High-purity ball valve capable of blowing

Abstract

The utility model discloses a high-purity ball valve capable of being purged, and belongs to the technical field of valve bodies. The valve mainly comprises a valve body; the handle is mounted at the upper end of the exterior of the valve body; the ball core is mounted at the lower end in the valve body; the valve shaft is fixedly connected with the ball core; the flange covers are mounted at the two ends of the valve body; the pipeline is mounted at one end of the flange cover; the purging pipeline is mounted on the flange cover; and the plug is mounted at one end of the purging pipeline. According to the high-purity ball valve capable of being purged, by arranging the purging pipeline, the effect that after gas is replaced, residual gas in the pipeline is purged, harmful substances are prevented from being generated, and the product quality is not affected is achieved.

Description

Technical Field

[0001] The present application relates to the field of valve technology, and in particular to a purgable high-purity ball valve. Background Art

[0002] The ball valve is the most widely used valve. Its main working principle is to use manual, pneumatic or electric actuators to drive the valve core to rotate through the valve shaft to realize the opening and closing action of the valve. Its main function is to open and close the material medium in the pipeline and regulate the flow.

[0003] The electronic semiconductor industry has extremely high requirements for gas purity, as any impurities may have a serious impact on product quality. High-purity ball valves are specially treated to maintain gas cleanliness and purity under harsh conditions such as high pressure, high temperature, and high impurity content. The sealing surface of the ball valve is tightly closed to the spherical surface, which is not easily eroded by the medium. The valve also has excellent sealing performance, which can effectively prevent gas leakage and impurities from entering.

[0004] However, in the semiconductor manufacturing process, the type of gas needs to be frequently changed between different process steps. When the gas is changed, a certain amount of the previous gas will remain in the pipeline. These residual gases may react with the new gas to generate harmful substances, thereby affecting product quality.

[0005] Therefore, it is necessary to provide a high-purity ball valve that can be purged to solve the above problems.

[0006] It should be noted that the above information disclosed in this Background section is only for understanding the background technology of the present application concept, and therefore, it may contain information that does not constitute prior art. Summary of the Invention

[0007] Based on the above-mentioned problems existing in the prior art, the problem to be solved by this application is: to provide a purgable high-purity ball valve, which solves the problem that during the semiconductor manufacturing process, gas may remain in the pipeline when the gas is replaced, resulting in the generation of harmful substances, thereby affecting product quality.

[0008] The technical solution adopted by the present application to solve the technical problem is: a high-purity ball valve that can be purged, comprising:

[0009] Valve body;

[0010] a handle mounted on an upper end of the exterior of the valve body;

[0011] a ball core mounted on the lower end of the valve body;

[0012] a valve shaft, the valve shaft being fixedly connected to the ball core;

[0013] Flange covers, which are installed at both ends of the valve body;

[0014] a pipe mounted on one end of the flange cover;

[0015] a purge pipe, the purge pipe being mounted on the flange cover;

[0016] A plug is installed at one end of the purge pipe.

[0017] Furthermore, the interior of the upper end of the valve body is a vertical channel, the interior of the ball core is provided with a through hole, and ball pads are fixedly provided on both sides of the ball core.

[0018] Furthermore, the valve shaft passes through the upper end channel of the valve body and extends to the outside of the valve body, and one end of the handle is locked with the valve shaft extending to the outside of the valve body by a nut.

[0019] Furthermore, an anti-loosening gasket is fixedly provided at the connection between the valve shaft and the interior of the upper end of the valve body, an O-ring is fixedly provided at the position where the outer side of the valve shaft contacts the internal channel of the upper end of the valve body, and a center sealing ring and a disc-shaped spring washer are vertically provided on the outer side of the valve shaft along the internal channel of the upper end of the valve body.

[0020] Furthermore, a channel is provided on the flange cover, the channel is connected to the through hole on the ball core, and multiple groups of bolts are threadedly connected around the flange cover.

