Anti-loosening overhead traveling crane disc OHT mounting structure

Abstract

The utility model relates to an anti-loosening crown block disc OHT mounting structure which is arranged on a wafer box POD and a crown block disc OHT. The anti-skidding structure comprises a strength screw column arranged on the wafer box POD, an anti-skidding screw column arranged on the crown block disc OHT, and a printing screw. The strength screw column comprises a strength column and a fixing column. And a reinforcing layer is arranged in the strength column. The anti-skid screw column comprises an anti-skid screw column body and an anti-skid rib arranged on the inner periphery of the anti-skid screw column body. The antiskid ribs are provided with installation grooves, and the installation grooves are provided with printing patterns. The printing screw comprises a screw head and a screw rod. And a clamping edge is arranged at the bottom of the screw head. And the card edge is provided with a print. According to the anti-loosening crown block disc OHT mounting structure, the reinforcing layer is arranged on the strength column, the anti-skid ribs are arranged in the anti-skid screw column, and the printed screws are used, so that the wafer box POD and the crown block disc OHT can be stably connected for a long time and are difficult to shake.

Description

Technical Field

[0001] The utility model relates to the field of wafer box overhead travelling plate OHT, in particular to an anti-loosening overhead travelling plate OHT mounting structure. Background Art

[0002] Overhead handling system (OHT) is an important automatic handling system in semiconductor manufacturing plants. It greatly improves the overall production process by improving material transportation efficiency, reducing labor costs and mitigating contamination risks.

[0003] In the wafer carrier wafer box POD overhead crane plate OHT installation mechanism system, since the overhead crane plate OHT needs to be fixed on the top of the wafer box POD, and the overhead crane system mechanical transport vehicle grabs the overhead crane plate OHT and hangs it on the top of the FAB workshop, transporting wafers on the overhead crane system track, it is subject to stress for a long time. It is necessary to ensure that the connection between the overhead crane plate OHT and the wafer box POD is reliable, the dimensions are stable, and the fixing mechanism does not loosen under vibration during transportation. Utility Model Content

[0004] In view of this, the present invention provides an anti-loosening overhead travelling block (OHT) mounting structure to solve the above-mentioned problem.

[0005] A structure for mounting an overhead traveling table (OHT) to prevent loosening is provided on a wafer box POD and an overhead traveling table OHT. It comprises four strength screw columns provided on the wafer box POD, four anti-slip screw columns provided on the overhead traveling table OHT, and a plurality of stamped screws for locking the strength screw columns and the anti-slip screw columns. The strength screw columns are provided on the side of the wafer box POD facing the overhead traveling table OHT, and extend toward the overhead traveling table OHT. The strength screw columns comprise a strength column and a fixing column provided on the wafer box POD. A reinforcement layer is uniformly provided on the inner sidewall of the strength column, and the strength column and the reinforcement layer form a first screw fixing hole. A plurality of different fixing columns are respectively provided in the corner direction of the overhead traveling table OHT. The anti-slip screw column comprises an anti-slip screw column body and an anti-slip rib provided on the inner circumference of the anti-slip screw column body. The position where the anti-slip screw column is provided on the overhead traveling table OHT corresponds to the position where the strength screw column is provided on the wafer box POD. The anti-slip screw column body is arranged on the side of the overhead crane OHT away from the wafer box POD, and is extended toward the wafer box POD. The anti-slip ribs are evenly arranged on the inner side wall of the anti-slip screw column body at one end opposite to the wafer box POD. The anti-slip rib is provided with a mounting groove on the side away from the wafer box POD, and a plurality of printed protrusions are evenly provided at the bottom of the mounting groove. The anti-slip rib and the anti-slip screw column body form a second screw fixing hole. The printed screw includes a screw head and a screw rod. A clamping edge is provided at the bottom of the screw head, and a printed groove is provided on the clamping edge facing the screw rod. The anti-slip screw column is sleeved on the outer periphery of the strength column, and the anti-slip screw column is provided above the fixing column. The screw locking is provided in the first and second screw fixing holes, and the clamping edge of the printed screw fits tightly with the mounting groove.

