Positioning processing device for gluing machine

Abstract

The utility model relates to a positioning processing device for a gluing machine, relates to the technical field of semiconductor gluing, and aims to solve the problem of inaccurate positioning of the gluing machine, the positioning processing device comprises a rack arranged on a workbench, the rack is provided with a positioning mechanism for positioning and gluing and a gluing mechanism, the positioning mechanism comprises a positioning plate, a supporting plate and a driving part, and the supporting plate is arranged on the rack. The supporting plate is connected to the rack in a sliding mode, the positioning plate is connected to the supporting plate, an arc-shaped groove hole used for limiting a gluing area is formed in the positioning plate, the driving piece comprises a driving gear, a driven rack and a servo motor, the servo motor is connected to the rack, the driving gear is connected to the output end of the servo motor, and the driven rack is connected to the output end of the servo motor. The driving gear is meshed with a driven rack, and the driven rack is connected to the sliding end of the supporting plate. The gluing device has the effects that the gluing precision and efficiency are improved, and high-precision gluing operation is achieved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor glue coating technology, and in particular to a positioning processing device for a glue coating machine. Background Art

[0002] In the field of semiconductor manufacturing, wafer coating is an indispensable and crucial process. As the cornerstone of integrated circuit manufacturing, the uniformity and accuracy of the surface coating of semiconductor wafers are directly related to the performance and quality level of the final product. Therefore, the performance and precision requirements of the coating machine have reached extremely high standards during the design and manufacturing process.

[0003] At present, although there are many types of glue coating machines on the market, they still face some technical challenges when coating semiconductor wafers. Among them, inaccurate positioning is one of the more common problems that need to be solved urgently. In actual applications, the problem of inaccurate positioning still occurs from time to time. This may be due to various reasons such as mechanical structure problems of the glue coating machine or environmental factors. Inaccurate positioning will not only affect the accuracy and efficiency of glue coating, but may also cause damage to the wafer and increase production costs, so it needs to be improved. Utility Model Content

[0004] In order to solve the problem of inaccurate positioning of a glue coating machine, the present application provides a positioning processing device for a glue coating machine.

[0005] The present application provides a positioning processing device for a glue coating machine using the following technical solutions:

[0006] A positioning processing device for a glue coating machine includes a frame arranged on a workbench, the frame is provided with a positioning mechanism and a glue coating mechanism for positioning and gluing, the positioning mechanism includes a positioning plate, a support plate and a driving member, the support plate is slidably connected to the frame, the positioning plate is connected to the support plate, the positioning plate is provided with an arc-shaped slot for limiting the glue coating area, the driving member includes a driving gear, a driven rack and a servo motor, the servo motor is connected to the frame, the driving gear is connected to the output end of the servo motor, the driving gear is meshed with the driven rack, and the driven rack is connected to the sliding end of the support plate.

[0007] Since in actual applications, the problem of inaccurate positioning still occurs from time to time, which may be caused by various reasons such as mechanical structure problems of the glue coating machine or environmental factors, inaccurate positioning will not only affect the accuracy and efficiency of glue coating, but may also cause damage to the wafer and increase production costs; by adopting the above technical solution, the positioning mechanism and the glue coating mechanism are installed on the frame, and the positioning mechanism includes a positioning plate, a support plate and a driving member, wherein the driving member is composed of a driving gear, a driven rack and a servo motor; before the glue coating machine coats glue, according to the shape and size of the wafer to be coated, the arc slot on the corresponding positioning plate is selected or replaced. The arc slot is designed to accurately match the contour of the wafer to ensure that the wafer can be stably positioned at the predetermined position during the glue coating process, and the servo motor is started, and the driving gear is tightly engaged with the driven rack, and the driving gear will drive the driven rack to move linearly Movement, the support plate slides along the frame, thereby driving the positioning plate to move to the appropriate position. After the positioning plate is accurately positioned, the gluing mechanism begins to prepare for the gluing work. The gluing mechanism evenly spreads the glue on the wafer according to the preset gluing parameters and trajectory. Since the positioning plate has ensured the accurate position of the wafer, the gluing mechanism can accurately control the direction and range of gluing to achieve high-precision gluing operation; through the setting of the positioning mechanism and the gluing mechanism, the accuracy and efficiency of gluing are improved, and the wafer can be stably positioned at the predetermined position during the gluing process, ensuring the accuracy of gluing, achieving high-precision gluing operation, and at the same time reducing the risk of wafer damage. The precise positioning and stable gluing process effectively reduce the movement or offset of the wafer during the gluing process, thereby reducing the possibility of wafer damage and ensuring product quality.

