Galvanometer and ray machine

Abstract

The utility model relates to a galvanometer, which comprises a carrying table; the slide glass is arranged on the carrying table; the lens is fixed on the slide glass and is used for receiving and refracting the emergent light; the driving module is positioned on at least one side of the lens and is used for driving the slide glass to incline; wherein the driving module comprises at least one magnet and a driving line group arranged corresponding to the magnet, the magnet is fixedly arranged on the carrying sheet, and the driving line group is arranged on the carrying table and located on the side, away from the lens, of the magnet; the driving line group comprises a plurality of parallel current lines, and the current lines are used for conducting current to generate a magnetic field for driving the magnet to move; and the current directions of the plurality of current lines in each driving line group are the same, and the included angle between the current directions and the magnetization direction of the corresponding magnet is 70-110 degrees. The galvanometer provided by the utility model is beneficial to improving the deflection effect of the galvanometer. The utility model further relates to an optical machine comprising the galvanometer.

Description

Technical Field

[0001] The present application relates to the field of projection display technology, and in particular includes a galvanometer and an optical machine including the galvanometer. Background Art

[0002] Common galvanometers are typically driven by magnets and coils. A common structure uses a reed fixed to one side of a carrier using studs, so that the current coil on the carrier aligns with the magnet on the reed. The magnetic field generated by the current coil drives the magnet to move, which in turn causes the reed to vibrate. However, due to the relative position of the magnet and the current coil, the Lorentz force acting on the magnet is relatively small, which in turn limits the deflection range of the galvanometer. Utility Model Content

[0003] The present application discloses a galvanometer and an optical machine, which can improve the deflection effect of the galvanometer.

[0004] In a first aspect, the present application relates to a galvanometer, comprising:

[0005] carrier;

[0006] a slide disposed on the stage, the slide being configured to tilt about at least a first axis between a first position and a second position relative to the stage;

[0007] a lens fixed on the slide, for receiving and refracting the outgoing light; the lens can be tilted between the first position and the second position under the drive of the slide; and

[0008] a driving module, located on at least one side of the lens, and configured to drive the slide to tilt around the first axis between the first position and the second position;

[0009] In which, the driving module includes at least one magnet and a driving wire group arranged corresponding to the magnet, the magnet is fixed on the carrier, and the driving wire group is arranged on the carrier and is located on the side of the magnet away from the lens; the driving wire group includes multiple parallel current lines, which are used to conduct current to generate a magnetic field for driving the magnet to move; the current directions of the multiple current lines in each driving wire group are the same, and the angle between them and the magnetization direction of the corresponding magnet is 70°-110°.

[0010] The galvanometer provided by the present application, by setting the drive line group to include multiple parallel current lines, and setting the angle between the magnetization direction of the magnet and the direction of the current in the current line to 70°-110°, can make the current line generate a force perpendicular to the direction of the platform on the magnet, and by setting the magnet on the side where the drive line group is flush with the platform, it can avoid being restricted in the range of movement by the platform, and can also make the magnet closer to the drive line group. This can reduce the thickness of the galvanometer while increasing the force it receives, thereby increasing the range of movement of the magnet under the reaction force of the Lorentz force, and further increasing the deflection amplitude of the galvanometer.

[0011] In one embodiment, the magnetization direction of the magnet is perpendicular to the extension direction of the current wires in the corresponding driving wire group.

[0012] In one embodiment, the magnet and the drive wire group are aligned in a first direction so that the drive wire group passes through the magnetic flux lines of the magnetic field generated by the magnetic pole; the first direction is perpendicular to the magnetization direction of the magnet and the extension direction of the current line.

[0013] In one embodiment, the current line is disposed on a side surface of the carrier or embedded inside the carrier.

[0014] In one embodiment, the carrier is also configured to tilt around a second axis between a third position and a fourth position to drive the lens to tilt between the third position and the fourth position; the driving module is also used to drive the lens to tilt around the second axis between the third position and the fourth position.

[0015] In one embodiment, the driving module includes multiple magnets and multiple driving line groups, each of the magnets corresponds to one driving line group, the multiple magnets are arranged at least on at least two adjacent sides of the lens, and each of the driving line groups corresponds to one magnet arranged on the carrier.

[0016] In one embodiment, a plurality of the current lines are connected in parallel.

[0017] In one embodiment, the driving wire group includes a coil, and the coil includes at least one current wire on a side close to the magnet and a conducting wire on a side away from the magnet, and the conducting wire is spaced apart from the current wire.

