Glow discharge device for generating large-area plasma

Abstract

The glow discharge device capable of generating the large-area plasma comprises an anode wiring end cover, a cathode wiring end cover, an air inlet, an air outlet and a shell, the anode wiring end cover and the cathode wiring end cover are symmetrically arranged at the two ends of the shell, and the air inlet and the air outlet are formed in the outer side of the shell; electrode grooves are symmetrically formed in the two ends of an inner cavity of the shell, electrodes are detachably connected into the electrode grooves, and a plurality of communicated discharging thin pipes are arranged between the electrode grooves; ventilation cavities are respectively formed in one sides, far away from the anode wiring end cover and the cathode wiring end cover, of the electrode grooves; and the ventilation cavities are respectively communicated with the air inlet, the air outlet and the plurality of discharge thin tubes. The large-area plasma glow discharge device provided by the utility model can effectively generate plasmas with good uniformity, high stability and high density.

Description

Technical Field

[0001] The present application relates to the field of plasma discharge technology, and in particular to a glow discharge device for generating large-area plasma. Background Art

[0002] Plasma glow discharge is a gas discharge phenomenon in low-pressure gas that exhibits a glow. The pressure generated by glow discharge is generally less than 10 MPa, and the voltage ranges from approximately 0.4 kV to 8.0 kV. The principle of glow discharge is that when the voltage between the two electrodes of air or an inert gas is high, the electrons in the gas gain sufficient kinetic energy under the influence of the electric field and are accelerated. They continuously collide with gas molecules, causing electron avalanches in the discharge space. This is characterized by current intensities of only a few milliamperes and a relatively low temperature in the discharge gas.

[0003] However, during atmospheric glow discharge, electrons collide frequently with neutral particles, which, to a certain extent, affects the stability and uniformity of plasma generation. In practical applications, the generation and control of atmospheric pressure glow discharge plasma is technically challenging, requiring precise control of discharge parameters to meet specific application requirements. Therefore, a discharge device capable of generating large-area, stable, and uniform plasma is urgently needed. Utility Model Content

[0004] The utility model solves the technical problems of poor stability and uniformity of plasma electrons generated in the existing plasma glow discharge technology by providing a glow discharge device for generating large-area plasma.

[0005] The utility model provides a glow discharge device for generating large-area plasma, comprising an anode terminal cover, a cathode terminal cover, an air inlet, an exhaust port and a shell, wherein the anode terminal cover and the cathode terminal cover are symmetrically arranged at both ends of the shell, and the air inlet and the exhaust port are arranged on the outside of the shell; electrode grooves are symmetrically arranged at both ends of the inner cavity of the shell, electrodes are detachably connected in the electrode grooves, and a plurality of communicating discharge tubes are arranged between the electrode grooves; ventilation cavities are respectively arranged on the side of the electrode grooves away from the anode terminal cover and the cathode terminal cover, and the ventilation cavities are respectively communicated with the air inlet, the exhaust port and the plurality of discharge tubes.

[0006] In a possible implementation, the electrode is composed of multiple groups of intersecting electrode wires, and needle-shaped filaments are provided at the intersections of the multiple groups of electrode wires.

[0007] In a possible implementation, the tip of the needle-shaped filament is arranged to be inclined toward the plurality of discharge tubes.

[0008] In a possible implementation, a support plate is provided between the ventilation cavity and the discharge tubes, and the ends of the plurality of discharge tubes, the ventilation cavity, and the support plate are all integrated with the housing.

[0009] In a possible implementation, support members are further provided between the plurality of support plates, and the plurality of discharge tubes are arranged around the support member array.

[0010] In a possible implementation, the anode terminal cover and the cathode terminal cover are respectively provided with wire holes, and both the anode terminal cover and the cathode terminal cover are detachably connected to the housing.

