Thermal paste coating equipment

Abstract

The utility model relates to the technical field of semiconductors, and provides heat-conducting paste coating equipment. The heat conduction paste coating equipment comprises an equipment body, a clamping assembly, a driving assembly and a coating printing assembly, the equipment body comprises a carrier plate and a bottom plate, the carrier plate is connected to the bottom plate, and a containing groove is formed in the carrier plate; the clamping assembly is connected to the bottom plate and comprises a pressing block. The driving assembly is connected to the clamping assembly and used for driving the pressing block to move towards the containing groove so as to clamp the ceramic wafer to be coated. The coating and printing assembly comprises a tray, the tray movably covers the side, provided with the containing groove, of the carrier plate, the tray is movably connected with the floor to be close to or away from the carrier plate, and the tray is provided with an opening corresponding to the containing groove. According to the heat-conducting paste coating equipment disclosed by the embodiment of the invention, the clamping assembly and the coating and printing assembly are used for clamping the ceramic wafer and accurately positioning the ceramic wafer in the horizontal direction and the vertical direction, so that a coating area does not deviate, the heat-conducting paste is tightly attached to the ceramic wafer, and the heat-conducting paste is uniformly coated.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a thermal paste coating device. Background Art

[0002] With the advancement of technology, the application of thermal paste on ceramic wafers has found widespread application in fields such as the automotive industry, electronic equipment manufacturing, and photovoltaic energy. Thermal paste coating technology is crucial for improving the thermal conductivity of ceramic wafers and the overall heat dissipation efficiency of the system. However, the currently widely used thermal paste coating method has significant technical limitations, including limited positioning accuracy, uneven coating, and low coating efficiency. Utility Model Content

[0003] The present application aims to solve at least one of the technical problems existing in the related art. To this end, the present application proposes a thermal paste coating device, which aims to solve the problem in the prior art that the thermal paste coating of ceramic sheets cannot be accurately limited, resulting in uneven coating and low efficiency.

[0004] The thermal paste coating device proposed in an embodiment of the present application includes:

[0005] The equipment body includes a carrier plate and a bottom plate, wherein the carrier plate is connected to the bottom plate and a receiving groove is formed on the carrier plate for placing the workpiece to be coated;

[0006] A clamping assembly connected to the base plate, the clamping assembly including a pressing block

[0007] a driving assembly connected to the clamping assembly, for driving the pressing block to move toward the receiving groove to clamp the workpiece to be coated;

[0008] The coating printing component includes a tray, which can be movably covered on a side of the carrier plate with a receiving groove, and the tray is movably connected to the bottom plate to move closer to or away from the carrier plate, and the tray has an opening corresponding to the receiving groove.

[0009] According to the thermal paste coating equipment of the embodiment of the present application, the workpiece is clamped by a clamping component and a coating printing component, and is precisely positioned in the horizontal and vertical directions to ensure that the coating area is not offset, the thermal paste and the workpiece are tightly fitted, and the thermal paste is evenly coated.

[0010] According to one embodiment of the present application, the driving assembly includes a driving member and a control valve, the pressure block is connected to the driving member, the driving member is used to drive the pressure block to move, and the control valve is connected to the driving member, and the control valve is used to control the start and stop of the driving member.

[0011] According to one embodiment of the present application, the carrier plate is provided with an avoidance hole between two oppositely arranged accommodating grooves, the pressure block is arranged in the avoidance hole, each of the accommodating grooves is correspondingly provided with a pressure block, and the driving member is suitable for driving the pressure blocks to move toward the corresponding accommodating grooves respectively.

[0012] According to one embodiment of the present application, the driving member is disposed between the two pressing blocks in the avoidance hole. When the clamping assembly is in a clamped state, the driving member simultaneously activates the two pressing blocks to move toward the corresponding accommodating grooves.

[0013] According to one embodiment of the present application, the device body includes several support columns, the first ends of the support columns are connected to the base plate, the carrier plate is connected to the second ends of the support columns, and the drive member and the control valve are arranged between the carrier plate and the base plate.

