Separating type spin coater tray structure

Abstract

The utility model relates to the technical field of semiconductors, in particular to a separating type spin coater tray structure which comprises a supporting disc and an adsorption structure arranged on the supporting disc, the adsorption structure comprises at least two independent adsorption areas, each adsorption area is provided with an air exhaust area and a plurality of adsorption grooves or / and adsorption holes communicated with the air exhaust area, and the adsorption grooves or / and the adsorption holes are communicated with the air exhaust area. The adsorption grooves or the adsorption holes are formed in the upper surface of the supporting disc. The scheme is used for solving the problem that a spin coater tray structure in the prior art can only adsorb one product.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a separate type glue spreader tray structure. Background Art

[0002] The glue machine tray mainly fixes products such as wafers and substrates through vacuum adsorption technology. Normally, a glue machine tray only adsorbs one product. However, in certain specific cases, gluing two or more products at the same time can significantly improve production efficiency and ensure the consistency of glue quality of products in the same batch. At present, there is a lack of glue machine trays on the market that can meet this demand. For example, for some special products, in order to facilitate other processing steps after the photolithography process, the whole substrate needs to be cut in half before gluing. However, the existing glue machine tray structure can only adsorb a single substrate and cannot adsorb two substrates at the same time, which limits production efficiency. For example, the patent publication number CN110238000A "Glue Machine Suction Cup" applied for and published in 2019 and the CN117101976A "Glue Machine Tray Structure" applied for and published in 2023 are both for the adsorption of single-piece products and cannot meet the needs of adsorbing two or more pieces at the same time. Utility Model Content

[0003] The utility model aims to provide a separate glue spreader tray structure to solve the problem that the glue spreader tray structure in the prior art can only absorb one piece of product.

[0004] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0005] A separate glue spreader tray structure includes a support plate and an adsorption structure arranged on the support plate. The adsorption structure includes at least two independent adsorption areas, each of which is provided with an exhaust area and multiple adsorption grooves and / or adsorption holes connected to the exhaust area. The adsorption grooves or adsorption holes are arranged on the upper surface of the support plate.

[0006] The principle and advantages of this solution are: when adopting this solution, by setting up independent adsorption areas, the adsorption grooves or adsorption holes between each adsorption area are connected. Each adsorption area can adsorb the product separately through the negative pressure generated by the corresponding exhaust area, or the combination of adsorption areas can be used to adsorb the same product, thereby ensuring that this solution can meet the adsorption of both a single product (wafer or substrate) and the number of products with the same number of adsorption areas, thereby improving production efficiency and helping to ensure the consistency of product glue distribution under the same adsorption, improving practicality while meeting actual production needs in more scenarios.

[0007] Preferably, as an improvement, the adsorption slots / adsorption holes of adjacent adsorption areas are separated by grooves to facilitate separation while reducing processing costs. At the same time, the setting of the grooves does not completely affect the subsequent gluing of the product by the glue machine. In addition, the design of the grooves forms a partition mark for adjacent areas to facilitate the staff to quickly know the partition situation, and when the product is a split product, adjacent products can be spliced ​​or docked in the area above the groove, which is convenient for the product to form a whole when gluing.

[0008] Preferably, as an improvement, a hollow cylinder is fixed at the bottom of the support plate, all the exhaust zones are arranged on the hollow cylinder, and adjacent exhaust zones are separated by partitions fixed on the hollow cylinder, so as to facilitate the integration of multiple exhaust tubes on one exhaust tube, and then exhaust each exhaust zone separately by inserting the hollow cylinder.

[0009] Preferably, as an improvement, the hollow cylinder is provided with a mounting slot for mounting the exhaust pipe, and the mounting slot is used to facilitate mounting the exhaust pipe integrated with the exhaust tube.

[0010] Preferably, as an improvement, the adsorption area is provided with a plurality of adsorption holes, and the supporting plate is provided with connecting cavities equal in number to the adsorption areas, and the connecting cavities connect the adsorption holes and the exhaust area of ​​the corresponding adsorption areas. The adsorption areas of this solution are adsorbed through the adsorption holes, which makes the tray structure simple and easy to process.

[0011] Preferably, as an improvement, the adsorption area is provided with a plurality of concentric arc-shaped adsorption grooves, and each adsorption area is provided with a through channel on the support plate. The projection of the through channel to the support plate passes through all the arc-shaped adsorption grooves in the same adsorption area, and the through channel is connected with the arc-shaped adsorption grooves and the exhaust area. The adsorption area of ​​this scheme adsorbs the product through the arc-shaped adsorption groove, which helps to ensure that a larger adsorption area is provided for the product and makes the adsorption more stable. The setting of the through channel on the surface of the support plate can simplify the tray structure and reduce the processing difficulty.

[0012] Preferably, as an improvement, the through channel is arranged on the symmetry line of the arc-shaped adsorption groove to facilitate the arc-shaped adsorption groove to generate a more uniform adsorption force.