[0008] Optionally, sliding blocks are respectively provided on both sides of the support plate, a sliding groove for the sliding blocks to move is opened through the frame, and the driven rack is connected to one of the sliding blocks.

[0009] By adopting the above technical solution, sliding blocks are installed on both sides of the support plate, and the sliding blocks slide in the corresponding sliding grooves to realize the movement of the support plate and the positioning plate; through the setting of the sliding blocks and the sliding grooves, the stability of the support plate and the positioning plate during the movement is ensured, and the shaking or deviation caused by mechanical structure problems is reduced, thereby improving the positioning accuracy.

[0010] Optionally, a sliding wheel is provided at the bottom of each sliding block, the sliding wheel is rotatably connected to the sliding block, and a pulley groove for the sliding wheel to move is opened on the bottom wall of the sliding groove.

[0011] By adopting the above technical solution, the sliding wheel is installed at the bottom of the sliding block, and the sliding wheel slides in the corresponding pulley groove; through the setting of the sliding wheel and the pulley groove, the sliding friction is converted into rolling friction, and the resistance of rolling friction is much smaller than that of sliding friction, thereby improving the movement efficiency of the entire positioning mechanism and reducing the wear caused by friction.

[0012] Optionally, a frame is provided on one side of the rack, the interior of the frame is a hollow structure, the driving gear and the driven rack are both provided in the frame, and a strip groove for the driven rack to slide is provided on the frame.

[0013] By adopting the above technical solution, the frame is installed on the frame, and the driven rack slides in the strip groove of the frame; through the setting of the frame and the strip groove, installation space can be provided for the driving gear and the driven rack, making the structure of the entire positioning mechanism more compact. At the same time, the existence of the frame protects the driving gear and the driven rack, reducing interference and damage to them by external factors, thereby improving the stability and reliability of the entire positioning mechanism.

[0014] Optionally, a connecting rod is provided between the driven rack and one of the sliding blocks, and two ends of the connecting rod are respectively connected to the driven rack and the corresponding sliding block.

[0015] By adopting the above technical solution, the connecting rod is installed between the driven gear and the sliding block; through the setting of the connecting rod, the two ends of the connecting rod are respectively connected to the driven rack and the corresponding sliding block, forming a stable connection structure, ensuring that the driven rack can drive the sliding block to move synchronously when moving, reducing the possibility of positioning deviation or shaking caused by unstable connection.

[0016] Optionally, the glue coating mechanism includes a glue coating container, a glue coating nozzle and a translation assembly, the translation assembly is connected to the frame, the glue coating container is arranged on the translation assembly, the glue coating nozzle is connected to the interior of the glue coating container, and the glue coating nozzle is arranged toward the arc-shaped slot hole of the positioning plate.

[0017] By adopting the above technical solution, the gluing mechanism includes a gluing container, a gluing nozzle and a translation component; when the gluing machine is working, the gluing container is pre-loaded with an appropriate amount of glue, and the gluing nozzle is ensured to be unobstructed. The gluing nozzle is precisely facing the direction of the preset arc slot on the positioning plate to ensure that the glue can be accurately applied to the position where gluing is required. The translation component starts working, driving the gluing container and the gluing nozzle to move translationally along a predetermined trajectory, and the gluing nozzle starts to release glue to work; through the setting of the gluing container, the gluing nozzle and the translation component, it can ensure that a large area of ​​gluing operations can be completed in a short time, thereby improving production efficiency and ensuring gluing accuracy.

[0018] Optionally, the translation assembly includes a translation screw, a translation plate, a translation slide rail and a translation motor, the translation screw is rotatably connected to the frame, the output end of the translation motor is connected to the end of the translation screw, the translation plate is threadedly connected to the translation screw, the translation slide rail is fixedly connected to the frame, the translation slide rail is arranged along the length direction of the translation screw, the translation plate is slidably connected to the translation slide rail, and the glue coating container is arranged on the translation plate.

