Double-layer cooling cavity

Abstract

The utility model relates to a double-layer cooling cavity which comprises an inner pipe body and an outer pipe body which is coaxially distributed with the inner pipe body and is sleeved outside the inner pipe body, a medium circulation interlayer is arranged between the outer pipe body and the inner pipe body, and the double-layer cooling cavity further comprises a water channel ring fixed in the medium circulation interlayer. At least part of the water channel ring is fixedly connected with the inner pipe body, the remaining part of the water channel ring is fixedly connected with the outer pipe body, and the water channel ring is provided with a water channel hole with the axis parallel to the axis of the inner pipe body. The double-layer cooling cavity has the advantages that the water channel ring is used in the medium circulation interlayer to replace the prior art, so that the machining and manufacturing cost of the double-layer cooling cavity is greatly reduced, meanwhile, the later maintenance cost and time are reduced, and the water channel ring improves the structural strength of the whole medium circulation interlayer to a certain extent; the influence of internal and external pressure difference generated by medium circulation on the interlayer structure is prevented.

Description

Technical Field

[0001] The utility model belongs to the field of semiconductor manufacturing and processing, and in particular relates to a double-layer cooling cavity. Background Art

[0002] Semiconductor processing chillers are devices used to control temperature during the semiconductor manufacturing process. Semiconductor manufacturing often involves high-temperature and high-energy process steps such as thin film deposition, etching, and ion implantation. These steps require strict temperature control to ensure stable material and device performance. Therefore, chillers play a vital role in the processing process.

[0003] In the prior art, during the manufacturing process of the cooling cavity, the double-layer tube body of the cooling cavity needs to be fixed with a spiral ring in the medium circulation interlayer. The process of fixing the double-layer tube body with the spiral ring requires high precision and consistency to ensure that the spiral ring can be accurately embedded in the interlayer of the double-layer tube body, which makes the processing cost high; the fixing method of the spiral ring makes the disassembly and cleaning of the cooling cavity extremely cumbersome, increasing downtime and maintenance costs. Utility Model Content

[0004] The purpose of the present invention is to provide a double-layer cooling cavity that can solve the above technical problems.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A double-layer cooling cavity includes an inner tube body and an outer tube body coaxially distributed with the inner tube body and sleeved outside the inner tube body, wherein a medium circulation interlayer is provided between the outer tube body and the inner tube body, and the double-layer cooling cavity further includes a water channel ring fixed in the medium circulation interlayer, wherein the water channel ring is at least partially fixedly connected to the inner tube body, and the remaining part of the water channel ring is fixedly connected to the outer tube body, and a water channel hole is provided on the water channel ring, whose axis is parallel to the axis of the inner tube body.

[0007] Furthermore, the water channel ring divides the medium flow interlayer into at least two chambers distributed vertically, and the chambers are connected through the water channel holes.

[0008] Furthermore, there are a plurality of water channel holes, which are evenly distributed in the circumferential direction of the water channel ring.

[0009] Furthermore, the inner ring wall of the water channel ring is seamlessly welded to the outer side wall of the inner tube body, and the outer ring wall of the water channel ring is seamlessly welded to the inner side wall of the outer tube body.

[0010] Furthermore, one end of the inner tube body is fixedly connected to one end of the outer tube body through a first flange ring, and the other end of the inner tube body is fixedly connected to the other end of the outer tube body through a second flange ring.

[0011] Furthermore, at least one medium flow inlet hole communicating with the medium flow interlayer is provided on the first flange ring, and at least one medium flow outlet hole communicating with the medium flow interlayer is provided on the second flange ring.

[0012] Furthermore, the first flange ring and the second flange ring are respectively provided with inner step grooves, and inner step portions matching the corresponding inner step grooves are respectively provided at both ends of the inner tube body, and the inner step grooves and the inner step portions are matched and fixed by welding.

[0013] Furthermore, the first flange ring and the second flange ring are respectively provided with outer step grooves, and outer step portions matching the corresponding outer step grooves are respectively provided at both ends of the outer tube body, and the outer step grooves and the outer step portions are matched and fixed by welding.

[0014] Compared with the existing technology, the advantages of this application are: the use of water channel rings in the medium circulation interlayer replaces the existing technology, which greatly reduces the processing and manufacturing costs of the double-layer cooling cavity, while reducing the subsequent maintenance costs and time, and the water channel rings improve the structural strength of the entire medium circulation interlayer to a certain extent, preventing the internal and external pressure difference generated by the medium circulation from affecting the interlayer structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is the main assembly view of the double-layer cooling cavity structure of the utility model;

[0016] Figure 2 This is a front view of the main structure of the double-layer cooling cavity of the utility model;

[0017] Figure 3 This is a top view of the main structure of the double-layer cooling cavity of the utility model;

[0018] Figure 4 This is a left middle cross-sectional view of the main structure of the double-layer cooling cavity of the utility model;

[0019] Figure 5 This is a front-center cross-sectional view of the main structure of the double-layer cooling cavity of the present invention;

[0020] Figure 6 for Figure 4 A magnified view of the details of the main components in area A;

[0021] Figure 7 This is an assembly drawing of the main components of the waterway ring of the present utility model.