[0014] According to one embodiment of the present application, the clamping assembly includes a pressure regulating valve, which is connected to the driving member and is used to control the output pressure of the driving member.

[0015] According to one embodiment of the present application, the coating and printing assembly includes a movable connecting rod, one end of which is rotatably connected to the bottom plate, and the other end of which is rotatably connected to the tray.

[0016] According to one embodiment of the present application, the coating and printing assembly includes a limit block, which is fixed to the bottom plate, and the limit block is used to support and limit the movable link when the tray is lifted.

[0017] According to one embodiment of the present application, the carrier plate is provided with a process groove beside the receiving groove, and the process groove is connected to the receiving groove.

[0018] According to one embodiment of the present application, the opening is provided with a steel mesh, the steel mesh is provided with a plurality of hexagonal through holes, and the hexagonal through hole array is provided at the opening.

[0019] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become obvious from the description below, or will be learned through practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application or related technologies, the following briefly introduces the drawings required for use in the embodiments or related technical descriptions. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0021] Figure 1 It is a structural schematic diagram of the thermal paste coating equipment provided in an embodiment of the present application.

[0022] Figure 2 This is a schematic diagram of the front view of the thermal paste coating device provided in an embodiment of the present application.

[0023] Figure 3 It is a front view structural schematic diagram of the tray cover provided by an embodiment of the present application being coupled to the carrier plate.

[0024] Figure 4 yes Figure 3 A left side view of the thermal paste coating apparatus provided in the embodiment.

[0025] Figure 5 yes Figure 3 A front view of a thermal paste coating apparatus provided in an embodiment.

[0026] Figure 6 It is a schematic diagram of the structure of the steel mesh provided in the embodiment of the present application.

[0027] Reference numerals:

[0028] 100, equipment body; 110, carrier plate; 111, receiving slot; 112, avoidance hole; 113, process tank; 120, bottom plate; 130, support column;

[0029] 200, clamping assembly; 210, pressing block;

[0030] 400, drive assembly; 420, drive member; 430, control valve; 440, pressure regulating valve;

[0031] 300, coating and printing assembly; 310, tray; 311, opening; 320, movable connecting rod; 330, limit block; 340, steel mesh. DETAILED DESCRIPTION

[0032] The following embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0033] In the description of the embodiments of the present application, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0034] In the description of the embodiments of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed or detachable connections, where fixed connections can include integral connections; they can refer to mechanical or electrical connections; and they can refer to direct connections or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in the embodiments of this application based on the specific circumstances.

[0035] In the embodiments of the present application, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, a first feature being "above," "above," and "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0036] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiments of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and the features of different embodiments or examples, unless they are contradictory.

[0037] It should be noted that the workpiece mentioned in this application can be a ceramic sheet or a workpiece made of other heat-conducting materials. The following text mainly uses ceramic sheets as an example to describe the workpiece of this application.

[0038] Traditional coating tooling uses magnetic suction and pressing to limit the ceramic sheet. Magnetic suction and pressing can only limit the position in the horizontal direction, but not in the vertical direction, which will cause the thermal adhesive to stick to the ceramic sheet. To solve this problem, traditional tooling uses a stepped screen, which will result in low positioning accuracy of the ceramic sheet in the tooling, easily causing the coating area to shift, and unable to precisely fit the coating surface of the ceramic sheet, which will easily lead to uneven coating amount.

[0039] The present application proposes a thermal paste coating device to solve the problem that the existing ceramic sheet cannot be accurately limited when coating thermal paste, resulting in uneven coating and low efficiency.

