Single crystal diamond growth cavity temperature control device

Abstract

The utility model relates to the technical field of monocrystal diamond growth, and discloses a monocrystal diamond growth cavity temperature control device which comprises a supporting table, a growth box is fixedly connected to the inner side of the supporting table, a growth cavity is formed in the inner side of the growth box, and a heat preservation layer is fixedly connected to the inner wall of the growth box. A heating plate is fixedly connected to the outer wall of the heat preservation layer, a plurality of avoiding holes are formed in the outer wall of the heating plate, heating wires are fixedly connected to the inner sides of the avoiding holes, temperature sensors are fixedly connected to the outer walls of the heating wires, a control table is arranged at the bottom of the supporting table, and a cover is slidably connected to the top of the growth box. According to the utility model, the mode of combining the overall basic heating of the heating plate and the local accurate heating of the heating wires is adopted, the temperatures of different positions of the growth box are detected through the temperature sensors, and the heating of the heating wires at the corresponding positions is controlled through the console, so that the temperature distribution is more uniform.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal diamond growth, in particular to a temperature control device for a single crystal diamond growth cavity. Background Art

[0002] Single crystal diamond refers to a diamond with a single crystal structure in which atoms are arranged in a regular periodic pattern throughout the crystal structure. It is a three-dimensional network crystal formed by carbon atoms interconnected by covalent bonds. Each carbon atom is covalently bonded to four adjacent carbon atoms to form a regular tetrahedron structure. This structure gives single crystal diamond many excellent properties, including extremely high hardness, excellent thermal conductivity and high refractive index.

[0003] Due to its excellent physical and chemical properties, single-crystal diamond has broad application prospects in many fields such as electronics, optics and mechanics. However, its growth process has extremely stringent requirements on temperature conditions. Slight fluctuations or uneven temperature distribution will lead to crystal defects, seriously affecting the performance and quality of diamond.

[0004] Traditional single-crystal diamond growth chamber heating methods use a single heating element, such as an ordinary resistive heating plate or heating coil, which can only provide an overall heating effect and makes it difficult to precisely adjust the temperature of different areas within the growth chamber. Therefore, a single-crystal diamond growth chamber temperature control device is proposed to solve the above problem. Utility Model Content

[0005] In order to make up for the above shortcomings, the present invention provides a single crystal diamond growth chamber temperature control device, which aims to improve the problem that the existing technology uses a single heating element to heat the growth chamber, making it difficult to accurately adjust the temperature of different areas in the growth chamber.

[0006] In order to achieve the above-mentioned purpose, the present invention adopts the following technical solutions: a single crystal diamond growth chamber temperature control device, comprising a support platform, a growth box is fixedly connected to the inner side of the support platform, a growth chamber is provided on the inner side of the growth box, an insulation layer is fixedly connected to the inner wall of the growth box, a heating plate is fixedly connected to the outer wall of the insulation layer, a plurality of avoidance holes are provided on the outer wall of the heating plate, a plurality of heating wires are fixedly connected to the inner sides of the avoidance holes, a temperature sensor is fixedly connected to the outer walls of the plurality of heating wires, a control console is provided at the bottom of the support platform, a lid is slidably connected to the top of the growth box, a recovery mechanism is provided on the top of the lid, and the recovery mechanism is used to recover heat energy.

[0007] As a further description of the above technical solution:

[0008] The recovery mechanism includes a heat exchanger, the outer wall of the heat exchanger is arranged on the outer wall of the growth box, the top of the growth box is connected to an exhaust pipe, the outer wall of the exhaust pipe is fixedly connected to the intelligent control valve 1, the other end of the exhaust pipe is connected to a connecting pipe, the other end of the connecting pipe is connected to the left side of the heat exchanger, the right side of the heat exchanger is connected to an outlet pipe, and the outer wall of the outlet pipe is fixedly connected to the intelligent control valve 2.

[0009] As a further description of the above technical solution:

[0010] The four corners of the bottom of the support platform are fixedly connected with pads, and the bottoms of the pads are made of silicone material.

[0011] As a further description of the above technical solution:

[0012] A display screen is provided on the front side of the outer wall of the console, and physical buttons are installed on the outer wall of the console.