[0019] By adopting the above technical solution, the translation assembly includes a translation screw, a translation plate, a translation slide and a translation motor; when the servo motor is working, the servo motor drives the translation screw to rotate, and the translation plate moves along the translation slide driven by the translation screw to realize the translation movement of the glue nozzle; through the setting of the translation assembly, it can ensure that the movement of the glue nozzle on the translation slide is accurate and stable, which helps to achieve precise control of the gluing position and improve the consistency and reliability of the gluing.

[0020] Optionally, a support base is provided on the translation plate, a lifting cylinder is provided on the support base, and an output end of the lifting cylinder is connected to the glue coating container.

[0021] By adopting the above technical solution, the support seat is installed on the translation plate, and the lifting cylinder is arranged on the support seat; through the setting of the support seat and the lifting cylinder, the support seat provides a stable support platform for the lifting cylinder and the glue coating container, ensuring that the glue coating container and the glue coating nozzle can maintain a stable position and angle during the gluing process. At the same time, controlling the lifting can accurately adjust the height of the glue coating nozzle, and can more accurately approach or move away from the glue coating surface to adapt to different thicknesses or shapes, ensuring the uniformity and accuracy of the glue coating.

[0022] In summary, this application includes at least one of the following beneficial technical effects:

[0023] The positioning mechanism and the gluing mechanism are set up to improve the accuracy and efficiency of gluing, so that the wafer can be stably positioned at the predetermined position during the gluing process, ensuring the accuracy of gluing and achieving high-precision gluing operations. At the same time, the risk of wafer damage can be reduced. The precise positioning and stable gluing process effectively reduce the possibility of wafer movement or deviation during the gluing process, thereby reducing the possibility of wafer damage and ensuring product quality.

[0024] The setting of the sliding block and the sliding groove ensures the stability of the support plate and the positioning plate during movement, reduces shaking or deviation caused by mechanical structure problems, and thus improves the accuracy of positioning;

[0025] By setting up the frame and the strip groove, installation space can be provided for the driving gear and the driven rack, making the structure of the entire positioning mechanism more compact. At the same time, the existence of the frame protects the driving gear and the driven rack, reducing interference and damage to them by external factors, thereby improving the stability and reliability of the entire positioning mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 It is a structural schematic diagram of a positioning processing device for a glue coating machine in an embodiment of the present application.

[0027] Figure 2 It is a partial cross-sectional view used to illustrate the driving member in the embodiment of the present application.

[0028] Figure 3 It is a structural diagram used to reflect the gluing mechanism in the embodiment of the present application.

[0029] Explanation of the accompanying drawings: 1. Frame; 2. Positioning mechanism; 21. Positioning plate; 211. Arc-shaped slot; 22. Support plate; 23. Driving member; 231. Driving gear; 232. Driven rack; 233. Servo motor; 3. Glue coating mechanism; 31. Glue coating container; 32. Glue coating nozzle; 33. Translation assembly; 331. Translation screw rod; 332. Translation plate; 333. Translation slide rail; 334. Translation motor; 4. Sliding block; 41. Sliding wheel; 5. Sliding groove; 51. Pulley groove; 6. Frame; 61. Strip groove; 7. Connecting rod; 8. Support seat; 81. Lifting cylinder. DETAILED DESCRIPTION

[0030] The following is combined with Figure 1-3 This application is described in further detail.

[0031] The embodiment of the present application discloses a positioning processing device for a glue coating machine. Figure 1 The positioning processing device for the gluing machine includes a frame 1, which is installed on the workbench of the gluing machine. A positioning mechanism 2 and a gluing mechanism 3 are installed on the frame 1. In this embodiment, the positioning mechanism 2 and the gluing mechanism 3 respectively realize the positioning and gluing processes.

[0032] Reference Figure 1 The positioning mechanism 2 includes a positioning plate 21, a support plate 22 and a driving member 23. The support plate 22 is slidably installed on the frame 1. The positioning plate 21 is detachably installed on the support plate 22. An arc-shaped slot 211 is provided on the positioning plate 21. The arc-shaped slot 211 is used to limit the glue coating area. In this embodiment, the arc-shaped slot 211 on the corresponding positioning plate 21 can be selected or replaced according to the shape and size of the wafer to be glued. The arc-shaped slot 211 is designed to accurately match the contour of the wafer. At the same time, a corresponding slot is provided on the support plate 22.

