used in this specification, determine the presence of the features, integers, steps, operations, elements and / or parts, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, parts and / or groups. When used herein, the term "and / or" includes any and all combinations of the relevant listed items.

[0069] In the related art, when an overhead transport vehicle moves along a track to transport a FOUP to a destination, the overhead transport vehicle is prone to vibration, which in turn causes the FOUP to shake due to the following reasons:

[0070] When the overhead transport vehicle accelerates and stops, it is prone to vibration, which in turn causes the FOUP to shake.

[0071] When the overhead transport vehicle changes its direction, it is prone to vibration, which in turn causes the FOUP to shake.

[0072] The levelness of the track is also an important factor affecting the vibration of the overhead transport vehicle and thus causing the FOUP to shake.

[0073] On the one hand, the above-mentioned vibration will cause damage to the wafer and reduce the product yield. On the other hand, it will shorten the service life of the overhead transport vehicle and even erroneously trigger an abnormal alarm when the overhead transport vehicle is working normally.

[0074] In order to solve at least one of the above-mentioned technical problems, the present application provides an elevated transport vehicle, which includes: a lifting device, configured to clamp materials; a travel drive device, configured to move along a track; a shock absorbing device, connected between the lifting device and the travel drive device; a sensing device, used to detect the vibration of the lifting device; a control device, wherein the sensing device and the shock absorbing device are both connected to the control device; wherein the shock absorbing device includes a plurality of magnetorheological fluid dampers, and the control device can control the damping force of the magnetorheological fluid damper based on the vibration detected by the sensing device to reduce the vibration of the lifting device; the plurality of magnetorheological fluid dampers are distributed in a planar shape on the projection surface between the lifting device and the travel drive device.

[0075] According to the overhead transport vehicle of the present application, the lifting device and the travel drive device are connected by a magnetorheological fluid damper. When the overhead transport vehicle moves along the track to transport the FOUP, the magnetorheological fluid damper can achieve shock absorption in multiple directions for the lifting device, so that the overhead transport vehicle can transport the FOUP smoothly, avoid damage to the wafer due to vibration, improve product yield, and at the same time increase the service life of the overhead transport vehicle.

[0076] In order to thoroughly understand the present application, detailed steps and structures will be provided in the following description to illustrate the technical solution proposed by the present application. The preferred embodiments of the present application are described in detail below. However, in addition to these detailed descriptions, the present application may also have other implementation methods.

[0077] Reference below Figures 1 to 5 An overhead transport vehicle according to one embodiment of the present application is described. The overhead transport vehicle includes: a lifting device 131 configured to clamp materials; a travel drive device 132 configured to move along a track; a shock absorber connected between the lifting device 131 and the travel drive device 132; a sensor device 140 for detecting vibrations of the lifting device; and a control device 150, with both the sensor device and the shock absorber connected to the control device 150. The shock absorber includes a plurality of magnetorheological fluid dampers 110. The control device 150 is capable of controlling the damping force of the magnetorheological fluid dampers 110 based on vibrations detected by the sensor device 140 to reduce vibrations of the lifting device 131. The plurality of magnetorheological fluid dampers 110 are distributed in a planar pattern on a projection plane between the lifting device 131 and the travel drive device 132.

[0078] The travel drive device 132 can be mounted on and move along the track 120 . The hoisting device 131 can be suspended below the travel drive device 132 , thereby moving synchronously with the travel drive device 132 along the track 120 . The hoisting device 131 can hold a material 200, such as a FOUP, which can contain wafers. It is understood that the hoisting device 131 can move with or without holding the material 200, i.e., the overhead transport vehicle can move empty. The hoisting device 131 and the travel drive device 132 are connected via a shock-absorbing device, but this is not limited to this. Other connecting members may also be provided between the hoisting device 131 and the travel drive device 132 . The shock-absorbing device includes multiple magnetorheological fluid dampers 110, and the lifting device 131 can be connected to the travel drive device 132 through the magnetorheological fluid damper 110. For example, the magnetorheological fluid damper 110 is directly connected between the lifting device 131 and the travel drive device 132. The magnetorheological fluid damper 110 can act as a suspension, but the present application is not limited to this. The magnetorheological fluid damper 110 can be indirectly connected to the lifting device 131 or the travel drive device 132. When the overhead transport vehicle carries materials 200 or is traveling empty along the track 120, vibrations will be generated due to factors such as the acceleration and deceleration of travel, the horizontality of the track 120, and changes in travel direction. The magnetorheological fluid damper 110 can achieve shock absorption for the lifting device 131, so that the overhead transport vehicle can smoothly carry the materials 200 or the lifting device 131 is stable when the overhead transport vehicle is traveling empty. This can avoid damage to the materials 200 (for example, FOUP and wafers carried by the FOUP) clamped by the lifting device 131, thereby improving product yield, and can also avoid damage to the overhead transport vehicle itself due to vibration, thereby increasing the life of the overhead transport vehicle.