[0040] According to the thermal paste coating device proposed in the embodiment of this application, please refer to Figure 1 The thermal paste coating equipment includes an equipment body 100, a clamping assembly 200 and a coating and printing assembly 300. The equipment body 100 includes a carrier plate 110 and a base plate 120. The carrier plate 110 is connected to the base plate 120. The carrier plate 110 is provided with a receiving groove 111. The receiving groove 111 is used to place the workpiece to be coated; the clamping assembly 200 is connected to the base plate 120. The clamping assembly 200 includes a pressure block 210. The driving assembly 400 is connected to the clamping assembly 200 and is used to drive the pressure block 210 to move toward the receiving groove 111 to clamp the workpiece to be coated; the coating and printing assembly 300 includes a tray 310. The tray 310 can be movably covered on the side of the carrier plate 110 where the receiving groove 111 is provided. The tray 310 is movably connected to the base plate 120 to move closer to or away from the carrier plate 110. The tray 310 is provided with an opening 311 corresponding to the receiving groove 111.

[0041] According to the thermal paste coating equipment of the embodiment of the present application, the workpiece is clamped by the clamping component 200 and the coating printing component 300, and is precisely positioned in the horizontal and vertical directions to ensure that the coating area is not offset, the thermal paste and the workpiece are tightly fitted, and the thermal paste is evenly coated.

[0042] The carrier plate 110 is a platform for supporting, fixing or carrying the workpiece to be coated, and is provided with a receiving groove 111. In one embodiment, the side walls of the receiving groove 111 are open enclosure structures, wherein the receiving groove 111 has an open side. The receiving groove 111 with an open enclosure structure has a unique structural feature, that is, it is composed of incompletely closed side walls to form an open enclosure structure. The structure of the receiving groove 111 is specifically adapted to the shape of the workpiece. In one embodiment, the shape of the workpiece is rectangular, and the receiving groove 111 is composed of three side walls to form an open three-sided enclosure structure.

[0043] The clamping assembly 200 is a mechanical device mounted near or integrated with the carrier plate 110, used to securely clamp an object placed in the receiving groove 111. The pressure block 210 is movable in a specific direction. As will be appreciated, the clamping assembly 200 securely clamps the workpiece by moving the pressure block 210 toward the receiving groove 111 and closing its open side, ensuring its secure hold during the coating process.

[0044] When the clamping assembly 200 is in the clamped state, the pressing block 210 moves along a predetermined path toward the receiving slot 111. As the pressing block 210 gradually approaches, it eventually fits snugly against the open side of the receiving slot 111, where the fourth sidewall was originally missing. Thus, the pressing block 210 and the three existing sidewalls together form a complete, four-sided enclosed receiving space.

[0045] On the contrary, when the clamping assembly 200 is in the loose state, the pressing block 210 moves away from the receiving groove 111 in the opposite direction. As the pressing block 210 gradually moves away, the "fourth side wall" originally formed by it disappears, and the receiving groove 111 returns to an open state with only three side walls.

[0046] The tray 310 of the coating and printing assembly 300 can be flexibly placed over the carrier plate 110, with an opening 311 corresponding to the receiving slot 111. This allows the tray 310 to be precisely aligned with the workpiece when closed, thereby ensuring that the thermal paste application area does not shift. The synergistic effect of the clamping assembly 200 and the coating and printing assembly 300 ensures a tight fit between the thermal paste and the workpiece during application. This tight fit not only improves thermal conductivity but also effectively prevents degradation of thermal conductivity due to poor adhesion.

[0047] According to an embodiment of the present application, please refer to Figures 1 to 6 The driving assembly 400 includes a driving member 420 and a control valve 430. The pressure block 210 is connected to the driving member 420. The driving member 420 is used to drive the pressure block 210 to move. The control valve 430 is connected to the driving member 420. The control valve 430 is used to control the start and stop of the driving member 420.

