Boat structure and processing equipment

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to a boat structure and processing equipment, and solves the problem that the heating efficiency of a reaction furnace on a product loaded on the boat structure in the reaction furnace is not high. The boat structure comprises a bearing assembly and a first conductive structure, the bearing assembly is configured to bear a product, and the first conductive structure is connected with the bearing assembly and can be electrically connected with a power source so that the first conductive structure can be powered on and generate heat. As the first conductive structure is very close to the product borne by the bearing assembly, the heating efficiency can be improved by heating the product through heat generated by the first conductive structure.

Description

Technical Field

[0001] The present application relates to the fields of semiconductor and photovoltaic technology, and in particular to a boat structure and processing equipment. Background Art

[0002] Currently, in the photovoltaic and semiconductor industries, boat structures are commonly used to load products to be processed, in process, or after processing. Furthermore, these products are typically processed in specialized reactors under specific temperature and pressure conditions. Some of these processes require high temperatures. Currently, reactors typically include heating devices that use the heat generated by the reactor to heat the products loaded in the boat structures within the reactor.

[0003] However, current reactors are not efficient in heating the products loaded into the boat structure within the reactor. Utility Model Content

[0004] In view of this, embodiments of the present application provide a boat structure and processing equipment, which solve the problem of low heating efficiency of a reactor for products loaded on a boat structure in the reactor.

[0005] In a first aspect, an embodiment of the present application provides a boat structure, comprising: a carrying component configured to carry a product; a first conductive structure connected to the carrying component and capable of being electrically connected to a power source so that the first conductive structure is energized and generates heat.

[0006] In combination with the first aspect, in certain implementations of the first aspect, the carrier assembly includes: a plurality of carriers configured to carry the product, the carriers including a second conductive structure; a connecting member connecting the plurality of carriers; wherein the first conductive structure is electrically connected to the carriers and to the connecting member, wherein the first conductive structure and the second conductive structure are energized and generate heat.

[0007] In combination with the first aspect, in certain implementations of the first aspect, the second conductive structure includes a slot rod; wherein the connecting member includes: a first end plate, connected to the first end of the slot rod; a second end plate, arranged opposite to the first end plate and connected to the second end of the slot rod, wherein the first end plate, multiple slot rods and the second end plate form a accommodating space, and the accommodating space is configured to accommodate the product; wherein the first conductive structure includes: at least one first sub-conductive structure, connected to the first end plate and electrically connected to at least one slot rod; at least one second sub-conductive structure, connected to the second end plate and electrically connected to at least one slot rod; wherein at least one first sub-conductive structure, at least one slot rod and at least one second sub-conductive structure can form at least one current loop with the power supply, so that at least one first sub-conductive structure, at least one slot rod and at least one second sub-conductive structure are energized and generate heat.

[0008] In combination with the first aspect, in certain implementations of the first aspect, the first end plate includes a first central area and a first edge area surrounding the first central area, and at least one first sub-conductive structure bends and extends in the first central area and the first edge area; and / or, the second end plate includes a second central area and a second edge area surrounding the second central area, and at least one second sub-conductive structure bends and extends in the second central area and the second edge area.

[0009] In combination with the first aspect, in certain implementations of the first aspect, the orthographic projection of at least one of the first sub-conductive structures on the first end plate includes: a plurality of first straight line segments, the plurality of first straight line segments are arranged at equal intervals along the extension direction of the first end plate; at least one first curved segment, the first curved segment electrically connects two adjacent first straight line segments; and / or, the orthographic projection of at least one of the second sub-conductive structures on the second end plate includes: a plurality of second straight line segments, the plurality of second straight line segments are arranged at equal intervals along the extension direction of the second end plate; and at least one second curved segment, the second curved segment electrically connects two adjacent second straight line segments.

[0010] In combination with the first aspect, in certain implementations of the first aspect, the number of the slot rods is four, namely, a first slot rod, a second slot rod, a third slot rod, and a fourth slot rod; wherein, the number of the second sub-conductive structures is multiple, at least one second sub-conductive structure is electrically connected to the second end of the first slot rod and the second end of the third slot rod, and at least another second sub-conductive structure is electrically connected to the second end of the second slot rod and the second end of the fourth slot rod; at least one first sub-conductive structure is electrically connected to the first end of the first slot rod and the first end of the second slot rod, and the first end of the third slot rod and the first end of the fourth slot rod can be electrically connected to the positive and negative poles of the power supply, respectively.

