Pipeline system
By tilting the guide tube and using anticorrosion materials, the problem of liquid residue in the drainage pipeline is solved, and residual liquid discharge and recycling is achieved, reducing costs and pollution risks.
Patent Information
- Application Number
- CN202422311084.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-20
- Publication Date
- 2025-08-19
- Estimated Expiration
- 2034-09-20
AI Technical Summary
During semiconductor manufacturing, liquid residues in the drainage pipeline cause corrosion and contamination of the process chamber, affecting liquid recycling, and volatile acid gases produce particulate matter, damaging the metal on the wafer surface.
A pipeline system is designed in which the first guide tube and the second guide tube are arranged inclined, and the liquid flows out under gravity to avoid residue, combine with polytetrafluoroethylene or stainless steel material and inner wall coating to prevent corrosion, and control the flow direction of the liquid through the valve body.
Effectively avoid liquid residue in the pipeline, reduce corrosion and pollution, improve liquid recycling efficiency, and reduce material costs.
Smart Images
Figure CN223242553U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a pipeline system. Background Art
[0002] During the semiconductor manufacturing process, corrosive liquids are required to process the wafers. After the processing is completed, these liquids will be discharged into the drain pipe through the drain port of the process chamber for liquid treatment and recovery.
[0003] Reference Attachment Figure 1 Typically, the liquid discharge pipeline includes a main pipeline 10, a branch pipeline 20, a first guide pipe 30 for connecting the main pipeline 10 with the branch pipeline 20, and a second guide pipe 40 for connecting the main pipeline 10 with the liquid storage container 50. The first end of the first guide pipe 30 is flush with the second end, and the first end of the second guide pipe 40 is flush with the second end. Therefore, during the liquid discharge process, liquid will inevitably remain in the first guide pipe 30 and the second guide pipe 40.
[0004] On the one hand, the liquid remaining in the first guide tube 30 and the second guide tube 40 will cause corrosion to the pipeline. On the other hand, the acidic gas generated by the volatile acidic liquid in these liquids will also enter the process chamber 60, corrode the inner wall of the process chamber 60 to form particulate matter, and then contaminate the wafers in the process chamber 60, increasing the particulate matter on the surface of the wafer. In addition, these acidic gases will also corrode the metal deposited on the surface of the wafer, such as aluminum, causing the loss of metal on the surface of the wafer.
[0005] In addition to the above hazards, the liquid remaining in the first guide tube 30 and the second guide tube 40 may also affect the recycling of the liquid discharged from the process chamber 60. Specifically, in the processing of some wafers, the liquid to be discharged in the early stage is directly treated as waste liquid because it contains more impurities, and is not recycled. The liquid to be discharged in the later stage has fewer impurities and will enter the recovery system for recycling after preliminary treatment. If the liquid discharged in the early stage remains and accumulates in the first guide tube 30 or the second guide tube 40, the liquid containing more impurities will enter the recovery system along with the liquid containing fewer impurities discharged in the later stage, increasing the difficulty of liquid recycling.
[0006] Therefore, it is necessary to design a drainage pipeline to avoid residual accumulation of liquid in the drainage pipeline. Utility Model Content
[0007] The purpose of this application is to provide a pipeline system that can avoid liquid accumulation in the pipeline.
[0008] An embodiment of the present application provides a piping system for liquid discharge in a process chamber, comprising: a main pipeline, a first end of the main pipeline being sealedly connected to any one of a plurality of drainage ports of the process chamber, and at least one connecting port being provided on the main pipeline; at least one branch pipeline, a first end of each branch pipeline being sealedly connected to the drainage port, a second end of each branch pipeline being sealedly connected to the connecting port via a first guide pipe, wherein the second end of the branch pipeline is higher than the connecting port; and a second guide pipe, a first end of the second guide pipe being sealedly connected to the second end of the main pipeline, a second end of the second guide pipe being used to discharge the liquid into a first liquid storage container, and the second end of the second guide pipe being lower than the first end of the second guide pipe.
[0009] In some embodiments, the piping system further includes a connecting pipe connected between the second end of the second guide pipe and the first liquid storage container, for discharging the liquid into the first liquid storage container.
