Chemical liquid concentration detection sensor

Abstract

The utility model discloses a chemical liquid concentration detection sensor which comprises a sensor body and a multi-way pipe fitting, a liquid channel is arranged in the multi-way pipe fitting, the sensor body comprises a shell, an information processing device and an information collecting device, the information collecting device and the information processing device are both contained in the shell, the shell is fixedly connected to the multi-way pipe fitting, and the multi-way pipe fitting is fixedly connected with the information processing device. The shell is provided with a detection window communicated with the liquid channel, the information acquisition device comprises a light source for emitting light, an optical sensing head and a photosensitive device, the photosensitive device is electrically connected with the information processing device, and the optical sensing head is arranged at the detection window and is in contact with the passing liquid medium to form a reflection interface; the reflecting interface is used for reflecting light emitted by the light source, the photosensitive device is used for converting reflected light signals into electric signals and outputting the electric signals, and the shell and the multi-way pipe fitting are both made of acid and alkali resistant plastic materials, so that the shell and the multi-way pipe fitting are prevented from being corroded when used in an acid and alkali environment.

Description

Technical Field

[0001] The utility model relates to a sensor, in particular to a chemical liquid concentration detection sensor. Background Art

[0002] The manufacture of semiconductor products requires hundreds of processes, including wafer preparation, cleaning, evaporation, photolithography, etching, diffusion, annealing, electroplating, cutting and other steps. Etching is divided into physical etching, chemical etching, and physical and chemical etching. Physical etching includes ion beam etching (IBE), chemical etching includes plasma stripping machines, and physical and chemical etching includes ICP-RIE, CCP-RIE, ECR-RIE, DRIE and the like. In the semiconductor manufacturing process, a variety of chemical solutions are required for cleaning and etching processes, such as H3PO4 phosphoric acid, TMAH, DHF hydrofluoric acid, DHF hydrofluoric acid, H2O2 hydrogen peroxide, H2SO4 sulfuric acid, HCL hydrochloric acid, HNO3 nitric acid, and each process step requires a set concentration of chemical solution. Therefore, a concentration detection sensor is needed to detect the concentration of the chemical solution used.

[0003] There are currently concentration detection sensors on the market that measure the concentration of chemical liquids by measuring the refractive index of the chemical liquid. For example, the liquid refractive index measuring instrument disclosed in patent CN2392178Y includes a light source, a sample tank containing the liquid to be measured, a prism, a PSD position sensor, an information processing device, and a display. The sample tank is mounted on the prism, and the bottom of the tank is connected to the prism. The light beam from the light source is obliquely incident on the interface between the prism and the liquid to be measured through the prism. The critical angle total reflection light formed is converged by a lens and enters the PSD position sensor. The light spot center of gravity position signal output by the PSD position sensor is input into the information processing device for converting the position signal into a refractive index value. The output end of the information processing device is connected to the display.

[0004] For example, the self-cleaning online refractometer disclosed in patent CN220399264U includes an online refractometer body and a quick-connect chuck; the top of the online refractometer body is a measuring part, which has a measuring window; the vertical cross-section of the measuring part is arched; and the quick-connect chuck is mounted on the top of the online refractometer body and is suitable for connecting to the circulation pool pipeline.

[0005] Since concentration detection sensors are needed to detect the concentration of chemical liquids required for semiconductor processes, and chemical liquids are generally acidic or alkaline, and have certain corrosive properties, the shells of existing conventional concentration detection sensors are generally made of metal (such as stainless steel). Testing in an acidic or alkaline environment will make the shell surface susceptible to corrosion, affecting the overall life of the concentration detection sensor. Utility Model Content

[0006] Based on the above-mentioned problem that the shell of the conventional concentration detection sensor is generally made of metal material (such as stainless steel), the detection in an acidic and alkaline environment will make the shell surface susceptible to corrosion, affecting the overall life of the concentration detection sensor, the utility model provides a chemical liquid concentration detection sensor.

[0007] The technical solution adopted by the present invention to solve the above-mentioned technical problems is as follows: a chemical liquid concentration detection sensor includes a sensor body and a multi-way pipe fitting, the multi-way pipe fitting is provided with a liquid channel for liquid medium to pass through, the sensor body includes a shell, an information processing device and an information collection device, the information collection device and the information processing device are both accommodated in the shell, the shell is fixedly connected to the multi-way pipe fitting, and a detection window connected to the liquid channel is provided on the shell, the detection window is used for the information collection device to collect information on the passing liquid medium, the information collection device includes a light source for emitting light, an optical sensor head and a photosensitive device, the photosensitive device is electrically connected to the information processing device, the optical sensor head is arranged at the detection window and contacts with the passing liquid medium to form a reflection interface, the reflection interface is used to reflect the light emitted by the light source, and the photosensitive device is used to convert the reflected light signal into an electrical signal and output it, the shell and the multi-way pipe fitting are both made of acid and alkali resistant plastic material.

