Plasma waste gas treatment device

Abstract

The utility model relates to the technical field of waste gas treatment washing towers, in particular to a plasma waste gas treatment device which comprises a main body of a tower body structure, an inner cavity is formed in the main body, a vertical water supply pipeline is arranged in the inner cavity, a plurality of water conveying frames which are longitudinally distributed at intervals are arranged on the water supply pipeline, and each water conveying frame comprises a water drainage pipe, a communicating pipe and a flow guide table. The drainage pipe is an annular pipe body with a plurality of water outlet holes evenly distributed in the bottom, the flow guide table is an annular plate body arranged below the water outlet holes, the inner end and the outer end of the communicating pipe communicate with the water supply pipeline and the drainage pipe correspondingly, and water in the water supply pipeline can penetrate through the water outlet holes to flow into the top end face of the flow guide table from top to bottom after flowing through the communicating pipe and the drainage pipe. And an annular water curtain is formed after guiding of the top end face of the flow guide table. The utility model is favorable for solving the problem that the purification effect is easy to influence due to the fact that only an atomizing nozzle is adopted for spraying treatment in some existing purification spraying towers, and spaces for harmful substances to escape still exist among fine water drops in an atomizing area.

Description

TECHNICAL FIELD

[0001] The utility model relates to waste gas treatment scrubbing tower technical field, especially a kind of plasma waste gas treatment device. BACKGROUND

[0002] In the production process of semiconductor industry, a large number of chemicals and special gases are used, and a large amount of toxic and harmful gas process waste gas is continuously generated in the production link.

[0003] The traditional semiconductor process waste gas treatment method is to inject the process waste gas into a waste gas burner, first accept the high-temperature flame combustion in the burner, form high-temperature waste gas, force the harmful substances in the high-temperature waste gas to accept high-temperature catalysis and decompose into harmless substances, then introduce the scrubbing tower to dissolve the harmful substances in the high-temperature waste gas that can be dissolved in water by using scrubbing water, so that the high-temperature waste gas is converted into harmless gas, and the high-temperature waste gas is cooled to facilitate discharge to the outside atmosphere without causing environmental pollution. Therefore, the scrubbing tower is important in the whole waste gas purification process, and there are still a large amount of harmful substances in the gas after combustion treatment, and the existing scrubbing tower mainly uses the interception mist generated by the atomizing nozzle to make the soluble harmful substances in the gas contact and dissolve with the small water droplets after atomization when passing through the spraying area. However, the atomizing nozzle converts the spraying water into a large number of small water droplets, although the coverage area is wide, but there are still gaps between the water droplets, and the water droplets are often small in size and cannot fully contact and mix with the soluble harmful substances, resulting in the escape of part of the harmful substances and affecting the purification effect of the spray tower. CONTENT OF THE UTILITY MODEL

[0004] The utility model provides a kind of plasma waste gas treatment device, it is favorable to solve the problem that some purification spray tower in present only uses atomizing nozzle to carry out spraying treatment, there is still space for harmful substances to escape between the small water droplets in atomizing area, easy to affect the purification effect.

[0005] The utility model is realized as follows:

[0006] The utility model provides a kind of plasma exhaust treatment device, including the main body of tower body structure, main body side wall is equipped with air inlet pipe near bottom, main body top is equipped with exhaust pipe, main body inside is equipped with inner chamber, the inner chamber is equipped with vertical water supply pipeline, water supply pipeline bottom end extends to main body bottom and forms the opening structure for connecting external pipeline, water supply pipeline is equipped with several longitudinal interval distribution water delivery frame, each water delivery frame includes drain pipe, communication pipe and flow guide platform, drain pipe is the annular pipe body of the several water outlets of uniform distribution bottom, flow guide platform is the annular plate body arranged below water outlet, the top end surface of flow guide platform is arc curved surface, several communication pipes are symmetrical along the axial center of water supply pipeline, and communication pipe inside and outside two ends are communicated with water supply pipeline and drain pipe respectively, water in water supply pipeline can flow through communication pipe and drain pipe, and then, by water outlet, from top to bottom into the top end surface of flow guide platform, and form annular water curtain after the guidance of the top end surface of flow guide platform, the water curtain constitutes the purification interception surface structure when gas is ascending in inner chamber.

[0007] On the basis of the above technical scheme, the drain pipes on the two water delivery frames adjacent in longitudinal direction are horizontally spaced, and the flow guide plates at the bottoms of the two drain pipes are horizontally opposite, and the water curtain on the top falls on the flow guide plate below.

[0008] On the basis of the above technical scheme, the drain pipe and the flow guide platform on the inner side in horizontal direction are fixed to the outer wall of the water supply pipeline.