[0011] In combination with the first aspect, in certain implementations of the first aspect, the boat structure can be placed on a boat carrying device, and the boat carrying device can be powered on; wherein, the number of the first sub-conductive structures is at least three; at least another first sub-conductive structure is electrically connected to the first end of the third slot rod and extends to the first area of the bottom of the first end plate, so that when the boat structure is placed on the boat carrying device, the first sub-conductive structure extending to the first area is electrically connected to the first position of the boat carrying device; at least another first sub-conductive structure is electrically connected to the first end of the fourth slot rod and extends to the second area of the bottom of the first end plate, so that when the boat structure is placed on the boat carrying device, the first sub-conductive structure extending to the second area is electrically connected to the second position of the boat carrying device.

[0012] In combination with the first aspect, in certain implementations of the first aspect, the slot rod is made of graphite or silicon carbide.

[0013] In combination with the first aspect, in certain implementations of the first aspect, the first end plate and the second end plate are both made of insulating materials, the first conductive structure includes a heating wire and / or a conductive coating, and the conductive coating is made of graphite or silicon carbide.

[0014] In a second aspect, an embodiment of the present application provides a processing device, comprising: a cavity having a chamber; at least one power supply extending into the chamber; the boat structure described in the first aspect, configured to carry a product, and when the boat structure is located in the chamber, the boat structure is electrically connected to the power supply so that the boat structure is energized and generates heat.

[0015] The boat structure provided in an embodiment of the present application includes a load-bearing assembly and a first conductive structure. The load-bearing assembly is configured to carry a product. The first conductive structure is connected to the load-bearing assembly and can be electrically connected to a power source to energize the first conductive structure and generate heat. Because the first conductive structure is in close proximity to the product carried by the load-bearing assembly, utilizing the heat generated by the first conductive structure to heat the product can improve heating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above and other purposes, features, and advantages of the present application will become more apparent through a more detailed description of the embodiments of the present application in conjunction with the accompanying drawings. The accompanying drawings are intended to provide a further understanding of the embodiments of the present application and constitute a part of the specification. Together with the embodiments of the present application, they are used to explain the present application and do not constitute a limitation of the present application. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 Shown is a schematic diagram of an application scenario of the boat structure provided in one embodiment of the present application.

[0018] Figure 2 Shown is a schematic diagram of an application scenario of a boat structure provided by another embodiment of the present application.

[0019] Figure 3 Shown is a structural schematic diagram of a boat structure provided in one embodiment of the present application.

[0020] Figure 4 Shown is a structural schematic diagram of a boat structure provided in another embodiment of the present application.

[0021] Figure 5 Shown Figure 4 Schematic diagram of the structure of the current loop formed after the boat structure is electrically connected to the power supply.

[0022] Figure 6 Shown is a structural schematic diagram of a boat structure and a boat carrying device provided in one embodiment of the present application.

[0023] Figure 7 Shown Figure 6 A partial enlarged view of the boat structure and the boat supporting device in area A is shown.

[0024] Figure 8 Shown is a schematic diagram of an application scenario of the processing equipment provided in one embodiment of the present application.

[0025] Reference numerals:

[0026] 1. Processing equipment; 10. Boat structure; 100. Carrying assembly; 1001. Accommodation space; 110. Carrying member; 1100. Second conductive structure; 1110. Slot rod; 1120. First end of slot rod; 1130. Second end of slot rod; 1111. First slot rod; 1121. First end of first slot rod; 1131. Second end of first slot rod; 1112. Second slot rod; 1122. First end of second slot rod; 1132. Second end of second slot rod; 1113. Third slot rod; 1123. First end of third slot rod; 1133. Second end of third slot rod; 1114. Fourth slot rod; 1124. First end of fourth slot rod; 1134. Second end of fourth slot rod; 120. Connector; 12 10. First end plate; 1211. First central area; 1212. First edge area; 1213. First area; 1214. Second area; 1220. Second end plate; 1221. Second central area; 1222. Second edge area; 200. First conductive structure; 201. Heating wire; 202. Conductive coating; 210. First sub-conductive structure; 2110. First straight segment; 2120. First curved segment; 220. Second sub-conductive structure; 2210. Second straight segment; 2220. Second curved segment; 20. Cavity; 2001. Chamber; 30. Power supply; 301. Positive electrode; 302. Negative electrode; 2. Product; 4. Boat carrying device; 401. First position; 402. Second position. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0028] The specific structure of the boat structure and the processing equipment will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0029] Figure 1 The figure shows an application scenario diagram of the boat structure provided by an embodiment of the present application. Figure 1 As shown, the boat structure 10 includes a carrying component 100 and a first conductive structure 200. The carrying component 100 is configured to carry the product 2. The first conductive structure 200 is connected to the carrying component 100 and can be electrically connected to the power supply 30 so that the first conductive structure 200 is energized and generates heat.

