Side edge brushing device and cleaning machine

Abstract

The utility model discloses a side edge brushing device and a cleaning machine, and relates to the technical field of cleaning equipment, the side edge brushing device comprises a framework, a brushing mechanism, a flushing mechanism, a guide rail assembly and a driving part; the scrubbing mechanism is mounted on the framework and is provided with a hollow cavity for accommodating a to-be-cleaned carrier; the flushing mechanism is mounted on the framework; the guide rail assembly is slidably connected with the brushing mechanism. The driving part is in driving connection with the brushing mechanism and used for driving the brushing mechanism to move along the guide rail assembly; according to the technical scheme, the scrubbing mechanism and the flushing mechanism which are installed on the framework are arranged in the side scrubbing device, so that the side scrubbing device can have the scrubbing function and the flushing function at the same time, the scrubbing mechanism and the flushing mechanism are installed in the same device through the framework, flushing and scrubbing can be carried out in the same space, and the cleaning efficiency is improved. Zoning and sectioning are not needed, and the occupied space of the side edge brushing device is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of cleaning equipment, in particular to a side brushing device and a cleaning machine. Background Art

[0002] In microelectronics and semiconductor manufacturing, photoresist barrels are transported from the warehouse to the cleanroom using carriers. During this process, the carriers are inevitably contaminated with dust and other impurities. To prevent these impurities from entering the cleanroom, the carriers' exterior surfaces must be cleaned. This requires not only a thorough rinse with clean water but also a deep clean with a brush. In existing technology, carrier cleaning is done manually, which is inefficient and costly. Utility Model Content

[0003] The main purpose of the utility model is to provide a side scrubbing device and a cleaning machine, which are intended to perform efficient automatic cleaning and scrubbing on a carrier.

[0004] To achieve the above-mentioned purpose, the side brushing device proposed in the present invention includes: a frame, a brushing mechanism, a flushing mechanism, a guide rail assembly and a driving member; the brushing mechanism is installed on the frame, and the brushing mechanism has a hollow cavity for accommodating the carrier to be cleaned; the flushing mechanism is installed on the frame; the guide rail assembly is slidably connected to the brushing mechanism; the driving member is driven and connected to the brushing mechanism, and is used to drive the brushing mechanism to move along the guide rail assembly.

[0005] In one embodiment, the brushing mechanism includes a plurality of brush assemblies, and the plurality of brush assemblies are enclosed to form an annular structure having the hollow cavity, and each of the brush assemblies includes a mounting part, a first brush and a brush clamp; the first brush is mounted on the mounting part through the brush clamp, and the first brushes and the brush clamps are stacked in a plurality along the movement direction of the brushing mechanism, and each of the first brushes is arranged in a one-to-one correspondence with the brush clamp.

[0006] In one embodiment, the brush fixture defines a mounting groove along an extending direction of the first brush, and the first brush is mounted in the mounting groove.

[0007] In one embodiment, the mounting member includes a first mounting portion and a second mounting portion; the first mounting portion includes a vertical plate and a side plate, the side plate is arranged on one side of the vertical plate, and the second mounting portion is arranged on a side of the vertical plate away from the side plate; the brush clamp is installed between the side plate and the second mounting portion.

[0008] In one embodiment, the brush assembly also includes a second brush, and the mounting member also includes a third mounting portion, wherein the third mounting portion is arranged below the vertical plate, and the third mounting portion has a connecting portion and a clamping portion, and a groove is provided at one end of the clamping portion away from the connecting portion, and the groove is used to install the second brush, and the second brush is arranged obliquely relative to the first brush.

[0009] In one embodiment, the flushing assembly includes multiple water pipes, which are arranged along the circumference of the hollow cavity to form a ring structure, and any two adjacent water pipes are connected by a connector; each water pipe is provided with multiple nozzles at intervals along its extension direction.