[0048] The driving member 420 drives the pressure block 210 to clamp the workpiece, so that the workpiece is subjected to a horizontal clamping force. This clamping force is adjusted by the stroke of the driving member 420 to ensure that the workpiece is not subject to stress fracture, floating, warping, or offset. The clamped workpiece should be slightly higher than the receiving groove 111. When the movable coating and printing component 300 is moved to the tile, it can be close to the workpiece so that the amount of thermal paste applied is appropriate and uniform. When the coating and printing component 300 is removed, the workpiece will not be carried away due to the viscosity of the thermal paste, thereby achieving the effect of precise limiting and precise coating.

[0049] The drive member 420 can be a cylinder or a motor. The compressed air inside the cylinder can generate a driving or pulling force, thereby driving the connected components to perform linear reciprocating motion. The motor can drive the pressure block to move linearly via a drive motor. In this embodiment, the drive member 420 is configured to transmit this power through its output jaws. The pressure block 210 can move precisely with the movement of the drive member 420, achieving rapid and accurate clamping or release of the workpiece.

[0050] Control valve 430 is used to precisely control the start and stop of driver 420, as well as its possible movement speed. Control valve 430 receives signals from an external control system (e.g., electrical signals, air pressure signals, etc.) and adjusts the air pressure inside driver 420 based on these signals, thereby achieving precise control of the movement of driver 420.

[0051] By adjusting the control valve 430, the driver 420 can be started instantly, operated smoothly, and stopped precisely, ensuring rapid response and accurate positioning of the clamping action. In addition, the control valve 430 can also have a variety of operating mode switching functions to adapt to different clamping requirements and working scenarios.

[0052] According to one embodiment of the present application, the carrier plate 110 is provided with an avoidance hole 112 between two oppositely arranged accommodating grooves 111, the pressure block 210 is arranged in the avoidance hole 112, and each accommodating groove 111 is correspondingly provided with a pressure block 210, and the driving member 420 is suitable for driving the pressure block 210 to move toward the corresponding accommodating groove 111 respectively.

[0053] Each avoidance hole 112 is designed to be large enough to accommodate the movement of the pressure block 210, and can meet the movement stroke required for clamping and loosening the pressure block 210. When the clamping assembly 200 is in a clamped state, the pressure block 210 moves toward the receiving groove 111 under the action of mechanical force or pre-tightening force until its edge is tightly fitted against the open side edge of the receiving groove 111, thereby effectively closing the channel between the two.

[0054] In one embodiment, the driving member 420 is located in the avoidance hole 112. Of course, the driving member 420 may also be partially located in the avoidance hole 112.

[0055] According to one embodiment of the present application, the driving member 420 is disposed between the two pressing blocks 210 in the avoidance hole 112 . When the clamping assembly 200 is in a clamped state, the driving member 420 simultaneously activates the two pressing blocks 210 to move toward the corresponding accommodating grooves 111 .

[0056] It is understood that the output force of the driver 420 can directly and efficiently act on the two pressure blocks 210. When the clamping assembly 200 receives the clamping command and enters the clamping state, the driver 420 is activated and generates a pushing or pulling force. Driven by the driver 420, the two pressure blocks 210 move along a predetermined trajectory toward the receiving slot 111 until their edges are tightly attached to the open side edges of the receiving slot 111. During this process, both pressure blocks 210 complete the sealing of the open side of the corresponding receiving slot 111.

[0057] In one embodiment, the carrier plate 110 is provided with six avoidance holes 112 , and an accommodating groove 111 is provided on both sides of each avoidance hole 112 . When the driving member 420 is started, twelve workpieces can be clamped and fixed at the same time.

[0058] According to one embodiment of the present application, the device body 100 includes several support columns 130, the first ends of the support columns 130 are connected to the base plate 120, the carrier plate 110 is connected to the second ends of the support columns 130, and the driving member 420 and the control valve 430 are arranged between the carrier plate 110 and the base plate 120.

[0059] The first end of the support column 130 is securely connected to the base plate 120, while the second end of the support column 130 is connected to the carrier plate 110, providing solid support for the carrier plate 110 and the various components thereon. The carrier plate 110 forms a horizontal working platform. The driver 420 and control valve 430 are cleverly positioned between the carrier plate 110 and the base plate 120, utilizing the space between the support columns 130 for installation. This layout not only saves space but also allows the driver 420 and control valve 430 to directly act on the pressure block 210 on the carrier plate 110, achieving efficient clamping and release actions.

