Micro-pressure vacuum transmitter
By using wave-shaped elastic parts and restoring elastic parts in the micro-pressure vacuum transmitter, the detection inaccurate problem caused by film fatigue is solved, and the deformation control and recovery ability is achieved, ensuring the accuracy and stability of the detection results.
Patent Information
- Application Number
- CN202422291848.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-19
- Publication Date
- 2025-08-26
- Estimated Expiration
- 2034-09-19
AI Technical Summary
In existing micro-pressure vacuum transmitters, the film is mainly fixed on the edges, and the restoration depends on the elasticity of the film itself. When the range exceeds the limit and frequent movements, the film is prone to fatigue and slightly deformation, resulting in inaccurate detection results.
Wave-shaped elastic parts and restorative elastic parts are used to reduce the deformation area and improve the restorative shape ability, so as to reduce the deformation of the wave-shaped elastic parts and enhance the restorative ability.
The deformation area control and resilience capability of the micro-pressure vacuum transmitter is improved to ensure the accuracy and stability of the detection results.
Smart Images
Figure CN223272074U_ABST
Abstract
Description
Technical Field
[0001] The present disclosure relates to the field of sensor technology, and in particular to a micro-pressure vacuum transmitter. Background Art
[0002] Micro-pressure vacuum transmitters are sensor devices that use changes in capacitance to measure vacuum levels. Their operating principle is that in a vacuum environment, the dielectric constant of a dielectric (i.e., gas) changes with the vacuum level. This change in dielectric constant affects the capacitance of a capacitor.
[0003] Therefore, by measuring the change in capacitance, the degree of vacuum can be indirectly determined. Specifically, when the vacuum increases, the number of gas molecules decreases, the dielectric constant of the dielectric decreases, and the capacitance value decreases; conversely, when the vacuum decreases, the capacitance value increases.
[0004] The current technical problem is that the film inside the micro-pressure vacuum transmitter is mostly fixed by the edges, and its recovery depends on the elasticity of the film itself. When the range exceeds the limit and the operation is frequent, the film inside the micro-pressure vacuum transmitter will become fatigued and slightly deformed, resulting in inaccurate detection results. Utility Model Content
[0005] In order to solve one or more of the above-mentioned technical problems, the present disclosure provides a micro-pressure vacuum transmitter, which reduces the deformation area through a wavy elastic part and improves the ability to restore the shape, and reduces the deformation degree of the wavy elastic part and further improves the ability of the wavy elastic part to restore the shape through a restoring elastic part.
[0006] The above-mentioned objectives of the present disclosure are achieved through the following technical solutions:
[0007] The present disclosure provides a micro-pressure vacuum transmitter, comprising:
[0008] a housing, wherein a first end of the housing is configured as an open end and a second end of the housing is configured as a closed end;
[0009] a core seat disposed on the first end of the housing;
[0010] a filler neck disposed on the core seat and disposed outside the housing;
[0011] The ceramic capacitor core is arranged on the core seat and inside the shell, and a vacuum cavity is provided inside the ceramic capacitor core;
[0012] The detection and amplification module is arranged in the housing, and the detection end of the detection and amplification module extends into the vacuum chamber;
[0013] a communicator, disposed on the housing and configured to be electrically connected to the detection and amplification module;
[0014] The ceramic capacitor core has a wave-shaped elastic part and a restoring elastic part inside.
[0015] In one possible implementation of the present disclosure, the ceramic capacitor core includes:
[0016] a core sleeve, disposed within the outer shell;
[0017] The upper cover is arranged on the core sleeve, and a transfer space is provided between the upper cover and the core sleeve;
[0018] A wave spring washer is disposed in the transfer space;
[0019] The spring is located in the transmission space, and the two ends of the spring are respectively in contact with the upper cover and the core sleeve;
[0020] Wherein, the detection end of the detection and amplification module extends into the area surrounded by the spring;
[0021] A gap is provided between the core sleeve and the core seat.
[0022] In a possible implementation of the present disclosure, the following further includes:
[0023] a pressure column, which is disposed on the upper cover and is arranged to communicate with the transfer space;
[0024] a getter, disposed within the pressure column;
[0025] Heat the column and wrap the pressure column.
[0026] In one possible implementation of the present disclosure, the getter is located within the heating column.
[0027] In a possible implementation of the present disclosure, a filter is provided in the pressure column, and the filter is located between the transfer space and the getter.
[0028] In a possible implementation of the present disclosure, the core sleeve abuts against the core seat.
[0029] In a possible implementation of the present disclosure, a portion of the core sleeve extends into the core seat.
[0030] In a possible implementation of the present disclosure, a copper tube is further provided on the upper cover, a first end of the copper tube is configured to communicate with the transfer space, and a second end of the copper tube is sealed after the transfer space is evacuated.