[0010] In one embodiment, the driving member is a rodless cylinder having a driving block and a check valve. The driving block drives and connects the brushing mechanism, and the check valve is used to drive the driving block to move in a preset direction.

[0011] In one embodiment, the guide rail assembly includes a guide rail and a slider, the slider is slidably connected to the guide rail, and one end of the brushing mechanism away from the driving member is connected to the slider.

[0012] The present invention further provides a cleaning machine, comprising: a machine platform; and any one of the side brushing devices described above, wherein the side brushing device can be movably disposed above the machine platform to clean the carrier to be cleaned on the machine platform.

[0013] In one embodiment, a sensor is provided on the platform, and the sensor is used to detect the position of the carrier to be cleaned on the platform.

[0014] The technical solution of the present invention is to provide a side scrubbing device with a scrubbing mechanism and a flushing mechanism installed on a frame, so that the side scrubbing device can have both scrubbing and flushing functions. The scrubbing mechanism and the flushing mechanism are installed in the same device through the frame. Flushing and scrubbing can be carried out in the same space without the need for partitioning and segmentation, thereby reducing the space occupied by the side scrubbing device. The scrubbing mechanism is connected by providing a driving member, so that the scrubbing mechanism together with the frame and flushing mechanism connected thereto can slide, thereby performing all-round cleaning on the side of the carrier. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0016] Figure 1 This is a structural diagram of an embodiment of a side brushing device provided by the present utility model;

[0017] Figure 2 An exploded view of an embodiment of a side brushing device provided by the present invention;

[0018] Figure 3 This is a structural schematic diagram of the mounting member in one embodiment of the side scrubbing device provided by the present invention.

[0019] Description of Figure Numbers:

[0020] 100. Side brushing device; 1. Frame; 2. Flushing mechanism; 3. Driving member; 4. Guide rail assembly; 5. Brush assembly; 51. Mounting member; 511. First mounting portion; 512. Second mounting portion; 513. Third mounting portion; 52. First brush; 53. Brush fixture; 54. Second brush.

[0021] The realization of the purpose, functional features and advantages of the present invention will be further explained in conjunction with embodiments and with reference to the accompanying drawings. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.

[0023] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components in a certain specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0024] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present invention, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features limited to "first" and "second" may explicitly or implicitly include at least one of such features. In addition, if "and / or" or "and / or" appears in the full text, its meaning includes three parallel schemes. Taking "A and / or B" as an example, it includes scheme A, or scheme B, or a scheme in which A and B are satisfied at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of ordinary technicians in this field to implement. When the combination of technical solutions is mutually contradictory or cannot be implemented, it should be deemed that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0025] In microelectronics and semiconductor manufacturing, photoresist barrels are transported from the warehouse to the cleanroom using carriers. During this process, the carriers are inevitably contaminated with dust and other impurities. To prevent these impurities from entering the cleanroom, the carriers' exterior surfaces must be cleaned. This requires not only a thorough rinse with clean water but also a deep clean with a brush. In existing technology, carrier cleaning is done manually, which is inefficient and costly.

[0026] The present invention provides a side scrubbing device 100 .

[0027] See also Figure 1-3 In one embodiment of the present invention, the side scrubbing device 100 includes: a frame 1, a scrubbing mechanism, a flushing mechanism 2, a guide rail assembly 4 and a driving member 3; the scrubbing mechanism is installed on the frame 1, and the scrubbing mechanism has a hollow cavity for accommodating the carrier to be cleaned; the flushing mechanism 2 is installed on the frame 1; the guide rail assembly 4 is slidably connected to the scrubbing mechanism; the driving member 3 drives the scrubbing mechanism to drive the scrubbing mechanism to move along the guide rail assembly 4.