[0079] The control device 150 can be connected to the sensor device 140 and the magnetorheological fluid damper 110 through a cable (eg Figure 1 (as shown by the dashed line in the middle), but not limited to this, the control device 150 can be connected to the sensor device 140 via wireless communication. The sensor device 140 obtains vibration data generated by the hoisting device 131 during the movement of the overhead transport vehicle and feeds it back to the control device 150. The control device 150 analyzes and processes the vibration data and controls the current flowing through each magnetorheological fluid damper 110 based on the analysis and processing results. Therefore, the damping force generated by each magnetorheological fluid damper 110 can be adjusted based on the specific vibration conditions of the hoisting device 131. In this way, the multiple magnetorheological fluid dampers 110 can generate damping forces of different magnitudes according to the different degrees of vibration of the overhead transport vehicle, thereby achieving shock absorption for the hoisting device 131.

[0080] The sensing device 140 can detect the vibration of the hoisting device 131 in real time, and the damping force of the magnetorheological fluid damper 110 is continuously adjustable. When the hoisting device 131 vibrates, the control device 150 can instantly control the magnetorheological fluid damper 110 to generate a damping force appropriate to the vibration level based on the vibration data obtained in real time by the sensing device 140, thereby effectively reducing the vibration of the hoisting device 131. When the vibration of the hoisting device 131 slows down or disappears, the sensing device 140 will continue to detect and feed back the vibration data to the control device 150 in real time, and adjust the damping force generated by the magnetorheological fluid damper 110 based on the real-time vibration data.

[0081] The vibrations generated by the lifting device 131 can occur in multiple directions. When multiple MR fluid dampers 110 are distributed linearly, they can only reduce vibrations in the plane defined by the linear extension direction and the direction of the damping force of the MR fluid dampers 110. By distributing the multiple MR fluid dampers 110 planarly on the projection plane between the lifting device 131 and the travel drive device 132, the control device 150 can adjust the damping force generated by the multiple planarly distributed MR fluid dampers 110 based on vibration data, thereby reducing vibrations in any direction.

[0082] Based on this, the present application provides an overhead transport vehicle capable of reducing shock for a lifting device 131. According to the overhead transport vehicle of the present application, the lifting device 131 and the travel drive device 132 are connected via a magnetorheological fluid damper 110. As the overhead transport vehicle moves along the track 120 to transport the material 200, the magnetorheological fluid damper 110 can reduce shock for the lifting device 131 in multiple directions, allowing the overhead transport vehicle to smoothly transport the material 200, avoiding damage to the material 200, improving product yield, and increasing the life of the overhead transport vehicle.

[0083] In addition, in this embodiment, the vibration of the overhead transport vehicle in different directions can be reduced by reasonably configuring the number and distribution of the magnetorheological fluid dampers 110 to further improve the shock absorption effect. Among them, the distribution of the magnetorheological fluid dampers 110 can be set according to actual conditions. The multiple magnetorheological fluid dampers 110 can be set to be symmetrically distributed between the lifting device 131 and the travel drive device 132, or they can be set to be asymmetrically distributed, or they can be set to be uniformly distributed, or they can be set to be unevenly distributed, etc., and there is no limitation on this. Taking symmetrical distribution as an example, it can be set to be annular distribution (for example, single ring / multiple rings / plane distribution within an annular area), etc., and there is no limitation on this.