[0008] A further preferred technical solution of the present invention is that the shell and the multi-way pipe are made of PTFE material.

[0009] A further preferred technical solution of the present invention is that the shell and the multi-way pipe fitting are made of HDPE material.

[0010] A further preferred technical solution of the present invention is: the optical sensor head includes a prism, and the surface of the prism facing the liquid channel is used to contact with the passing liquid medium to form a reflective interface.

[0011] A further preferred technical solution of the present utility model is: the optical sensor head includes a prism and an acid- and alkali-resistant transparent film, the transparent film is arranged on the surface of the prism facing the liquid channel, and serves as a part in contact with the liquid medium. The transparent film contacts the liquid medium and forms the reflective interface.

[0012] A further preferred technical solution of the present invention is that the light-transmitting diaphragm is a diaphragm made of fluorine material.

[0013] A further preferred technical solution of the present invention is that the photosensitive device is a linear CCD / CMOS array.

[0014] A further preferred technical solution of the present invention is that a focusing lens is provided on the optical path of the reflected light between the optical sensor head and the photosensitive device, and the reflected light is converged onto the photosensitive device after passing through the focusing lens.

[0015] A further preferred technical solution of the present invention is that the shell and the multi-way pipe are made of reinforced polypropylene.

[0016] A further preferred technical solution of the present invention is: the multi-way pipe fitting is a three-way pipe fitting, the shell is fixed to one of the joints of the three-way pipe fitting, and the detection window is connected to the liquid channel in the joint.

[0017] Compared with the existing technology, the advantage of the present invention is that the shell of the sensor body and the multi-way pipe fittings are made of acid and alkali resistant plastic materials, which prevents the shell and the multi-way pipe fittings from being corroded when used in acid and alkali environments, thereby improving the service life of the concentration detection sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention will be described in further detail below with reference to the accompanying drawings and preferred embodiments. However, those skilled in the art will appreciate that these drawings are drawn only for the purpose of explaining the preferred embodiments and should not be construed as limiting the scope of the present invention. Furthermore, unless otherwise specified, the drawings are merely schematic representations of the composition or structure of the depicted objects and may contain exaggerated representations. Furthermore, the drawings are not necessarily drawn to scale.

[0019] Figure 1 This is a schematic diagram of the structure of this patent;

[0020] Figure 2 A schematic cross-sectional view of this patent;

[0021] Figure 3 It is a detection principle diagram of the information collection device and the information processing device;

[0022] Figure 4 A schematic diagram of the optical sensor head.

[0023] In the figure: 1. Sensor body; 2. Multi-way pipe fitting; 3. Liquid channel; 4. Electric wire; 5. Shell; 6. Information processing device; 7. Information acquisition device; 8. Detection window; 9. Light source; 10. Control circuit board; 11. Prism; 12. Liquid medium; 13. Transparent film; 14. Focusing lens; 15. Photosensitive device; 16. Processing chip; 17. Reflection interface. DETAILED DESCRIPTION

[0024] The preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings. Those skilled in the art will appreciate that these descriptions are merely illustrative and exemplary and should not be construed as limiting the scope of protection of the present invention.

[0025] It should be noted that like reference numerals denote like items in the following drawings, and thus, once an item is defined in one drawing, it may not be further defined or explained in subsequent drawings.

[0026] Figure 1-Figure 4 As shown, the chemical liquid concentration detection sensor includes a sensor body 1 and a multi-way pipe 2. The multi-way pipe 2 is provided with a liquid channel 13 for the liquid medium 12 to pass through. The sensor body 1 is fixed on the multi-way pipe 2 to detect the concentration of the liquid medium 12 passing through.

[0027] The sensor body 1 includes a shell 5, an information processing device 6 and an information collection device 7. The information processing device 6 and the information collection device 7 are both accommodated in the shell 5. The shell 5 is fixedly connected to the multi-way pipe fitting 2. A detection window 8 is provided on the shell 5. The detection window 8 is connected to the liquid channel 13 in the multi-way pipe fitting 2, so that the information collection device 7 in the shell 5 can collect information about the passing liquid medium 12. The information collection device 7 includes a light source 9 for emitting light, an optical sensor head and a photosensitive device 15. The photosensitive device 15 is electrically connected to the information processing device 6. The optical sensor head is provided at the detection window 8 and contacts the passing liquid medium 12 to form a reflective interface 17. The reflective interface 17 is used to reflect the light emitted by the light source 9. The photosensitive device 15 is used to convert the reflected light signal into an electrical signal and output it. The information processing device 6 receives the electrical signal output by the photosensitive device 15 and performs image processing and data analysis, thereby completing the concentration detection of the liquid medium 12 and obtaining the concentration of the liquid medium 12 passing through the liquid channel 13.