[0013] Preferably, as an improvement, the through-channel is arranged along the radial direction of the support disc. This solution simplifies the processing steps and reduces the processing cost when processing the through-channels or arc-shaped adsorption grooves of all adsorption areas based on the determination of the circumferential center.

[0014] Preferably, as an improvement, the through-channel is provided on the upper surface of the support plate, passing through all the arc-shaped adsorption grooves in the same area. The through-channel of this solution is provided on the upper surface of the support plate, which can reduce the processing difficulty of the tray structure, simplify the processing cost, and increase the adsorption area.

[0015] Preferably, as an improvement, the through channel is located below the arc-shaped adsorption groove, and the through channel and the arc-shaped adsorption groove are connected via a through hole. The through channel of this solution is located below the arc-shaped adsorption groove, so that the adsorption force of each arc-shaped adsorption groove is more uniform during suction. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the three-dimensional structure of Example 1 of the present utility model.

[0017] Figure 2 for Figure 1 Schematic diagram of the three-dimensional structure after rotation angle.

[0018] Figure 3 This is a schematic diagram of the three-dimensional structure of another solution in Example 1 of the present utility model.

[0019] Figure 4 for Figure 3 Schematic diagram of the three-dimensional structure of the supporting suction cup and the plate body after the explosion.

[0020] Figure 5 for Figure 3 The main section view in .

[0021] Figure 6 This is a schematic diagram of the three-dimensional structure of the second embodiment of the present utility model.

[0022] Figure 7 This is a schematic diagram of the three-dimensional structure after the carrying suction cup on the support plate is removed in Example 2 of the utility model. DETAILED DESCRIPTION

[0023] The following is further described in detail through specific implementation methods:

[0024] The figure marks in the drawings of the specification include: support plate 1, groove 11, adsorption area 12, arc-shaped adsorption groove 121, through channel 122, connecting groove 123, through hole 124, hollow cylinder 2, exhaust area 10, partition 21, mounting slot 22, adsorption hole 125, connecting cavity 126, through hole 127.

[0025] Example 1

[0026] Combine Figures 1 to 5As shown, a separate glue spreader tray structure includes a support plate 1 and an adsorption structure arranged on the support plate 1. The adsorption structure includes at least two independent adsorption areas 12. Each adsorption area 12 is provided with an exhaust area 10 and a plurality of adsorption grooves connected to the exhaust area 10. The adsorption grooves are arranged on the upper surface of the support plate 1. In this embodiment, the adsorption grooves are arc-shaped adsorption grooves 121. The number of adsorption areas 12 is 2 as an example.

[0027] Adjacent adsorption regions 12 are separated by the grooves 11 . In this embodiment, the adsorption regions 12 are symmetrically arranged with respect to the grooves 11 .

[0028] A hollow cylinder 2 is fixed at the bottom of the support plate 1, and all the exhaust zones 10 are arranged in the hollow space of the hollow cylinder 2, and adjacent exhaust zones 10 are separated by a partition 21 fixed on the hollow cylinder 2. In this embodiment, the partition 21 is a partition protrusion, and an installation slot 22 is provided on the hollow cylinder 2. The installation slot 22 is used to facilitate the installation of the exhaust pipe integrated with the exhaust tube. The exhaust tube has a corresponding exhaust zone 10 to perform negative pressure suction on the corresponding adsorption area 12.

[0029] Each adsorption area 12 is provided with multiple concentric arc-shaped adsorption grooves 121, and each adsorption area 12 is provided with a through channel 122 on the support disk 1. The projection of the through channel 122 onto the support disk 1 passes through all the arc-shaped adsorption grooves 121 in the same adsorption area 12. The through channel 122 is connected to the arc-shaped adsorption grooves 121 and the exhaust area 10. The through channel 122 is arranged on the symmetry line of the arc-shaped adsorption groove 121, and the through channel 122 is arranged radially along the support disk 1.

[0030] In one specific embodiment, Figure 1 and Figure 2 The through-channel 122 is provided on the upper surface of the support plate 1, extending through all the arc-shaped adsorption grooves 121 in the same area. This solution allows both the through-channel 122 and the arc-shaped adsorption grooves 121 to adsorb the product, helping to ensure a larger adsorption area for the product and making adsorption more stable. The placement of the through-channel 122 on the surface of the support plate 1 simplifies the tray structure and reduces manufacturing difficulty. Furthermore, a connecting groove 123 is machined on the surface of the support plate 1. The connecting groove 123 forms a T-shaped groove with the through-channel 122, and the connecting groove 123 communicates with the exhaust area 10 within the hollow cylinder 2 via a through hole.

[0031] In another specific embodiment, in combination Figures 3 to 5The through-channel 122 is not located on the upper surface of the support disk 1, but is located below the arc-shaped adsorption groove 121. The support disk 1 includes a fixedly connected disk body and a carrying suction cup fixed on the disk body. The arc-shaped adsorption groove 121 is opened on the carrying suction cup. The upper surface of the disk body is processed with a radial through-groove, and the through-groove is covered with the carrying suction cup to form a through-channel. The through-channel 122 is connected to the arc-shaped adsorption groove 121 through a through hole 124, and the through hole 124 is set on the carrying suction cup.