[0084] In some embodiments, the magnetorheological fluid damper 110 is a device that utilizes the properties of magnetorheological fluid to achieve damping control. By adjusting the intensity of the magnetic field, the viscosity of the magnetorheological fluid can be changed, thereby changing the damping force of the magnetorheological fluid damper 110. In this embodiment, by disposing the magnetorheological fluid damper 110 between the lifting device 131 and the travel drive device 132, the advantages include fast response speed (the magnetorheological fluid can respond to changes in the magnetic field in a very short time, thereby achieving rapid adjustment of the damping force), strong controllability (the magnetic field intensity can be precisely controlled by changing the current, thereby adjusting the damping force to meet the needs of different working conditions, and continuous adjustment can be achieved), and low energy consumption (energy is consumed only when the damping force needs to be adjusted, and is in a low energy consumption state at other times).

[0085] In some embodiments, the magnetorheological fluid damper 110 is generally composed of a piston, a cylinder, magnetorheological fluid, and an electromagnetic coil, and may have various structural forms. This embodiment does not limit the specific implementation form of the magnetorheological fluid damper 110.

[0086] For example, Figure 4 As shown, the magnetorheological fluid damper 110 includes: a cavity 111, including a first chamber 1111, the first chamber 1111 is filled with magnetorheological fluid; a first piston 112, configured to be able to reciprocate in the first chamber 111; a piston rod 113, the first end of the piston rod 113 is located in the cavity 111 and connected to the first piston 112, and the second end of the piston rod 113 is located outside the cavity 111 and connected to the travel drive device 131; a coil 114, used to generate a magnetic field when energized, the magnetic field can act on the magnetorheological fluid, and controlling the damping force of the magnetorheological fluid damper 110 includes controlling the current flowing through the coil 114; a through hole 115 is provided in the first piston 112, and the through hole 115 connects the first chamber 1111 and the space on both sides of the first piston 112.

[0087] When the overhead transport vehicle vibrates, the overhead transport vehicle drives the first piston 112 to slide in the cavity 111 through the piston rod 113. At this time, the magnetorheological fluid flows through the through hole 115 on the first piston 112. The coil 114 can be connected to an external power source through a wire 117 (such as Figure 4As shown, the wire 117 can be disposed in the piston rod 113. When the coil 114 is energized, the magnetic field generated by the coil 114 causes the viscosity of the magnetorheological fluid to change rapidly (for example, the viscosity can increase or decrease rapidly, which can be changed according to actual conditions and meet the shock absorption target), thereby generating a large damping force to hinder the movement of the first piston 112. The damping force generated offsets the vibration of the overhead transport vehicle, achieving a shock absorption effect on the overhead transport vehicle. The damping force of the magnetorheological fluid damper 110 can be continuously changed by continuously adjusting the current in the coil 114. It can be understood that the control device 150 controls the damping force of the magnetorheological fluid damper 110 based on the vibration detected by the sensor device 140, including the control device 150 controlling the current flowing through the coil 114 based on the vibration detected by the sensor device 140. For example, the coil 114 can be connected to an external power supply via the wire 117, and the control device 150 controls the current provided by the external power supply.

[0088] It should be noted that the number and distribution of the through holes 115 in the first piston 112 can be set according to actual conditions and are not limited thereto. When a plurality of through holes 115 are provided in the first piston 112, the plurality of through holes 115 can be arranged to be symmetrically distributed, asymmetrically distributed, uniformly distributed, or unevenly distributed, etc., and are not limited thereto. For example, the symmetrical distribution can include annular distribution (e.g., single ring / multiple rings / planar distribution within an annular area), etc., and are not limited thereto. Figure 5 , which is a schematic diagram showing that a plurality of through holes 115 are distributed in a ring shape around the axis of the first piston 112 .

[0089] In addition, the coil 114 can be set in the first piston 112 or not in the first piston 112, for example, it can be wound outside the first piston 112 or the first chamber 1111. The winding direction of the coil 114 in the magnetorheological fluid damper 110 can also be set according to actual conditions so that the coil 114 can generate the most appropriate magnetic field direction after being energized. The specific setting method of the coil 114 is not limited.

[0090] For example, Figure 4 As shown, the magnetorheological fluid damper 110 may further include a second piston 116 configured to reciprocate within the cavity 111. The cavity 111 is divided by the second piston 116 into a first chamber 1111 and a second chamber 1112. The magnetorheological fluid is filled in the first chamber 1111, and the second chamber 1112 is filled with gas. Because the magnetorheological fluid in the first chamber 1111 is incompressible, the second chamber 1112 is provided to prevent the first piston 112 from being unable to reciprocate.

