Clamping device and lead bonding equipment

Abstract

The utility model belongs to the technical field of semiconductor packaging, and relates to a clamping device which comprises a first positioning assembly, a tool jig and a pressing plate assembly, the tool jig is fixed on the first positioning assembly through the positioning effect of the first positioning assembly, a product is fixed in the tool jig through the positioning effect of the tool jig, and the pressing plate assembly is arranged on the tool jig. And the pressing plate assembly is covered on the product. The tool jig can fix and position the multiple products, meanwhile, the first positioning assembly can also fix and position the tool jig, the multiple products can be repeatedly and accurately positioned on the clamping device, the situation that the quality is poor during welding is avoided, the convenience and accuracy of product positioning are improved, and the production efficiency is improved. And meanwhile, the clamping device can be adapted to different products by replacing different tool jigs, so that the clamping device is adapted to more lead bonding equipment, the price is low, the maintenance is convenient, the equipment cost is reduced, and the equipment has higher cost performance.

Description

Technical Field

[0001] The present application relates to the field of semiconductor packaging technology, and more particularly, to a clamping device and a wire bonding device including the clamping device. Background Art

[0002] The chip packaging process typically includes bonding, which involves attaching gold wires to the pads of the leadframe. Traditional bonding equipment uses manual wire bonding, resulting in slow bonding speeds, poor bonding quality, and low positioning accuracy.

[0003] To adapt to the increasing diversification of semiconductor packaging products in the market, new packaging types are emerging one after another. However, these wire bonding equipment cannot repeat the positioning of products well, resulting in poor welding quality and increased costs, and cannot meet the diverse product needs of the market. Utility Model Content

[0004] The technical problem to be solved by the embodiments of the present application is that traditional bonding equipment cannot repeat the positioning of products well, resulting in poor welding quality and increased costs.

[0005] In order to solve the above technical problems, the present application provides a clamping device, which adopts the following technical solutions, including:

[0006] a first positioning component;

[0007] A tooling fixture, fixed on the first positioning component by the positioning function of the first positioning component, and used for placing the product;

[0008] a pressing plate assembly, disposed on the first positioning assembly and used for fixing to the product;

[0009] When the clamping device clamps the product, the product is fixed in the tooling fixture by the positioning function of the tooling fixture, and the pressure plate assembly covers the product.

[0010] Furthermore, the tooling fixture includes a material table and a second positioning component arranged on the material table for positioning the product, and the material table is provided with a plurality of accommodating holes for placing the product.

[0011] Furthermore, the second positioning assembly includes a connecting piece and a first spring plunger provided on the connecting piece. A positioning hole is provided on the product, and the first spring plunger is inserted into the positioning hole during fixation.

[0012] Furthermore, the first positioning assembly includes a fixing plate and at least one first positioning block and at least one second positioning block provided on the fixing plate, and the first positioning block and the second positioning block are used to position the tooling fixture.

[0013] Furthermore, a positioning groove is provided on the material table, and a second spring plunger is provided on the second positioning block. When fixed, the second spring plunger is inserted into the positioning groove.

[0014] Furthermore, the pressing plate assembly includes a pressing plate rotatably arranged on the fixing plate and a fixing member for fixing the pressing plate. When the pressing plate is covered on the material table, the product is positioned.

[0015] Furthermore, the fixing member is selected from one of a toggle clamp, a pneumatic clamp, and a buckle.

[0016] Furthermore, a spring is provided on one end of the pressing plate connected to the fixing plate, so that the pressing plate has a tendency to press against the product.

[0017] Furthermore, the clamping device also includes an adjusting mechanism, which includes a bracket, an adjusting device for adjusting the position of the first positioning assembly on the bracket, the adjusting device includes a knob, a screw assembly linked to the knob, and a transmission member linked to the screw assembly, the first positioning assembly is fixedly arranged on the transmission member, and the transmission member is slidably arranged on the bracket, so that the knob drives the transmission member and the first positioning assembly to move relative to the bracket through the screw assembly.

[0018] In order to solve the above technical problems, an embodiment of the present application further provides a wire bonding device, which adopts the following technical solution: the wire bonding device includes: a workbench system, a welding head system and the clamping device.