[0030] Since the first conductive structure 200 is very close to the product 2 carried by the carrying assembly 100 , heating the product 2 by utilizing the heat generated by the first conductive structure 200 can improve heating efficiency.

[0031] Illustratively, the bearing assembly 100 may be a plate-like structure or a frame-like structure, or may be other types of structures with bearing functions.

[0032] For example, the first conductive structure 200 may be a resistance wire that can be electrically connected to the power source 30 so that it is energized and generates heat. The first conductive structure 200 may also be a structure having a conductive coating on its surface that can be electrically connected to the power source 30 so that it is energized and generates heat. The first conductive structure 200 may also be other structures that have both electrical conductivity and the ability to generate heat when energized.

[0033] Product 2 can be silicon wafers, wafers, solar panels, glass substrates and other products.

[0034] In some embodiments, as Figure 2 As shown, the carrier assembly 100 includes multiple carriers 110 and a connector 120. The multiple carriers 110 are configured to support the product 2. The carriers 110 include second conductive structures 1100. The connector 120 connects the multiple carriers 110. The first conductive structure 200 is electrically connected to the carriers 110 and to the connector 120. The first conductive structure 200 and the second conductive structure 1100 are energized and generate heat.

[0035] The carrier 110 is used to carry the product 2, so the carrier 110 is closer to the product 2. When the second conductive structure 1100 of the carrier 110 is energized and generates heat, the heat generated by the second conductive structure 1100 is used to heat the product 2, which can further improve the heating efficiency of the product 2.

[0036] Exemplarily, the second conductive structure 1100 may include a resistance wire, which is electrically connected to the first conductive structure 200, which is electrically connected to the power source 30, so that the resistance wire can be energized and generate heat. The second conductive structure 1100 may also be a structure with a conductive coating on its surface, which can be electrically connected to the first conductive structure 200, which is electrically connected to the power source 30, so that the conductive coating can be energized and generate heat. The second conductive structure 1100 may also be other structures that have conductive properties and the ability to generate heat when energized. Exemplarily, the supporting assembly 100 includes three supporting members 110, two supporting members 110 are on the same horizontal plane, and another supporting member 110 is located below the other two supporting members 110, and the three supporting members 110 extend in the same direction. Product 2 is located between the three supporting members 110.

[0037] In some embodiments, as Figure 2As shown, second conductive structure 1100 includes slot bars 1110, and connector 120 includes a first end plate 1210 and a second end plate 1220. First end plate 1210 is connected to first end 1120 of the slot bars, while second end plate 1220 is disposed opposite first end plate 1210 and connected to second end 1130 of the slot bars. First end plate 1210, multiple slot bars 1110, and second end plate 1220 form a receiving space 1001 configured to receive product 2.

[0038] The first conductive structure 200 includes at least one first sub-conductive structure 210 and at least one second sub-conductive structure 220. The first sub-conductive structure 210 is connected to the first end plate 1210 and electrically connected to at least one slot bar 1110. The second sub-conductive structure 220 is connected to the second end plate 1220 and electrically connected to at least one slot bar 1110. The at least one first sub-conductive structure 210, the at least one slot bar 1110, and the at least one second sub-conductive structure 220 can form at least one current loop with the power source 30, so that the at least one first sub-conductive structure 210, the at least one slot bar 1110, and the at least one second sub-conductive structure 220 are energized and generate heat.

[0039] The above arrangement enables the first conductive structure 200 and the second conductive structure 1100 to surround the accommodating space 1001 , thereby further improving the heating efficiency of the product 2 located in the accommodating space 1001 .