[0091] The gas filled in the second chamber 1112 may be nitrogen or an inert gas, etc., which is not limited.

[0092] In some embodiments, the shock absorbing device further includes a restorer configured to move the first piston 112 away from both ends of the first chamber 1111 .

[0093] After the first piston 112 reaches either end of the first chamber 1111, it cannot move further, and the magnetorheological fluid damper cannot continue to absorb shock. Therefore, a resetter is provided to move the first piston 112 away from the ends of the first chamber 1111. For example, the resetter can provide a force in the same direction as the damping force to the first piston to prevent the first piston from reaching the ends of the first chamber 1111. Alternatively, the resetter can provide a force to the first piston 112 after it reaches either end of the first chamber 1111, causing it to move toward the middle of the first chamber 1111 to achieve reset.

[0094] In some embodiments, as Figure 2 As shown, the resetter includes a spring 119, one end of which is connected to the cavity 111, and the other end of the spring 119 is connected to the second end of the piston rod 113. When the overhead transport vehicle vibrates, the lifting device 131 and the travel drive device 132 squeeze or stretch the shock absorber. The spring 119 can provide a force in the same direction as the damping force to counteract the squeezing or pulling force generated by the vibration together with the damping force generated by the magnetorheological fluid, thereby preventing the first piston 112 from contacting the two ends of the first chamber 1111.

[0095] The second end of piston rod 113 can be directly or indirectly connected to travel drive 132. A spring 119 is sleeved on the second end of piston rod 113. When the second end of piston rod 113 is directly connected to travel drive 132, spring 119 is confined between travel drive 132 and cavity 111. When the overhead transport vehicle vibrates, driving piston rod 113, the compression or extension of spring 119 can also offset the vibration of the overhead transport vehicle.

[0096] In some embodiments, as Figure 1 As shown, the lifting device 131 includes a shell 1311 and a clamping unit 1312 , and the clamping unit 1312 is used to clamp the material 200 ; one end of the cavity 111 away from the piston rod 113 is directly or indirectly connected to the shell 1311 .

[0097] The housing 1311 surrounds a cavity, and the clamping unit 1312 can be located in the cavity. The clamping unit 1312 can be used to clamp the material 200.

[0098] In some embodiments, the material 200 may be a wafer box or any other suitable material, which is not limited.

[0099] like Figure 3 As shown, the housing 1311 may further include a damper base 118 for connecting to the magnetorheological fluid damper 110 . The damper base 118 is used to connect to an end of the cavity 111 away from the piston rod 113 . The connection may be a fixed connection or a detachable connection.

[0100] In some embodiments, as Figure 1 and Figure 3 As shown, the lifting device 131 includes a shell 1311 and a clamping unit 1312 , and the clamping unit 1312 is used to clamp materials; the sensing device 140 is located on the shell 1311 .

[0101] The sensor device 140 is disposed on the housing 1311 to detect vibrations generated by the lifting device 131. Thus, the damping force of the magnetorheological fluid damper 110 is controlled based on the vibrations detected by the sensor device 140, thereby reducing vibrations of the lifting device 131 and, in turn, reducing vibrations of the material 200 held by the lifting device 131.

[0102] Among them, the sensing device 140 can be one or more sensors such as a displacement sensor, a velocity sensor, an acceleration sensor, etc., and the control device 150 can be a single-chip microcomputer, a digital signal processor (DSP), a programmable logic controller, etc., without limitation.

[0103] In some embodiments, as Figure 1 and Figure 2 As shown, the travel drive device 132 includes a base 1321 and a wheel assembly 1322 connected to the base 1321 ; the second end of the piston rod 113 can be directly or indirectly connected to the base 1321 .

[0104] The wheel assembly 1322 of the travel drive device 132 can be set on the track 120 to drive the lifting device 131 to run along the track 120.

[0105] To sum up, according to the embodiment of the overhead transport vehicle of the present application, the lifting device and the walking drive device are connected by a magnetorheological fluid damper. In the process of the overhead transport vehicle moving along the track to transport materials, the magnetorheological fluid damper can achieve shock absorption in multiple directions for the lifting device, so that the overhead transport vehicle can transport materials smoothly, avoid damage to the materials due to vibration, improve product yield, and at the same time increase the life of the overhead transport vehicle.