[0028] In this embodiment, the skeleton 1 serves as the basic support structure of the side brushing device 100, and is used to connect the brushing mechanism and the flushing mechanism 2. The brushing mechanism and the flushing mechanism 2 are connected as a whole through the skeleton 1, so that the brushing mechanism and the flushing mechanism 2 move synchronously and can clean the same position on the outer surface of the carrier. At the same time, the skeleton 1 also ensures the stability and reliability of the components during operation. The brushing mechanism is arranged around the carrier to be cleaned. After the carrier to be cleaned enters the hollow cavity, the brushing mechanism can abut against the side of the carrier to be cleaned, and brush the surrounding side of the carrier to be cleaned by moving up and down to remove dirt, grease and other impurities on the surface of the carrier. The shape and size of the hollow cavity designed inside the brushing mechanism must match the carrier to be cleaned to ensure that the carrier can be firmly accommodated inside and can abut against the brush in the brushing mechanism, so as to be effectively cleaned. The brushing mechanism may be equipped with various types of brushes, such as rotating brushes, vibrating brushes or flexible brushes, to meet the cleaning needs of carriers of different materials and shapes. The guide rail assembly 4 is used to provide guidance and support for the movement of the brushing mechanism and the flushing mechanism 2 connected to it through the skeleton 1. Through the precise guidance of the guide rail, the brushing mechanism can reciprocate along a predetermined path to achieve comprehensive cleaning of the carrier surface; the guide rail assembly 4 is usually made of high-precision, low-friction materials to ensure the smoothness and accuracy of the movement of the brushing mechanism. The driving mechanism is used to drive the brushing mechanism to move repeatedly in the height direction under the action of electricity to repeatedly brush the peripheral side of the carrier to be cleaned; the driving device can be a motor, cylinder, hydraulic cylinder or other similar actuators. By controlling the operating parameters of the driving component 3 (such as speed, stroke, etc.), precise control of the brushing process can be achieved.

[0029] In this embodiment, the driver 3 and guide rail assembly 4 are first installed on the corresponding support frame of the cleaning machine. To balance the center of gravity of the side scrubbing device 100, the driver 3 and guide rail assembly 4 are symmetrically arranged on opposite sides of the scrubbing mechanism, thus supporting the scrubbing mechanism from both sides. After the driver 3 and guide rail assembly 4 are installed, the scrubbing mechanism is connected to the driver and guide rail assembly 4 using fasteners or welding. The frame 1 is then fixedly connected to the top of the scrubbing mechanism using fasteners or welding. The top of the frame 1 is connected to the flushing mechanism 2 via a connector. The water flushed by the flushing mechanism 2 is allowed to flow naturally downward under the action of gravity, thereby rinsing the side of the vehicle to be cleaned.

[0030] The technical solution of the present invention is to provide a skeleton 1 on the side brushing device 100 to connect the brushing mechanism and the flushing mechanism 2 into one body, so that the flushing mechanism 2 and the brushing mechanism can move synchronously, thereby being able to flush and brush the same position on the side of the carrier to be cleaned at the same time; by connecting the brushing mechanism to the guide rail assembly 4 and the driving member 3, the brushing mechanism is driven by the driving member 3 to reciprocate up and down, and the brushing mechanism is guided by the guide rail assembly 4 to avoid deflection of the brushing mechanism during movement, and the brushing mechanism drives the flushing mechanism 2 through the skeleton 1 to move synchronously with it. The technical solution of the present invention is to provide a brushing mechanism and a flushing mechanism 2 installed on the skeleton 1 in the side brushing device 100, so that the side brushing device 100 can have both brushing and flushing functions. The brushing mechanism and the flushing mechanism 2 are installed in the same device through the skeleton 1. Flushing and brushing can be carried out in the same space without the need for partitioning and segmentation, thereby reducing the space occupied by the side brushing device 100; and by providing a driving member 3 to drive the connection brushing mechanism, the brushing mechanism together with the skeleton 1 and the flushing mechanism 2 connected thereto can slide, thereby performing all-round cleaning of the side of the carrier.