[0010] In some embodiments, the first liquid storage container is further connected to a second liquid storage container via a recovery pipeline, and the second liquid storage container is used to recover the liquid processed by the first liquid storage container.
[0011] In some embodiments, the liquid inlet of the second liquid storage container is higher than the liquid outlet of the first liquid storage container.
[0012] In some embodiments, the recovery line is provided with a pump.
[0013] In some embodiments, the main line is provided with a first valve body; the branch line is provided with a second valve body; and the second guide pipe is provided with a third valve body.
[0014] In some embodiments, the first valve body, the second valve body, and the third valve body comprise pneumatic valves.
[0015] In some embodiments, the main pipe, the branch pipe, the first guide pipe, and the second guide pipe are made of polytetrafluoroethylene.
[0016] In some embodiments, the material of the main line, the branch line, the first guide tube and the second guide tube includes stainless steel, and the inner wall of the main line, the inner wall of the branch line, the inner wall of the first guide tube and the inner wall of the second guide tube are provided with a polytetrafluoroethylene coating.
[0017] In some embodiments, the port at the first end of the branch line is flush with the port at the first end of the main line.
[0018] The piping system provided herein includes a main line, at least one branch line, a first guide pipe for connecting the branch line with the main line, and a second guide pipe for discharging liquid in the main line into a first liquid storage container. The first end of the second guide pipe is sealed with the main line, and the second end of the second guide pipe is used to discharge the liquid into the first liquid storage container. The second ends of the branch lines are both higher than the connection port of the main line connected to the first guide pipe, and the second ends of the second guide pipes are lower than the first ends of the second guide pipes. That is, the first and second guide pipes are both arranged at an angle so that liquid flowing into the first and second guide pipes can flow out under the action of gravity, preventing liquid from remaining and accumulating in the first and second guide pipes.
[0019] The piping system also includes a connecting pipe connected between the second end of the second guide pipe and the first liquid storage container, for discharging the liquid into the first liquid storage container. Compared to the prior art, by angling the first and second guide pipes, the connection between the first guide pipe and the branch pipe, and the connection between the second guide pipe and the connecting pipe, is changed from a right-angle connection to an oblique angle connection. This reduces the total length of the branch pipe, the first guide pipe, the second guide pipe, and the connecting pipe, thereby reducing material costs. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] The following figures describe in detail exemplary embodiments disclosed in this application. Like reference numerals denote similar structures throughout the several views of the drawings. Those skilled in the art will appreciate that these embodiments are non-limiting, exemplary embodiments, and that the drawings are provided for illustration and description purposes only and are not intended to limit the scope of this application. Other embodiments may also achieve the inventive intent of this application. It should be understood that the drawings are not drawn to scale.
[0021] in:
[0022] Figure 1 A schematic diagram of the structure of a piping system in the prior art; and
[0023] Figure 2 Schematic diagram of the structure of a pipeline system according to some embodiments of the present application. DETAILED DESCRIPTION
[0024] The following description provides specific application scenarios and requirements of the present application, with the purpose of enabling those skilled in the art to make and use the content of this application. Various local modifications to the disclosed embodiments will be apparent to those skilled in the art, and the general principles defined herein may be applied to other embodiments and applications without departing from the spirit and scope of this application. Therefore, this application is not limited to the embodiments shown, but is intended to be of the widest scope consistent with the claims.
[0025] The present application provides a piping system for discharging liquid in a process chamber, comprising: a main pipe, a first end of the main pipe being sealedly connected to any one of a plurality of drainage ports of the process chamber, and at least one connecting port being provided on the main pipe; at least one branch pipe, a first end of the branch pipe being sealedly connected to the drainage port, a second end of the branch pipe being sealedly connected to the connecting port via a first guide pipe, wherein the second end of the branch pipe is higher than the connecting port; and a second guide pipe, a first end of the second guide pipe being sealedly connected to the second end of the main pipe, a second end of the second guide pipe being used to discharge the liquid into a first liquid storage container, and the second end of the second guide pipe being lower than the first end of the second guide pipe.
