Nitride ceramic sintering sagger

Abstract

The utility model discloses a nitride ceramic sintering sagger, and relates to the technical field of ceramic plate machining devices. A closed hollow cavity is formed in the sagger, at least one side of the hollow cavity is provided with a containing structure used for containing powder, and the inner space of the containing structure is communicated with the hollow cavity. According to the nitride ceramic sintering sagger, the containing structure used for containing the sintering aid powder is arranged in the inner cavity of the sagger, the sealing performance of the sagger cannot be controlled, meanwhile, the atmosphere rich in the sintering aid is created, and the sintering compactness is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of ceramic plate processing devices, and more specifically, to a nitride ceramic sintering sagger. Background Art

[0002] Nitride ceramics, such as silicon nitride and boron nitride, offer high thermal stability, high resistivity, high theoretical thermal conductivity, and excellent mechanical properties, making them ideal ceramic substrate materials for devices. Currently, nitride ceramics are primarily produced through tape casting, which involves tape-casting nitride powder into thin sheets, laminating these sheets, statically pressing them, and then sintering them. To prevent the adverse effects of gases and harmful substances on the green body during sintering, existing sintering processes typically involve sintering the green body in a closed sagger.

[0003] However, the high sintering temperature of nitrides inevitably causes the volatilization of the sintering aid. Once the sintering aid volatilizes, the composition ratio of the ceramic becomes uncontrollable. Excessive volatilization can lead to loose sintering, affecting the material's ultimate performance. To control the volatilization of the sintering aid, it is necessary to create a closed atmosphere rich in sintering aid. However, no saggers capable of providing such an atmosphere have been reported.

[0004] For example, patent CN116161970A proposes a stacking sintering process method for high-performance silicon nitride ceramic substrates, which places the powder-coated cast green sheets in a stack in a boron nitride ceramic sagger, and presses a boron nitride ceramic block with holes on the silicon nitride stacked green sheets, and presses a tungsten carbide ceramic block on the boron nitride ceramic block at the same time, and sinters the silicon nitride stacked green sheets in a sintering furnace; thereby achieving debinding and sintering without bonding and warping, and achieving uniform sintering; the sintering process uses a closed sagger to sinter the green body, but it fails to create an atmosphere rich in sintering aids while ensuring the closedness of the sagger. Utility Model Content

[0005] The utility model aims to overcome the defects and shortcomings of the prior art that a closed atmosphere rich in sintering aids cannot be created in a sagger, and provides a nitride ceramic sintering sagger.

[0006] The above-mentioned purpose of the utility model is achieved through the following technical solutions:

[0007] The utility model protects a sagger having a closed hollow cavity inside, at least one side of the hollow cavity being provided with a storage structure for loading powder, and the inner space of the storage structure being communicated with the hollow cavity.

[0008] The utility model discloses a nitride ceramic sintering sagger. A receiving structure for loading sintering aid powder is arranged in the inner cavity of the sagger, which does not control the sealing performance of the sagger and creates an atmosphere rich in sintering aid to ensure the density of sintering.

[0009] In some embodiments, the receiving structure is loaded with sintering aid powder.

[0010] Preferably, the sintering aid is a rare earth oxide or an alkaline metal oxide, including but not limited to Y2O3 and / or MgO.

[0011] In some embodiments, it includes an upper cover plate, a frame body and a lower cover plate, the top of the frame body is connected to the upper cover plate, the bottom of the frame body is connected to the lower cover plate, and a closed hollow cavity is formed between the upper cover plate, the frame body and the lower cover plate.

[0012] In some embodiments, the receiving structure includes an isolation layer, which divides the hollow cavity to form an inner cavity and a receiving cavity. The isolation layer is provided with at least one through hole, and the inner cavity and the receiving cavity are connected through the through hole.

[0013] The storage structure of the utility model can place sintering aids, thereby creating an atmosphere rich in sintering aids, and can also block the sintering aids to avoid contamination of the green body by the sintering aids.

[0014] In some embodiments, the isolation layer is detachably mounted inside the sagger.

[0015] Specifically, the upper cover plate and / or the lower cover plate are provided with slots, and the upper end and / or the lower end of the isolation layer are inserted into the corresponding slots, so that the isolation layer can be detachably installed inside the sagger.

[0016] In some embodiments, the sum of the cross-sectional areas of at least one through hole is not less than 1 / 10 of the area of ​​the isolation layer.

[0017] In some embodiments, the receiving structure is located on the inner wall of the frame, and the receiving structure is at least one extension block and / or groove.

[0018] Preferably, the extension block is an L-shaped groove or a V-shaped groove structure.