[0013] As a further description of the above technical solution:

[0014] An emergency stop button is provided on the front side of the console, and a plurality of reinforcing columns are fixedly connected to the outer wall of the support platform.

[0015] As a further description of the above technical solution:

[0016] The bottom of the growth box is connected to a discharge port, and the outer wall of the growth box is provided with an observation window.

[0017] As a further description of the above technical solution:

[0018] The outer wall of the growth box is fixedly connected to a plurality of switches, and the outer walls of the plurality of switches are slidably connected to the outer wall of the cover.

[0019] As a further description of the above technical solution:

[0020] The outer wall of the heat exchanger is provided with a protective shell, and the bottom of the protective shell is fixedly connected to the top of the support platform.

[0021] The utility model has the following beneficial effects:

[0022] 1. In this utility model, the overall basic heating of the heating plate is combined with the local precise heating of the heating wire. The temperature of each different position of the growth chamber is detected by a temperature sensor, and the heating of the heating wire at the corresponding position is controlled by the control console, so that the temperature distribution is more uniform, which provides a key guarantee for the high-quality growth of single crystal diamond.

[0023] 2. In the present invention, an intelligent control valve is used to control the discharge of hot air in the growth chamber. The hot air enters the heat exchanger through the exhaust pipe and the connecting pipe, and the heat is efficiently transferred from the hot air to the circulating medium in the heat exchanger, so that the originally lost heat energy is recovered and converted into reusable energy, thereby improving the energy utilization efficiency of the entire device. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 This is a three-dimensional schematic diagram of the temperature control device for the single crystal diamond growth chamber proposed in the present invention;

[0025] Figure 2 This is a front view of the temperature control device for the single crystal diamond growth chamber proposed by the present invention;

[0026] Figure 3 A cross-sectional view of a growth chamber of the single crystal diamond growth chamber temperature control device proposed in the present invention;

[0027] Figure 4 This is a schematic structural diagram of the heating plate of the single crystal diamond growth chamber temperature control device proposed in the present invention.

[0028] Legend:

[0029] 1. Support platform; 2. Recovery mechanism; 201. Exhaust pipe; 202. Connecting pipe; 203. Heat exchanger; 204. Exhaust pipe; 205. Intelligent control valve 1; 206. Intelligent control valve 2; 3. Growth chamber; 4. Insulation layer; 5. Heating plate; 6. Growth chamber; 7. Avoidance hole; 8. Heating wire; 9. Temperature sensor; 10. Control console; 11. Display screen; 12. Emergency stop button; 13. Physical button; 14. Footrest; 15. Reinforcement column; 16. Discharge port; 17. Protective shell; 18. Switch; 19. Observation window; 20. Cover. DETAILED DESCRIPTION

[0030] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0031] Reference Figure 2-Figure 4The utility model provides an embodiment: a temperature control device for a single crystal diamond growth chamber, comprising a support platform 1, a growth box 3 is fixedly connected to the inner side of the support platform 1, a growth chamber 6 is opened on the inner side of the growth box 3, an inner wall of the growth box 3 is fixedly connected to a heat preservation layer 4, an outer wall of the heat preservation layer 4 is fixedly connected to a heating plate 5, a plurality of avoidance holes 7 are opened on the outer wall of the heating plate 5, a plurality of the avoidance holes 7 are fixedly connected to the inner sides of the plurality of heating wires 8, a plurality of the outer walls of the heating wires 8 are fixedly connected to a temperature sensor 9, a control console 10 is provided at the bottom of the support platform 1, a cover 20 is slidably connected to the top of the growth box 3, a recovery mechanism 2 is provided on the top of the cover 20, and the recovery mechanism 2 is used to recover heat energy; The four corners of the bottom of the support platform 1 are fixedly connected with pads 14. The bottom of the pads 14 is made of silicone material. The silicone pads 14 have good elasticity and anti-slip properties, which reduce the impact of vibration generated when the equipment is running on the ground and the surrounding environment; a display screen 11 is provided on the front side of the outer wall of the console 10, so that the operator can understand the operating status of the equipment in real time. The outer wall of the console 10 is installed with physical buttons 13, which is more convenient to operate; an emergency stop button 12 is provided on the front side of the console 10. When the equipment has an abnormal situation, the operator can immediately press the emergency stop button 12 to quickly stop the device from running. A plurality of reinforcing columns 15 are fixedly connected to the outer wall of the support platform 1 to enhance the structural strength of the support platform 1;