[0026] Since both ends of the first guide tube and the second guide tube have a height difference, the liquid flowing through the first guide tube and the second guide tube will flow out of the first guide tube and the second guide tube under the action of gravity without remaining and accumulating in the first guide tube and the second guide tube.
[0027] The pipeline system provided in this application will be described in detail below with reference to the embodiments and drawings.
[0028] refer to Figure 2 An embodiment of the present application provides a pipeline system, including a main pipeline 100, at least one branch pipeline 200, at least one first guide pipe 300 for connecting the branch pipeline 200 with the main pipeline 100, and a second guide pipe 400 for discharging liquid in the main pipeline 100 to a first liquid storage container 500.
[0029] In some embodiments, the first end of the main line 100 is sealedly connected to any one of the multiple drain ports 601 of the process chamber 600, and the second end of the main line 100 is connected to the first end of the second guide tube 400, so that the liquid in the process chamber 600 flows to the second guide tube 400 through the main line 100.
[0030] In some embodiments, the main line 100 is provided with at least one connection port 101 , and the connection port 101 is used to connect with the first guide tube 300 .
[0031] In some embodiments, the first end of the branch line 200 is sealedly connected to the drain port 601, and the second end of the branch line 200 is sealedly connected to the connection port 101 via the first guide tube 300. The number of branch lines 200 matches the number of the plurality of drain ports 601. In addition to directly flowing into the main line 100 through the drain port 601 connected to the main line 100, the remaining liquid in the process chamber 600 must first flow into the branch line 200 through the drain port 601 connected to the branch line 200, then flow through the first guide tube 300, and then into the main line 100.
[0032] In some implementations, the port at the first end of the branch line 200 is flush with the port at the first end of the main line 100 , so as to facilitate connecting the branch line 200 and the main line 100 to the plurality of drain ports 601 .
[0033] In some embodiments, the second ends of the branch pipes 200 are all higher than the connection port 101 to which the second ends of the branch pipes 200 are connected via the first guide pipe 300. That is, the first ends of the first guide pipes 300 connected to the main pipe 100 are all lower than the second ends of the first guide pipes 300 connected to the branch pipes 200. Liquid flowing into the first guide pipes 300 can flow into the main pipe 100 through the connection port 101 under the action of gravity without remaining or accumulating in the first guide pipes 300.
[0034] In some embodiments, the first end of the second guide tube 400 is sealedly connected to the second end of the main line 100, the second end of the second guide tube 400 is used to discharge the liquid into the first liquid storage container 500, and the second end of the second guide tube 400 is lower than the first end of the second guide tube 400. The liquid flowing into the second guide tube 400 can flow into the first liquid storage container 500 through the connecting port 101 under the action of gravity without remaining and accumulating in the second guide tube 400.
[0035] In some implementations, the main line 100 is provided with a first valve body 102; the branch line 200 is provided with a second valve body 201; and the second guide pipe 400 is provided with a third valve body 401. The first valve body 102, the second valve body 201, and the third valve body 401 are opened when the process chamber 600 is draining liquid, allowing the liquid to enter the first liquid storage container 500. The first valve body 102, the second valve body 201, and the third valve body 401 are closed after the process chamber 600 is drained. While controlling the direction of liquid flow, the first valve body 102, the second valve body 201, and the third valve body 401 also reduce the probability of liquid in the pipelines entering the process chamber 600 due to volatilization.
[0036] In some embodiments, the first valve body 102 , the second valve body 201 , and the third valve body 401 comprise pneumatic valves.
[0037] In some embodiments, the main line 100, the branch line 200, the first guide tube 300, and the second guide tube 400 are made of polytetrafluoroethylene to prevent the liquid from corroding the main line 100, the branch line 200, the first guide tube 300, and the second guide tube 400. Furthermore, to improve the strength of the main line 100, the branch line 200, the first guide tube 300, and the second guide tube 400, in some embodiments, the main line 100, the branch line 200, the first guide tube 300, and the second guide tube 400 are made of stainless steel, and the inner walls of the main line 100, the inner walls of the branch line 200, the inner walls of the first guide tube 300, and the inner walls of the second guide tube 400 are provided with a polytetrafluoroethylene coating, thereby meeting both strength and corrosion resistance requirements.