[0019] Compared with the prior art, the embodiments of the present application mainly have the following beneficial effects: the tooling fixture can fix and position multiple products, and the first positioning component can also fix and position the tooling fixture, so that multiple products can be repeatedly and accurately positioned on the clamping device, avoiding poor quality during welding, and improving the convenience and accuracy of product positioning. At the same time, different tooling fixtures can be replaced to adapt to different products, so that the clamping device can adapt to more wire bonding equipment, which is cheap, easy to maintain, reduces equipment costs, and makes the equipment more cost-effective. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the solution of the present application, a brief introduction is given below to the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0021] Figure 1 This is one of the structural schematic diagrams of the clamping device provided in the embodiment of the present application;

[0022] Figure 2 This is the second structural diagram of the clamping device provided in the embodiment of the present application;

[0023] Figure 3 is an exploded view of the clamping device provided in an embodiment of the present application;

[0024] Figure 4 is a cross-sectional view of a clamping device provided in an embodiment of the present application;

[0025] Figure 5 yes Figure 4 A is an enlarged schematic diagram;

[0026] Figure 6 This is an exploded view of the tooling fixture provided in the embodiment of the present application;

[0027] Figure 7 1 is a schematic structural diagram of a first positioning assembly and a pressure plate assembly provided in an embodiment of the present application;

[0028] Figure 8 is an exploded view of the first positioning assembly and the pressure plate assembly provided in an embodiment of the present application;

[0029] Figure 9 is an exploded view of the adjustment mechanism provided in an embodiment of the present application;

[0030] Figure 10 Schematic diagram of the structure of the bracket provided in the embodiment of the present application;

[0031] Figure 11 It is a structural schematic diagram of the transmission part provided in an embodiment of the present application.

[0032] Figure numerals: 10, product; 101, positioning hole; 1, material table; 11, accommodating hole; 12, positioning groove; 2, second positioning assembly; 21, connecting piece; 22, first spring plunger; 3, fixing plate; 4, first positioning block; 5, second positioning block; 51, second spring plunger; 6, pressure plate; 61, spring; 62, bracket; 63, connecting shaft; 7, fixing piece; 8, knob; 81, transmission piece; 82, heating table; 9, screw assembly; 91, screw; 92, screw nut; 100, first positioning assembly; 200, tooling fixture; 300, pressure plate assembly; 400, adjustment mechanism. DETAILED DESCRIPTION

[0033] Unless otherwise defined, all technical and scientific terms used herein have the same meanings as commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of the application are only for the purpose of describing specific embodiments and are not intended to limit this application. The terms "including" and "having" and any variations thereof in the specification and claims of this application and the above-mentioned drawings are intended to cover non-exclusive inclusions. The terms "first", "second", etc. in the specification and claims of this application or the above-mentioned drawings are used to distinguish different objects, not to describe a specific order.

[0034] References herein to "embodiments" mean that a particular feature, structure, or characteristic described in connection with the embodiments may be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0035] As attached Figure 1 To the attached Figure 11 As shown, the embodiment of the present application further provides a clamping device, which adopts the following technical solution: the clamping device includes:

[0036] A first positioning assembly 100;

[0037] A fixture 200 is fixed on the first positioning assembly 100 by the positioning function of the first positioning assembly 100 and is used to place the product 10;

[0038] A pressing plate assembly 300 is provided on the first positioning assembly 100 and is used to be fixed on the product 10;

[0039] When the clamping device clamps the product 10, the product 10 is fixed in the fixture 200 by the positioning function of the jig 200, and the pressure plate assembly 300 covers the product 10. The jig 200 can fix and position multiple products 10, and the first positioning assembly 100 can also fix and position the jig 200, so that multiple products 10 can be repeatedly and accurately positioned on the clamping device, avoiding poor quality during welding and improving the convenience and accuracy of product positioning. At the same time, different jigs 200 can be replaced to adapt to different products 10, so that the clamping device can adapt to more wire bonding equipment. It is cheap and easy to maintain, which reduces equipment costs and makes the equipment more cost-effective.

[0040] As attached Figure 1 To the attached Figure 6 As shown, further, the jig 200 includes a material table 1 and a second positioning component 2 provided on the material table 1 for positioning the product 10. The material table 1 is provided with a plurality of receiving holes 11 for placing the product 10. The product 10 is fixed and positioned on the first positioning component 100 by the jig 200. The combination of the receiving holes 11 and the second positioning component 2 can repeatedly position the product 10, ensuring that the processing position remains unchanged each time, avoiding poor quality during welding, solving the problem that the product 10 cannot be fixed on old-style wire bonding equipment, and solving the problem of repeated positioning consistency when the product is used in batches on the wire bonding equipment, thereby improving the yield rate of the product 10. At the same time, by replacing different jigs 200 to adapt to different products 10, the clamping device can be adapted to more wire bonding equipment, reducing equipment costs and making the equipment more cost-effective.