[0009] On the basis of the above technical scheme, the drain pipe and the flow guide platform on the outer side in horizontal direction are fixed to the inner wall of the main body.

[0010] On the basis of the above technical scheme, the inner chamber is provided with a gas distribution plate above the air inlet pipe, the outer edge of the gas distribution plate is connected to the inner wall of the main body, and the gas distribution plate is uniformly provided with a plurality of gas distribution holes.

[0011] On the basis of the above technical scheme, the plurality of gas distribution holes in the form of strip-shaped through holes are symmetrical along the axial center of the water supply pipeline.

[0012] On the basis of the above technical scheme, the plurality of gas distribution plates are longitudinally spaced.

[0013] On the basis of the above technical scheme, a spray frame is arranged between the gas distribution plate and the water delivery frame adjacent above the gas distribution plate, and the water inlet end of the spray frame is communicated with the water supply pipeline.

[0014] On the basis of the above technical scheme, the main body is provided with a conical cylinder at the top, and the exhaust pipe is located at the top center of the conical cylinder.

[0015] Compared with the prior art, the utility model at least has the following advantages:

[0016] The utility model discloses a water supply pipeline provides water source, forms a plurality of annular water curtain in the cavity as the purification intercepting surface structure, effectively intercepts and dissolves the harmful substance in waste gas, and this is favorable to solve the problem that some purification spray tower in the prior art only uses atomizing nozzle to carry out spray treatment, and there is still space for harmful substance to escape between the tiny water droplets in the atomizing area, which can easily affect the purification effect. BRIEF DESCRIPTION OF DRAWINGS

[0017] In order to make the technical scheme of the embodiments of the utility model clearer, the drawings needed in the embodiments will be briefly introduced as follows, and it should be understood that the following drawings only show some embodiments of the utility model, and therefore should not be regarded as a limitation to the scope, and for those skilled in the art, other related drawings can also be obtained without creative labor on the basis of the drawings.

[0018] Figure 1 It is a structure schematic view of a kind of plasma waste gas treatment device;

[0019] Figure 2 It is Figure 1 The internal structure schematic view of

[0020] Figure 3 It is Figure 1 The internal structure schematic view of working state;

[0021] Figure 4 It is the structure schematic view of outlet hole;

[0022] Figure 5 It is Figure 3 The structure schematic view of uniform gas plate in

[0023] Figure 6 It is the internal structure schematic view of another embodiment of plasma waste gas treatment device;

[0024] Figure 7 It is the internal structure schematic view of another embodiment of plasma waste gas treatment device.

[0025] The figure is marked: 100, main body; 101, air inlet pipe; 102, cone cylinder; 103, exhaust pipe; 200, inner cavity; 300, water supply pipeline; 301, sharp head; 302, communication pipe; 310, first drain pipe; 311, first flow guide table; 320, second drain pipe; 321, second flow guide table; 330, third drain pipe; 331, third flow guide table; 340, fourth drain pipe; 341, fourth flow guide table; 350, water outlet hole; 400, air distribution plate; 410, air distribution hole; 500, spraying frame; a, water curtain. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme in the embodiments of the present application will be described clearly and completely below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are some of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only to represent selected embodiments of the present application.

[0027] In the description of the present application, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0028] It should be noted that when an element is referred to as "fixed to" another element, it can be directly on another element or there can be a middle element. When an element is considered to be "connected" to another element, it can be directly connected to one element or there can be a middle element. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are only for the purpose of illustration, and do not represent the only embodiment.

[0029] The present application will be further described below in combination with the drawings and specific embodiments.

[0030] Embodiment 1: in combination Figures 1-5 The present embodiment discloses a kind of plasma waste gas treatment devices, to solve the problem that some purification spray tower in the prior art is only used atomizing nozzle to carry out spray treatment, there is still space for harmful substance to escape between small water droplets in atomizing area, prone to affect purification effect.

[0031] The plasma waste gas treatment device comprises a main body 100 in the form of a cylindrical shell structure, a gas inlet pipe 101 arranged at the bottom of the side wall of the main body 100, a gas outlet pipe 103 arranged at the top of the main body 100, and an inner cavity 200 arranged in the main body 100. The gas inlet pipe 101 is used to connect the exhaust end of the plasma waste gas burner, the gas outlet pipe 103 is used to discharge the purified gas, and the inner cavity 200 is used to supply the water required for purification treatment.

[0032] In combination with Figure 2 and Figure 3 , a vertical water supply pipe 300 is arranged at the center of the inner cavity 200, the bottom end of the water supply pipe 300 extends to the bottom of the main body 100 and forms an opening structure for connecting external pipelines, the water supply pipe 300 is used to supply water required for purification treatment into the cavity, and the corresponding additives are supplemented according to the actual demand. The top of the water supply pipe 300 is provided with a sharp head 301 for forming an airflow guide structure at the inner axial end.