[0031] In a possible implementation of the present disclosure, at least one sealing member is provided between the core sleeve and the outer shell.
[0032] In a possible implementation of the present disclosure, solder is injected into the gap between the copper tube and the upper cover, and the copper tube and the upper cover are welded.
[0033] The beneficial effects of the present disclosure are:
[0034] In some embodiments of the present disclosure, the micro-pressure vacuum transmitter uses a wavy elastic member to reduce the deformation area and improve the ability to restore the shape. At the same time, the restoring elastic member is used to reduce the deformation degree of the wavy elastic member and further improve the ability of the wavy elastic member to restore the shape. BRIEF DESCRIPTION OF THE DRAWINGS
[0035] The above and other features, advantages and aspects of the embodiments of the present disclosure will become more apparent with reference to the following detailed description in conjunction with the accompanying drawings, in which:
[0036] Figure 1 It is a schematic diagram of the appearance structure of the micro-pressure vacuum transmitter provided in the embodiment of the present disclosure.
[0037] Figure 2 Schematic diagram of the internal structure of the micro-pressure vacuum transmitter according to the embodiment of the present disclosure.
[0038] Figure 3 It is a schematic diagram of the communicator interface of an embodiment provided by the present disclosure.
[0039] Figure 4 Schematic diagram of the structure of the ceramic capacitor core according to the embodiment of the present disclosure.
[0040] Figure 5 Schematic diagram of placing the getter in a heating column according to an embodiment of the present disclosure.
[0041] In each of the accompanying drawings, the same or corresponding reference numerals represent the same or corresponding parts; wherein the reference numerals are: 1, outer shell, 2, core seat, 3, take-off nozzle, 4, ceramic capacitor core, 5, detection and amplification module, 6, communicator, 41, core sleeve, 42, upper cover, 43, wave spring washer, 44, transfer space, 46, spring, 47, pressure column, 48, getter, 49, heating column, 410, copper tube, 412, filter. DETAILED DESCRIPTION
[0042] Embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although certain embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be construed as being limited to the embodiments described herein. On the contrary, these embodiments are provided to provide a more thorough and complete understanding of the present disclosure. It should be understood that the drawings and embodiments of the present disclosure are for illustrative purposes only and are not intended to limit the scope of protection of the present disclosure.
[0043] In the description of the embodiments of the present disclosure, the term "including" and similar terms should be understood as open inclusion, that is, "including but not limited to." The term "based on" should be understood as "based at least in part on." The term "one embodiment" or "the embodiment" should be understood as "at least one embodiment." The terms "first," "second," etc. may refer to different or the same objects. Other explicit and implicit definitions may also be included below.
[0044] In view of the fact that the thin films inside the micro-pressure vacuum transmitters in the prior art are mostly fixed by the edges, and the restoration needs to rely on the elasticity of the film itself, when the range exceeds the limit and the operation is frequent, the thin films inside the micro-pressure vacuum transmitter will become fatigued and slightly deformed, resulting in inaccurate detection results; in order to solve one or more of the above technical problems, the present disclosure proposes a micro-pressure vacuum transmitter. In some embodiments, the micro-pressure vacuum transmitter of the present disclosure includes a housing 1, a core seat 2, a pipe nozzle 3, a ceramic capacitor core 4, a detection and amplification module 5 and a communicator 6. The pipe nozzle 3 is responsible for connecting to the detection area, the ceramic capacitor core 4 is responsible for converting the external pressure change into an electrical signal (capacitance value) that can be measured, the detection and amplification module 5 is responsible for detecting and amplifying the electrical signal, and the communicator 6 is responsible for transmitting the amplified electrical signal to a designated terminal, such as a programmable logic controller, an industrial computer or a communicator.
[0045] See also Figure 1 and Figure 2 The first end of the shell 1 is set to an open end, and the second end is set to a closed end; the core seat 2 is fixed on the first end of the shell 1, and the ceramic capacitor core 4 is installed on the core seat 2 and is arranged inside the shell 1, and a vacuum cavity is provided inside the ceramic capacitor core 4.
[0046] The filler neck 3 is fixed to the core seat 2 and is arranged outside the housing 1 .
[0047] The detection and amplification module 5 is fixed inside the shell 1, and the detection end of the detection and amplification module 5 extends into the vacuum chamber, and is responsible for detecting the capacitance value of the vacuum chamber in combination with the detection circuit. The communicator 6 is arranged on the shell 1 and is configured to be electrically connected to the detection and amplification module 5.
[0048] In some possible implementations, the communicator 6 uses an RS232 serial port, such as Figure 3 shown.
[0049] In some embodiments, see Figure 4 The ceramic capacitor core 4 includes a core sleeve 41, an upper cover 42, a wave spring washer 43, a transfer space 44 and a spring 46. The core sleeve 41 is fixed in the housing 1, and the upper cover 42 is fixed on the core sleeve 41.