[0038] In some embodiments, the piping system further includes a connecting pipe 700 , which is connected between the second end of the second guide pipe 400 and the first liquid storage container 500 , and is used to discharge the liquid into the first liquid storage container 500 .
[0039] In some embodiments, the first liquid storage container 500 includes a waste liquid treatment system and a recovery liquid treatment system. When the liquid flowing out of the process chamber 600 does not need to be recovered, the liquid will enter the waste liquid treatment system; and when the liquid in the process chamber 600 needs to be recovered, the liquid will enter the recovery liquid treatment system.
[0040] In some embodiments, the first liquid storage container 500 is further connected to a second liquid storage container 800 via a recovery line 900 , and the second liquid storage container 800 is used to recover the liquid processed by the recovery liquid processing system.
[0041] In some embodiments, the liquid inlet of the second liquid storage container 800 is higher than the liquid outlet of the first liquid storage container 500, so as to prevent the liquid in the first liquid storage container 500 from entering the second liquid storage container 800 under the action of gravity without being processed.
[0042] In some embodiments, the recovery line 900 is provided with a pump 901 to pump the liquid processed by the first liquid storage container 500 to the second liquid storage container 800 .
[0043] The working process of the pipeline system provided in the embodiment of the present application is as follows: when the process chamber 600 needs to discharge liquid, the first valve body 102, the second valve body 201 and the third valve body 401 are opened, and a part of the liquid in the process chamber 600 flows directly into the main line 100 through the drain port 601 connected to the main line 100, and a part enters the branch line 200 through the drain port 601 connected to the branch line 200, and enters the main line 100 through the first guide pipe 300. The liquid entering the main line 100 then flows into the first liquid storage container 500 through the second guide pipe 400 and the connecting pipe 700. When the process chamber 600 completes liquid discharge, the first valve body 102, the second valve body 201 and the third valve body 401 are closed.
[0044] It should be noted that in some processes, the liquid that needs to be discharged in the later stage of the process can be further recycled. Therefore, in the process of discharging the liquid from the process chamber 600, the liquid within the preset time period will flow into the waste liquid treatment system of the first liquid storage container 500 and be treated according to the waste liquid table. The liquid that exceeds the preset time period will flow into the recovery liquid treatment system of the first liquid storage container 500. After being treated by the recovery liquid treatment system, it will be pumped to the second liquid storage container 800 through the recovery pipeline 900.
[0045] The beneficial effects of the pipeline system provided by the embodiments of the present application include but are not limited to:
[0046] The piping system provided herein includes a main line, at least one branch line, a first guide pipe for connecting the branch line with the main line, and a second guide pipe for discharging liquid in the main line into a first liquid storage container. The first end of the second guide pipe is sealed with the main line, and the second end of the second guide pipe is used to discharge the liquid into the first liquid storage container. The second end of the branch line is higher than the connection port of the main line connected to the first guide pipe, and the second end of the second guide pipe is lower than the first end of the second guide pipe. That is, the first and second guide pipes are both arranged at an angle so that liquid flowing into the first and second guide pipes can flow out under the action of gravity, preventing liquid from remaining and accumulating in the first and second guide pipes.
[0047] The piping system also includes a connecting pipe connected between the second end of the second guide pipe and the first liquid storage container, for discharging the liquid into the first liquid storage container. Compared to the prior art, by angling the first and second guide pipes, the connection between the first guide pipe and the branch pipe, and the connection between the second guide pipe and the connecting pipe, is changed from a right-angle connection to an oblique angle connection. This reduces the total length of the branch pipe, the first guide pipe, the second guide pipe, and the connecting pipe, thereby reducing material costs.
[0048] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other possible beneficial effects.
[0049] The basic concepts have been described above. It will be apparent to those skilled in the art that the detailed disclosure above is merely illustrative and does not limit this specification. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and revisions to this application. Such modifications, improvements, and revisions are suggested in this specification and remain within the spirit and scope of the exemplary embodiments of this application.