[0031] See Figure 2 In one embodiment, the scrubbing mechanism includes a plurality of brush assemblies 5, which enclose a ring structure having a hollow cavity. Each brush assembly 5 includes a mounting member 51, a first brush 52, and a brush fixture 53. The first brush 52 is mounted to the mounting member 51 via the brush fixture 53. The first brushes 52 and the brush fixture 53 are stacked in a plurality along the direction of movement of the scrubbing mechanism, with each first brush 52 corresponding to a brush fixture 53. The brush fixture 53 is clamped to the outside of the first brush 52 and is detachably connected to the brush fixture 53 to facilitate replacement of the first brush 52. The brush fixture 53 is detachably connected to the mounting member 51 via a threaded fastener to mount the first brush 52 to the mounting member 51. The mounting member 51 is used to connect to the driving member 3 or the guide rail assembly 4 to provide a transmission connection between the brush assembly 5 and the driving mechanism or the guide rail assembly 4. In this embodiment, four brush assemblies 5 are specifically provided, and the four brush assemblies 5 enclose a rectangular structure with four sides closed. During cleaning, the vehicle to be cleaned is located in the center of the rectangular structure, and the brush assembly 5 performs an all-round cleaning on all sides of the vehicle. The first brushes 52 and the mounting members 51 arranged in a one-to-one correspondence with the first brushes 52 are stacked in multiple layers along the direction of movement of the brush assembly 5, i.e., the height direction, to expand the brushing range of the brush assembly 5 and improve the brushing efficiency. The more first brushes 52 are stacked, the larger the range covered by the brush assembly 5. However, the distance moved within the limited operating space will be correspondingly reduced, and the friction will also increase when repeatedly moved for brushing. The number of stacked first brushes 52 can be set as needed to achieve optimal brushing efficiency.

[0032] In one embodiment, the brush holder 53 defines a mounting slot along the extension of the first brush 52, and the first brush 52 is mounted in the mounting slot. In this embodiment, the first brush 52 is a horizontally extending, elongated brush having a long handle and bristles fixed to one side of the handle. The brush holder 53 secures the first brush 52 by clamping the handle at the top and bottom. The brush holder 53 defines a mounting slot whose width corresponds to the width of the handle, preventing the first brush 52 from falling out when mounted in the slot. The brush holder 53 abuts the handle of the first brush 52 through the top and bottom walls of the mounting slot, thereby clamping the first brush 52 in place through the walls of the mounting slot. Because the first brush 52 is easily damaged during repeated daily scrubbing, the mounting slot connection allows the first brush 52 and the brush holder 53 to be detachable, facilitating replacement of the first brush 52 and better cleaning the side of the vehicle.

[0033] See Figure 2 、 3 In one embodiment, the mounting member 51 includes a first mounting portion 511 and a second mounting portion 512. The first mounting portion 511 includes a vertical plate and a side plate. The side plate is provided on one side of the vertical plate, and the second mounting portion 512 is provided on the side of the vertical plate away from the side plate. The brush fixture 53 is mounted between the side plate and the second mounting portion 512. The width of the vertical plate is approximately the same as that of the brush fixture 53. The side plates and the second mounting portion 512 are provided on either side of the vertical plate to sandwich the brush fixture 53 between the side plates and the second mounting portion 512. The side plates and the second mounting portion 512 are provided with a plurality of mounting holes spaced apart along the height direction. The mounting holes are elongated to facilitate adjustment of the position of the brush fixture 53. Threaded holes are provided at both ends of the brush fixture 53 at positions corresponding to the mounting holes. By passing threaded fasteners through the mounting holes and screwing them into the threaded holes, the brush fixture 53 can be fixed to the mounting member 51 and connected to the drive member 3 or the guide rail assembly 4 through the mounting member 51.