[0018] In one embodiment, a magnetoresistive element is provided between the conductive line and the current line, and the magnetoresistive element is used to block the magnetic field of the magnet from being acted upon by the conductive line.

[0019] In one embodiment, the galvanometer further includes a control module, which is electrically connected to the driving line group and is used to control the on-off, direction and magnitude of the current in the driving line group.

[0020] In a second aspect, the present application also relates to an optical machine, comprising:

[0021] The light source module is used to emit image light; and the galvanometer is used to receive and refract the image light.

[0022] The optical machine provided in the present application, by setting the galvanometer mirror in the above embodiment, is thinner. At the same time, since the galvanometer mirror has a larger deflection amplitude of the image light, the position between the galvanometer mirror and the light source module can be set more flexibly, thereby further improving space utilization. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present application, a brief introduction will be given below to the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0024] Figure 1 It is a structural schematic diagram of the galvanometer in the first embodiment provided in this application.

[0025] Figure 2 yes Figure 1 Schematic diagram of the explosion structure.

[0026] Figure 3 yes Figure 1 Schematic diagram of the cross-section structure.

[0027] Figure 4 It is a schematic diagram of the cross-sectional structure of the galvanometer in the second embodiment provided in this application.

[0028] Figure 5 Schematic diagram of the structure of the driving line group in the third embodiment provided in this application.

[0029] Figure 6 yes Figure 5 Schematic diagram of the cross-sectional structure.

[0030] Figure 7 Schematic diagram of the cross-sectional structure of the driving line group in the fourth embodiment provided by the present application.

[0031] Figure 8 It is a structural diagram of an optical machine in an embodiment provided in this application.

[0032] Description of main component symbols

[0033] Galvanometer 100

[0034] Stage 10

[0035] Accommodation hole 11

[0036] Lens 20

[0037] Slide 30

[0038] Deflection unit 31

[0039] Connecting arm 33

[0040] Fixing portion 35

[0041] Drive module 50

[0042] Magnet 51

[0043] Magnetic Pole 511

[0044] Drive line group 53

[0045] Coil 53a

[0046] Current line 531

[0047] Gap 532

[0048] Conductive line 533

[0049] Magnetoresistive element 55

[0050] Control module 70

[0051] Optical Machine 200

[0052] Light source module 210

[0053] First direction X

[0054] Second direction Y

[0055] The third direction Z

[0056] Magnetization direction M

[0057] First axis O1

[0058] Second axis O2

[0059] Image light L1

[0060] The following specific implementation methods will further illustrate the present application in conjunction with the above-mentioned drawings. DETAILED DESCRIPTION

[0061] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments of this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0062] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly attached to the other component or there may be a central component. When a component is referred to as being "connected to" another component, it may be directly connected to the other component or there may be a central component. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only.

[0063] It should be noted that the concepts of "first" and "second" mentioned in this application are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.

[0064] Please also refer to Figure 1 and Figure 2 The galvanometer 100 provided in an embodiment of the present application includes a stage 10, a lens 20, a carrier 30, and a driving module 50. The lens 20 is fixed on the carrier 30 for receiving and refracting outgoing light. The carrier 30 is disposed on the stage 10, and the carrier 30 is configured to tilt between a first position and a second position relative to the stage 10 at least around a first axis O1, so that the lens 20 can tilt between the first position and the second position driven by the carrier 30. The driving module 50 is located on at least one side of the lens 20, and is used to drive the carrier 30 to tilt between the first position and the second position around the first axis O1.

[0065] Specifically, the carrier 10 is a plate for supporting the slide 30. In this embodiment, the carrier 10 may be a printed circuit board and may be configured with circuitry for controlling the drive module 50. The carrier 10 is provided with a receiving hole 11, so that when the slide 30 is secured to the carrier 10, at least a portion of the lens 20 is accommodated in the receiving hole 11, thereby improving the space utilization of the galvanometer 100.

[0066] The slide 30 includes a deflecting unit 31, a connecting arm 33, and a fixing unit 35. The deflecting unit 31 is connected to the lens 20. The fixing unit 35 is disposed around the deflecting unit 31 for fixed connection to the stage 10. The connecting arm 33 is disposed between the deflecting unit 31 and the fixing unit 35, so that the deflecting unit 31 is configured to tilt about a first axis O1 between a first position and a second position relative to the fixing unit 35. This allows the lens 20 fixed to the deflecting unit 31 to tilt about the first axis O1 between the first position and the second position relative to the stage 10.