[0022] In the figure, the inner tube body 1, the inner step groove 10, the inner step portion 11, the outer tube body 2, the outer step groove 20, the outer step portion 21, the medium circulation interlayer 3, the water channel ring 4, the water channel hole 40, the first flange ring 5, the medium circulation inlet hole 50, the second flange ring 6, the medium circulation outlet hole 60, the channel tube 7, the first channel 70, the second channel 71, and the inlet and outlet flanges 8. DETAILED DESCRIPTION

[0023] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.

[0024] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0025] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0026] In the description of this embodiment, terms such as "upper," "lower," "right," and "left" are used to refer to positions or locations based on the positions or locations shown in the accompanying drawings. These terms are intended solely to facilitate description and simplify operation, and are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0027] Example 1

[0028] like Figure 1 The figure shows the finished assembly of the double-layer cooling chamber, which is used in semiconductor manufacturing, such as Figure 4 and Figure 6 As shown, it includes an inner tube body 1, and an outer tube body 2 coaxially distributed with the inner tube body 1 and sleeved outside the inner tube body 1, with a medium flow interlayer 3 between the outer tube body 2 and the inner tube body 1. The cooling medium flows through the medium flow interlayer 3, thereby controlling the temperature to achieve a cooling effect;

[0029] Among them, such as Figure 6 As shown, a water channel ring 4 is fixed in the medium circulation interlayer 3. The water channel ring 4 is at least partially fixedly connected to the inner tube body 1, and the remaining part of the water channel ring 4 is fixedly connected to the outer tube body 2. At the same time, it does not affect the cooling medium flowing in the medium circulation interlayer 3. Figure 7 As shown, a plurality of water channel holes 40 are provided on the water channel ring 4, whose axis is parallel to the axis of the inner tube body 1. In addition to providing a circulation channel for the cooling medium, the water channel hole 40 can also be used to adjust the water flow to achieve a temperature control effect. Specifically, the inner ring wall of the water channel ring 4 is seamlessly welded to the outer wall of the inner tube body 1, and the outer ring wall of the water channel ring 4 is seamlessly welded to the inner wall of the outer tube body 2. The water channel holes 40 are evenly distributed circumferentially on the above-mentioned water channel ring 4.

[0030] The water channel ring 4 improves the structural strength of the entire medium circulation interlayer 3 to a certain extent, and prevents the internal and external pressure difference caused by the medium circulation from affecting the interlayer structure.

[0031] At the same time, the arrangement of the water channel ring 4 divides the medium flow interlayer 3 into at least two upper and lower chambers, which are connected through the water channel holes 40. In this embodiment, there is only one water channel ring 4, which can also be increased according to the length or pipe diameter of the double-layer cooling cavity.

[0032] One end of the inner tube body 1 is fixedly connected to one end of the outer tube body 2 via a first flange ring 5 , and the other end of the inner tube body 1 is fixedly connected to the other end of the outer tube body 2 via a second flange ring 6 .

[0033] In this embodiment, both ends of the inner tube body 1 and the outer tube body 2 are connected to flange rings. The above-mentioned first flange ring 5 and second flange ring 6 are used to connect the double-layer cooling cavity with other devices. At the same time, the above-mentioned first flange ring 5 and second flange ring 6 play a positioning role in the assembly of the inner tube body 1 and the outer tube body 2 during the cavity processing. The first flange ring 5 and the second flange ring 6 are fixedly connected to the inner tube body 1 and the outer tube body 2 by welding. At the same time, the first flange ring 5 is described in terms of spatial position and is arranged at the bottom of the tube body, while the second flange ring 6 is arranged at the top of the above-mentioned tube body.

[0034] The first flange ring 5 and the second flange ring 6 are respectively provided with an inner step groove 10, and the two ends of the inner tube body 1 are respectively provided with an inner step portion 11 that matches the corresponding inner step groove 10. The inner step groove 10 and the inner step portion 11 are matched and welded and fixed. The matching of the inner step groove 10 and the inner step portion 11 enables the operator to align the position of the flange ring and the tube body more quickly and conveniently during the processing, thereby improving the processing accuracy and speed.

[0035] Similarly, with the same function as the above-mentioned inner step groove 10 and inner step portion 11, outer step grooves 20 are respectively provided on the first flange ring 5 and the second flange ring 6, and outer step portions 21 matching the corresponding outer step grooves 20 are respectively provided at both ends of the outer tube body 2. The outer step groove 20 and the outer step portion 21 are matched and welded to fix.

