Special-shaped crucible structure for spontaneous nucleation growth of semiconductor crystals

Abstract

The utility model discloses a special-shaped crucible structure for spontaneous nucleation growth of semiconductor crystals, which relates to the technical field of semiconductor crystal preparation and comprises a crucible main body, an upper cover body and a seed crystal, and a clamping mechanism for clamping and fixing the seed crystal is mounted on the upper cover body. According to the utility model, when the control knob is rotated, the two L-shaped insertion rods can be driven to move towards each other or away from each other at the same time, when the two L-shaped insertion rods move away from the two fixing cylinders at the same time, the seed crystal can be loosened, and when the two L-shaped insertion rods move towards each other to be inserted into the two fixing cylinders at the same time, the seed crystal can be clamped and fixed. Therefore, the purpose that the seed crystal can be conveniently and rapidly disassembled and assembled is achieved, operation is convenient and time-saving, the upper cover body cannot be damaged in the disassembling and assembling process, the upper cover body can be repeatedly used, cost is reduced, and practicability is good.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor crystal preparation, in particular to a special-shaped crucible structure for spontaneous nucleation growth of semiconductor crystals. Background Art

[0002] Spontaneous nucleation and growth of semiconductor crystals refers to the process by which semiconductor materials, under specific conditions, form crystal nuclei and further grow without external induction. This process involves two stages: crystal nucleation and nucleus growth. It is the process by which a substance forms crystals from a gas, liquid, or solid phase under specific physical and chemical conditions. Vapor-phase growth involves converting a source material into gaseous particles through physical vapor deposition or chemical vapor deposition, which then deposit on a substrate to form crystals. During vapor-phase growth of semiconductor crystals, the raw materials are typically placed in a crucible and heated to form gaseous particles.

[0003] The patent with publication number CN218812231U in the prior art discloses a crystal preparation crucible. By setting a temperature measuring component and a growth monitoring component, the temperature measuring component can detect the temperature of the crystal in the crystallization zone to prevent the crystal from undergoing phase change during growth, and at the same time monitor the temperature field fluctuation of the crucible so that timely measures can be taken when abnormal situations occur; the growth monitoring component collects the growth data of the crystal in the crystallization zone. If polycrystalline or uneven growth thickness is encountered, the growth formula can be adjusted in time to avoid waste of resources. However, its seed crystal structure is fixed to the bottom of the crucible cover by pasting, which makes it difficult to remove the crystal from the crucible cover after the crystal growth is completed. It is not only time-consuming and labor-intensive, but also easy to cause the crucible cover to be damaged due to carelessness, resulting in unnecessary economic losses and increased costs. Therefore, in order to solve the above problems, the utility model proposes a special-shaped crucible structure for spontaneous nucleation growth of semiconductor crystals. Utility Model Content

[0004] The purpose of the present utility model is to provide a special-shaped crucible structure for spontaneous nucleation growth of semiconductor crystals, so as to solve the problem that the method of fixing the seed crystal by sticking proposed in the above-mentioned background technology will make it difficult to remove the crystal from the crucible cover after the growth is completed, and it is even easy to accidentally damage the crucible cover, thereby increasing costs.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a special-shaped crucible structure for spontaneous nucleation and growth of semiconductor crystals, comprising a crucible body, an upper cover body and a seed crystal, the upper cover body being provided with a clamping mechanism for clamping and fixing the seed crystal; the clamping mechanism comprises a hollow seat fixedly mounted on the bottom of the upper cover body, the hollow seat being provided with horizontal sliding holes on both sides away from each other, horizontal sliding rods being slidably mounted in the two horizontal sliding holes, and L-shaped insertion rods being fixedly mounted on one end of the two horizontal sliding rods away from each other, fixing plates being pasted on both sides away from each other, fixing tubes being fixedly mounted on the sides away from each other of the two fixing plates, and the ends of the two L-shaped insertion rods close to each other being respectively slidably mounted in the two fixing tubes, and a control component for controlling the two horizontal sliding rods to move toward or away from each other at the same time is installed on the hollow seat.

[0006] Preferably, the control assembly includes a bidirectional screw rod rotatably mounted on the inner wall of the side portion of the hollow seat, two first moving blocks are threadedly sleeved on the bidirectional screw rod, the ends of the two horizontal sliding rods close to each other are fixedly mounted with a second moving block, the two first moving blocks are rotatably connected to the sides away from each other with tilting rotating rods, one end of the four tilting rotating rods are respectively rotatably connected to the sides away from each other of the two second moving blocks, the four tilting rotating rods are distributed in a diamond shape, one end of the bidirectional screw rod extends to the outside of the hollow seat and is fixedly mounted with a control knob, and a ratchet self-locking unit is installed on the bidirectional screw rod.