[0106] Although example embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above example embodiments are merely illustrative and are not intended to limit the scope of the present application. Various changes and modifications may be made therein by those skilled in the art without departing from the scope and spirit of the present application. All such changes and modifications are intended to be included within the scope of the present application as required by the appended claims.

[0107] Similarly, it should be understood that in order to streamline the present application and aid in understanding one or more of the various application aspects, in the description of the exemplary embodiments of the present application, the various features of the present application are sometimes grouped together into a single embodiment, figure, or description thereof. However, this approach of the present application should not be interpreted as reflecting the intention that the claimed application requires more features than those explicitly recited in each claim. More precisely, as reflected in the corresponding claims, the point of the application is that the corresponding technical problem can be solved with fewer features than all the features of a single disclosed embodiment. Therefore, the claims following the detailed description are hereby expressly incorporated into the detailed description, with each claim itself serving as a separate embodiment of the present application.

[0108] Furthermore, those skilled in the art will appreciate that although some embodiments described herein include certain features included in other embodiments but not other features, combinations of features from different embodiments are intended to be within the scope of this application and to form different embodiments. For example, in the claims, any of the claimed embodiments may be used in any combination.

[0109] It should be noted that the above embodiments are illustrative rather than limiting of the present application, and that those skilled in the art may devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The use of the words first, second, and third, etc., does not denote any order. These words may be interpreted as designations.

Claims

1. An elevated transport vehicle, characterized in that: include: a lifting device configured to hold the material; A travel drive device configured to move along the track; a shock absorbing device connected between the lifting device and the travel drive device; a sensing device for detecting vibration of the lifting device; a control device, the sensing device and the shock absorbing device being connected to the control device; in The shock absorbing device includes a plurality of magnetorheological fluid dampers, and the control device is capable of controlling the damping force of the magnetorheological fluid dampers based on the vibration detected by the sensing device to reduce the vibration of the lifting device; The plurality of magnetorheological fluid dampers are distributed in a planar shape on a projection surface between the hoisting device and the travel drive device.

2. The overhead transport vehicle according to claim 1, wherein: The magnetorheological fluid damper comprises: The cavity comprises a first chamber filled with magnetorheological fluid; a first piston configured to reciprocate within the first chamber; a piston rod, wherein a first end of the piston rod is located in the first chamber and connected to the first piston, and a second end of the piston rod is located outside the first chamber and connected to the travel drive device; a coil, configured to generate a magnetic field when energized, wherein the magnetic field can act on the magnetorheological fluid, wherein controlling the damping force of the magnetorheological fluid damper comprises controlling the current flowing through the coil; The first piston is provided with a through hole, and the through hole communicates with the space of the first chamber located on both sides of the first piston.

3. The overhead transport vehicle according to claim 2, wherein: The magnetorheological fluid damper further comprises: a second piston configured to reciprocate within the cavity; The cavity is divided into a first chamber and a second chamber by the second piston, and the second chamber is filled with gas.

4. The overhead transport vehicle according to claim 3, wherein: The gas includes nitrogen or an inert gas.

5. The elevated transport vehicle according to claim 2, wherein: The shock absorbing device further includes a restorer configured to move the first piston away from both ends of the first chamber.

6. The overhead transport vehicle according to claim 5, wherein: The returner includes a spring, one end of the spring is connected to the cavity, and the other end of the spring is connected to the second end of the piston rod.

7. The overhead transport vehicle according to claim 2, wherein: The lifting device includes a housing and a clamping unit, wherein the clamping unit is used to clamp the material; One end of the cavity away from the piston rod is connected to the housing.

8. The overhead transport vehicle according to claim 1, wherein: The lifting device includes a housing and a clamping unit, wherein the clamping unit is used to clamp the material; The sensor device is arranged on the shell.

9. The overhead transport vehicle according to claim 1, wherein: The sensing device includes at least one of a displacement sensor, a velocity sensor and an acceleration sensor.

10. The overhead transport vehicle according to claim 2, wherein: The travel drive device includes a base and a wheel assembly connected to the base; The second end of the piston rod is connected to the base.

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