[0040] Exemplarily, the bearing assembly 100 includes three slot bars 1110, and the first conductive structure 200 includes two first sub-conductive structures 210 and two second sub-conductive structures 220. The first sub-conductive structures 210 and the second sub-conductive structures 220 are arranged in a one-to-one correspondence. One first sub-conductive structure 210 is connected to the first end plate 1210 and is electrically connected to the first end 1120 of a slot bar. One second sub-conductive structure 220 is connected to the second end plate 1220 and is electrically connected to the slot bar 1110 electrically connected to the corresponding first sub-conductive structure 210. Exemplarily, the second sub-conductive structure 220 is electrically connected to the second end 1130 of the slot bar. One first sub-conductive structure 210 and one second sub-conductive structure 220 are respectively connected to the two poles of the power supply 30 to form a current loop, so that one first sub-conductive structure 210, one slot bar 1110 and one second sub-conductive structure 220 are energized and generate heat. Exemplarily, Figure 2 Three current loops are shown in FIG.

[0041] For example, the first sub-conductive structure 210 may include a resistance wire electrically connected to the slot rod 1110 and to the power source 30. The first sub-conductive structure 210 may also include a structure having a conductive coating on its surface, which can be electrically connected to the slot rod 1110 and to the power source 30, so that the conductive coating is energized and generates heat. The first sub-conductive structure 210 may also include other structures that have both electrical conductivity and the ability to generate heat when energized.

[0042] For example, the second sub-conductive structure 220 may include a resistance wire electrically connected to the slot rod 1110 and to the power source 30. The second sub-conductive structure 220 may also include a structure having a conductive coating on its surface, which can be electrically connected to the slot rod 1110 and to the power source 30, so that the conductive coating is energized and generates heat. The second sub-conductive structure 220 may also include other structures that have both electrical conductivity and the ability to generate heat when energized.

[0043] In some embodiments, as Figure 3 As shown, the first end plate 1210 includes a first central region 1211 and a first edge region 1212 surrounding the first central region 1211 , and at least one first sub-conductive structure 210 bends and extends in the first central region 1211 and the first edge region 1212 .

[0044] In some embodiments, as Figure 3 As shown, the second end plate 1220 includes a second central region 1221 and a second edge region 1222 surrounding the second central region 1221 , and the at least one second sub-conductive structure 220 bends and extends between the second central region 1221 and the second edge region 1222 .

[0045] In some embodiments, as Figure 3 As shown, the first end plate 1210 includes a first central region 1211 and a first edge region 1212 surrounding the first central region 1211, and at least one first sub-conductive structure 210 bends and extends in the first central region 1211 and the first edge region 1212. The second end plate 1220 includes a second central region 1221 and a second edge region 1222 surrounding the second central region 1221, and at least one second sub-conductive structure 220 bends and extends in the second central region 1221 and the second edge region 1222.

[0046] By configuring the first sub-conductive structure 210 and the second sub-conductive structure 220 as described above, the coverage area of the first conductive structure 200 on the connector 120 can be increased, thereby increasing the coverage area of the product 2 by the heat generated by the first conductive structure 200 when the first conductive structure 200 is energized, thereby further improving the heating efficiency of the product 2.

[0047] In some embodiments, as Figure 4 As shown, the orthographic projection of at least one first sub-conductive structure 210 on the first end plate 1210 includes multiple first straight segments 2110 and at least one first curved segment 2120. The multiple first straight segments 2110 are arranged at equal intervals along the extension direction of the first end plate 1210, and the first curved segment 2120 electrically connects two adjacent first straight segments 2110.

[0048] By providing the first sub-conductive structure 210 with a bent shape, the uniformity of heat generated when the first sub-conductive structure 210 is energized is improved.

[0049] In some embodiments, as Figure 4 As shown, the orthographic projection of at least one second conductive sub-structure 220 on the second end plate 1220 includes a plurality of second straight segments 2210 and at least one second curved segment 2220. The plurality of second straight segments 2210 are arranged at equal intervals along the extension direction of the second end plate 1220, and a second curved segment 2220 electrically connects two adjacent second straight segments 2210.

[0050] By providing the second sub-conductive structure 220 with a bent shape, the uniformity of heat generated when the second sub-conductive structure 220 is energized is improved.