[0067] In this embodiment, the deflection unit 31 is further configured to tilt about the second axis O2 between a third position and a fourth position relative to the stage 10. That is, the deflection unit 31 can tilt between the first position, the second position, the third position, and the fourth position. The first axis O1 and the second axis O2 are perpendicular to each other, and both the first axis O1 and the second axis O2 are parallel to the surface of the stage 10. In other embodiments, the deflection unit 31 can also be configured to tilt about three or more axes, and this application is not limited thereto.

[0068] In this embodiment, the galvanometer 100 defines mutually perpendicular first, second, and third directions X, Y, and Z. The first direction X is perpendicular to the plane on which the stage 10 is located, while the second and third directions Y and Z are parallel to the plane on which the stage 10 is located. The slide 30 is a quadrilateral, with its sides parallel to the second and third directions Z. The slide 30 is disposed on the stage 10 along the first direction X.

[0069] In this embodiment, the carrier 30 and the carrier 10 can be directly connected by silicone or other adhesives. By selecting the material of the adhesive, an elastic or rigid connection between the carrier 30 and the carrier 10 can be achieved, and this application does not impose any restrictions on this.

[0070] Please also refer to Figure 2 and Figure 3 The driving module 50 includes at least one magnet 51 and a driving wire group 53 corresponding to the magnet 51. The magnet 51 is fixed to the slide 30, and the driving wire group 53 is disposed on the stage 10 and is located on the side of the magnet 51 away from the lens 20. The driving wire group 53 includes a plurality of parallel current wires 531. The current wires 531 are used to conduct currents in the same direction to generate a magnetic field that drives the magnet 51 to move. The current directions of the multiple current wires 531 in each driving wire group 53 are the same, and the angle between them and the magnetization direction M of the corresponding magnet 51 is 70°-110°. That is, the angle between the extension direction of the current wires 531 and the magnetization direction M of the magnet 51 is 70°-110°.

[0071] Specifically, Figure 3Taking the illustrated driving module 50 as an example, the magnet 51 is fixed to the deflection unit 31 and is disposed on one side of the lens 20 along the third direction Z. The driving wire group 53 is disposed on the carrier 10 and is disposed on one side of the magnet 51 along the third direction Z. The magnet 51 and the driving wire group 53 are aligned in the first direction X, so that the driving wire group 53 passes through the magnetic flux lines of the magnetic field generated by the magnet 51. In other words, the magnetic pole 511 of the magnet 51 is disposed in correspondence with the driving wire group 53 in the first direction X, so that the magnetic flux lines emanating from the position of the magnetic pole 511 can cover as much of the driving wire group 53 as possible, thereby allowing the magnetic field generated by the driving wire group 53 to fully act on the magnet 51.

[0072] The angle between the magnetization direction M of the magnet 51 and the extension direction of the current line 531 in the corresponding drive line group 53 can fall within any range of 70°-75°, 75°-80°, 80°-85°, 85°-90°, 90°-95°, 95°-100°, 100°-105°, and 105°-110°. According to the left-hand rule, the component of the current in the current line 531 in the direction perpendicular to the magnetization direction M of the magnet 51 can generate a Lorentz force under the action of the magnet 51. By setting the angle between the magnetization direction M of the magnet 51 and the extension direction of the current line 531 in the corresponding drive line group 53 to 70°-110°, the current line 531 can be subjected to a certain Lorentz force, thereby generating a reaction force on the magnet 51 to drive the magnet 51 to move.

[0073] In this embodiment, the magnetization direction M of the magnet 51 is perpendicular to the extension direction of the current lines 531 in the corresponding drive line group 53. According to the left-hand rule, when the magnetization direction M of the magnet 51 is perpendicular to the extension direction of the current lines 531, the Lorentz force exerted on the current lines 531 after energization is maximized. Therefore, by setting the magnetization direction M of the magnet 51 perpendicular to the extension direction of the current lines 531 in the corresponding drive line group 53, the Lorentz force exerted on the current lines 531 can be more effective, and the reaction force exerted on the magnet 51 can also be more effective, thereby increasing the movement amplitude of the magnet 51 and, in turn, the deflection amplitude of the lens 20. In actual manufacturing, due to precision reasons, the magnetization direction M of the magnet 51 may not be completely perpendicular to the extension direction of the current lines 531 in the corresponding drive line group 53. That is, the angle between the magnetization direction M of the magnet 51 and the extension direction of the current lines 531 in the corresponding drive line group 53 may be in the range of 85°-95°, with an error of ±5°.