[0021] Furthermore, a sealing ring is fixedly provided at the connection between the flange cover and the valve body.

[0022] Furthermore, the purge pipe passes through the flange cover and extends to the interior of the pipe.

[0023] Furthermore, the back of the plug has a magnetic material, and a connecting rope is fixedly provided between the plug and the purge pipe.

[0024] The beneficial effect of the present application is that the present application provides a high-purity ball valve that can be purged, which, by setting up a purging pipeline, can purge the residual gas in the pipeline after the gas is replaced, thereby avoiding the generation of harmful substances and affecting product quality.

[0025] In addition to the above-described purposes, features and advantages, the present application also has other purposes, features and advantages. The present application will be further described in detail below with reference to the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] The drawings that constitute part of this application are used to provide a further understanding of this application. The illustrative embodiments of this application and their descriptions are used to explain this application and do not constitute an improper limitation on this application. In the drawings:

[0027] Figure 1This is an overall schematic diagram of a purgeable high-purity ball valve in this application;

[0028] Figure 2 This is an explosion diagram of a purgeable high-purity ball valve in this application;

[0029] Figure 3 for Figure 1 Schematic diagram of the control mechanism;

[0030] Figure 4 for Figure 1 Explosion diagram of the control mechanism;

[0031] Figure 5 This is an overall schematic diagram of another state of a purgeable high-purity ball valve in this application;

[0032] Among them, the reference numerals in the figures are:

[0033] 1. High-purity ball valve; 2. Control mechanism; 10. Pipeline; 11. Flange cover; 12. Purge pipe; 13. Plug; 14. Bolt; 20. Limit block; 21. Sealing ring; 22. Ball washer; 22. Valve body; 23. Ball washer; 24. Ball core; 25. Valve shaft; 26. O-ring; 27. Center seal ring; 28. Disc spring washer; 30. Anti-loosening gasket; 32. Handle; 15. Connecting rope. DETAILED DESCRIPTION

[0034] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments in this application can be combined with each other. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0035] In order to enable those skilled in the art to better understand the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of this application.

[0036] like Figures 1-4 As shown, the present application provides a purgeable high-purity ball valve, comprising a high-purity ball valve 1, which is used to control the on-off of a fluid, and its high-purity design ensures that the fluid will not be contaminated when passing through;

[0037] The high-purity ball valve 1 includes a control mechanism 2, which is used to manually or automatically open and close the high-purity ball valve 1. The control mechanism 2 includes a valve body 22, which is the main body of the high-purity ball valve 1 and is used to accommodate internal components and provide a fluid channel. The valve body 22 is precision-cast from high-purity stainless steel and is manufactured through high-precision processing to achieve an inner surface finish of Ra0.25, meeting surface cleanliness requirements.

[0038] The upper end of the valve body 22 is designed with a vertical channel, and the lower end is equipped with a ball core 24. The ball core 24 has a through hole. The alignment and stagger of the through hole in the ball core 24 and the internal pipe of the valve body 22 determine the on-off state of the fluid. At the same time, ball pads 23 are fixedly arranged on both sides of the ball core 24. The ball pads 23 are in direct contact with the valve body 22 to prevent fluid leakage when the ball core 24 rotates. The ball pads 23 are grease-free and made of high-purity imported PTFE material to ensure sealing reliability and self-lubrication function.