[0050] A space is provided between the upper cover 42 and the core sleeve 41 , and the wave spring washer 43 is located in the transfer space 44 . The transfer space 44 here is the vacuum chamber described above.
[0051] The spring 46 is located in the transfer space 44, with its two ends respectively abutting against the upper cover 42 and the wave spring washer 43. The spring 46 has two functions: one is to reduce the deformation of the wave spring washer 43, and the other is to assist the wave spring washer 43 to restore its original shape.
[0052] In some possible implementations, the core sleeve 41 abuts against the core seat 2 .
[0053] In some possible implementations, a portion of the core sleeve 41 extends into the core seat 2 .
[0054] In some possible implementations, at least one seal is provided between the core sleeve 41 and the outer shell 1 .
[0055] In some possible implementations, solder is injected into the gap between the copper tube 410 and the upper cover 42 , and the copper tube 410 and the upper cover 42 are welded together.
[0056] In some possible implementations, the spring 46 uses a pagoda-shaped spring.
[0057] The detection end of the detection and amplification module 5 extends into the area surrounded by the spring 46. As can be seen from the figure, the spring 46 is located at the highest point of a waveform on the wave spring washer 43. This position can enable the wave spring washer 43 to return to or try to return to its original shape each time it recovers its shape.
[0058] At the same time, it can also play a good protective role on the detection end of the detection and amplification module 5, avoiding damage to the detection end of the detection and amplification module 5 after contact with the wave spring washer 43.
[0059] A gap is provided between the core sleeve 41 and the core base 2. It can be seen that the core sleeve 41 has a hole that communicates with the filler neck 3 through the gap. Furthermore, there is a distance between the axis of the filler neck 3 and the axis of the hole in the core sleeve 41. This distance prevents pressure fluctuations within the filler neck 3 from directly affecting the wave spring washer 43, effectively providing a buffer for the wave spring washer 43.
[0060] The transfer space 44 can be vacuumed using a copper tube 410 , which is fixed to the upper cover 42 . The first end of the copper tube 410 is configured to communicate with the transfer space 44 , and the second end of the copper tube 410 is sealed after the transfer space 44 is vacuumed.
[0061] In addition, the vacuum degree can be further improved with the help of a pressure column 47, a getter 48 and a heating column 49. Specifically, the pressure column 47 is fixed on the upper cover 42 and is configured to be connected to the transfer space 44. The getter 48 is placed in the pressure column 47, and the heating column 49 wraps the pressure column 47.
[0062] When the transfer space 44 is evacuated, the heating column 49 can be powered on and heated at the same time, generally at a constant temperature of 800° C. for 5 minutes, so that the getter 48 is activated to absorb the gas and the transfer space 44 reaches a vacuum.
[0063] The heat source of the heating column 49 is electricity. In some possible implementations, the heating column 49 is connected to the communicator 6 via an electric wire, and there is a circuit in the communicator 6 that supplies power to the heating column 49 separately.
[0064] The getter 48 can be placed in the filter 412. Figure 5 As shown, it is prevented from entering the transfer space 44. Of course, one or more additional filters can be added to the pressure column 47 to intercept the getter 48 and prevent it from entering the transfer space 44.
[0065] It should be noted that in some embodiments, the gap between the core seat 2 and the filler neck 3 may be circumferentially welded.
[0066] Furthermore, in some embodiments, the gap between the upper cover 42 and the heating column 49 can be circumferentially welded.
[0067] Furthermore, in some embodiments, the filter screen 412 is sandwiched between two upper and lower pressure columns 47 .
[0068] Furthermore, in some embodiments, the gap between the pressure column 47 and the heating column 49 can be circumferentially spot welded.
[0069] It should be understood that in industrial applications, the micro-pressure vacuum transmitter is an advanced, high-performance, non-heated capacitive sensor designed specifically for low vacuum and pressure measurement applications. Advanced manufacturing techniques and processes ensure repeatability in all applications, while a sophisticated digital architecture guarantees high accuracy and stability. High overvoltage limits and pressure resistance ensure resistance to sudden pressure surges in the event of system failures. Applications include vacuum furnaces, freeze drying, natural gas, plasma etching process equipment, and vacuum distillation.
[0070] In the disclosed embodiments, the micro-pressure vacuum transmitter operates on the principle of capacitance change. It is a device specifically designed to detect minute pressure changes in a vacuum environment. Based on pressure sensing technology, it senses changes in vacuum pressure through a sensing element and converts them into a measurable and transmittable electrical signal. The sensor consists of two main components: a vacuum chamber and a detection chamber. The vacuum chamber is a fully sealed vacuum structure. A fixed-plate ceramic capacitor core is located within the vacuum chamber and is connected to the circuit by two electrodes extending outside the vacuum chamber. A diaphragm is located between the vacuum chamber and the detection chamber. The diaphragm is a movable plate that forms a flat plate capacitor with the fixed-plate ceramic capacitor core. When the diaphragm is deflected by low vacuum pressure, the distance between it and the fixed-plate ceramic capacitor core changes, and the capacitance value also changes accordingly. Different low vacuum pressures correspond to different capacitance values. The capacitance value change signal is transmitted to the conversion circuit, which converts, sorts, and amplifies the capacitance signal to output a standard electrical signal that is proportional to the low vacuum pressure.