[0019] In some embodiments, the extension block is in a barbed structure or an upwardly inclined plate-shaped structure; and the length direction of the extension block extends horizontally on the inner wall surface of the frame.

[0020] In some embodiments, the storage structure is located inside the frame, a hollow interlayer cavity is provided inside the frame, and at least one channel is provided on the inner wall surface of the frame, and the interlayer cavity and the hollow cavity are connected through the channel.

[0021] In some embodiments, the powder is a sintering aid powder.

[0022] In some embodiments, the sagger is made of boron nitride, graphite, or a composite of boron nitride and graphite formed by lamination and / or splicing.

[0023] Compared with the prior art, the beneficial effects of the present invention are:

[0024] The utility model provides a nitride ceramic sintering sagger. A receiving structure for loading sintering aid powder is arranged in the inner cavity of the sagger, which does not control the sealing performance of the sagger, while creating an atmosphere rich in sintering aid to ensure sintering density. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is a cross-sectional view of a nitride ceramic sintering sagger according to Example 1 of the present utility model.

[0026] Figure 2 For the utility model Figure 1 Schematic diagram of the structure of the middle isolation layer.

[0027] Figure 3 This is a cross-sectional view of a nitride ceramic sintering sagger in use according to Example 1 of the utility model.

[0028] Figure 4 This is a top view of a nitride ceramic sintering sagger according to Example 1 of the utility model when in use with the upper cover removed.

[0029] Figure 5 This is a cross-sectional view of a nitride ceramic sintering sagger according to Example 2 of the present utility model.

[0030] Figure 6 for Figure 5 A schematic structural diagram of one side of the middle frame.

[0031] Figure 7 This is a schematic diagram of the partial structure of a nitride ceramic sintering sagger according to Example 3 of the present utility model.

[0032] Figure 8 This is a schematic diagram of the partial structure of a nitride ceramic sintering sagger according to Example 4 of the present utility model. DETAILED DESCRIPTION

[0033] The present invention will be further described below in conjunction with specific implementations, but the examples do not limit the present invention in any form.

[0034] The same or similar numbers in the drawings of the embodiments of the present invention correspond to the same or similar parts; in the description of the present invention, it should be understood that if the terms "upper", "lower", "left", "right", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, they are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms describing the positional relationship in the drawings are only used for illustrative purposes and cannot be understood as limiting this patent.

[0035] In order to overcome the technical problem that the sintering temperature of nitride is very high and the sintering aid inevitably volatilizes, the utility model creates a closed atmosphere rich in sintering aid. The specific solution is:

[0036] A closed hollow cavity is provided inside the sagger, and a storage structure for loading powder is provided on at least one side of the hollow cavity, and the internal space of the storage structure is communicated with the hollow cavity.

[0037] The utility model discloses a nitride ceramic sintering sagger. A receiving structure for loading sintering aid powder is arranged in the inner cavity of the sagger, which does not control the sealing performance of the sagger and creates an atmosphere rich in sintering aid to ensure the density of sintering.

[0038] Furthermore, the storage structure is loaded with sintering aid powder.

[0039] Preferably, the sintering aid is a rare earth oxide or an alkaline metal oxide, including but not limited to Y2O3 and / or MgO.

[0040] Furthermore, it includes an upper cover plate, a frame body and a lower cover plate, the top of the frame body is connected to the upper cover plate, the bottom of the frame body is connected to the lower cover plate, and a closed hollow cavity is formed between the upper cover plate, the frame body and the lower cover plate.

[0041] Furthermore, the storage structure includes an isolation layer, which divides the hollow cavity to form an inner cavity and a storage cavity. At least one through hole is provided in the isolation layer, and the inner cavity and the storage cavity are connected through the through hole.

[0042] Furthermore, the isolation layer is detachably installed inside the sagger.

[0043] Specifically, the upper cover plate and / or the lower cover plate are provided with slots, and the upper end and / or the lower end of the isolation layer are inserted into the corresponding slots, so that the isolation layer can be detachably installed inside the sagger.

[0044] Furthermore, the sum of the cross-sectional areas of at least one through hole is not less than 1 / 10 of the area of ​​the isolation layer.

[0045] In some embodiments, the receiving structure is located on the inner wall of the frame, and the receiving structure is at least one extension block and / or groove.

[0046] Furthermore, the extension block is in a barbed hook structure or an upwardly inclined plate-shaped structure; and the length direction of the extension block extends horizontally on the inner wall surface of the frame.

[0047] Furthermore, the storage structure is located inside the frame, a hollow interlayer cavity is provided inside the frame, and at least one channel is provided on the inner wall surface of the frame, and the interlayer cavity and the hollow cavity are connected through the channel.