[0007] Preferably, a guide rod is fixedly mounted on the inner wall of the side of the hollow seat, two guide blocks are slidably sleeved on the guide rod, and the two guide blocks are respectively fixedly mounted on the bottoms of the two second moving blocks.

[0008] Preferably, the ratchet self-locking unit includes a connecting ratchet fixedly sleeved on the bidirectional screw rod, a connecting protrusion is fixedly installed on the side of the hollow seat, a connecting sliding hole is opened on the side of the connecting protrusion, a connecting sliding rod is slidably installed in the connecting sliding hole, one end of the connecting sliding rod is fixedly installed with a ratchet block adapted to the connecting ratchet, the other end of the connecting sliding rod is fixedly installed with a control pull block, and a reset element is installed on the connecting sliding rod.

[0009] Preferably, the reset element includes a reset spring, a protrusion is fixedly sleeved on the connecting slide rod, the protrusion is located between the connecting protrusion and the ratchet block, and the two ends of the reset spring are respectively fixedly mounted on the side portions of the connecting protrusion and the protrusion close to each other.

[0010] Preferably, a filter plate is slidably sleeved in the crucible body, a support ring is fixedly mounted on the inner wall of the crucible body, and the top of the filter plate fits in contact with the bottom of the support ring.

[0011] Preferably, a plurality of positioning rods are evenly fixedly installed on the bottom of the filter plate, a plurality of positioning holes are evenly opened on the top of the support ring, and the plurality of positioning rods are slidably installed in the plurality of positioning holes respectively.

[0012] In summary, the technical effects and advantages of the utility model are:

[0013] 1. The utility model has a reasonable structure. When the control knob is turned, the two L-shaped rods are driven to move toward or away from each other at the same time through the bidirectional screw rod, the first moving block, the tilting rod, the second moving block and the horizontal sliding rod. When the two L-shaped rods are moved away from each other and are simultaneously moved out of the two fixed cylinders, the seed crystal can be loosened. When the two L-shaped rods are moved toward each other and are simultaneously inserted into the two fixed cylinders, the seed crystal can be clamped and fixed, thereby achieving the purpose of facilitating the rapid disassembly and assembly of the seed crystal. The operation is not only convenient and time-saving, but also the upper cover body will not be damaged during the disassembly and assembly process, so that the upper cover body can be reused, which reduces costs and has good practicality.

[0014] 2. In the utility model, through the coordinated arrangement of the connecting ratchet, the connecting protrusion, the connecting slide rod, the ratchet block, the control pull block, the protrusion and the reset spring, when the control pull block is pulled to make the ratchet block move away and release the connecting ratchet, the control knob can be freely rotated for disassembly and assembly operation; when the control pull block is released, the ratchet block will be automatically reset and engaged with the connecting ratchet under the elastic force of the reset spring, and then the control knob can only be rotated clockwise for installation operation, and the control knob cannot be reversed for disassembly operation, thereby effectively avoiding the loosening and falling off of the seed crystal due to careless rotation of the control knob during use, and the utility model is stable and reliable when used. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative work.

[0016] Figure 1 This is a schematic diagram of the three-dimensional structure of a special-shaped crucible structure for spontaneous nucleation and growth of semiconductor crystals according to the present invention;

[0017] Figure 2 This is an enlarged three-dimensional structural diagram of the clamping mechanism and the seed crystal in the present invention;

[0018] Figure 3 It is a partially enlarged structural diagram of the connection between the ratchet self-locking unit and the bidirectional screw rod in the present invention;

[0019] Figure 4 The utility model is a schematic cross-sectional view of a special-shaped crucible structure for spontaneous nucleation and growth of semiconductor crystals.