[0033] The water supply pipe 300 is provided with four longitudinally spaced water supply frames, each of which comprises a drain pipe, a communication pipe 302 and a flow guide table. The drain pipe is an annular pipe body with a plurality of water outlet holes 350 uniformly distributed at the bottom, and the flow guide table is an annular plate body arranged below the water outlet holes 350. The top end surface of the flow guide table is an arc-shaped curved surface. A plurality of communication pipes 302 are symmetrically arranged along the axial center of the water supply pipe 300, and the inner and outer ends of the communication pipes 302 are respectively communicated with the water supply pipe 300 and the drain pipe. The water in the water supply pipe 300 can flow through the communication pipe 302 and the drain pipe, pass through the water outlet holes 350 and flow into the top end surface of the flow guide table from top to bottom, and form a circular water curtain a after being guided by the top end surface of the flow guide table. The water curtain a constitutes a purification interception surface structure when the gas flows upward in the inner cavity 200. The drain pipes on the longitudinally adjacent two water supply frames are horizontally spaced apart, and the flow guide plates at the bottom of the two drain pipes are horizontally opposite to each other. The water curtain a at the top falls on the flow guide plate below.

[0034] In this embodiment, in combination with Figure 3 , for the drain pipe, a first drain pipe 310, a second drain pipe 320, a third drain pipe 330 and a fourth drain pipe 340 are alternately arranged from top to bottom. The lateral outer end of the first drain pipe 310 and the third drain pipe 330 is fixedly arranged on the inner wall of the main body 100, and the lateral inner end of the second drain pipe 320 and the fourth drain pipe 340 is fixedly arranged on the outer wall of the water supply pipe 300 and communicated with the water supply pipe 300.

[0035] Further, the first drainage pipe 310 is fixedly provided with a first flow guide table 311 at the bottom, and the top end surface of the first flow guide table 311 is an arc-shaped curved surface profile with the center of the arc on the inner side; the second drainage pipe 320 is fixedly provided with a second flow guide table 321 at the bottom, and the top end surface of the second flow guide table 321 is an arc-shaped curved surface profile with the center of the arc on the outer side; the third drainage pipe 330 is fixedly provided with a third flow guide table 331 at the bottom, and the top end surface of the third flow guide table 331 is an arc-shaped curved surface profile with the center of the arc on the inner side; and the fourth drainage pipe 340 is fixedly provided with a fourth flow guide table 341 at the bottom, and the top end surface of the fourth flow guide table 341 is an arc-shaped curved surface profile with the center of the arc on the outer side. Taking the first drainage pipe 310 as an example, as shown in Figure 4 The first drainage pipe 310 is provided with a water outlet hole 350 at the bottom, which communicates between the inside and the outside of the first drainage pipe 310, and the water outlet holes 350 on the other drainage pipes have the same structure.

[0036] In operation, the water supply pipeline 300 delivers sufficient purified water from bottom to top by means of an external water pump, the water at the top of the inner side of the water supply pipeline 300 flows to the inside of the first drainage pipe 310 through the communication pipe 302, then flows to the top of the first flow guide table 311 through the water outlet hole 350, and flows along the top end surface of the first flow guide table 311 in a full and uniform manner, forming a water curtain a with an arc-shaped curved profile in longitudinal section at the inner side of the bottom of the first flow guide table 311. The water curtain a has a ring-shaped closed surface structure in the transverse direction, and constitutes a purification interception surface structure. The falling point of the water curtain a is located on the second flow guide table 321, and the water continues to flow along the top end surface of the second flow guide table 321 in a full and uniform manner. At the same time, part of the purified water in the water supply pipeline 300 flows to the second flow guide table 321 through the second drainage pipe 320, as supplemental water, and flows together with the original water, forming a water curtain a with a larger water volume. In this way, the water volume is increased layer by layer and alternately inside and outside, forming four water curtains a (as shown in Figure 3 Therefore, the device has sufficient interception effect, can greatly reduce the gas escape phenomenon, and avoids the defect that the degree of contact and mixing is not enough due to insufficient water volume.

[0037] It should be noted that part of the water in the upper water curtain a will splash after flowing to the lower flow guide table, that is, on the basis of the water curtain a, water droplets generated by splashing, and even atomization effect are also present, further increasing the contact and mixing quality with the gas. In addition, the inner cavity 200 is provided with a drainage hole (not shown in the figure) at the bottom for cooperating with an external negative pressure water pump to timely drain the accumulated water, and there is a height difference between the air inlet pipe 101 and the bottom of the inner cavity 200 to avoid backflow of the accumulated water.