[0048] Furthermore, the powder is sintering aid powder.

[0049] Furthermore, the material of the sagger is boron nitride, graphite, or a composite of boron nitride and graphite formed by lamination and / or splicing.

[0050] The utility model discloses a nitride ceramic sintering sagger. A receiving structure for loading sintering aid powder is arranged in the inner cavity of the sagger, which does not control the sealing performance of the sagger and creates an atmosphere rich in sintering aid to ensure the density of sintering.

[0051] Example 1

[0052] A nitride ceramic sintering sagger, such as Figure 1-2 As shown, a closed hollow cavity 1 is provided inside the sagger, and a storage structure for loading powder is provided on at least one side of the hollow cavity 1.

[0053] Specifically, the sagger described in this embodiment has a hollow cubic structure, including an upper cover 11, a frame 13 and a lower cover 12. The top of the frame 13 is connected to the upper cover 11, and the bottom of the frame 13 is connected to the lower cover 12. A closed hollow cavity 1 is formed between the upper cover 11, the frame 13 and the lower cover 12, and the hollow cavity 1 includes an inner cavity and a storage structure.

[0054] The storage structure includes an isolation layer 2, the top of which is connected to the upper cover plate 11, and the bottom of which is connected to the lower cover plate 12. The isolation layer 2 is a closed-loop structure, so that the inner side of the isolation layer 2 is an inner cavity, and the outer side of the isolation layer 2 is a storage cavity 3. The isolation layer 2 is composed of at least one isolation plate connected end to end, and at least one through hole 21 is provided in the isolation plate, and the inner cavity and the storage cavity 3 are connected through the through hole 21. The isolation plate is parallel to the corresponding plane in the frame 13, and the distance between the isolation plate and the frame 13 is ≥ 1 / 2 of the thickness of the isolation plate; in this embodiment, the distance between the isolation plate and the frame 13 is twice the thickness of the isolation plate, and the sum of the cross-sectional areas of the through holes is 1 / 4 of the area of ​​the isolation layer.

[0055] The upper cover plate 11 , the frame 13 , the lower cover plate 12 and the isolation layer 2 are made of high-temperature resistant boron nitride (BN) material.

[0056] The isolation layer 2 is detachably connected to the upper cover plate 11 and the lower cover plate 12. Specifically, the lower cover plate 12 has a concave groove on its surface for securing the isolation plate, which is removably inserted into the groove. The upper cover plate 11 has a step on its side facing the inner cavity, and the concave portion of the step abuts against the isolation plate, thereby facilitating the attachment and removal of the isolation plate.

[0057] like Figure 3-4 As shown, when the nitride ceramic sintering sagger is used to sinter silicon nitride, pressing plates are placed on the upper and lower sides of the laminated silicon nitride blank, and then they are transferred together into the inner cavity. At the same time, an appropriate amount of sintering aid powder (MgO) is added to the receiving cavity 3, and then the upper cover 11 is closed to seal the sagger to achieve the loading of the silicon nitride blank. When the silicon nitride blank is sintered at high temperature, the sintering aid powder volatilizes to create an atmosphere that is relatively saturated with the sintering aid, thereby suppressing the volatilization of the sintering aid in the product, effectively avoiding the silicon nitride blank during the high-temperature sintering process. Due to excessive volatilization of the sintering aid, the sintering is not dense, which affects the final performance of the material.

[0058] Example 2

[0059] A nitride ceramic sintering sagger differs from Example 1 in that: a closed hollow cavity 1 is provided inside the sagger, and a storage structure for loading powder is provided on at least one side of the hollow cavity 1. The sagger described in this embodiment has a hollow cubic structure, including an upper cover plate 11, a frame 13, and a lower cover plate 12. The top of the frame 13 is connected to the upper cover plate 11, and the bottom of the frame 13 is connected to the lower cover plate 12. The upper cover plate 11, the frame 13, and the lower cover plate 12 surround and form a closed hollow cavity 1.

[0060] like Figure 5-6As shown, the storage structure in this embodiment is a barb structure and is fixed to the inner walls of the four sides of the frame 13, including at least one evenly distributed horizontally placed barb member 71, one end of the barb member 71 is fixedly connected to the frame 13, and the other end of the barb member 71 is bent upward to form a barb groove between the barb member 71 and the frame 13.

[0061] When in use, sintering aid powder (MgO) is loaded in the barb groove, thereby creating a relatively saturated closed atmosphere of the sintering aid in the sagger, inhibiting the volatilization of the sintering aid in the nitride ceramic body and improving the production yield.