[0060] In one embodiment, the carrier plate 110 is slidably connected to the support columns 130, and the distance between the carrier plate 110 and the base plate 120 is adjustable. By slidingly connecting the carrier plate 110 to the support columns 130, the carrier plate 110 can be easily moved up and down along the support columns 130, thereby adjusting the distance between the carrier plate 110 and the base plate 120. This adjustability allows the device to accommodate workpieces of varying heights.

[0061] According to one embodiment of the present application, the clamping assembly 200 includes a pressure regulating valve 440 connected to the driver 420. The pressure regulating valve 440 is used to control the output pressure of the driver 420. As a pressure regulating device, the pressure regulating valve 440 can accurately adjust the output pressure of the driver 420 in real time based on a preset pressure value or an external control signal. Precise pressure control helps improve the accuracy and stability of clamping. In situations requiring high-precision clamping (such as precision machining and assembly), the pressure regulating valve 440 can significantly improve the clamping performance of the clamping assembly 200.

[0062] According to one embodiment of the present application, the coating and printing assembly 300 includes a movable link 320, one end of which is rotatably connected to the base plate 120 and the other end of which is rotatably connected to the tray 310. The movable link 320 provides the tray 310 with a certain degree of freedom relative to the carrier plate 110, enabling the tray 310 to rotate, tilt, or translate within the range of the movable link 320, thereby meeting the complex requirements of the coating and printing process. For example, when coating is not required, the tray 310 can be moved away from the side of the carrier plate 110 by rotating the movable link 320, making it easier for the user to remove the coated workpiece.

[0063] According to one embodiment of the present application, the coating and printing assembly 300 includes a limiting block 330 , which is fixed to the bottom plate 120 . The limiting block 330 is used to support and limit the movable link 320 when the tray 310 is lifted.

[0064] The stopper 330 limits the range of motion of the movable link 320. This ensures that the tray 310 does not exceed a predetermined safety range during movement, preventing collisions, jams, or other potential problems caused by excessive movement. The stopper 330 not only protects the coating and printing assembly 300 itself but also ensures a smooth coating process and consistent coating quality.

[0065] According to one embodiment of the present application, the carrier plate 110 is provided with a process slot 113 beside the receiving slot 111, and the process slot 113 is connected to the receiving slot 111. It is understood that the process slot 113 facilitates the operator to take and place the workpiece in the receiving slot 111. Specifically, the process slot 113 can be provided on both sides of the receiving slot 111.

[0066] According to one embodiment of the present application, the opening 311 is provided with a steel mesh 340 , and the steel mesh 340 is provided with a plurality of hexagonal through holes. The hexagonal through hole array is arranged in the opening 311 .

[0067] Printing openings 311 utilize a honeycomb layout design, with several hexagonal through-holes arranged at appropriate intervals to form a single printing opening 311, which is then combined in an array to create a variety of configurations. Openings 311 correspond to workpiece receiving slots 111. When the coating printing assembly 300 is moved onto the workpiece, openings 311 are centered on the workpiece. The area of ​​openings 311 should be smaller than the workpiece coating area. When the workpiece is tightly mounted, the thermal paste is squeezed and stretched, effectively filling the heat transfer area without causing flow.

[0068] Of course, in addition to hexagonal through holes, the steel mesh 340 can also be provided with through holes of other shapes, such as circular, triangular, square, etc.

[0069] The thermal paste coating equipment of this application uses a 0.2mm laser-engraved steel mesh 340 to replace traditional roller printing. The steel mesh 340 printing can better control the amount of glue and the printing area. The printing area is 70% of the workpiece area. After the thermal paste is coated and installed, it fills the thermal connection area.