[0020] In the figure: 1. Crucible body; 2. Upper cover body; 3. Seed crystal; 4. Hollow seat; 5. Horizontal slide bar; 6. L-shaped plug rod; 7. Fixed plate; 8. Fixed cylinder; 9. Bidirectional screw; 10. First moving block; 11. Second moving block; 12. Tilt rod; 13. Control knob; 14. Guide rod; 15. Connecting ratchet; 16. Connecting protrusion; 17. Connecting slide bar; 18. Ratchet block; 19. Control pull block; 20. Return spring; 21. Filter plate; 22. Support ring; 23. Positioning rod. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0022] Example: Reference Figures 1-4 The structure of a special-shaped crucible for spontaneous nucleation growth of semiconductor crystals shown in the figure includes a crucible body 1, an upper cover body 2 and a seed crystal 3. It should be noted that the top of the seed crystal 3 is coated with a molybdenum film, which can prevent the crystal from growing on the top of the seed crystal 3 and ensure the quality and stability of the crystal growth; a clamping mechanism for clamping and fixing the seed crystal 3 is installed on the upper cover body 2; the clamping mechanism includes a hollow seat 4 fixedly installed on the bottom of the upper cover body 2, and horizontal sliding holes are provided on both sides of the hollow seat 4 away from each other. Horizontal sliding rods 5 are slidably installed in the two horizontal sliding holes, and L-shaped insertion rods 6 are fixedly installed on the ends of the two horizontal sliding rods 5 away from each other. Fixed plates 7 are pasted on both sides of the seed crystal 3 away from each other, and the two fixed plates 7 are away from each other. The sides are fixedly installed with fixed cylinders 8, and the ends of the two L-shaped insertion rods 6 close to each other are slidably installed in the two fixed cylinders 8 respectively. A bidirectional screw rod 9 is rotatably installed on the inner wall of the side of the hollow seat 4, and two first moving blocks 10 are threadedly sleeved on the bidirectional screw rod 9. The ends of the two horizontal sliding rods 5 close to each other are fixedly installed with a second moving block 11, and the two first moving blocks 10 are rotatably connected to the sides away from each other with a tilting rotating rod 12. One end of the four tilting rotating rods 12 is rotatably connected to the two sides away from each other of the two second moving blocks 11. The four tilting rotating rods 12 are distributed in a diamond shape, one end of the bidirectional screw rod 9 extends to the outside of the hollow seat 4 and is fixedly installed with a control knob 13, and a ratchet self-locking unit is installed on the bidirectional screw rod 9.

[0023] When the two L-shaped rods 6 are moved toward each other and are inserted into the two fixed cylinders 8 at the same time, the seed crystal 3 can be clamped and fixed, thereby achieving the purpose of facilitating the quick disassembly and assembly of the seed crystal 3. The operation is not only convenient and time-saving, but also will not damage the upper cover body 2 during the disassembly and assembly process.

[0024] like Figure 2 and Figure 4 As shown, a guide rod 14 is fixedly mounted on the inner side wall of the hollow seat 4. Two guide blocks are slidably sleeved on the guide rod 14. The two guide blocks are respectively fixedly mounted on the bottoms of the two second movable blocks 11. The advantage of this arrangement is that, through the coordinated arrangement of the guide rod 14 and the guide blocks, the second movable blocks 11 can only move horizontally and will not rotate with the bidirectional screw rod 9, thus playing a horizontal guiding role and improving stability.

[0025] like Figure 3As shown, the ratchet self-locking unit includes a connecting ratchet 15 fixedly sleeved on the bidirectional screw rod 9, a connecting protrusion 16 is fixedly installed on the side of the hollow seat 4, a connecting slide hole is opened on the side of the connecting protrusion 16, a connecting slide rod 17 is slidably installed in the connecting slide hole, one end of the connecting slide rod 17 is fixedly installed with a ratchet block 18 adapted to the connecting ratchet 15, and the other end of the connecting slide rod 17 is fixedly installed with a control pull block 19, a protrusion is fixedly sleeved on the connecting slide rod 17, the protrusion is located between the connecting protrusion 16 and the ratchet block 18, and a reset spring 20 is fixedly installed on the sides where the connecting protrusion 16 and the protrusion are close to each other. The advantage of this arrangement is that when the two-way screw rod 9 is rotated clockwise to make the two L-shaped rods 6 move toward each other, the connecting ratchet 15 will rotate clockwise with the two-way screw rod 9. At this time, the teeth of the connecting ratchet 15 will squeeze the ratchet block 18 for automatic avoidance. When the connecting ratchet 15 rotates to the point where its next tooth corresponds to the ratchet block 18, under the elastic force of the reset spring 20, the push-piece will be squeezed to drive the ratchet block 18 to automatically reset and engage with the connecting ratchet 15 through the connecting slide rod 17, thereby making the connecting ratchet 15 and the two-way screw rod 9 unable to reverse. During use, it can effectively avoid the situation where the seed crystal 3 becomes loose and falls off due to accidental counterclockwise rotation of the control knob 13. It is stable and reliable when used. When the seed crystal 3 needs to be removed, the control pull block 19 can be pulled to make the ratchet block 18 move away from the connecting ratchet 15, and then the control knob 13 can be rotated counterclockwise.