[0036] The first flange ring 5 is provided with at least one medium flow inlet hole 50 communicating with the medium flow interlayer 3, and the second flange ring 6 is provided with at least one medium flow outlet hole 60 communicating with the medium flow interlayer 3. Cooling medium enters the medium flow interlayer 3 through the medium flow inlet hole 50 on the bottom first flange ring 5, then flows out of the medium flow outlet hole 60 through the water channel hole 40. Because the medium flow inlet hole 50 is located on the bottom first flange ring 5 and the medium flow outlet hole 60 is located on the top second flange ring 6, the cooling medium can completely fill the medium flow interlayer 3, ensuring sufficient and uniform cooling of all parts of the double-layer cooling cavity.

[0037] Example 2

[0038] The structure and principle of this embodiment are basically the same as those of the first embodiment. The difference lies in that, with respect to the double-layer cooling cavity of the first embodiment, this embodiment describes other components on the double-layer cooling cavity.

[0039] like Figure 2-Figure 3 As shown, the double-layer cooling cavity further includes a plurality of channel tubes 7 evenly distributed in an annular shape on the outer wall of the outer tube body 2 . The channel tubes 7 penetrate the outer tube body 2 and extend to the interior of the inner tube body 1 . The channel tubes 7 are not connected to the medium flow interlayer 3 .

[0040] like Figure 5 As shown, the channel tube 7 includes a first channel 70 distributed perpendicular to the central axis of the inner tube body 1, and a second channel 71 distributed at an angle to the central axis of the inner tube body 1. In this embodiment, the second channel 71 is set to form a 70° angle with the central axis of the above-mentioned tube body.

[0041] The double-layer cooling cavity further includes an inlet and outlet flange 8 fixedly connected to the outer tube body 2 . The inlet and outlet flange 8 communicates with the interior of the inner tube body 1 , and is not in communication with the medium flow interlayer 3 .

[0042] The specific embodiments described herein are merely illustrative of the spirit of the present invention. Persons skilled in the art may make various modifications, additions, or substitutions to the described specific embodiments without departing from the spirit of the present invention or exceeding the scope defined by the appended claims.

Claims

1. A double-layer cooling cavity, comprising an inner tube (1), and an outer tube (2) coaxially distributed with the inner tube (1) and sleeved outside the inner tube (1), wherein a medium-flowing interlayer (3) is provided between the outer tube (2) and the inner tube (1), characterized in that: The double-layer cooling cavity further comprises a water channel ring (4) fixed in the medium circulation interlayer (3), wherein at least a portion of the water channel ring (4) is fixedly connected to the inner tube body (1), and the remaining portion of the water channel ring (4) is fixedly connected to the outer tube body (2), and a water channel hole (40) is provided on the water channel ring (4) whose axis is parallel to the axis of the inner tube body (1).

2. The double-layer cooling cavity according to claim 1, characterized in that: The water channel ring (4) divides the medium flow interlayer (3) into at least two chambers distributed vertically, and the chambers are connected through the water channel holes (40).

3. The double-layer cooling cavity according to claim 2, characterized in that: There are a plurality of water channel holes (40) which are evenly distributed in the circumferential direction of the water channel ring (4).

4. The double-layer cooling cavity according to claim 1, characterized in that: The inner ring wall of the water channel ring (4) is seamlessly welded to the outer wall of the inner tube body (1), and the outer ring wall of the water channel ring (4) is seamlessly welded to the inner wall of the outer tube body (2).

5. The double-layer cooling cavity according to claim 1, characterized in that: One end of the inner tube body (1) is fixedly connected to one end of the outer tube body (2) via a first flange ring (5), and the other end of the inner tube body (1) is fixedly connected to the other end of the outer tube body (2) via a second flange ring (6).

6. The double-layer cooling cavity according to claim 5, characterized in that: The first flange ring (5) is further provided with at least one medium flow inlet hole (50) communicating with the medium flow interlayer (3), and the second flange ring (6) is further provided with at least one medium flow outlet hole (60) communicating with the medium flow interlayer (3).

7. The double-layer cooling cavity according to claim 5, characterized in that: The first flange ring (5) and the second flange ring (6) are respectively provided with inner step grooves (10), and inner step portions (11) matching the corresponding inner step grooves (10) are respectively provided at both ends of the inner tube body (1), and the inner step grooves (10) and the inner step portions (11) are matched and fixed by welding.

8. The double-layer cooling cavity according to claim 7, characterized in that: The first flange ring (5) and the second flange ring (6) are respectively provided with an outer step groove (20), and both ends of the outer tube body (2) are respectively provided with an outer step portion (21) that matches the corresponding outer step groove (20), and the outer step groove (20) and the outer step portion (21) are matched and fixed by welding.

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