[0006] Furthermore, the strength screw column also includes a fixing column arranged on the wafer box POD, and a plurality of different fixing columns are respectively arranged in the corner directions of the overhead traveling block OHT.

[0007] Furthermore, the outer diameter of the fixing column is greater than the outer diameter of the strength column, and the strength column and the fixing column are arranged on the same central axis.

[0008] Furthermore, a plurality of support blocks are equidistantly provided on the outer circumference of the fixing column.

[0009] Furthermore, the depth of the mounting groove is equal to the height of the clamping edge.

[0010] Compared with the prior art, the utility model provides an anti-loosening overhead crane plate OHT installation structure that is provided with the strength screw column and the anti-slip screw column to ensure that the wafer box POD and the overhead crane plate OHT can still maintain a stable connection without loosening after long-term connection. The strength screw column is provided with the reinforcement layer to enhance the structural strength and reduce the shaking caused by wear of the strength screw column after long-term connection with the printed screw. The anti-slip rib is provided on the anti-slip screw column, and the anti-slip rib is provided with a mounting groove on the side away from the wafer box POD. The bottom of the mounting groove is provided with the printed protrusion that tightly engages with the printed groove on the printed screw, thereby increasing the friction between the printed screw and the anti-slip screw column after installation, and preventing the wafer box POD and the overhead crane plate OHT from shaking. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 The utility model provides a structural schematic diagram of an anti-loosening overhead crane plate OHT installation structure.

[0012] Figure 2 for Figure 1 Exploded view of the anti-loosening overhead crane plate OHT mounting structure.

[0013] Figure 3 for Figure 2 A partial enlarged view of point A in the middle.

[0014] Figure 4 It is a top view of the overhead travelling plate OHT of the anti-loosening overhead travelling plate OHT mounting structure.

[0015] Figure 5 for Figure 2 Schematic diagram of the structure of the printed screw.

[0016] Figure 6 for Figure 4 A schematic structural diagram of the anti-slip rib from another perspective. DETAILED DESCRIPTION

[0017] The following is a further detailed description of specific embodiments of the present invention. It should be understood that the description of the embodiments of the present invention herein is not intended to limit the scope of protection of the present invention.

[0018] See also Figures 1 to 6, which is a schematic diagram of the structure of an anti-loosening overhead travelling table OHT mounting structure provided by the present invention. The anti-loosening overhead travelling table OHT mounting structure includes four strength screw posts 10 provided on a wafer pod POD 100, four anti-slip screw posts 20 provided on an overhead travelling table OHT 200, and a plurality of stamped screws 30 for locking the strength screw posts 10 and the anti-slip screw posts 20. It is contemplated that the anti-loosening overhead travelling table OHT mounting structure may also include other functional modules, such as mounting holes, which are well known to those skilled in the art and will not be further described here.

[0019] The anti-loosening overhead crane plate (OHT) mounting structure is installed on the wafer pod (POD) 100 and the overhead crane plate (OHT) 200. The wafer pod (POD) 100 effectively handles and stores wafers, ensuring their safety and efficiency during processing. The overhead crane plate (OHT) 200 is a critical automated handling system in semiconductor manufacturing plants, significantly improving the overall production process by increasing material transportation efficiency, reducing labor costs, and mitigating contamination risks. The wafer pod (POD) 100 and the overhead crane plate (OHT) 200 are common technologies and will not be further described here.

[0020] The strength screw column 10 is arranged on the side of the wafer box POD100 facing the overhead traveling platform OHT200 and extends toward the overhead traveling platform OHT200. The strength screw column 10 includes a fixing column 11 arranged on the wafer box POD100 and a strength column 12 arranged above the fixing column 11.