[0026] like Figure 1 and Figure 4 As shown, a filter plate 21 is slidably mounted inside the crucible body 1. It should be noted that the filter plate 21 is made of materials such as tungsten, tantalum, and niobium, and can react with carbon atoms at high temperatures to convert into tungsten carbide, tantalum carbide, niobium carbide, etc.; a support ring 22 is fixedly mounted on the inner wall of the crucible body 1, and the top of the filter plate 21 fits in contact with the bottom of the support ring 22. A plurality of positioning rods 23 are evenly fixedly mounted on the bottom of the filter plate 21, and a plurality of positioning holes are evenly opened on the top of the support ring 22. The plurality of positioning rods 23 are slidably mounted in the plurality of positioning holes. The advantage of this arrangement is that, through the coordinated arrangement of the filter plate 21, when the heated raw material is converted into gaseous particles, the filter plate 21 can adsorb the carbon impurities in the gas and react to convert them into carbides, effectively preventing the carbon impurities from being deposited along with the gas and attached to the seed crystal during the crystal growth process, thereby improving the quality of the semiconductor crystal generated.

[0027] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A special-shaped crucible structure for spontaneous nucleation growth of semiconductor crystals, comprising a crucible body (1), an upper cover body (2) and a seed crystal (3), characterized in that: The upper cover body (2) is provided with a clamping mechanism for clamping and fixing the seed crystal (3); the clamping mechanism comprises a hollow seat (4) fixedly installed on the bottom of the upper cover body (2); the hollow seat (4) is provided with horizontal sliding holes on both sides away from each other; horizontal sliding rods (5) are slidably installed in the two horizontal sliding holes; L-shaped insertion rods (6) are fixedly installed at one end of the two horizontal sliding rods (5) away from each other; fixed plates (7) are pasted on both sides away from each other; fixed cylinders (8) are fixedly installed on the sides away from each other of the two fixed plates (7); the ends of the two L-shaped insertion rods (6) close to each other are respectively slidably installed in the two fixed cylinders (8); and a control component for controlling the two horizontal sliding rods (5) to move toward or away from each other at the same time is installed on the hollow seat (4).

2. The special-shaped crucible structure for spontaneous nucleation growth of semiconductor crystals according to claim 1, characterized in that: The control assembly includes a bidirectional screw rod (9) rotatably mounted on the inner wall of the side of the hollow seat (4), two first moving blocks (10) are threadedly sleeved on the bidirectional screw rod (9), the ends of the two horizontal slide rods (5) close to each other are fixedly mounted with a second moving block (11), the two first moving blocks (10) are rotatably connected to the two sides away from each other with a tilting rotating rod (12), one end of the four tilting rotating rods (12) are respectively rotatably connected to the two sides away from each other of the two second moving blocks (11), the four tilting rotating rods (12) are distributed in a diamond shape, one end of the bidirectional screw rod (9) extends to the outside of the hollow seat (4) and is fixedly mounted with a control knob (13), and a ratchet self-locking unit is installed on the bidirectional screw rod (9).

3. The special-shaped crucible structure for spontaneous nucleation growth of semiconductor crystals according to claim 2, characterized in that: A guide rod (14) is fixedly mounted on the inner wall of the side of the hollow seat (4), and two guide blocks are slidably sleeved on the guide rod (14). The two guide blocks are respectively fixedly mounted on the bottoms of the two second moving blocks (11).

4. The special-shaped crucible structure for spontaneous nucleation growth of semiconductor crystals according to claim 2, characterized in that: The ratchet self-locking unit comprises a connecting ratchet (15) fixedly sleeved on the bidirectional screw rod (9); a connecting protrusion (16) is fixedly installed on the side of the hollow seat (4); a connecting sliding hole is opened on the side of the connecting protrusion (16); a connecting slide rod (17) is slidably installed in the connecting sliding hole; a ratchet block (18) adapted to the connecting ratchet (15) is fixedly installed on one end of the connecting slide rod (17); a control pull block (19) is fixedly installed on the other end of the connecting slide rod (17); and a reset element is installed on the connecting slide rod (17).

5. The special-shaped crucible structure for spontaneous nucleation growth of semiconductor crystals according to claim 4, characterized in that: The reset element includes a reset spring (20), a protrusion is fixedly sleeved on the connecting slide rod (17), and the protrusion is located between the connecting protrusion (16) and the ratchet block (18), and the two ends of the reset spring (20) are respectively fixedly mounted on the side portions of the connecting protrusion (16) and the protrusion close to each other.

6. The special-shaped crucible structure for spontaneous nucleation growth of semiconductor crystals according to claim 1, characterized in that: A filter plate (21) is slidably sleeved in the crucible body (1), a support ring (22) is fixedly mounted on the inner wall of the crucible body (1), and the top of the filter plate (21) fits in contact with the bottom of the support ring (22).

7. The special-shaped crucible structure for spontaneous nucleation and growth of semiconductor crystals according to claim 6, characterized in that: A plurality of positioning rods (23) are evenly fixedly installed on the bottom of the filter plate (21), and a plurality of positioning holes are evenly opened on the top of the support ring (22), and the plurality of positioning rods (23) are respectively slidably installed in the plurality of positioning holes.

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