Photoetching machine camera position adjusting mechanism

Abstract

The utility model discloses a position adjusting mechanism for a camera of a photoetching machine, which comprises a strip-shaped seat and four guide strips symmetrically fixed on the inner wall of the strip-shaped seat, the guide strips are symmetrically distributed pairwise, an insertion plate is slidably inserted between the guide strips, a rack is fixedly connected to the bottom of the insertion plate, and the rack is fixedly connected to the bottom of the strip-shaped seat. A power gear is rotatably arranged between the inner walls of the strip-shaped seat through a driving shaft, a supporting frame is fixedly connected to the end of the inserting plate, a positioning strip is rotatably arranged in the supporting frame through a rotating shaft, and a camera is fixedly connected to the end of the positioning strip. According to the utility model, the first motor is started to drive the worm to rotate, the worm drives the worm gear to rotate, the worm gear drives the power gear to rotate through the driving shaft, the power gear drives the insertion plate to linearly move through the rack, and the insertion plate drives the camera arranged at the end part of the insertion plate to linearly move, so that the position of the camera is adjusted, and the adjustment is more convenient and faster than manual adjustment.

Description

Technical Field

[0001] The utility model relates to the technical field of photolithography machines, in particular to a camera position adjustment mechanism for a photolithography machine. Background Art

[0002] Photolithography is a crucial process in semiconductor manufacturing. It involves sequentially transferring chip patterns from a series of mask sheets to the corresponding layers of a silicon wafer through exposure. It is considered a core step in large-scale integrated circuit manufacturing. This complex and time-consuming photolithography process is primarily performed by a photolithography machine, which consists of a camera and a wafer placement plate. The camera is used to capture images of wafers on the plate to collect relevant information and facilitate the movement of wafers into and out of the photolithography process.

[0003] Currently, in order to adjust the position of the camera, the device needs to be shut down and then the camera position needs to be adjusted manually. This step is cumbersome and inconvenient to use. Utility Model Content

[0004] (1) Technical problems solved

[0005] In view of the deficiencies in the prior art, the present invention provides a camera position adjustment mechanism for a lithography machine, which solves the problems raised in the above-mentioned background technology.

[0006] (2) Technical solution

[0007] To achieve the above objectives, the present invention is implemented through the following technical solutions: a photolithography machine camera position adjustment mechanism, including a bar seat, guide bars symmetrically fixed to the inner wall of the bar seat, the number of the guide bars is four, and they are symmetrically distributed in pairs, and a plug-in plate is slidably inserted between the guide bars, and a rack is fixedly connected to the bottom of the plug-in plate, a power gear is arranged between the inner walls of the bar seat through a driving shaft, the end of the plug-in plate is fixedly connected to a support frame, a positioning bar is arranged in the support frame through a rotating shaft, and the end of the positioning bar is fixedly connected to a camera.

[0008] Preferably, the end of the drive shaft is fixedly connected to a worm gear, the outer side wall of the strip seat is fixedly mounted with a first motor, the output end of the first motor is fixedly connected to a worm, and the worm is in meshing contact with the worm gear.

[0009] Preferably, the end of the rotating shaft is fixedly connected to a driven gear, the top of the plug plate is fixedly installed with a second motor, the output end of the second motor is fixedly connected to a driving gear, and the driving gear is in meshing contact with the driven gear.

[0010] Preferably, the inserting plate is a flat plate structure, and the inserting plate is in contact with the side wall of the guide bar.

[0011] Preferably, the front and rear sides of the strip-shaped seat are fixedly connected with side branches, and the side branches are provided with openings.

[0012] Preferably, the opening is waist-shaped.

[0013] (3) Beneficial effects

[0014] The utility model provides a camera position adjustment mechanism for a lithography machine, which has the following beneficial effects:

[0015] 1. In the present invention, the first motor is started to drive the worm to rotate, the worm drives the worm wheel to rotate, the worm wheel drives the power gear to rotate through the drive shaft, the power gear drives the plug plate to move linearly through the rack, and the plug plate drives the camera set at its end to move linearly, thereby adjusting its position. Compared with manual adjustment, it is more convenient and quick.

[0016] 2. In the present invention, the second motor is started to drive the driving gear to rotate, the driving gear drives the driven gear to rotate, the driven gear drives the positioning bar to rotate through the rotating shaft, and the positioning bar drives the camera at its end to rotate to adjust the camera angle. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a front-view stereoscopic structural diagram of a camera position adjustment mechanism for a lithography machine proposed in the present invention;

[0018] Figure 2 This is a left-view stereoscopic structural diagram of a camera position adjustment mechanism for a lithography machine proposed in the present invention;

[0019] Figure 3 for Figure 2 A magnified structure diagram.