[0034] In one embodiment, the brush assembly 5 further includes a second brush 54, and the mounting member 51 further includes a third mounting portion 513. The third mounting portion 513 is positioned below the upright plate and comprises a connecting portion and a clamping portion. The clamping portion defines a groove at one end, distal from the connecting portion, for mounting the second brush 54. The second brush 54 is tilted relative to the first brush 52. The clamping portion is configured to hold the second brush 54. Two jaws are spaced along the extension of the second brush 54, with grooves located at the ends of the jaws. These jaws secure the second brush 54 at an angle. The number of jaws can be increased or a mounting groove structure can be configured as needed to enhance the stability of the second brush 54. The second brush 54 is tilted relative to the first brush 52 to create different angles for scrubbing the carrier being cleaned. This tilted arrangement makes it easier to reach gaps in the carrier, improving the cleaning efficiency of the device.

[0035] In one embodiment, the flushing assembly includes multiple water pipes arranged around the circumference of the hollow cavity to form an annular structure, with any two adjacent water pipes connected by a connector; each water pipe is provided with multiple nozzles spaced apart along its extension direction. In this embodiment, four water pipes are provided, forming a rectangular structure that fits the hollow cavity. The junctions between the two water pipes are connected by a tee connector. During use, the ends of the tee connectors not connected to the water pipes can be blocked, and only at least one tee connector can be connected to a water source, and the water source can be connected through a single water inlet, thereby enabling simultaneous flushing of all four water pipes. In the event of insufficient water pressure, multiple tee connectors can be connected to the water source to achieve the desired flushing level.

[0036] In one embodiment, the driving member 3 is a rodless cylinder comprising a drive block and a check valve. The drive block drives the brush mechanism, and the check valve is used to drive the drive block in a predetermined direction. Using a rodless cylinder as a driving component enables efficient and compact adjustment of the brush mechanism. The rodless cylinder enables infinitely variable adjustment of the brush mechanism, allowing it to be raised or lowered to any desired height within a specified range. Furthermore, the rodless cylinder has a high response speed, enabling it to quickly respond to control signals and generate corresponding movement.

[0037] In one embodiment, the guide rail assembly 4 comprises a guide rail and a slider. The slider is slidably connected to the guide rail, and the end of the brush mechanism away from the driver 3 is connected to the slider. The guide rail assembly 4 ensures that the brush mechanism can move smoothly and precisely along a predetermined path. The sliding connection between the guide rail and the slider provides the necessary guidance and support for the brush mechanism. The guide rail surface is precision-machined, ensuring smooth and low-friction sliding of the slider over it. The guide rail has sufficient strength and rigidity to withstand the weight of the brush mechanism and all its components, as well as the forces generated during operation. It also has excellent wear and corrosion resistance, extending its service life. The slider is mounted on the end of the brush mechanism away from the driver 3 and fits tightly against the guide rail. The slider may incorporate structures such as balls, rollers, or sliding plates to reduce friction with the guide rail, ensuring smoother sliding. The connection between the slider and the guide rail is tight and stable, preventing the brush mechanism from shaking or deviating from the predetermined path during movement. When the driver 3 is operating, power is transmitted to the brush mechanism via the drive block, propelling it along the guide rail. Due to the sliding connection between the slider and the guide rail, the scrubbing mechanism can move smoothly in straight or curved lines along the guide rail's trajectory, achieving comprehensive cleaning of the carrier surface. The coordination between the driver 3 and the guide rail assembly 4 makes the scrubbing mechanism more stable and reliable during operation, while also improving cleaning efficiency and accuracy. By adjusting the shape and length of the guide rail, it can flexibly adapt to the cleaning needs of carriers of different sizes and shapes. In addition, the guide rail assembly 4 is relatively simple to maintain and replace, facilitating rapid repairs in the event of equipment failure.