[0041] As attached Figure 1 To the attached Figure 6 As shown, the second positioning assembly 2 further includes a connector 21 and a first spring plunger 22 disposed on the connector 21. The product 10 is provided with a positioning hole 101, and the first spring plunger 22 is inserted into the positioning hole 101 when fixed. The first spring plunger 22 can press the product 10 into position and restrict its rotation, effectively preventing the product 10 from moving, ensuring that each positioning is at the same position and height. This allows multiple products 10 to be repeatedly positioned on the clamping device, ensuring flatness during the wire bonding process, avoiding poor quality during welding, improving the convenience and accuracy of product positioning, meeting customers' pursuit of cost-effectiveness, and solving the problem of repeated positioning consistency when products are used in batches on wire bonding equipment.

[0042] Going further, the spring plunger is also called a ball plunger or a positioning bead / column. The spring plunger is a mechanical part with a spring installed inside the screw thread. The preload force is adjusted and the positioning function is realized by controlling the screw-in depth. The working principle of the spring plunger is to use the elastic force of the spring to push the top of the plunger of a sphere or other shape, thereby realizing precise end pressure control, so that the first spring plunger 22 can use the elastic force of the spring to push the ball against the positioning hole 101 to position the product 10. The positioning is accurate and easy to disassemble and assemble. The preload force on the product 10 can also be adjusted by controlling the screw-in depth to avoid damage to the product 10.

[0043] As attached Figure 1 To the attached Figure 5 and attached Figure 7 To the attached Figure 8 As shown, further, the first positioning assembly 100 includes a fixed plate 3 and at least one first positioning block 4 and at least one second positioning block 5 provided on the fixed plate 3. The first positioning block 4 and the second positioning block 5 are used to position the jig 200. The use of multiple first positioning blocks 4 and second positioning blocks 5 to position the jig 200 improves positioning accuracy, effectively prevents movement of the jig 200, and ensures that each positioning is in the same position. This allows multiple products 10 to be repeatedly positioned on the clamping device, ensuring flatness during the wire bonding process, avoiding poor quality during welding, improving the convenience and accuracy of product positioning, and satisfying customers' pursuit of cost-effectiveness.

[0044] Furthermore, the two first positioning blocks 4 are arranged perpendicular to each other, and the two first positioning blocks 4 form a right-angle positioning structure, which is conducive to repeated and accurate positioning of the tooling fixture 200, and the simple positioning mechanism also increases the convenience of its positioning.

[0045] As attached Figure 1 To the attached Figure 5 As shown, further, a positioning groove 12 is provided on the material table 1, and a second spring plunger 51 is provided on the second positioning block 5. When fixed, the second spring plunger 51 is inserted into the positioning groove 12. The second spring plunger 51 can press and position the jig 200, ensuring that each positioning is at the same position and the same height, that is, multiple products 10 can be repeatedly and accurately positioned on the clamping device, ensuring the flatness of the wire bonding process, avoiding poor quality during welding, and improving the convenience and accuracy of product positioning. At the same time, it also facilitates the disassembly and assembly of the jig 200, and the preload force on the jig 200 can be adjusted by controlling the screw-in depth to avoid damage to the jig 200.

[0046] Furthermore, the second spring plunger 51 positions the side of the product 10. In addition to the side positioning, a spring plunger, a pin, etc. can also be set in the accommodating hole 11, so that the spring plunger, the pin, etc. are inserted into the positioning hole at the bottom of the product 10 to position the bottom of the product 10. The double positioning method further enhances the accuracy of positioning.

[0047] Furthermore, the two second positioning blocks 5 are also arranged perpendicular to each other, and the two first positioning blocks 4 are arranged adjacent to each other, and the two second positioning blocks 5 are also arranged adjacent to each other, so that after the two first positioning blocks 4 form a right-angled position for the tooling fixture 200, the two second positioning blocks 5 press against the tooling fixture 200 on the other right-angled side, and the double positioning method further enhances the accuracy of positioning.

[0048] As attached Figure 1 To the attached Figure 5 and attached Figure 7 To the attached Figure 8 As shown, the pressing plate assembly 300 further includes a pressing plate 6 rotatably mounted on the fixing plate 3 and a fixing member 7 for fixing the pressing plate 6. When the pressing plate 6 is placed on the material table 1, the product 10 is positioned. The pressing plate 6 can axially position the product 10 in the axial direction of the product 10, preventing the product 10 from shifting, ensuring flatness during the wire bonding process, and allowing the product 10 to be repeatedly and accurately positioned on the clamping device.