[0032] A communication groove 123 is also processed on the disk body. The communication groove 123 and the through channel 122 form a T-shaped groove. The communication groove 123 is connected to the air extraction area 10 in the hollow column 2 through a through hole.

[0033] In this embodiment, negative pressure suction is transferred through the connecting groove 123, the through-channel 122, and the through-hole to each arc-shaped adsorption groove 121, thereby generating uniform adsorption force throughout the entire adsorption area 12. Furthermore, in this embodiment, the tray body and the supporting suction cup can be connected in a detachable manner, allowing for quick replacement if the supporting suction cup is damaged or if the position of the arc-shaped adsorption groove 121 needs to be changed according to the specific adsorption requirements of the product, thereby reducing replacement costs.

[0034] Example 2

[0035] Combine Figure 6 and Figure 7 The difference between the second embodiment and the first embodiment is that the adsorption area is not provided with an arc-shaped adsorption groove, but is provided with a plurality of adsorption holes 125. The support disk 1 includes a disk body and a carrying suction cup fixed on the disk body. The hollow cylinder 2 is fixed to the bottom of the disk body. The adsorption holes 125 are opened on the carrying suction cup. The disk body is provided with grooves 11 with the same number as the adsorption area 12. The grooves 11 are located below the carrying suction cup and form a connecting cavity 126 connected to the adsorption holes 125 of the corresponding adsorption area 12 under the pressure and cover of the carrying suction cup. In this embodiment, the number of connecting cavities 126 is two, and the connecting cavity 126 is connected to the exhaust area below through a through hole 127. Compared with the first embodiment, the structural structure of the second embodiment is simpler, and in this embodiment, the disk body and the carrying suction cup can be connected in a detachable connection manner, so that the appropriate carrying suction cup can be replaced according to the specific adsorption requirements of the product, thereby improving practicality.

[0036] The above description is merely an embodiment of the present invention, and the commonly known specific technical solutions and / or features of the solution are not described in detail here. It should be noted that for those skilled in the art, without departing from the technical solution of the present invention, several variations and improvements can be made, which should also be considered as the scope of protection of the present invention, and these will not affect the effect of the implementation of the present invention and the practicality of the patent. The scope of protection claimed in this application shall be based on the content of its claims, and the specific implementation methods and other records in the specification can be used to interpret the content of the claims.

Claims

1. A separate type spinner tray structure, comprising a support plate and an adsorption structure provided on the support plate, characterized in that: The adsorption structure includes at least two independent adsorption areas, each of which is provided with an exhaust area and a plurality of adsorption slots and / or adsorption holes communicating with the exhaust area, and the adsorption slots or adsorption holes are arranged on the upper surface of the support plate.

2. The tray structure of a separate type glue spreader according to claim 1, characterized in that: Adjacent adsorption areas have adsorption slots / adsorption holes separated by grooves.

3. The tray structure of a separate type glue spreader according to claim 1, characterized in that: A hollow cylinder is fixed at the bottom of the support plate, all the air extraction areas are arranged on the hollow cylinder, and adjacent air extraction areas are separated by a partition fixed on the hollow cylinder.

4. The tray structure of a separate type glue roller according to claim 3, characterized in that: The hollow cylinder is provided with an installation slot for mounting the exhaust pipe.

5. A separate type spin coater tray structure according to any one of claims 1 to 4, characterized in that: The adsorption area is provided with a plurality of adsorption holes, and the supporting plate is provided with a number of connecting cavities equal to the number of the adsorption areas, and the connecting cavities connect the adsorption holes corresponding to the adsorption area and the exhaust area.

6. A separate type spin coater tray structure according to any one of claims 1 to 4, characterized in that: The adsorption area is provided with multiple concentric arc-shaped adsorption grooves, and each adsorption area is provided with a through channel on the support disk. The projection of the through channel to the support disk passes through all the arc-shaped adsorption grooves in the same adsorption area, and the through channel is connected with the arc-shaped adsorption grooves and the exhaust area.

7. The tray structure of a separate type glue spreader according to claim 6, characterized in that: The through channel is arranged on the symmetry line of the arc-shaped adsorption groove.

8. The tray structure of a separate type glue roller according to claim 7, characterized in that: The through channel is arranged along the radial direction of the support disk.

9. A separate type spin coater tray structure according to any one of claims 7-8, characterized in that: The through channel is arranged on the upper surface of the support plate and passes through all the arc-shaped adsorption grooves in the same area.

10. A separate type spin coater tray structure according to any one of claims 7-8, characterized in that: The through channel is located below the arc-shaped adsorption groove, and the through channel is communicated with the arc-shaped adsorption groove via a through hole.

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