[0039] A valve shaft 25 is fixedly provided at the upper end of the ball core 24, and the valve shaft 25 is rotatably connected to the valve body 22. At the same time, the valve shaft 25 passes through the upper end channel of the valve body 22 and extends to the outside of the valve body 22. A handle 32 is fixedly provided on the outer portion of the upper end of the valve body 22. One end of the handle 32 is locked with the valve shaft 25 extending to the outside of the valve body 22 by a nut, so that rotating the handle 32 can drive the valve shaft 25 and the ball core 24 to rotate, thereby controlling the flow of the fluid. At the same time, a limit block 20 is fixedly provided on the outer portion of the upper end of the valve body 22. The limit block 20 is used to limit the rotation angle of the ball core 24, thereby ensuring the accuracy of the high-purity ball valve in the open and closed positions;

[0040] A locking gasket 30 is fixedly provided at the connection between the valve shaft 25 and the upper end of the valve body 22. The locking gasket 30 is used to prevent the valve shaft 25 from loosening due to vibration during use, thereby ensuring the stability and sealing of the connection.

[0041] An O-ring 26 is fixedly installed on the outside of the valve shaft 25 at the position where it contacts the internal passage at the upper end of the valve body 22. The O-ring 26 is used to further enhance the sealing effect and prevent fluid leakage. In addition, a center sealing ring 27 and a disc-shaped spring washer 28 are vertically installed on the outside of the valve shaft 25 along the internal passage at the upper end of the valve body 22 to prevent fluid leakage around the valve shaft.

[0042] At the same time, in order to ensure internal purity, the middle seal ring 27 and the disc spring washer 28 are both grease-free and made of high-purity imported PTFE material to ensure sealing reliability and self-lubricating function. The disc spring washer 28 is used to produce greater deformation when subjected to pressure, increasing the contact pressure of the sealing surface, thereby providing a better seal;

[0043] like Figure 1-Figure 3 and Figure 5 As shown, flange covers 11 are fixedly provided at both ends of the valve body 22. A channel is opened inside the flange cover 11, and the through hole is connected to the through hole on the ball core 24 to provide a channel for the fluid to flow;

[0044] The flange cover 11 is threadedly connected to a plurality of bolts 14 around the flange cover 11. The flange covers 11 at both ends are fixedly connected to the valve body 22 by the bolts 14 around the flange cover 11. A sealing ring 21 is fixedly provided at the connection between the flange cover 11 and the valve body 22. The sealing ring 21 is used to prevent fluid from leaking when passing through the valve body 22.

[0045] At the same time, a pipe 10 is fixedly provided at one end of the flange cover 11. The pipe 10 is used to connect the valve body 22 and other peripheral equipment, and provides a flow channel for the fluid. In addition, a purge pipe 12 is fixedly provided on the flange cover 11. The purge pipe 12 passes through the flange cover 11 and extends into the interior of the pipe 10, so that a purge medium can be injected into the pipe 10 when the gas is replaced to remove residual impurities and pollutants, thereby ensuring the cleanliness of the interior of the high-purity ball valve 1 and the purity of the fluid, and preventing the previous gas from remaining and causing the generation of harmful substances, thereby affecting product quality;

[0046] At the same time, a plug 13 is detachably provided at one end of the purge pipe 12. The plug 13 is used to close the purge pipe 12 when the purge operation is not required to prevent external impurities from entering the interior of the high-purity ball valve 1 to maintain the cleanliness of the interior;

[0047] In order to prevent the plug 13 from being lost after being removed during purging, magnetic material is added to the back of the plug 13. At the same time, a connecting rope 15 is fixedly provided between the plug 13 and the purge pipe 12. The connecting rope 15 avoids the potential risks and inconveniences caused by the plug 13 being lost.

[0048] When the plugs 13 are removed for purging, the two groups of plugs 13 can be connected together using magnetism. At the same time, the two groups of plugs 13 are fixed to the purging pipe 12 using a connecting rope 15, which further enhances the safety of the plugs 12. Even if the magnetism fails or the magnetic force is insufficient to attract the plugs 13, the connecting rope 15 can ensure the physical connection between the plugs 13 and the purging pipe 12, preventing the plugs 13 from falling off and ensuring the smooth progress of the purging operation.