[0070] Finally, it should be noted that the above embodiments are intended only to illustrate the present application and are not intended to limit the present application. Although the present application has been described in detail with reference to the embodiments, those skilled in the art will appreciate that various combinations, modifications, or equivalent substitutions of the technical solutions of the present application do not depart from the spirit and scope of the technical solutions of the present application and are intended to be encompassed by the claims of the present application.

Claims

1. A thermal paste coating device, characterized in that: include: The device body (100) comprises a carrier plate (110) and a bottom plate (120), wherein the carrier plate (110) is connected to the bottom plate (120), and the carrier plate (110) is provided with a receiving groove (111), and the receiving groove (111) is used to place a workpiece to be coated; A clamping assembly (200) connected to the base plate (120), the clamping assembly (200) comprising a pressing block (210); a driving assembly (400), connected to the clamping assembly (200), and configured to drive the pressing block (210) to move toward the receiving groove (111) to clamp the workpiece to be coated; The coating printing assembly (300) includes a tray (310), wherein the tray (310) can be movably covered on a side of the carrier (110) on which a receiving groove (111) is provided. The tray (310) is movably connected to the bottom plate (120) to move closer to or away from the carrier (110), and the tray (310) has an opening (311) corresponding to the receiving groove (111).

2. The thermal paste coating device according to claim 1, characterized in that: The driving assembly (400) includes a driving member (420) and a control valve (430). The pressure block (210) is connected to the driving member (420). The driving member (420) is used to drive the pressure block (210) to move. The control valve (430) is connected to the driving member (420). The control valve (430) is used to control the start and stop of the driving member (420).

3. The thermal paste coating device according to claim 2, characterized in that: The carrier plate (110) is provided with an avoidance hole (112) between the two oppositely arranged accommodating grooves (111), the pressing block (210) is arranged in the avoidance hole (112), and each of the accommodating grooves (111) is correspondingly provided with a pressing block (210), and the driving member (420) is suitable for driving the pressing block (210) to move toward the corresponding accommodating groove (111).

4. The thermal paste coating device according to claim 3, characterized in that: The driving member (420) is arranged between the two pressing blocks (210) in the avoidance hole (112). When the clamping assembly (200) is in a clamped state, the driving member (420) simultaneously activates the two pressing blocks (210) to move toward the corresponding accommodating grooves (111).

5. The thermal paste coating device according to claim 2, characterized in that: The clamping assembly (200) comprises a pressure regulating valve (440), the pressure regulating valve (440) being connected to the driving member (420), and the pressure regulating valve (440) being used to control the output pressure of the driving member (420).

6. The thermal paste coating device according to claim 2, characterized in that: The device body (100) includes a plurality of support columns (130), wherein the first ends of the support columns (130) are connected to the base plate (120), the carrier plate (110) is connected to the second ends of the support columns (130), and the driving member (420) and the control valve (430) are arranged between the carrier plate (110) and the base plate (120).

7. The thermal paste coating device according to any one of claims 1 to 6, characterized in that: The coating and printing assembly (300) comprises a movable connecting rod (320), one end of the movable connecting rod (320) being rotatably connected to the bottom plate (120), and the other end being rotatably connected to the tray (310).

8. The thermal paste coating device according to claim 7, characterized in that: The coating and printing assembly (300) comprises a limiting block (330), wherein the limiting block (330) is fixed to the bottom plate (120), and the limiting block (330) is used to support and limit the movable connecting rod (320) when the tray (310) is lifted.

9. The thermal paste coating device according to any one of claims 1 to 6, characterized in that: The carrier plate (110) is provided with a process groove (113) beside the receiving groove (111), and the process groove (113) is connected to the receiving groove (111).

10. The thermal paste coating device according to any one of claims 1 to 6, characterized in that: The opening (311) is provided with a steel mesh (340), the steel mesh (340) is provided with a plurality of hexagonal through holes, and the hexagonal through hole array is provided at the opening (311).

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