[0051] In some embodiments, the orthographic projection of at least one first conductive sub-structure 210 on the first end plate 1210 includes a plurality of first straight segments 2110 and at least one first curved segment 2120. The plurality of first straight segments 2110 are arranged at equal intervals along the extension direction of the first end plate 1210, and a first curved segment 2120 electrically connects two adjacent first straight segments 2110. The orthographic projection of at least one second conductive sub-structure 220 on the second end plate 1220 includes a plurality of second straight segments 2210 and at least one second curved segment 2220. The plurality of second straight segments 2210 are arranged at equal intervals along the extension direction of the second end plate 1220, and a second curved segment 2220 electrically connects two adjacent second straight segments 2210.

[0052] By providing the first sub-conductive structure 210 and the second sub-conductive structure 220 in a bent shape, the uniformity of heat generated when the first conductive structure 200 is energized is improved.

[0053] In some embodiments, as Figure 4 and Figure 5As shown, there are four slot bars 1110, namely a first slot bar 1111, a second slot bar 1112, a third slot bar 1113, and a fourth slot bar 1114. There are multiple second sub-conductive structures 220, at least one of which electrically connects the second end 1131 of the first slot bar and the second end 1133 of the third slot bar, and at least another second sub-conductive structure 220 electrically connects the second end 1132 of the second slot bar and the second end 1134 of the fourth slot bar. At least one first sub-conductive structure 210 electrically connects the first end 1121 of the first slot bar and the first end 1122 of the second slot bar. The first end 1123 of the third slot bar and the first end 1124 of the fourth slot bar can be electrically connected to the positive electrode 301 and the negative electrode 302 of the power source 30, respectively.

[0054] The above arrangement enables the third slot bar 1113, at least one second sub-conductive structure 220, the first slot bar 1111, at least one first sub-conductive structure 210, the second slot bar 1112, at least another second sub-conductive structure 220, and the fourth slot bar 1114 to form a current loop. The current loop only needs to be electrically connected to a power source 30 to be energized, and has a simple structure.

[0055] Exemplarily, there are two second sub-conductive structures 220. One second sub-conductive structure 220 electrically connects the second end 1131 of the first slot bar and the second end 1133 of the third slot bar, and another second sub-conductive structure 220 electrically connects the second end 1132 of the second slot bar and the second end 1134 of the fourth slot bar. One first sub-conductive structure 210 electrically connects the first end 1121 of the first slot bar and the first end 1122 of the second slot bar. The first end 1123 of the third slot bar and the first end 1124 of the fourth slot bar can be electrically connected to the positive electrode 301 and the negative electrode 302 of the power source 30, respectively, so that the third slot bar 1113, one second sub-conductive structure 220, the first slot bar 1111, one first sub-conductive structure 210, the second slot bar 1112, another second sub-conductive structure 220, the fourth slot bar 1114, and the power source 30 form a current loop, thereby energizing the third slot bar 1113, one second sub-conductive structure 220, the first slot bar 1111, one first sub-conductive structure 210, the second slot bar 1112, another second sub-conductive structure 220, and the fourth slot bar 1114 and generating heat. For example, Figure 4 The direction of the arrow shown in the figure indicates the direction of current flow when the current loop is energized.

[0056] In some embodiments, as Figure 6 and Figure 7As shown, the boat structure 10 can be placed on a boat carrier 4, and the boat carrier 4 can be powered. There are at least three first sub-conductive structures 210, at least one of which is electrically connected to the first end 1123 of the third slot bar and extends to the first region 1213 of the bottom of the first end plate 1210. When the boat structure 10 is placed on the boat carrier 4, the first sub-conductive structure 210 extending to the first region 1213 is electrically connected to the first position 401 of the boat carrier 4. At least one further first sub-conductive structure 210 is electrically connected to the first end 1124 of the fourth slot bar and extends to the second region 1214 of the bottom of the first end plate 1210. When the boat structure 10 is placed on the boat carrier 4, the first sub-conductive structure 210 extending to the second region 1214 is electrically connected to the second position 402 of the boat carrier 4.

[0057] By extending the first sub-conductive structure 210 to the bottom of the boat structure 10 , the boat structure 10 can be powered when the boat structure 10 is placed on the boat carrying device 4 and the boat carrying device 4 is powered on.