[0038] Further, the inner cavity 200 is provided with a uniform gas distribution plate 400 above the air inlet pipe 101, the outer edge of the uniform gas distribution plate 400 is connected with the inner wall of the main body 100, and a plurality of uniform gas distribution holes 410 are uniformly distributed on the uniform gas distribution plate 400. Figure 5As shown, several bar-shaped hole structures of the air uniformizing holes 410 are symmetrically arranged along the axial center of the water supply pipeline 300. The air uniformizing plate 400 is used to buffer and distribute the gas entering the inner cavity 200, so that the gas is distributed on the balanced distribution path, and the interception and purification effect of the gas is improved.

[0039] Embodiment 2: on the basis of embodiment 1, combined with Figure 6 As shown, in the embodiment, the air uniformizing plate 400 is arranged between the water supply frame and the spraying frame 500 adjacent to the water supply frame, and the water inlet end of the spraying frame 500 is communicated with the water supply pipeline 300. The spraying frame 500 is provided with a plurality of atomizing nozzles, which are used for spraying and further improving the purification effect.

[0040] Embodiment 3: on the basis of embodiment 2, combined with Figure 7 As shown, in the embodiment, the two air uniformizing plates 400 are longitudinally spaced apart, which is used to further improve the air uniformizing effect.

[0041] The above embodiments are only used to illustrate the technical solutions of the present application, but not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that the technical solutions recorded in the foregoing embodiments can be modified, or some technical features can be replaced by equivalent ones; and these modifications or replacements do not make the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A plasma waste gas treatment device, characterized in that, The structure includes a main body (100) with a tower structure. An air inlet pipe (101) is located near the bottom of the side wall of the main body (100), and an exhaust pipe (103) is located at the top of the main body (100). An inner cavity (200) is located inside the main body (100), and a vertical water supply pipe (300) is located within the inner cavity (200). The bottom end of the water supply pipe (300) extends to the bottom of the main body (100) and forms an opening structure for connecting to external pipelines. Several longitudinally spaced water conveying frames are provided on the water supply pipe (300). Each water conveying frame includes a drain pipe, a connecting pipe (302), and a guide platform. The drain pipe has several evenly distributed water outlet holes (350) at its bottom. The annular tube body has a guide platform located below the water outlet (350) and the top end face of the guide platform is an arc-shaped curved surface. Several connecting pipes (302) are symmetrical along the axial center of the water supply pipe (300), and the inner and outer ends of the connecting pipes (302) are connected to the water supply pipe (300) and the drain pipe, respectively. The water in the water supply pipe (300) can flow through the connecting pipes (302) and the drain pipe, and then flow through the water outlet (350) from top to bottom into the top end face of the guide platform. After being guided by the top end face of the guide platform, an annular water curtain (a) is formed. The water curtain (a) constitutes the purification and interception surface structure when the gas rises in the inner cavity (200).

2. The plasma waste gas treatment device according to claim 1, characterized in that, The drain pipes on two longitudinally adjacent water conveyor racks are distributed laterally inward and outward at intervals, and the guide plates at the bottom of the two drain pipes are opposite each other inward and outward in the horizontal direction. The water curtain (a) at the top falls on the adjacent guide plate below.

3. The plasma waste gas treatment device according to claim 2, characterized in that, The drain pipe and guide platform located on the inner side of the transverse direction are fixed on the outer wall of the water supply pipe (300).

4. The plasma waste gas treatment device according to claim 2, characterized in that, The drain pipe and the flow guide platform located on the outer side are fixed to the inner wall of the main body (100).

5. The plasma waste gas treatment device according to claim 1, characterized in that, The inner cavity (200) is provided with an air distribution plate (400) above the air inlet pipe (101). The outer edge of the air distribution plate (400) is connected to the inner wall of the main body (100). A number of air distribution holes (410) are evenly distributed on the air distribution plate (400).

6. The plasma waste gas treatment device according to claim 5, characterized in that, Several strip-shaped through-hole structures with uniform air holes (410) are symmetrical about the axial center of the water supply pipe (300).

7. The plasma waste gas treatment device according to claim 5, characterized in that, Several gas equalization plates (400) are longitudinally spaced.

8. The plasma waste gas treatment device according to claim 5, characterized in that, A spray frame (500) is provided between the air distribution plate (400) and the water conveying frame above it, and the water inlet end of the spray frame (500) is connected to the water supply pipe (300).

9. The plasma waste gas treatment device according to claim 1, characterized in that, The main body (100) is provided with a cone (102) at the top, and the exhaust pipe (103) is located at the center of the top of the cone (102).

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