[0049] In summary, the staff can rotate the handle 32 to drive the valve shaft 25 and the ball core 24 to rotate synchronously. When the through-hole direction of the ball core 24 is consistent with the through-hole direction of the flange cover 11, the valve is fully open. When the through-hole direction of the ball core 24 is perpendicular to the through-hole direction of the flange cover 11, the valve is closed, realizing the on / off function of the high-purity ball valve 1.

[0050] The internal sealing of the valve body 22 is achieved by installing a ball washer 22, and the external sealing of the valve body 22 is achieved by setting a sealing ring 21 between the flange cover 11 and the valve body 22. The valve shaft 25 is sealed by an O-ring 26, a middle sealing ring 27 and a disc spring washer 28 to achieve a multiple sealing structure and elastic compensation of the pressing force.

[0051] At the same time, before the purging operation, the staff can remove the two sets of plugs 13. At the same time, the two sets of plugs 13 are connected together by magnetic means on the back and fixed to the purging pipe 12 by a connecting rope 15 to prevent the plugs 13 from being missed during the purging operation.

[0052] During the purging operation, the staff can conveniently perform the purging operation on the high-purity ball valve 1 through the purging pipe 12 to remove residual impurities and pollutants, thereby ensuring the cleanliness of the high-purity ball valve 1 and the high purity of the fluid. After the purging is completed, the purging pipe 12 can be closed by the plug 13 to prevent external impurities from entering the interior of the high-purity ball valve 1 to maintain the cleanliness of the interior.

[0053] The above description is merely a preferred embodiment of the present application and is not intended to limit the present application. Various modifications and variations are possible for those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

Claims

1. A purgeable high-purity ball valve, characterized by: include: Valve body (22); a handle (32), the handle (32) being mounted on an upper end of the exterior of the valve body (22); A ball core (24) is mounted on the lower end of the valve body (22); a valve shaft (25), the valve shaft (25) being fixedly connected to the ball core (24); Flange covers (11), the flange covers (11) being mounted on both ends of the valve body (22); a pipe (10) mounted on one end of the flange cover (11); a purge pipe (12), the purge pipe (12) being mounted on the flange cover (11); A plug (13) is installed at one end of the purge pipe (12).

2. A purgeable high-purity ball valve according to claim 1, characterized in that: The interior of the upper end of the valve body (22) is a vertical channel, a through hole is provided inside the ball core (24), and ball pads (23) are fixedly provided on both sides of the ball core (24).

3. The purgeable high-purity ball valve according to claim 1, characterized in that: The valve shaft (25) passes through the upper end channel of the valve body (22) and extends to the outside of the valve body (22), and one end of the handle (32) is locked with the valve shaft (25) extending to the outside of the valve body (22) by a nut.

4. The purgeable high-purity ball valve according to claim 1, characterized in that: An anti-loosening gasket (30) is fixedly provided at the connection between the valve shaft (25) and the interior of the upper end of the valve body (22), an O-ring (26) is fixedly provided at the position where the outer side of the valve shaft (25) contacts the internal channel of the upper end of the valve body (22), and a center sealing ring (27) and a disc-shaped spring washer (28) are vertically provided on the outer side of the valve shaft (25) along the internal channel of the upper end of the valve body (22).

5. The purgeable high-purity ball valve according to claim 1, characterized in that: The flange cover (11) is provided with a channel, which is connected to the through hole on the ball core (24). The flange cover (11) is threadedly connected to multiple groups of bolts (14) around its periphery.

6. The purgeable high-purity ball valve according to claim 1, characterized in that: A sealing ring (21) is fixedly provided at the connection between the flange cover (11) and the valve body (22).

7. The purgeable high-purity ball valve according to claim 1, characterized in that: The purge pipe (12) passes through the flange cover (11) and extends into the interior of the pipe (10).

8. The purgeable high-purity ball valve according to claim 1, characterized in that: The back side of the plug (13) has a magnetic material, and a connecting rope (15) is fixedly arranged between the plug (13) and the purge pipe.

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