[0058] For example, as shown in 4, Figure 6 and Figure 7 As shown, there are three first sub-conductive structures 210. One first sub-conductive structure 210 is electrically connected to the first end 1123 of the third slot bar and extends to the first region 1213 of the bottom of the first end plate 1210. Another first sub-conductive structure 210 is electrically connected to the first end 1124 of the fourth slot bar and extends to the second region 1214 of the bottom of the first end plate 1210. Yet another first sub-conductive structure 210 connects the first end 1121 of the first slot bar and the first end 1122 of the second slot bar. Exemplarily, multiple boat structures 10 are sequentially placed on the boat supporting device 4 along the extension direction of the boat supporting device 4, so that when the boat supporting device 4 is powered, the multiple boat structures 10 can be powered.

[0059] In some embodiments, the material of the slot rod 1110 is graphite or silicon carbide.

[0060] Both graphite and silicon carbide have the characteristics of high melting point, good thermal conductivity, small thermal deformation, and corrosion resistance. The above characteristics enable the slot rod 1110 to stably carry the product 2. At the same time, the slot rod 1110 can also be energized and generate heat.

[0061] In some embodiments, the first end plate 1210 and the second end plate 1220 are both made of insulating materials, and the first conductive structure 200 includes a heating wire 201 , which has a simple structure.

[0062] In some embodiments, the first end plate 1210 and the second end plate 1220 are both made of insulating materials. The first conductive structure 200 includes a conductive coating 202 . The conductive coating 202 is made of graphite or silicon carbide and has a simple structure.

[0063] In some embodiments, the first end plate 1210 and the second end plate 1220 are both made of insulating materials. The first conductive structure 200 includes a heating wire 201 and a conductive coating 202. The conductive coating 202 is made of graphite or silicon carbide and has a simple structure.

[0064] For example, the insulating material may be ceramic, quartz, etc.

[0065] Exemplarily, the first sub-conductive structure 210 connecting the first end 1121 of the first slot bar and the first end 1122 of the second slot bar is a heating wire 201. The first sub-conductive structure 210 extending to the first region 1213 of the bottom of the first end plate 1210 includes a conductive coating 202, and the conductive coating 202 is disposed on the surface of the first sub-conductive structure 210 that contacts the first position 401 of the boat carrier 4. The first sub-conductive structure 210 extending to the second region 1214 of the bottom of the first end plate 1210 includes a conductive coating 202, and the conductive coating 202 is disposed on the surface of the first sub-conductive structure 210 that contacts the second position 402 of the boat carrier 4. The second sub-conductive structure 220 is a heating wire 201. The slot bar 1110 also includes a conductive coating 202.

[0066] Figure 8 The figure shows an application scenario diagram of the processing equipment provided by an embodiment of the present application. Figure 8 As shown, processing apparatus 1 includes the boat structure 10 mentioned in the above embodiments, a chamber 20, and at least one power supply 30. The chamber 20 has a chamber 2001, into which the power supply 30 extends. The boat structure 10 is configured to support a product 2. When the boat structure 10 is located in the chamber 2001, the boat structure 10 is electrically connected to the power supply 30, so that the boat structure 10 is energized and generates heat.

[0067] Since the processing equipment 1 includes the boat structure 10 , all technical features and technical effects of the processing equipment 1 including the boat structure 10 are not described in detail here.

[0068] In the various embodiments of the present application, unless otherwise specified, the connection may be in the form of a detachable connection using bolts, nuts, screws, snaps, magnets, etc. In some connections, if there is no particular requirement for a detachable connection, a non-detachable connection may be achieved by welding, bonding, etc.

[0069] The basic principles of the present application have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, and effects mentioned in this application are merely illustrative and not restrictive, and it should not be assumed that these advantages, strengths, and effects are required of each embodiment of this application. In addition, the specific details disclosed above are merely illustrative and facilitating understanding, and are not restrictive. The above details do not limit this application to necessarily being implemented using the above specific details.

[0070] The block diagrams of the devices, devices, equipment, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As will be appreciated by those skilled in the art, these devices, devices, equipment, and systems can be connected, arranged, or configured in any manner. Words such as "include," "comprise," "have," and the like are open-ended words, meaning "including but not limited to," and can be used interchangeably therewith. The words "or" and "and" used herein refer to the words "and / or" and can be used interchangeably therewith, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to," and can be used interchangeably therewith.