[0033] Reference Figure 1 and Figure 2 , both sliding ends of the support plate 22 are equipped with sliding blocks 4, and two sliding grooves 5 are opened through the frame 1. The two sliding blocks 4 correspond to the two sliding grooves 5 respectively. The sliding blocks 4 are slidably connected in the corresponding sliding grooves 5. At the same time, a sliding wheel 41 is rotatably installed at the bottom of each sliding block 4. The number of sliding wheels 41 can be multiple groups. The bottom wall of the sliding groove 5 is provided with a pulley groove 51. The pulley groove 51 is arranged along the opening direction of the sliding groove 5. The sliding wheel 41 is slidably connected in the pulley groove 51 to ensure the stability of the support plate 22 and the positioning plate 21 during movement, reducing shaking or deviation caused by mechanical structure problems, thereby improving the accuracy of positioning.

[0034] Reference Figure 1 and Figure 2 The driving member 23 includes a driving gear 231, a driven rack 232 and a servo motor 233. A frame 6 is installed and fixed on one side of the frame 1. The interior of the frame 6 is a hollow structure. The driving gear 231 and the driven rack 232 are both installed in the frame 6. The servo motor 233 can realize forward and reverse rotation. The servo motor 233 is installed outside the frame 6. The output end of the servo motor 233 is connected to the driving gear 231, and the driving gear 231 is meshed with the driven rack 232. A strip groove 61 for the driven rack 232 to slide is opened in the frame 6, and a connecting rod 7 is installed and fixed between the driven rack 232 and the adjacent sliding block 4; start the servo motor 233, the driving gear 231 is tightly meshed with the driven rack 232, the driving gear 231 will drive the driven rack 232 to perform linear motion, and the connecting rod 7 drives the sliding block 4 to move, so that the support plate 22 slides along the frame 1, thereby driving the positioning plate 21 to move to the appropriate position.

[0035] Reference Figure 1 and Figure 3 The gluing mechanism 3 includes a gluing container 31, a gluing nozzle 32 and a translation assembly 33. The translation assembly 33 is connected to the frame 1. The translation assembly 33 includes a translation screw 331, a translation plate 332, a translation rail 333 and a translation motor 334. The translation screw 331 is rotatably mounted on the frame 1 through a bearing. The translation motor 334 is mounted on the frame 1. The output end of the translation motor 334 is connected to the end of the translation screw 331. In this embodiment, the translation motor 334 can realize forward and reverse rotation. The translation rail 333 is installed and fixed on the frame 1. The translation rail 333 is installed along the length direction of the translation screw 331. The translation plate 332 is slidably connected to the translation rail 333, and the translation plate 332 is threadedly connected to the translation screw 331.

[0036] Reference Figure 1 and Figure 3A support base 8 is installed on the translation plate 332, and a lifting cylinder 81 is vertically installed on the support base 8. The output end of the lifting cylinder 81 is installed on the glue container 31, and the glue nozzle 32 is connected to the inside of the glue container 31, and the glue nozzle 32 is arranged toward the arc-shaped groove of the positioning plate 21; the support base 8 provides a stable support platform for the lifting cylinder 81 and the glue container 31, ensuring that the glue container 31 and the glue nozzle 32 can maintain a stable position and angle during the gluing process, and at the same time, controlling the lifting can accurately adjust the height of the glue nozzle 32, and can more accurately approach or move away from the glue coating surface to adapt to different thicknesses or shapes, ensuring the uniformity and accuracy of the glue coating.