[0074] In this embodiment, the driving wire group 53 can be embedded in the carrier 10, and multiple current lines 531 can be arranged in parallel in the first direction X and / or the third direction Z, thereby increasing the number of current lines 531, thereby increasing the strength of the magnetic field generated by the driving wire group 53, and enhancing the reaction force exerted on the magnet 51.

[0075] In another embodiment, see Figure 4 The driving wire group 53 can also be disposed on the surface of the carrier 10, with the multiple current wires 531 arranged in parallel in the third direction Z. In this case, a gap can be left between the carrier 30 and the carrier 10, so that the magnet 51 can be aligned with the driving wire group 53. In other embodiments, the driving wire group 53 can also be disposed on both the surface and the interior of the carrier 10, and this application does not limit this.

[0076] Please refer to Figure 2 In this embodiment, the included angle between the extension directions of any two current lines 531 is less than 10°. Specifically, the closer the multiple current lines 531 are to being parallel, the stronger the magnetic field generated by the drive line group 53. However, in actual manufacturing, due to machining precision, the multiple current lines 531 may not be completely parallel. By setting the included angle between the extension directions of any two current lines 531 to be less than 10°, a certain degree of error between the current lines 531 can be tolerated, balancing production costs and energy efficiency during power conversion.

[0077] In this embodiment, multiple current lines 531 are arranged in parallel. Specifically, the multiple current lines 531 are connected in parallel so that the current input from one end of the driving line group 53 can pass through the multiple current lines 531 at the same time and be output from the other end.

[0078] The galvanometer 100 provided in the embodiment of the present application can fully utilize the space of the carrier 10 by setting a plurality of current lines 531 connected in parallel, and setting the plurality of current lines 531 in parallel, thereby increasing the number of current lines 531 as much as possible, thereby increasing the strength of the magnetic field generated when the driving line group 53 is energized, thereby increasing the reaction force on the magnet 51, and thereby increasing the movement amplitude of the magnet 51.

[0079] In another embodiment, please refer to Figure 5 and Figure 6 The driving wire group 53 includes a coil 53a, which includes multiple current wires 531 on the side close to the magnet 51 and multiple conductive wires 533 on the side away from the magnet 51. The current wires 531 and the conductive wires 533 are spaced apart. Specifically, the magnet 51 can also be driven by the coil 53a. There is a gap 532 between the current wires 531 and the conductive wires 533, so that the conductive wires 533 are away from the magnet 51, thereby preventing the magnetic field generated by the conductive wires 533 from affecting the magnet 51. In other embodiments, please refer to Figure 7 A magnetoresistive element 57 may be provided between the conductive line 533 and the current line 531 to block the magnetic field of the conductive line 533 from acting on the magnet 51, thereby further avoiding mutual interference between the magnetic field generated by the conductive line 533 and the magnetic field generated by the current line 531.

[0080] Please continue reading Figure 2 and Figure 3 The drive module 50 includes a plurality of magnets 51 and a plurality of drive wire groups 53. Each magnet 51 corresponds to a drive wire group 53. The plurality of magnets 51 are disposed on at least two adjacent sides of the lens 20, and each drive wire group 53 corresponds to a magnet 51 disposed on the carrier 10. Specifically, in this embodiment, there are four magnets 51, and they are disposed in pairs on opposite sides of the lens 20 along the second direction Y and the third direction Z. The four drive wire groups 53 are disposed on the carrier 10, corresponding to the four magnets 51. That is, the four drive wire groups 53 are disposed in pairs on opposite sides of the accommodating hole 11 along the second direction Y and the third direction Z. The drive wire group 53 disposed on one side of the magnet 51 along the second direction Y has its current line 531 extending along the third direction Z. The magnetization direction M of the magnet 51 is oriented in the second direction Y, so that the reaction force on the magnet 51 is oriented in the first direction X. By adjusting the direction of the reaction force received by each magnet 51 , the deflecting portion 31 can be subjected to forces in different directions, thereby being tilted along the first axis O1 or the second axis O2 .

[0081] In other embodiments, the drive module 50 may include only one magnet 51 disposed on one side of the lens 20 along the second direction Y and another magnet 51 disposed on one side of the lens 20 along the third direction Z. By adjusting the force directions of the two magnets 51, the deflection unit 31 can be subjected to forces in different directions, thereby tilting along the first axis O1 or the second axis O2. The drive module 50 may also include only one magnet 51, so that the deflection unit 31 tilts only along one of the first axis O1 or the second axis O2. This is not a limitation of the present application.