[0071] It should also be noted that in the apparatus, device, and method of the present application, each component or each step can be decomposed and / or recombined, and such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0072] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0073] The above description has been provided for the purpose of illustration and description. Furthermore, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although a number of example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A boat structure, characterized in that: include: a carrier assembly configured to carry a product; a first conductive structure connected to the carrier assembly and capable of being electrically connected to a power source so that the first conductive structure is energized and generates heat; The bearing assembly includes: a plurality of carriers configured to carry the product, the carriers comprising a second conductive structure; A connecting member, connecting a plurality of the supporting members; The first conductive structure is electrically connected to the carrier and to the connecting member, and the first conductive structure and the second conductive structure are energized and generate heat.

2. The boat structure according to claim 1, characterized in that: The second conductive structure includes a slot bar; Wherein, the connecting piece includes: a first end plate connected to the first end of the slot rod; a second end plate, disposed opposite to the first end plate and connected to the second end of the channel rod, wherein the first end plate, the plurality of channel rods and the second end plate form a receiving space configured to receive the product; Wherein, the first conductive structure includes: at least one first sub-conductive structure connected to the first end plate and electrically connected to at least one of the slot bars; at least one second sub-conductive structure connected to the second end plate and electrically connected to at least one of the slot bars; Among them, at least one of the first sub-conductive structure, at least one of the slot rods and at least one of the second sub-conductive structure can form at least one current loop with the power supply, so that at least one of the first sub-conductive structure, at least one of the slot rods and at least one of the second sub-conductive structure are energized and generate heat.

3. The boat structure according to claim 2, characterized in that: The first end plate includes a first central area and a first edge area surrounding the first central area, and at least one first sub-conductive structure bends and extends in the first central area and the first edge area; and / or, The second end plate includes a second central region and a second edge region surrounding the second central region, and at least one second sub-conductive structure bends and extends in the second central region and the second edge region.

4. The boat structure according to claim 3, characterized in that: An orthographic projection of at least one of the first sub-conductive structures on the first end plate includes: a plurality of first straight line segments, wherein the plurality of first straight line segments are arranged at equal intervals along an extension direction of the first end plate; at least one first curved segment, wherein the first curved segment electrically connects two adjacent first straight segments; and / or, The orthographic projection of at least one of the second conductive sub-structures on the second end plate includes: a plurality of second straight line segments, wherein the plurality of second straight line segments are arranged at equal intervals along an extension direction of the second end plate; At least one second curved segment, wherein the second curved segment electrically connects two adjacent second straight segments.

5. The boat structure according to claim 2, characterized in that: There are four slot rods, namely a first slot rod, a second slot rod, a third slot rod and a fourth slot rod; There are multiple second sub-conductive structures, at least one of which is electrically connected to the second end of the first slot bar and the second end of the third slot bar, and at least another second sub-conductive structure is electrically connected to the second end of the second slot bar and the second end of the fourth slot bar; at least one first sub-conductive structure is electrically connected to the first end of the first slot bar and the first end of the second slot bar, and the first end of the third slot bar and the first end of the fourth slot bar can be electrically connected to the positive and negative poles of the power supply, respectively.

6. The boat structure according to claim 5, characterized in that The boat structure can be placed on a boat carrying device, and the boat carrying device can be powered; Wherein, the number of the first sub-conductive structures is at least three; At least one other of the first sub-conductive structures is electrically connected to a first end of the third slot bar and extends to a first region of a bottom portion of the first end plate, so that when the boat structure is placed on the boat carrier, the first sub-conductive structure extending to the first region is electrically connected to a first position of the boat carrier; At least one more of the first sub-conductive structures is electrically connected to the first end of the fourth slot rod and extends to a second area at the bottom of the first end plate, so that when the boat structure is placed on the boat carrying device, the first sub-conductive structure extending to the second area is electrically connected to a second position of the boat carrying device.

7. The boat structure according to any one of claims 2 to 5, characterized in that: The material of the slot rod is graphite or silicon carbide.

8. The boat structure according to any one of claims 2 to 6, characterized in that: The first end plate and the second end plate are both made of insulating materials. The first conductive structure includes a heating wire and / or a conductive coating. The conductive coating is made of graphite or silicon carbide.

9. A processing equipment, characterized in that, include: a cavity having a chamber; at least one power source extending into the chamber; The boat structure according to any one of claims 1 to 8 is configured to carry a product, and when the boat structure is located in the chamber, the boat structure is electrically connected to the power supply so that the boat structure is energized and generates heat.

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