[0020] In the figure: 1. Bar seat; 2. Guide bar; 3. Insert plate; 4. Rack; 5. Drive shaft; 6. Power gear; 7. Worm gear; 8. Worm; 9. First motor; 10. Support frame; 11. Positioning bar; 12. Camera; 13. Driven gear; 14. Drive gear; 15. Second motor; 16. Rotating shaft; 17. Side support bar; 171. Opening. DETAILED DESCRIPTION

[0021] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0022] See also Figures 1 to 3The present invention provides a technical solution: a camera position adjustment mechanism for a photolithography machine, comprising a bar seat 1, a guide bar 2 symmetrically fixed to the inner wall of the bar seat 1, the number of the guide bars 2 being four, symmetrically distributed in pairs, an inserting plate 3 being slidably inserted between the guide bars 2, and a rack 4 being fixedly connected to the bottom of the inserting plate 3. A power gear 6 is provided between the inner walls of the bar seat 1 through a driving shaft 5, and the end of the driving shaft 5 is rotatably inserted on the side wall of the bar seat 1, and the power gear 6 is coaxially fixed on the driving shaft 5. The end of the inserting plate 3 is fixedly connected to a support frame 10, and a positioning bar 11 is rotatably provided in the support frame 10 through a rotating shaft 16. Specifically, both ends of the rotating shaft 16 are rotatably inserted on the side wall of the support frame 10, the positioning bar 11 is fixedly connected to the driving shaft 5, and the end of the positioning bar 11 is fixedly connected to a camera 12. The camera 12 of the photolithography machine is used to accurately align the pattern on the photolithography mask and the wafer; it captures real-time images of the pattern, ensures high precision and high quality in the photolithography process, and supports micron-level or even nanometer-level detail processing. The camera 12 is a prior art.

[0023] The end of the driving shaft 5 is fixedly connected to a worm gear 7 , the outer wall of the strip seat 1 is fixedly mounted with a first motor 9 , the output end of the first motor 9 is fixedly connected to a worm 8 , and the worm 8 is in meshing contact with the worm gear 7 .

[0024] Start the first motor 9 to drive the worm 8 to rotate, the worm 8 drives the worm wheel 7 to rotate, the worm wheel 7 drives the power gear 6 to rotate through the drive shaft 5, the power gear 6 drives the plug board 3 to move linearly through the rack 4, and the plug board 3 drives the camera 12 set at its end to move linearly, thereby adjusting its position, which is more convenient and faster than manual adjustment.

[0025] The end of the rotating shaft 16 is fixedly connected to the driven gear 13 , the top of the inserting plate 3 is fixedly installed with a second motor 15 , the output end of the second motor 15 is fixedly connected to the driving gear 14 , and the driving gear 14 is in meshing contact with the driven gear 13 .

[0026] The second motor 15 is started to drive the driving gear 14 to rotate, and the driving gear 14 drives the driven gear 13 to rotate. The driven gear 13 drives the positioning bar 11 to rotate through the rotating shaft 16. The positioning bar 11 drives the camera 12 at its end to rotate and adjust the angle of the camera 12.

[0027] The inserting plate 3 is a flat plate structure, and the inserting plate 3 contacts the side wall of the guide bar 2. The four guide bars 2 achieve the purpose of linearly guiding the inserting plate 3 to avoid deviation from the predetermined trajectory, thereby improving the accuracy of the system.

[0028] The front and rear sides of the bar seat 1 are fixedly connected with side support bars 17 , which have openings 171 in a waist shape. Fasteners are provided inside the openings 171 to fix the side support bars 17 to external components.

[0029] The above shows and describes the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely preferred examples of the present invention and are not intended to limit the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention, and such changes and improvements fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. A camera position adjustment mechanism for a lithography machine, characterized in that: The invention comprises a bar seat (1), a guide bar (2) symmetrically fixed to the inner wall of the bar seat (1), four guide bars (2) being symmetrically distributed in pairs, a plug-in plate (3) being slidably inserted between the guide bars (2), a rack (4) being fixedly connected to the bottom of the plug-in plate (3), a power gear (6) being rotatably provided between the inner walls of the bar seat (1) via a driving shaft (5), a support frame (10) being fixedly connected to the end of the plug-in plate (3), a positioning bar (11) being rotatably provided in the support frame (10) via a rotating shaft (16), and a camera (12) being fixedly connected to the end of the positioning bar (11).

2. A camera position adjustment mechanism for a lithography machine according to claim 1, characterized in that: The end of the drive shaft (5) is fixedly connected to a worm gear (7), the outer side wall of the strip seat (1) is fixedly mounted with a first motor (9), the output end of the first motor (9) is fixedly connected to a worm (8), and the worm (8) is in meshing contact with the worm gear (7).

3. The camera position adjustment mechanism for a lithography machine according to claim 1, wherein: The end of the rotating shaft (16) is fixedly connected to a driven gear (13), the top of the inserting plate (3) is fixedly mounted with a second motor (15), the output end of the second motor (15) is fixedly connected to a driving gear (14), and the driving gear (14) is in meshing contact with the driven gear (13).

4. The camera position adjustment mechanism for a lithography machine according to claim 1, wherein: The inserting plate (3) is a flat plate structure, and the inserting plate (3) is in contact with the side wall of the guide bar (2).

5. The camera position adjustment mechanism for a lithography machine according to claim 1, wherein: The front and rear sides of the strip-shaped seat (1) are both fixedly connected with side branches (17), and the side branches (17) are provided with openings (171).

6. The camera position adjustment mechanism for a lithography machine according to claim 5, characterized in that: The opening (171) is waist-shaped.

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