[0071] It should be understood that this disclosure is not intended to propose a new communicator. The communicator in each embodiment of this disclosure generally refers to a device or component used to implement signal transmission, processing, or control in a communication system. It can be a standalone hardware device, a software program, or a combination of the two.
[0072] It should be understood that the operating principle of the micro-pressure vacuum transmitter disclosed herein primarily relies on its internal sensitive element (such as a pressure chip or diaphragm) and conversion element. When vacuum or micro-pressure acts on the sensitive element, it produces a micro-displacement or resistance change proportional to the pressure. This change is then captured by the conversion element and converted by electronic circuitry into a standard signal (such as 4-20mA or 1-5VDC) for subsequent measurement, display, or control.
[0073] While various embodiments of the present disclosure have been described above, the foregoing description is intended to be illustrative, non-exhaustive, and not limited to the disclosed embodiments. Many modifications and variations will be apparent to those skilled in the art without departing from the scope and spirit of the described embodiments. The terminology used herein is selected to best explain the principles of the embodiments, their practical applications, or technological improvements in the marketplace, or to enable others skilled in the art to understand the embodiments disclosed herein.
[0074] The foregoing description is merely an optional embodiment of the present disclosure and is not intended to limit the present disclosure. Those skilled in the art will readily appreciate that the present disclosure is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present disclosure shall be included within the scope of protection of the present disclosure.
Claims
1. A micro-pressure vacuum transmitter, characterized in that: include: A housing (1), wherein a first end of the housing (1) is configured as an open end and a second end of the housing (1) is configured as a closed end; A core seat (2) is provided on the first end of the housing (1); A nozzle (3) is disposed on the core seat (2) and outside the housing (1); A ceramic capacitor core (4) is arranged on a core seat (2) and inside the housing (1), and a vacuum cavity is provided inside the ceramic capacitor core (4); A detection and amplification module (5) is arranged in the housing (1), and a detection end of the detection and amplification module (5) extends into the vacuum chamber; a communicator (6) disposed on the housing (1) and configured to be electrically connected to the detection and amplification module (5); The ceramic capacitor core (4) has a wave-shaped elastic member and a restoring elastic member inside.
2. The micro-pressure vacuum transmitter according to claim 1, characterized in that: The ceramic capacitor core (4) comprises: A core sleeve (41) is disposed in the housing (1); An upper cover (42) is provided on the core sleeve (41), and a transfer space (44) is provided between the upper cover (42) and the core sleeve (41); A wave spring washer (43) is disposed in the transfer space (44); The spring (46) is located in the transmission space (44), and the two ends of the spring (46) are respectively in contact with the upper cover (42) and the core sleeve (41); Wherein, the detection end of the detection and amplification module (5) extends into the area surrounded by the spring (46); A gap is provided between the core sleeve (41) and the core seat (2).
3. The micro-pressure vacuum transmitter according to claim 2, characterized in that: Also includes: A pressure column (47) is provided on the upper cover (42) and is arranged to communicate with the transfer space (44); A getter (48) is disposed within the pressure column (47); The heating column (49) wraps around the pressure column (47).
4. The micro-pressure vacuum transmitter according to claim 3, characterized in that: A getter (48) is located within the heating column (49).
5. The micro-pressure vacuum transmitter according to claim 3, characterized in that: A filter screen (412) is provided in the pressure column (47), and the filter screen (412) is located between the transfer space (44) and the getter (48).
6. The micro-pressure vacuum transmitter according to claim 2, characterized in that: The core sleeve (41) abuts against the core seat (2).
7. The micro-pressure vacuum transmitter according to claim 6, characterized in that: A portion of the core sleeve (41) extends into the core seat (2).
8. The micro-pressure vacuum transmitter according to claim 2, characterized in that: It also includes a copper tube (410) arranged on the upper cover (42), the first end of the copper tube (410) is arranged to communicate with the transfer space (44), and the second end of the copper tube (410) is sealed after the transfer space (44) is vacuumed.
9. The micro-pressure vacuum transmitter according to claim 2, characterized in that: At least one sealing member is provided between the core sleeve (41) and the outer shell (1).
10. The micro-pressure vacuum transmitter according to claim 8, characterized in that: Solder is injected into the gap between the copper tube (410) and the upper cover (42), and the copper tube (410) and the upper cover (42) are welded.