[0028] Preferably, the optical sensor head includes a prism 11, which is a triangular prism. The surface of the prism 11 facing the liquid channel 13 closes the detection window 8 and serves as a portion in contact with the liquid medium 12. When the liquid medium 12 passes through the liquid channel 13, the surface of the prism 11 facing the liquid channel 13 contacts the liquid medium 12 to form the above-mentioned reflective interface 17.

[0029] In addition, a sealing ring may be provided between the prism 11 and the housing 5 to improve the sealing performance between the prism 11 and the detection window 8 . The sealing ring may be made of polytetrafluoroethylene.

[0030] Working principle: the light emitted by the light source 9 enters the prism 11 from the S1 surface of the prism 11, and the light is reflected on the reflection interface 17S2 formed by the contact between the prism 11 and the liquid medium 12. The light reflected on the reflection interface 17S2 is emitted from the prism 11 through the S3 surface of the prism 11, and the photosensitive device 15 converts the reflected light signal into an electrical signal and outputs it to the information processing device 6, and finally the concentration of the liquid medium 12 is obtained.

[0031] This patent utilizes the principle of measuring refractive index by a critical angle refractometer to detect the concentration of the liquid medium 12 passing through the liquid channel 13. The refractometer measures the refractive index of the liquid based on the principle of total optical reflection, also known as the critical angle method. This detection method is an existing detection method. The information processing device 6 and the information acquisition device 7 are the same as the existing refractometer. Please refer to patents CN215985735U and CN102012359A.

[0032] Preferably, the photosensitive device 15 is a linear CCD (linear charge coupled device) / CMOS (linear complementary metal oxide semiconductor) array, which includes multiple pixels and the multiple pixels are arranged linearly in one dimension along the linear direction of light dispersion. Each pixel can include components such as a photosensitive diode, a storage unit, and an amplification circuit.

[0033] The information processing device 6 includes a processing chip 16 and a control circuit board 10. The processing chip 16 is electrically connected to the control circuit board 10, and the photosensitive device 15 is electrically connected to the processing chip 16. The processing chip 16 receives the electrical signal output by the photosensitive device 15 and performs image processing and data analysis. The processing chip 16 transmits the analysis results to the control circuit board 10. The light source 9 is also electrically connected to the control circuit board 10. The processing chip 16 can be a CPU processing module.

[0034] The detection window 8 is provided at the bottom of the housing 5 , and the top of the housing 5 is provided with a wire 4 connected to the control circuit board 10 , and the wire 4 can be used to connect to an external display screen or other equipment.

[0035] A focusing lens 14 is provided on the optical path of the reflected light between the optical sensor head and the photosensitive device 15. The reflected light passes through the focusing lens 14 and converges onto the photosensitive device 15. Preferably, the focusing lens 14 can be a convex lens.

[0036] Figure 1 、 Figure 2 As shown, preferably, the multi-way pipe fitting 2 is a three-way pipe fitting, and the housing 5 is fixed to one of the joints of the three-way pipe fitting, so that the above-mentioned detection window 8 is connected to the liquid channel 13 in the joint.

[0037] The shell 5 and the multi-way pipe fitting 2 are both made of acid- and alkali-resistant plastic materials, which can effectively prevent the shell 5 and the multi-way pipe fitting 2 from being corroded when used in an acidic or alkaline environment, thereby increasing the service life of the concentration detection sensor.

[0038] Preferably, the housing 5 and the multi-way pipe 2 are made of PTFE (polytetrafluoroethylene).

[0039] In another embodiment, preferably, the housing 5 and the multi-way pipe 2 are made of HDPE (high-density polyethylene).

[0040] In another embodiment, preferably, the housing 5 and the multi-way pipe 2 are made of reinforced polypropylene.

[0041] The above-mentioned plastic materials have good chemical stability and good acid and alkali resistance. The materials of the shell 5 and the multi-way pipe fitting 2 in this patent are not limited to the above-mentioned three types. Other conventional plastic materials with the same properties on the market are applicable to this patent.

[0042] In contrast to the structure of the above-mentioned optical sensor head, this patent also has another structure. The specific contents are as follows:

[0043] Figure 3 、 Figure 4 As shown, the optical sensor head includes a prism 11 and an acid- and alkali-resistant transparent film 13. The transparent film 13 is arranged on the surface of the prism 11 facing the liquid channel 13 and serves as a contact portion with the liquid medium 12. When the liquid medium 12 passes through the liquid channel 13, the transparent film 13 contacts the liquid medium 12 to form the above-mentioned reflective interface 17.