[0082] The galvanometer 100 provided in the embodiment of the present application, by setting the magnetization direction M of the magnet 51 perpendicular to the direction of current flow in the current line 531, and providing the drive line group 53 including multiple parallel current lines 531, with the currents in the multiple current lines 531 in the same direction, makes the reaction force of the Lorentz force on the magnet 51 stronger, thereby improving the deflection capability of the galvanometer 100. In addition, the magnet 51 can be arranged in a position flush with the drive line group 53 in the first direction X, thereby reducing the thickness of the galvanometer 100.

[0083] See also Figure 8 The present invention also provides an optical engine 200, which includes a light source module 210 and the galvanometer mirror 100 of the above embodiment. The light source module 210 is used to emit image light L1, and the galvanometer mirror 100 is used to receive and refract the emitted image light L1. The galvanometer mirror 100 can emit the image light L1 in different directions by tilting the lens 20.

[0084] The optical engine 200 provided in the embodiment of the present application can improve space utilization by installing the galvanometer mirror 100 of the above embodiment. On the one hand, the thickness of the galvanometer mirror 100 itself is reduced, which can save the occupied area. On the other hand, because the galvanometer mirror 100 has a stronger deflection ability of the image light L1, the relative position between the galvanometer mirror 100 and the light source module 210 can be more flexibly set, thereby further improving space utilization.

[0085] The above description is merely an embodiment of the present application and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A galvanometer, characterized in that: include: carrier; a slide disposed on the stage, the slide being configured to tilt about at least a first axis between a first position and a second position relative to the stage; a lens fixed on the slide, for receiving and refracting the outgoing light; the lens can be tilted between the first position and the second position under the drive of the slide; as well as a driving module, located on at least one side of the lens, and configured to drive the slide to tilt around the first axis between the first position and the second position; In which, the driving module includes at least one magnet and a driving wire group arranged corresponding to the magnet, the magnet is fixed on the carrier, and the driving wire group is arranged on the carrier and is located on the side of the magnet away from the lens; the driving wire group includes multiple parallel current lines, which are used to conduct current to generate a magnetic field for driving the magnet to move; the current directions of the multiple current lines in each driving wire group are the same, and the angle between them and the magnetization direction of the corresponding magnet is 70°-110°.

2. The galvanometer according to claim 1, characterized in that The magnetization direction of the magnet is perpendicular to the extension direction of the current wires in the corresponding driving wire group.

3. The galvanometer according to claim 1, wherein: The magnet and the driving wire group are aligned in a first direction so that the driving wire group passes through the magnetic flux lines of the magnetic field generated by the magnet; the first direction is perpendicular to the magnetization direction of the magnet and the extension direction of the current line.

4. The galvanometer according to claim 1, characterized in that The current line is arranged on a side surface of the carrier or embedded in the carrier.

5. The galvanometer according to claim 1, wherein: The carrier is also configured to tilt around a second axis between a third position and a fourth position to drive the lens to tilt between the third position and the fourth position; the driving module is also used to drive the lens to tilt around the second axis between the third position and the fourth position.

6. The galvanometer according to claim 5, characterized in that: The driving module includes multiple magnets and multiple driving line groups, each of the magnets corresponds to one driving line group, the multiple magnets are at least arranged on at least two adjacent sides of the lens, and each of the driving line groups corresponds to one magnet arranged on the carrier.

7. The galvanometer according to claim 1, wherein: A plurality of the current lines are arranged in parallel.

8. The galvanometer according to claim 1, wherein: The driving wire group includes a coil, and the coil includes a plurality of current wires on a side close to the magnet and a conducting wire on a side away from the magnet, wherein the conducting wire is spaced apart from the current wires.

9. The galvanometer according to claim 8, characterized in that: A magnetoresistive element is provided between the conductive line and the current line, and the magnetoresistive element is used to block the magnetic field of the magnet from being acted upon by the conductive line.

10. The galvanometer according to claim 1, characterized in that: It also includes a control module, which is electrically connected to the driving line group and is used to control the current on and off, current direction and current size in the driving line group.

11. An optical machine, characterized in that: include: A light source module, used for emitting image light; The galvanometer according to any one of claims 1 to 10, configured to receive and refract the image light.

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