[0011] The technical solution provided in this utility model has at least the following technical effects:

[0012] (1) Efficient gas ionization: By connecting the anode terminal cap and the cathode terminal cap to the electrodes respectively, an effective electric field can be formed in the discharge tube, promoting the ionization of gas molecules and generating high-density plasma;

[0013] (2) Uniform plasma distribution: Since the electrodes are provided with a number of needle-like filaments, these filaments increase the surface area of ​​the ionization region, which helps to form a uniformly distributed plasma, thereby improving the stealth effect;

[0014] (3) Optimized gas flow: The design of the vent cavity allows gas to flow effectively within the discharge tube and connect with the gas inlet and exhaust ports, which helps maintain the stability and uniformity of the plasma;

[0015] (4) Structural stability: The design of the support plate and support members provides additional structural stability for the discharge tube, which is conducive to maintaining the stability of the plasma during long-term operation;

[0016] (5) Angle-tilted needle-like filaments: The needle-like filaments form a certain angle with the electrode plane, and the tip is set toward the ventilation cavity. This design can optimize the electric field distribution and further improve the ionization efficiency of the plasma.

[0017] Through the above-mentioned design features, the large-area plasma glow discharge device provided by the utility model can effectively generate plasma with good uniformity, high stability and high density. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the description of the present invention or the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 This is a schematic diagram of the overall external structure of a glow discharge device for generating large-area plasma provided by the present invention;

[0020] Figure 2 A cross-sectional schematic diagram of a glow discharge device for generating large-area plasma provided by the present invention;

[0021] Figure 3 This is a schematic AA cross-sectional view of a glow discharge device for generating large-area plasma provided by the present invention;

[0022] Figure 4 The present invention provides a schematic diagram of the electrode structure of a glow discharge device for generating large-area plasma.

[0023] Figure numerals: 1. anode terminal cover; 2. cathode terminal cover; 3. air inlet; 4. exhaust port; 5. shell; 6. electrode slot; 61. electrode; 62. needle-shaped filament; 7. discharge tube; 8. ventilation cavity; 9. support member. DETAILED DESCRIPTION

[0024] The following will be combined with the accompanying drawings to clearly and completely describe the technical solutions of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0025] In the description of the present invention, it should be noted that the terms "upper", "lower", "vertical", "horizontal", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention. The terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. In addition, the terms "installation" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be a communication between the internal parts of two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0026] The utility model provides a glow discharge device that generates large area plasma. The overall structure is shown in Figure 1 and Figure 2 The device comprises an anode terminal cover 1, a cathode terminal cover 2, an air inlet 3, an exhaust port 4 and a shell 5. The anode terminal cover 1 and the cathode terminal cover 2 are symmetrically arranged at both ends of the shell 5, and the air inlet 3 and the exhaust port 4 are arranged on the outside of the shell 5.

[0027] Illustratively, electrode slots 6 are symmetrically provided at both ends of the inner cavity of the shell 5, electrodes 61 are detachably connected to the electrode slots 6, and multiple connected discharge tubes 7 are provided between the electrode slots 6; ventilation cavities 8 are respectively provided on the side of the electrode slots 6 away from the anode terminal cover 1 and the cathode terminal cover 2, and the ventilation cavities 8 are respectively connected to the air inlet 3, the exhaust port 4 and the multiple discharge tubes 7.

[0028] Exemplarily, the electrode 61 is composed of multiple groups of intersecting electrode wires, and a needle-shaped filament 62 is provided at the intersection of the multiple groups of electrode wires.

[0029] Exemplarily, the tips of the needle-shaped filaments 62 are arranged to be inclined toward the plurality of discharge tubes 7 .

[0030] Specifically, the anode terminal cap 1 and cathode terminal cap 2 of the device are respectively connected to a nearby electrode slot 6, which is configured according to the shape of the housing 5. Electrodes 61 are detachably connected in the electrode slot 6. The needle-like filaments 62 provided on the surface of the electrode slot 6 increase the discharge area while also making the discharge process more uniform.

[0031] Specifically, the needle-shaped filament 62 is arranged at a certain angle to the plane where the electrode 61 is located, and can be arranged perpendicular to each other.

[0032] Exemplarily, a support plate is provided between the ventilation cavity 8 and the discharge tubes 7 , and the ends of the plurality of discharge tubes 7 , the ventilation cavity 8 and the support plate are all integrated with the housing 5 .

[0033] Specifically, the ventilation cavity 8 and the ends of the plurality of discharge tubes 7 are integrated, which improves the sealing and pressure resistance of the connection between the two. The end support plates of the plurality of discharge tubes 7 are integrated to provide stability between the plurality of discharge tubes 7.

[0034] Exemplarily, a support member 9 is further provided between the plurality of support plates, and a plurality of discharge tubes 7 are arranged in an array around the support member 9 .