[0044] The light-transmitting film 13 seals the detection window 8 to prevent the liquid medium 12 flowing through the liquid channel 13 from entering the housing 5. A sealing ring can be provided between the light-transmitting film 13 and the housing 5 to improve the sealing performance between the light-transmitting film 13 and the detection window 8. The sealing ring can be made of polytetrafluoroethylene.

[0045] Working principle: the light emitted by the light source 9 enters the prism 11 from the S1 surface of the prism 11, and then enters the transparent film 13 after being refracted through the interface S4 between the prism 11 and the transparent film 13. These light rays are reflected on the reflection interface 17S2 formed by the contact between the transparent film 13 and the liquid medium 12. The reflected light rays on the reflection interface 17S2 are then refracted through the interface S4 and enter the prism 11 again, and then exit the prism 11 through the S3 surface of the prism 11. The photosensitive device 15 receives the light emitted from the S3 surface of the prism 11, converts the optical signal into an electrical signal and outputs it to the information processing device 6, and finally obtains the concentration of the liquid medium 12.

[0046] Preferably, the light-transmitting film 13 is a fluorine film made of a fluorine material. The film has good chemical stability and good acid and alkali resistance. It is arranged on the surface of the prism 11 as the contact part with the liquid medium 12, which can effectively prevent the liquid medium 12 from corroding the prism 11 and also ensure the stability of the detection.

[0047] The above describes the chemical liquid concentration detection sensor provided by the present invention. Specific examples are used herein to illustrate the principles and implementation methods of the present invention. The above examples are intended only to facilitate understanding of the present invention and its core concepts. It should be noted that those skilled in the art may, without departing from the principles of the present invention, make various improvements and modifications to the present invention, and such improvements and modifications fall within the scope of protection of the claims of the present invention.

Claims

1. A chemical liquid concentration detection sensor, comprising a sensor body and a multi-way pipe, wherein the multi-way pipe is provided with a liquid channel for the liquid medium to pass through, characterized in that: The sensor body includes a shell, an information processing device and an information collection device. The information collection device and the information processing device are both accommodated in the shell. The shell is fixedly connected to the multi-way pipe fitting, and the shell is provided with a detection window connected to the liquid channel. The detection window is used for the information collection device to collect information about the passing liquid medium. The information collection device includes a light source for emitting light, an optical sensor head and a photosensitive device. The photosensitive device is electrically connected to the information processing device. The optical sensor head is arranged at the detection window and contacts the passing liquid medium to form a reflective interface. The reflective interface is used to reflect the light emitted by the light source. The photosensitive device is used to convert the reflected light signal into an electrical signal and output it. The shell and the multi-way pipe fitting are both made of acid and alkali resistant plastic materials.

2. The chemical liquid concentration detection sensor according to claim 1, characterized in that: The shell and the multi-way pipe are made of PTFE material.

3. The chemical liquid concentration detection sensor according to claim 1, characterized in that: The shell and the multi-way pipe are made of HDPE material.

4. The chemical liquid concentration detection sensor according to claim 1, characterized in that: The optical sensor head comprises a prism, and a surface of the prism facing the liquid channel is used to contact with the passing liquid medium to form a reflective interface.

5. The chemical liquid concentration detection sensor according to claim 1, characterized in that: The optical sensor head includes a prism and an acid- and alkali-resistant transparent film. The transparent film is arranged on the surface of the prism facing the liquid channel and serves as a portion in contact with the liquid medium. The transparent film contacts the liquid medium and forms the reflective interface.

6. The chemical liquid concentration detection sensor according to claim 5, characterized in that: The light-transmitting diaphragm is made of fluorine material.

7. The chemical liquid concentration detection sensor according to claim 1, characterized in that: The photosensitive device is a linear CCD / CMOS array.

8. The chemical liquid concentration detection sensor according to claim 1, characterized in that: A focusing lens is provided on the optical path of the reflected light between the optical sensor head and the photosensitive device, and the reflected light is converged onto the photosensitive device after passing through the focusing lens.

9. The chemical liquid concentration detection sensor according to claim 1, characterized in that: The shell and the multi-way pipe are made of reinforced polypropylene.

10. The chemical liquid concentration detection sensor according to claim 1, characterized in that: The multi-way pipe fitting is a three-way pipe fitting, the shell is fixed on one of the joints of the three-way pipe fitting, and the detection window is communicated with the liquid channel in the joint.

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