[0032] Specifically, by providing overall basic heating through the heating plate 5, combined with the precise heating supplement of the heating wire 8 in the local area, the temperature in the growth chamber 6 can be very finely regulated. When the temperature sensor 9 detects that the local temperature is low, the heating wire 8 can increase the power output in a targeted manner, effectively solving the temperature unevenness problem caused by the traditional single heating method. The temperature sensors 9 are evenly distributed on the outer wall of the heating wire 8, and can accurately monitor the temperature changes of each key position in the growth chamber 6 in real time. The temperature data is fed back to the control console 10 in time, so that the control system can quickly adjust the power output of the heating plate 5 and the heating wire 8 according to the difference between the actual temperature and the set temperature. At the same time, the heat loss to the external environment is effectively blocked by the insulation layer 4. The support platform 1 of the device provides a solid support foundation for the entire device. The structural strength of the support platform 1 is further enhanced by the reinforcing column 15, thereby improving its anti-deformation and anti-vibration capabilities.

[0033] Reference Figure 1 and Figure 2, the recovery mechanism 2 includes a heat exchanger 203, which can make full use of the heat energy in the hot air discharged from the growth chamber 6 and transfer it to the circulating medium to heat the circulating medium, so that the recovered heat energy can be used for other links requiring heat. The outer wall of the heat exchanger 203 is set on the outer wall of the growth box 3, and the top of the growth box 3 is connected with an exhaust pipe 201. The outer wall of the exhaust pipe 201 is fixedly connected to the intelligent control valve 1 205, and the other end of the exhaust pipe 201 is connected to the connecting pipe 202. The other end of the connecting pipe 202 is connected to the left side of the heat exchanger 203, and the right side of the heat exchanger 203 is connected with the outlet pipe 204. The outer wall of the outlet pipe 204 is fixedly connected to the intelligent control valve 2 206; the outer wall of the heat exchanger 203 is provided with a protective shell 17, and the bottom of the protective shell 17 is fixedly connected to the top of the support platform 1. The protective shell 17 provides important physical protection for the heat exchanger 203, thereby preventing the internal structure and heat exchange elements of the heat exchanger 203 from being damaged;

[0034] Specifically, the intelligent control valve 1 205 can accurately control the discharge timing of the hot gas according to the temperature in the growth chamber 6. When the temperature in the growth chamber 6 reaches a certain height and there is excess heat energy that needs to be recovered, the intelligent control valve 1 205 is opened through the console 10. This can ensure that the excess heat energy is drawn out for recycling at the most appropriate time. The intelligent control valve 2 206 on the outlet pipe 204 can control the flow rate and pressure of the exhaust gas. After the heat exchange process, the gas with a lowered temperature needs to be discharged. The intelligent control valve 2 206 can ensure that the heat exchanger 2 03, so that the hot gas can smoothly enter and flow out of the heat exchanger 203, thereby improving the efficiency of heat exchange. The heat exchanger 203 can fully utilize the thermal energy in the hot gas discharged from the growth chamber 6 and transfer it to the circulating medium to heat the circulating medium. The recovered thermal energy can be used for other links that require heat, thereby improving the energy utilization rate of the entire production process. At the same time, in the process of recovering thermal energy, the heat of the hot gas is reasonably transferred out, avoiding excessive temperature or excessive fluctuation in the growth chamber 6, and providing a more stable temperature environment for the growth of single crystal diamond.

[0035] Reference Figure 1 The bottom of the growth box 3 is connected to a discharge port 16, and an observation window 19 is opened on the outer wall of the growth box 3; a plurality of switches 18 are fixedly connected to the outer wall of the growth box 3, and the outer walls of the plurality of switches 18 are slidably connected to the outer wall of the cover 20;

[0036] Specifically, the discharge port 16 connected to the bottom of the growth chamber 3 provides a direct and convenient channel for discharging the single crystal diamond after the growth is completed. Through the observation window 19, the operator can directly observe the growth of the single crystal diamond inside without opening the growth chamber 3, allowing the operator to understand the internal situation at any time, ensuring the stability and continuity of the growth process. The switch 18 is slidably connected to the cover 20, providing a convenient operation method for opening and closing the cover 20. At the same time, it can ensure the close connection between the cover 20 and the growth chamber 3 in the closed state, thereby ensuring the sealing of the growth chamber 6.