[0049] As attached Figure 1 To the attached Figure 5 and attached Figure 7 To the attached Figure 8 As shown, the fixing member 7 is further selected from a toggle clamp, a pneumatic clamp, and a buckle. The toggle clamp is a fixture that secures the pressure plate 6 via a linkage mechanism. The toggle clamp type clamping structure is convenient and quick to operate, with a high clamping force, which can firmly hold the product and improve the bonding quality. The pneumatic clamp is a fixture that uses compressed air generated by a compressor to move and press. The buckle is a fixing member used to fasten the pressure plate 6 and the fixed plate 3. Either fixing member can secure the pressure plate 6 to the fixed plate 3, thereby axially positioning the product 10.

[0050] As attached Figure 1 To the attached Figure 5 and attached Figure 7 To the attached Figure 8As shown, further, a spring 61 is provided on one end of the pressing plate 6 connected to the fixing plate 3, so that the pressing plate 6 has a tendency to press against the product 10. The spring 61 can eliminate the virtual position between the pressing plate 6 and the product 10, ensuring that the pressing plate 6 always presses against the product 10, preventing the product 10 from shifting during bonding, ensuring the reliability of the press-fit, avoiding poor quality during welding, and improving product quality.

[0051] Furthermore, the pressure plate 6 is rotatably mounted on the fixed plate 3 via a rotating shaft, and the pressure plate 6 is flipped 180° or more, thereby achieving both a closed and an open state. Simultaneously, the rotating shaft is movably mounted on the fixed plate 3 via a connecting shaft 63. The spring 61 is sleeved on the connecting shaft 63, with one end of the spring 61 resting on the fixed plate 3 and the other end of the spring 61 resting on the end of the connecting shaft 63. This causes the pressure plate 6 to tend to approach the fixed plate 3 under the action of the spring 61. A layer of wear-resistant elastic material is provided on the contact surface between the pressure plate 6 and the product 10, further eliminating any gaps in the pressed state and improving service life. Of course, in addition to being provided with a wear-resistant elastic material, an elastic material having the same function can also be provided, or the pressure plate 6 can be made into a spring-type spring to give the pressure plate 6 a tendency to rest against the product 10.

[0052] As attached Figure 1 To the attached Figure 5 and attached Figure 9 To the attached Figure 11 As shown, further, the clamping device also includes an adjusting mechanism 400, the adjusting mechanism includes a bracket 62, an adjusting device for adjusting the position of the first positioning component 100 on the bracket 62, the adjusting device includes a knob 8, a screw assembly 9 linked to the knob 8, and a transmission member 81 linked to the screw assembly 9, the first positioning component 100 is fixedly arranged on the transmission member 81, and the transmission member 81 is slidably arranged on the bracket 62, so that the knob 8 drives the transmission member 81 and the first positioning component 100 to move relative to the bracket 62 through the screw assembly 9. The first positioning component 100 is arranged on the adjusting mechanism 400, so that the height of the first positioning component 100 is adjusted through the adjusting mechanism 400, so that the first positioning component 100 can achieve height adaptation of multiple products, has a simple structure and manual operation, and there is no electric control module during the operation process, which makes the workbench easy to operate, the product has a wide range of applicability, high compatibility, positioning accuracy and clamping reliability, improved operating efficiency and accuracy, and low maintenance cost. At the same time, the screw assembly 9 has very high precision, and the screw transmission can achieve precise position control and motion control. It has a compact structure, improved operating efficiency and accuracy, and low maintenance cost.

[0053] Furthermore, the screw assembly 9 includes a screw 91 and a screw nut 92 linked to the screw, and the screw nut 92 is fixedly connected to the transmission member 81, converting the rotational motion of the knob 8 and the screw 91 into linear motion of the screw nut 92 and the transmission member 81, thereby adapting to the products 10 of different thicknesses and structures. The product has strong versatility and does not require customized fixtures. The product has wide applicability, high compatibility, high positioning accuracy, and low maintenance cost. It can realize positioning and clamping of various product widths, solve the problem that traditional wire bonding equipment requires frequent customization of fixtures, and improve bonding quality.