[0037] The implementation principle of the positioning processing device for a glue coating machine in the embodiment of the present application is as follows: before the glue coating machine coats glue, the arc slot 211 on the corresponding positioning plate 21 is selected or replaced according to the shape and size of the wafer to be coated with glue. The arc slot 211 is designed to accurately match the contour of the wafer to ensure that the wafer can be stably positioned at the predetermined position during the glue coating process. The servo motor 233 is started, and the driving gear 231 is tightly engaged with the driven rack 232. The driving gear 231 will drive the driven rack 232 to perform linear motion, and the support plate 22 slides along the frame 1, thereby driving the positioning plate 21 to move to the appropriate position. After the positioning plate 21 is accurately positioned, the glue coating mechanism 3 begins to prepare for glue coating. The gluing mechanism 3 evenly applies glue on the wafer according to the preset gluing parameters and trajectory. Since the positioning plate 21 has ensured the accurate position of the wafer, the gluing mechanism 3 can accurately control the direction and range of gluing to achieve high-precision gluing operation; through the setting of the positioning mechanism 2 and the gluing mechanism 3, the accuracy and efficiency of gluing are improved, and the wafer can be stably positioned at the predetermined position during the gluing process, ensuring the accuracy of gluing and achieving high-precision gluing operation. At the same time, the risk of wafer damage can be reduced. Through precise positioning and a stable gluing process, the movement or offset of the wafer during the gluing process is effectively reduced, thereby reducing the possibility of wafer damage and ensuring product quality.

[0038] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A positioning processing device for a glue coating machine, comprising a frame (1) arranged on a workbench, characterized in that: The frame (1) is provided with a positioning mechanism (2) and a gluing mechanism (3) for positioning and gluing, the positioning mechanism (2) comprising a positioning plate (21), a support plate (22) and a driving member (23), the support plate (22) being slidably connected to the frame (1), the positioning plate (21) being connected to the support plate (22), an arc-shaped slot (211) being provided on the positioning plate (21) for limiting a gluing area, the driving member (23) comprising a driving gear (231), a driven rack (232) and a servo motor (233), the servo motor (233) being connected to the frame (1), the driving gear (231) being connected to the output end of the servo motor (233), the driving gear (231) being meshed with the driven rack (232), and the driven rack (232) being connected to the sliding end of the support plate (22).

2. A positioning processing device for a glue coating machine according to claim 1, characterized in that: Sliding blocks (4) are respectively provided on both sides of the support plate (22); a sliding groove (5) for the sliding block (4) to move is provided through the frame (1); and the driven rack (232) is connected to one of the sliding blocks (4).

3. A positioning processing device for a glue coating machine according to claim 2, characterized in that: A sliding wheel (41) is provided at the bottom of each sliding block (4), and the sliding wheel (41) is rotatably connected to the sliding block (4). A pulley groove (51) for the sliding wheel (41) to move is provided on the bottom wall of the sliding groove (5).

4. The positioning processing device for a glue coating machine according to claim 2, characterized in that: A frame (6) is provided on one side of the frame (1). The interior of the frame (6) is a hollow structure. The driving gear (231) and the driven rack (232) are both provided in the frame (6). The frame (6) is provided with a strip groove (61) for the driven rack (232) to slide.

5. The positioning processing device for a glue coating machine according to claim 4, characterized in that: A connecting rod (7) is provided between the driven rack (232) and one of the sliding blocks (4), and two ends of the connecting rod (7) are respectively connected to the driven rack (232) and the corresponding sliding block (4).

6. The positioning processing device for a glue coating machine according to claim 1, characterized in that: The glue coating mechanism (3) comprises a glue coating container (31), a glue coating nozzle (32) and a translation assembly (33); the translation assembly (33) is connected to the frame (1); the glue coating container (31) is arranged on the translation assembly (33); the glue coating nozzle (32) is connected to the inside of the glue coating container (31); and the glue coating nozzle (32) is arranged toward the arc-shaped slot (211) of the positioning plate (21).

7. The positioning processing device for a glue coating machine according to claim 6, characterized in that: The translation assembly (33) comprises a translation screw (331), a translation plate (332), a translation slide rail (333) and a translation motor (334); the translation screw (331) is rotatably connected to the frame (1); the output end of the translation motor (334) is connected to the end of the translation screw (331); the translation plate (332) is threadedly connected to the translation screw (331); the translation slide rail (333) is fixedly connected to the frame (1); the translation slide rail (333) is arranged along the length direction of the translation screw (331); the translation plate (332) is slidably connected to the translation slide rail (333); and the glue coating container (31) is arranged on the translation plate (332).

8. The positioning processing device for a glue coating machine according to claim 7, characterized in that: A support seat (8) is provided on the translation plate (332), a lifting cylinder (81) is provided on the support seat (8), and an output end of the lifting cylinder (81) is connected to the glue coating container (31).

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