[0050] It should be noted that, in the description of this application, unless otherwise expressly specified or limited, the terms "installed," "connected," "connected," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integration; mechanical connections, electrical connections; rotational connections, or sliding connections; direct connections, or indirect connections through an intermediate medium; and can refer to internal communication between two components or the interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this application in light of specific circumstances.
[0051] In addition, when terms such as "first", "second", and "third" are used in the specification of this application to describe various features, these terms are only used to distinguish these features and cannot be understood as indicating or implying the relationship between the features, the relative importance, or implicitly indicating the number of features indicated.
[0052] In addition, this specification describes exemplary embodiments by reference to idealized exemplary cross-sectional views and / or plan views and / or perspective views. Therefore, differences from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be interpreted as limited to the shapes of the regions shown herein, but should include deviations in shapes due to, for example, manufacturing. Therefore, the regions shown in the figures are schematic in nature, and their shapes are not intended to illustrate the actual shapes of the regions of the device nor to limit the scope of the exemplary embodiments.
[0053] At the same time, this application uses specific terms to describe the embodiments of this specification. For example, "one embodiment," "an embodiment," and / or "some embodiments" refer to a certain feature, structure, or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment," "an embodiment," or "an alternative embodiment" mentioned twice or multiple times in different locations in this application does not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of the present application may be appropriately combined.
[0054] Similarly, it should be noted that, in order to simplify the presentation of this application and thus facilitate understanding of one or more embodiments of the invention, the foregoing descriptions of the embodiments of this application sometimes combine multiple features into a single embodiment, figure, or description thereof. However, this disclosure method does not mean that the subject matter of this application requires more features than those recited in the claims. In fact, an embodiment may have fewer features than all of the features of a single embodiment disclosed above.
[0055] Finally, it should be understood that the embodiments described in this application are merely illustrative of the principles of the embodiments of this application. Other variations may also fall within the scope of this application. Therefore, by way of example and not limitation, alternative configurations of the embodiments of this application may be considered consistent with the teachings of this application. Accordingly, the embodiments of this application are not limited to the embodiments explicitly introduced and described in this application.
Claims
1. A piping system for discharging liquid in a process chamber, characterized in that: include: a main pipe, a first end of which is sealedly connected to any one of the plurality of drain ports of the process chamber, and at least one connecting port is provided on the main pipe; at least one branch pipe, wherein a first end of the branch pipe is sealedly connected to the drain port, and a second end of the branch pipe is sealedly connected to the connection port via a first guide pipe, wherein the second end of the branch pipe is higher than the connection port; as well as A second guide tube, wherein the first end of the second guide tube is sealedly connected to the second end of the main line, the second end of the second guide tube is used to discharge the liquid into the first liquid storage container, and the second end of the second guide tube is lower than the first end of the second guide tube.
2. The piping system according to claim 1, characterized in that: The device further comprises a connecting pipe connected between the second end of the second guide pipe and the first liquid storage container, and used for discharging the liquid into the first liquid storage container.
3. The piping system according to claim 2, characterized in that: The first liquid storage container is also connected to a second liquid storage container through a recovery pipeline, and the second liquid storage container is used to recover the liquid processed by the first liquid storage container.
4. The piping system according to claim 3, characterized in that: The liquid inlet of the second liquid storage container is higher than the liquid outlet of the first liquid storage container.
5. The piping system according to claim 4, characterized in that: The recovery pipeline is provided with a pump.
6. The piping system according to claim 1, characterized in that: The main pipeline is provided with a first valve body; the branch pipeline is provided with a second valve body; and the second guide pipe is provided with a third valve body.
7. The piping system according to claim 6, characterized in that: The first valve body, the second valve body, and the third valve body include pneumatic valves.
8. The piping system according to claim 1, wherein: The main pipe, the branch pipe, the first guide pipe, and the second guide pipe are made of polytetrafluoroethylene.
9. The piping system according to claim 1, characterized in that: The main pipe, the branch pipe, the first guide pipe and the second guide pipe are made of stainless steel, and the inner walls of the main pipe, the branch pipe, the first guide pipe and the second guide pipe are coated with polytetrafluoroethylene.
10. The piping system according to claim 1, wherein: The port at the first end of the branch line is flush with the port at the first end of the main line.