[0037] Working Principle: When the device is turned on, heating plate 5 begins to work, generating heat through its own resistance, transferring heat to insulation layer 4 and growth chamber 6. Heating plate 5 acts as an overall heating element, providing a basic heating environment for growth chamber 6. Heating wires 8 are distributed in avoidance holes 7 of heating plate 5 and serve as auxiliary heating elements to further improve heating uniformity and accuracy. When temperature sensor 9 detects that the temperature in certain areas of growth chamber 6 is low, the heating wires 8 in the corresponding position can increase power output to raise the temperature in that area.

[0038] When the temperature in the growth chamber 6 reaches a certain level and there is excess heat energy that needs to be recovered, the intelligent control valve 205 is opened through the console 10, allowing the hot gas to be discharged from the growth chamber 6 through the exhaust pipe 201, and the hot gas enters the heat exchanger 203 through the connecting pipe 202. When the hot gas flows in the heat exchanger 203, the heat is transferred to the circulating medium through the wall of the heat exchanger 203. After heat exchange, the gas with reduced temperature is discharged from the outlet pipe 204 on the right side of the heat exchanger 203.

[0039] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A temperature control device for a single crystal diamond growth chamber, comprising a support platform (1), characterized in that: The inner side of the support platform (1) is fixedly connected to a growth box (3), the inner side of the growth box (3) is provided with a growth chamber (6), the inner wall of the growth box (3) is fixedly connected to a heat preservation layer (4), the outer wall of the heat preservation layer (4) is fixedly connected to a heating plate (5), the outer wall of the heating plate (5) is provided with a plurality of avoidance holes (7), the inner sides of the plurality of avoidance holes (7) are fixedly connected to heating wires (8), the outer walls of the plurality of heating wires (8) are fixedly connected to temperature sensors (9), a control console (10) is provided at the bottom of the support platform (1), the top of the growth box (3) is slidably connected to a cover (20), the top of the cover (20) is provided with a recovery mechanism (2), and the recovery mechanism (2) is used to recover heat energy.

2. The single crystal diamond growth chamber temperature control device according to claim 1, characterized in that: The recovery mechanism (2) comprises a heat exchanger (203), the outer wall of the heat exchanger (203) being arranged on the outer wall of the growth box (3), the top of the growth box (3) being connected to an exhaust pipe (201), the outer wall of the exhaust pipe (201) being fixedly connected to a first intelligent control valve (205), the other end of the exhaust pipe (201) being connected to a connecting pipe (202), the other end of the connecting pipe (202) being connected to the left side of the heat exchanger (203), the right side of the heat exchanger (203) being connected to an outlet pipe (204), the outer wall of the outlet pipe (204) being fixedly connected to a second intelligent control valve (206).

3. The single crystal diamond growth chamber temperature control device according to claim 1, characterized in that: The four corners of the bottom of the support platform (1) are all fixedly connected with pads (14), and the bottoms of the pads (14) are made of silicone material.

4. The single crystal diamond growth chamber temperature control device according to claim 1, characterized in that: A display screen (11) is provided on the front side of the outer wall of the console (10), and physical buttons (13) are installed on the outer wall of the console (10).

5. The single crystal diamond growth chamber temperature control device according to claim 1, characterized in that: An emergency stop button (12) is provided on the front side of the console (10), and a plurality of reinforcing columns (15) are fixedly connected to the outer wall of the support platform (1).

6. The single crystal diamond growth chamber temperature control device according to claim 1, characterized in that: The bottom of the growth box (3) is connected to a discharge port (16), and an observation window (19) is provided on the outer wall of the growth box (3).

7. The single crystal diamond growth chamber temperature control device according to claim 1, characterized in that: The outer wall of the growth box (3) is fixedly connected to a plurality of switches (18), and the outer walls of the plurality of switches (18) are all slidably connected to the outer wall of the cover (20).

8. The single crystal diamond growth chamber temperature control device according to claim 2, characterized in that: The outer wall of the heat exchanger (203) is provided with a protective shell (17), and the bottom of the protective shell (17) is fixedly connected to the top of the support platform (1).

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