[0021] Multiple fixing columns 11 are positioned along the corners of the overhead crane platform (OHT) 200. These columns 11 are used to support the anti-slip screw columns 20. The outer diameter of each fixing column 11 is greater than the outer diameter of the strength column 12, forming a flat surface on each fixing column 11 to receive the anti-slip screw columns 20. Multiple support blocks 111 are evenly spaced around the perimeter of each fixing column 11 to prevent deformation of the fixing column 11 due to receiving the anti-slip screw columns 20, which could affect the installation of the wafer cassette (POD) 100 and the overhead crane platform (OHT) 200.

[0022] The strength column 12 and the fixing column 11 are arranged on the same central axis and are hollow cylindrical. A reinforcement layer 121 is evenly distributed on the inner sidewall of the strength column 12. This reinforcement layer 121 is made of a high-strength material, preferably a super-engineered material, to enhance the structural strength of the strength column 12. The reinforcement layer 121 is hollow and cylindrical and is disposed within the strength column 12. The strength column 12 and the reinforcement layer 121 form a first screw fixing hole. The diameter of the first screw fixing hole is equal to the diameter of the stamping screw 30, for receiving the stamping screw 30.

[0023] The anti-slip screw post 20 includes an anti-slip screw post body 21 and an anti-slip rib 22 provided on the inner side wall of the anti-slip screw post body 21. The position of the anti-slip screw post 20 on the overhead crane plate OHT200 corresponds to the position of the strength screw post 10 on the wafer pod POD100, so that the anti-slip screw post 20 is sleeved on the strength screw post 10.

[0024] The anti-slip screw column body 21 is located on the side of the overhead crane platen OHT 200 away from the wafer pod POD 100 and extends toward the wafer pod POD 100. The anti-slip screw column body 21 is hollow cylindrical. The inner diameter of the anti-slip screw column body 21 is equal to the outer diameter of the strength column 12. During installation, the anti-slip screw column body 21 is sleeved around the outer circumference of the strength column 12.

[0025] The anti-slip ribs 22 are evenly distributed on the inner sidewall of the anti-slip screw column body 21 at the end facing the wafer pod 100. The anti-slip ribs 22 are hollow cylindrical, with a mounting slot 221 defined on the side facing away from the wafer pod 100. The anti-slip ribs 22 and the anti-slip screw column body 21 form a second screw fixing hole, the diameter of which is equal to that of the printed screw 30, for mounting the printed screw 30. A plurality of printed protrusions 2211 are evenly distributed across the bottom of the mounting slot 221. The configuration of the mounting slot 221 is related to the printed screw 30, described below, and will be described in detail in conjunction with the printed screw 30.

[0026] The printed screw 30 includes a screw head 31 and a screw rod 32. A clamping edge 311 is provided at the bottom of the screw head 31. The diameter of the clamping edge 311 is equal to the outer diameter of the anti-slip rib 22, and the clamping edge 311 is provided with a printing groove 3111 on the side facing the screw rod 32. The shape and size of the printing groove 3111 correspond to the setting of the printing protrusion 2211, so that the printing protrusion 2211 can be tightly clamped in the printing groove 3111. The groove depth of the installation groove 221 is equal to the height of the clamping edge 311, so that the clamping edge 311 can be tightly installed in the installation groove 221. The printing groove 3111 of the clamping edge 311 and the printing protrusion 2211 of the installation groove 221 generate friction, preventing the screw head 31 and the anti-slip rib 22 from shaking after installation. The screw rod 32 is used to be installed in the first and second screw fixing holes, and is used to lock the strength screw column 10 and the anti-slip screw column 20.