[0054] Furthermore, a heating platform 82 is further provided on the transmission member 81, and the first positioning component 100 is fixedly provided on the transmission member 81 through the heating platform 82. The heating platform 82 provides a constant temperature environment to promote the combination of the metal lead and the pad.

[0055] As attached Figure 1 To the attached Figure 11 As shown, based on the above-mentioned clamping device, the embodiment of the present application also provides a wire bonding device, which adopts the following technical solution: the wire bonding device includes: a workbench system, a welding head system and the clamping device. The tooling fixture 200 can fix and position multiple products 10, and the first positioning component 100 can also fix and position the tooling fixture 200, so that multiple products 10 can be repeatedly positioned on the clamping device, avoiding poor quality during welding, improving the convenience and accuracy of product positioning, and at the same time, different tooling fixtures 200 can be replaced to adapt to different wire bonding devices, so that the clamping device can adapt to more wire bonding devices, which is cheap and easy to maintain, reduces equipment costs, and makes the equipment more cost-effective.

[0056] Obviously, the embodiments described above are only some of the embodiments of the present application, rather than all of the embodiments. The preferred embodiments of the present application are given in the accompanying drawings, but they do not limit the patent scope of the present application. The present application can be implemented in many different forms. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present application more thorough and comprehensive. Although the present application has been described in detail with reference to the aforementioned embodiments, for those skilled in the art, it is still possible to modify the technical solutions described in the aforementioned specific embodiments, or to make equivalent replacements for some of the technical features therein. Any equivalent structure made using the contents of the present application specification and the accompanying drawings, directly or indirectly used in other related technical fields, is also within the scope of patent protection of the present application.

Claims

1. A clamping device, characterized in that: include: a first positioning assembly (100); A tooling fixture (200) is fixed to the first positioning component (100) through the positioning function of the first positioning component (100) and is used to place the product (10); a pressing plate assembly (300), disposed on the first positioning assembly (100) and used for fixing to the product (10); When the clamping device clamps the product (10), the product (10) is fixed in the tooling fixture (200) by the positioning function of the tooling fixture (200), and the pressure plate assembly (300) covers the product (10).

2. The clamping device according to claim 1, characterized in that The tooling fixture (200) comprises a material platform (1) and a second positioning component (2) arranged on the material platform (1) for positioning the product (10); the material platform (1) is provided with a plurality of receiving holes (11) for placing the product (10).

3. The clamping device according to claim 2, characterized in that The second positioning assembly (2) comprises a connecting piece (21) and a first spring plunger (22) arranged on the connecting piece (21); a positioning hole (101) is provided on the product (10); and the first spring plunger (22) is inserted into the positioning hole (101) when fixing.

4. The clamping device according to claim 3, characterized in that The first positioning assembly (100) comprises a fixing plate (3) and at least one first positioning block (4) and at least one second positioning block (5) arranged on the fixing plate (3); the first positioning block (4) and the second positioning block (5) are used to position the tooling fixture (200).

5. The clamping device according to claim 4, characterized in that: The material platform (1) is provided with a positioning groove (12), and the second positioning block (5) is provided with a second spring plunger (51). When fixed, the second spring plunger (51) is inserted into the positioning groove (12).

6. The clamping device according to claim 5, characterized in that The pressing plate assembly (300) includes a pressing plate (6) rotatably arranged on the fixing plate (3) and a fixing member (7) for fixing the pressing plate (6). When the pressing plate (6) is covered on the material platform (1), the product (10) is positioned.

7. The clamping device according to claim 6, characterized in that The fixing member (7) is selected from one of a toggle clamp, a pneumatic clamp, and a buckle.

8. The clamping device according to claim 6, characterized in that A spring (61) is provided on one end of the pressing plate (6) connected to the fixing plate (3) so that the pressing plate (6) has a tendency to press against the product (10).

9. The clamping device according to any one of claims 1 to 8, characterized in that: The clamping device also includes an adjusting mechanism (400), which includes a bracket (62) and an adjusting device for adjusting the position of the first positioning component (100) on the bracket (62). The adjusting device includes a knob (8), a screw assembly (9) linked to the knob (8), and a transmission member (81) linked to the screw assembly (9). The first positioning component (100) is fixedly arranged on the transmission member (81), and the transmission member (81) is slidably arranged on the bracket (62), so that the knob (8) drives the transmission member (81) and the first positioning component (100) to move relative to the bracket (62) through the screw assembly (9).

10. A wire bonding device, characterized in that: include: A workbench system, a welding head system and a clamping device according to any one of claims 1 to 9.

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