[0035] Specifically, adding the support member 9 between the two support plates improves the stability of the circumferentially arranged discharge tubes 7. Furthermore, the support member 9 can be a hollow tube or a solid rod.

[0036] Specifically, the discharge tubes 7 are arranged in a honeycomb shape in the inner cavity of the shell 5 with the support member 9 as the center.

[0037] Specifically, a heat dissipation layer is provided around the plurality of discharge tubes 7. The gaps between the plurality of discharge tubes 7 increase the heat dissipation layer to evenly dissipate the heat generated during the discharge process and further increase the stability between the discharge tubes 7.

[0038] Illustratively, the anode terminal cover 1 and the cathode terminal cover 2 are respectively provided with wire holes, and both the anode terminal cover 1 and the cathode terminal cover 2 are detachably connected to the housing 5 .

[0039] Specifically, the external power line enters through the wire hole and is connected to the electrode 61 . The anode terminal cover 1 and the cathode terminal cover 2 are detachable, which provides convenience for later replacement and maintenance of the electrode 61 in the electrode tank 6 .

[0040] Working principle:

[0041] The device inputs current through a wire connected to an external power source via the wire hole in the anode terminal cap 1, and outputs current via the wire hole in the cathode terminal cap 2. The wire entering the anode terminal cap 1 connects to the electrode 61 near one side, and the wire entering the cathode terminal cap 2 connects to the electrode 61 near one side, thereby generating a voltage between the symmetrically arranged electrodes 61. Gas is introduced into the ventilation cavity 8 through the air inlet 3, and the introduced gas further enters the multiple groups of discharge tubes 7. The generated voltage then ionizes the gas in the discharge tubes 7 to produce plasma. The ionized gas in the discharge tubes 7 enters the ventilation cavity 8 near the cathode terminal cap 2, and is then discharged through the exhaust port 4.

[0042] The various embodiments in this specification are described in a progressive manner, and the same or similar parts between the various embodiments can be referred to each other. Each embodiment focuses on the differences from other embodiments.

[0043] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit the present application. Although the present application has been described in detail with reference to the aforementioned embodiments, a person of ordinary skill in the art should understand that the technical solutions described in the aforementioned embodiments can still be modified, or some or all of the technical features therein can be replaced with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the present application.

Claims

1. A glow discharge device for generating large-area plasma, characterized in that: The invention comprises an anode terminal cover (1), a cathode terminal cover (2), an air inlet (3), an exhaust port (4) and a shell (5), wherein the anode terminal cover (1) and the cathode terminal cover (2) are symmetrically arranged at two ends of the shell (5), and the air inlet (3) and the exhaust port (4) are arranged on the outside of the shell (5); Electrode slots (6) are symmetrically arranged at both ends of the inner cavity of the shell (5), electrodes (61) are detachably connected in the electrode slots (6), and a plurality of discharge tubes (7) are arranged between the electrode slots (6); A ventilation cavity (8) is provided on one side of the electrode tank (6) away from the anode terminal cover (1) and the cathode terminal cover (2), and the ventilation cavity (8) is respectively connected to the air inlet (3), the exhaust port (4) and the plurality of discharge tubes (7).

2. The glow discharge device for generating large-area plasma according to claim 1, characterized in that: The electrode (61) is composed of multiple groups of intersecting electrode wires, and needle-shaped filaments (62) are provided at the intersection points of the multiple groups of electrode wires.

3. The glow discharge device for generating large-area plasma according to claim 2, characterized in that: The tips of the needle-shaped filaments (62) are all arranged obliquely toward the plurality of discharge tubes (7).

4. The glow discharge device for generating large-area plasma according to claim 1, characterized in that: A support plate is provided between the plurality of ventilation cavities (8) and the discharge tubes (7); the ends of the plurality of discharge tubes (7), the ventilation cavities (8) and the support plate are integrated with the housing (5).

5. The glow discharge device for generating large area plasma according to claim 4, characterized in that: A support member (9) is further provided between the plurality of support plates, and the plurality of discharge tubes (7) are arranged in an array around the support member (9).

6. The glow discharge device for generating large-area plasma according to claim 1, characterized in that: The anode terminal cover (1) and the cathode terminal cover (2) are respectively provided with wire holes, and the anode terminal cover (1) and the cathode terminal cover (2) are both detachably connected to the shell (5).

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