[0038] The present invention also proposes a cleaning machine, which includes a machine table and a side brushing device 100. The specific structure of the side brushing device 100 refers to the above embodiment. Since the present cleaning machine adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought by the technical solutions of the above embodiments, which will not be described one by one here. Among them, the side brushing device 100 can be movably arranged above the machine table to clean the carrier to be cleaned on the machine table. Conveyor belt devices are also provided on both sides of the machine table. After the conveyor belt device transports the carrier to be cleaned to the top of the machine table, the side brushing device 100 starts to move up and down to brush the surrounding side of the carrier, and rinses it through the flushing mechanism 2, and then removes the brushing mechanism to transport the carrier to be cleaned to the next station. The machine table is provided with brackets on both sides perpendicular to the conveying direction of the transmission belt device, and the driving member 3 and the guide rail assembly 4 are respectively installed on the brackets on both sides.

[0039] In one embodiment, a sensor is provided on the machine platform to detect the position of the carrier to be cleaned on the machine platform. The sensor can sense whether the carrier has reached the center of the hollow cavity, so that the brushes in the scrubbing mechanism can abut against the sides of the carrier, avoiding inadequate scrubbing or damage to the carrier caused by the scrubbing mechanism.

[0040] The above description is merely an exemplary embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made using the contents of the present invention specification and drawings under the technical concept of the present invention, or direct / indirect application in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A side brushing device, characterized in that: include: skeleton; A scrubbing mechanism is mounted on the frame, the scrubbing mechanism having a hollow cavity for accommodating a carrier to be cleaned; A flushing mechanism, mounted on the frame; a guide rail assembly, the guide rail assembly being slidably connected to the scrubbing mechanism; as well as A driving member is connected to the brushing mechanism and is used to drive the brushing mechanism to move along the guide rail assembly.

2. The side brushing device according to claim 1, characterized in that: The brushing mechanism includes a plurality of brush assemblies, which are enclosed to form an annular structure having the hollow cavity. Each of the brush assemblies includes a mounting part, a first brush and a brush clamp; the first brush is mounted on the mounting part through the brush clamp, and the first brushes and the brush clamps are stacked in a plurality along the movement direction of the brushing mechanism, and each of the first brushes is arranged in a one-to-one correspondence with the brush clamp.

3. The side brushing device according to claim 2, characterized in that: The brush fixture is provided with a mounting groove along the extending direction of the first brush, and the first brush is mounted in the mounting groove.

4. The side brushing device according to claim 2, characterized in that: The mounting member includes a first mounting portion and a second mounting portion; the first mounting portion includes a vertical plate and a side plate, the side plate is arranged on one side of the vertical plate, and the second mounting portion is arranged on a side of the vertical plate away from the side plate; the brush clamp is installed between the side plate and the second mounting portion.

5. The side brushing device according to claim 4, characterized in that: The brush assembly also includes a second brush, and the mounting member also includes a third mounting portion, which is arranged below the vertical plate. The third mounting portion has a connecting portion and a clamping portion, and a groove is provided at one end of the clamping portion away from the connecting portion. The groove is used to install the second brush, and the second brush is arranged obliquely relative to the first brush.

6. The side brushing device according to claim 1, characterized in that: The flushing mechanism includes a plurality of water pipes, which are arranged along the circumference of the hollow cavity to form a ring structure, and any two adjacent water pipes are connected by a connector; each water pipe is provided with a plurality of nozzles at intervals along its extension direction.

7. The side brushing device according to claim 1, characterized in that: The driving member is a rodless cylinder having a driving block and a check valve. The driving block is driven and connected to the brushing mechanism, and the check valve is used to drive the driving block to move in a preset direction.

8. The side brushing device according to claim 7, characterized in that: The guide rail assembly includes a guide rail and a slider, the slider is slidably connected to the guide rail, and one end of the brushing mechanism away from the driving member is connected to the slider.

9. A cleaning machine, characterized in that: include: Machine; as well as The side brushing device according to any one of claims 1 to 8, wherein the side brushing device can be movably arranged above the machine to clean the carrier to be cleaned on the machine.

10. The cleaning machine according to claim 9, characterized in that The platform is provided with a sensor, and the sensor is used to detect the position of the carrier to be cleaned on the platform.

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