[0062] Example 3

[0063] A nitride ceramic sintering sagger differs from Example 1 in that: a closed hollow cavity 1 is provided inside the sagger, and a storage structure for loading powder is provided on at least one side of the hollow cavity 1. The sagger described in this embodiment has a hollow cubic structure, including an upper cover plate 11, a frame 13, and a lower cover plate 12. The top of the frame 13 is connected to the upper cover plate 11, and the bottom of the frame 13 is connected to the lower cover plate 12. The upper cover plate 11, the frame 13, and the lower cover plate 12 surround and form a closed hollow cavity 1.

[0064] like Figure 7 As shown, the storage structure in this embodiment is an upwardly inclined hanging groove structure and is fixed to the inner walls of the four sides of the frame 13, including at least one evenly distributed horizontally placed hanging groove member 72, the lower end of the hanging groove member 72 is fixedly connected to the frame 13, and a storage space is formed between the hanging groove member 72 and the frame 13.

[0065] When in use, sintering aid powder (MgO) is loaded in the storage space, thereby creating a relatively saturated closed atmosphere of the sintering aid in the sagger, inhibiting the volatilization of the sintering aid in the nitride ceramic body and improving the production yield.

[0066] Example 4

[0067] A nitride ceramic sintering sagger differs from Example 1 in that: a closed hollow cavity 1 is provided inside the sagger, and a storage structure for loading powder is provided on at least one side of the hollow cavity 1. The sagger described in this embodiment has a hollow cubic structure, including an upper cover plate 11, a frame 13, and a lower cover plate 12. The top of the frame 13 is connected to the upper cover plate 11, and the bottom of the frame 13 is connected to the lower cover plate 12. The upper cover plate 11, the frame 13, and the lower cover plate 12 surround and form a closed hollow cavity 1.

[0068] like Figure 8As shown, in this embodiment, the storage structure is located inside the frame 13, and the frame 13 is a hollow splint structure. The frame 13 includes an outer splint and an inner splint parallel to each other, and there is an interlayer cavity 73 between the outer splint and the inner splint, and the inner splint is provided with at least one channel 74, and the interlayer cavity 73 is connected to the hollow cavity 1 through the channel 74.

[0069] When in use, sintering aid powder (MgO) is loaded into the interlayer cavity 73, thereby creating a relatively saturated closed atmosphere of the sintering aid in the sagger, inhibiting the volatilization of the sintering aid in the nitride ceramic body and improving the production yield.

[0070] The above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all the embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A nitride ceramic sintering sagger, characterized in that: A closed hollow cavity (1) is provided inside the sagger, and a storage structure for loading powder is provided on at least one side of the hollow cavity (1), and the internal space of the storage structure is communicated with the hollow cavity (1).

2. The nitride ceramic sintering sagger according to claim 1, characterized in that: The invention comprises an upper cover plate (11), a frame body (13) and a lower cover plate (12), wherein the top of the frame body (13) is connected to the upper cover plate (11), the bottom of the frame body (13) is connected to the lower cover plate (12), and a closed hollow cavity (1) is formed between the upper cover plate (11), the frame body (13) and the lower cover plate (12).

3. The nitride ceramic sintering sagger according to claim 1 or 2, characterized in that: The storage structure comprises an isolation layer (2), wherein the isolation layer (2) divides the hollow cavity (1) to form an inner cavity and a storage cavity (3), and at least one through hole (21) is provided in the isolation layer (2), and the inner cavity and the storage cavity (3) are connected via the through hole (21).

4. The nitride ceramic sintering sagger according to claim 3, characterized in that: The isolation layer (2) is detachably installed inside the sagger.

5. The nitride ceramic sintering sagger according to claim 3, characterized in that: The sum of the cross-sectional areas of the through holes is not less than 1 / 10 of the area of ​​the isolation layer.

6. The nitride ceramic sintering sagger according to claim 2, characterized in that: The receiving structure is located on the inner wall surface of the frame (13), and the receiving structure is at least one extension block and / or groove.

7. The nitride ceramic sintering sagger according to claim 6, characterized in that: The extension block is in a barbed hook structure or an upwardly inclined plate-shaped structure.

8. The nitride ceramic sintering sagger according to claim 2, characterized in that: The storage structure is located inside the frame (13), a hollow interlayer cavity (73) is provided inside the frame (13), and at least one channel (74) is provided on the inner wall surface of the frame (13), and the interlayer cavity (73) and the hollow cavity (1) are connected through the channel (74).

9. The nitride ceramic sintering sagger according to claim 1, characterized in that: The powder is a sintering aid powder.

10. The nitride ceramic sintering sagger according to claim 1, characterized in that: The material is boron nitride, graphite or a composite material of boron nitride and graphite formed by lamination and / or splicing.

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