[0027] After installation, the anti-slip screw post 20 is sleeved around the outer periphery of the strength post 12, and the anti-slip screw post 20 is positioned above the fixing post 11. The screw 32 is securely mounted in the first and second screw fixing holes to secure the strength screw post 10 and the anti-slip screw post 20. The printed protrusion 2211 is tightly secured in the printed groove 3111, and the locking edge 311 of the printed screw 30 fits tightly against the mounting groove 221 to increase friction and prevent the screw head 31 from shaking with the anti-slip rib 22.

[0028] Compared with the prior art, the present invention provides an anti-loosening overhead crane plate OHT installation structure that is provided with the strength screw column 10 and the anti-slip screw column 20 to ensure that the wafer box POD100 and the overhead crane plate OHT200 can still maintain a stable connection without loosening after long-term connection. The strength screw column 10 is provided with the reinforcement layer 121 to enhance the structural strength and reduce the shaking caused by wear of the strength screw column 10 after long-term connection with the printed screw 30. The anti-slip screw column 20 is provided with the anti-slip rib 22, and the anti-slip rib 22 is provided with a mounting groove 221 on the side away from the wafer box POD100. The bottom of the mounting groove 221 is provided with the printed protrusion 2211, which is tightly engaged with the printed groove 3111 on the printed screw 20, thereby increasing the friction between the printed screw 30 and the anti-slip screw column 20 after installation, and preventing the wafer box POD100 and the overhead crane plate OHT200 from shaking.

[0029] The above are only preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Any modifications, equivalent replacements or improvements within the spirit of the present invention are included in the scope of the claims of the present invention.

Claims

1. An anti-loosening overhead travelling table (OHT) mounting structure, which is provided on a wafer cassette (POD) and an overhead travelling table (OHT), and is characterized by: The anti-loosening overhead crane plate OHT mounting structure includes four strength screw columns arranged on the wafer box POD, four anti-slip screw columns arranged on the overhead crane plate OHT, and a plurality of stamped screws for locking the strength screw columns and the anti-slip screw columns. The strength screw column is arranged on the side of the wafer box POD facing the overhead crane plate OHT, and the extension direction is arranged toward the overhead crane plate OHT. The strength screw column includes a strength column and a fixing column arranged on the wafer box POD. The inner side wall of the strength column is evenly provided with a reinforcement layer. The strength column and the reinforcement layer form a first screw fixing hole. A plurality of different fixing columns are respectively arranged in the corner direction of the overhead crane plate OHT. The anti-slip screw column includes an anti-slip screw column body and an anti-slip rib arranged on the inner circumference of the anti-slip screw column body. The position of the anti-slip screw column on the overhead crane plate OHT corresponds to The strength screw column is arranged at a position on the wafer box POD, the anti-slip screw column body is arranged on the side of the overhead crane plate OHT away from the wafer box POD, and is extended toward the wafer box POD. The anti-slip ribs are evenly arranged on the inner wall of the anti-slip screw column body at one end opposite to the wafer box POD, the anti-slip rib is provided with a mounting groove on the side away from the wafer box POD, and a plurality of printed protrusions are evenly provided at the bottom of the mounting groove. The anti-slip rib and the anti-slip screw column body form a second screw fixing hole, and the printed screw includes a screw head and a screw rod. The bottom of the screw head is provided with a clamping edge, and the clamping edge is provided with a printed groove toward the side of the screw. The anti-slip screw column is sleeved on the outer periphery of the strength column, and the anti-slip screw column is provided above the fixing column. The screw locking is arranged in the first and second screw fixing holes, and the clamping edge of the printed screw is tightly fitted with the mounting groove.

2. The anti-loosening OHT mounting structure of claim 1, characterized in that: The outer diameter of the fixing column is greater than the outer diameter of the strength column, and the strength column and the fixing column are arranged on the same central axis.

3. The anti-loosening OHT mounting structure of claim 1, characterized in that: A plurality of support blocks are equidistantly arranged on the outer circumference of the fixing column.

4. The anti-loosening OHT mounting structure of claim 1, characterized in that: The depth of the mounting groove is equal to the height of the clamping edge.

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