Vacuum magnetron sputtering film plating equipment

Abstract

The utility model discloses vacuum magnetron sputtering film plating equipment, and relates to the technical field of film plating. The device comprises a box body, the front surface of the box body is rotatably connected with a box door, the right side of the box body is provided with an air exhaust hole, the right side of the box body is fixedly connected with an air exhaust pipe, the air exhaust pipe is communicated with the air exhaust hole, and the top of the box body is fixedly connected with a motor. The gear disc is arranged, specifically, the gear which rotates along with the rotating shaft and drives the gear disc to rotate, the gear which rotates along with the gear disc and is in meshed connection with the gear disc rotates, and the gear drives the frame to rotate through the connecting shaft, so that articles are driven to rotate around the rotating shaft in the box body and rotate at the same time. The planetary motion can ensure that the coated article is uniformly bombarded from all directions in the coating process, and all parts of the surface of the coated article can be uniformly bombarded by sputtering particles, so that the quality of the coated article finished product is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of thin film coating, in particular to a vacuum magnetron sputtering thin film coating device. Background Art

[0002] Vacuum magnetron sputtering coating machines are widely used for decorative coatings on surfaces such as household appliances, clocks and watches, lamps, arts and crafts, toys, car light reflectors, mobile phone button housings, instruments and meters, plastics, glass, ceramics, and tiles, as well as functional coatings for tooling. Sputtering is the process of bombarding an object with energetic particles, causing atoms on the surface of the object to escape from the matrix.

[0003] Usually, when coating an object, the object is placed in the equipment. Due to the combined action of the magnetic field and the electric field, the sputtered atoms or molecules will accelerate along a certain direction and deposit on the surface of the substrate. The sputtering angle is relatively single, resulting in an uneven film on the surface of the object. Thin areas are prone to forming holes, which loses the protective effect on the substrate, while excessively thick areas result in a waste of coating metal. Therefore, we proposed a vacuum magnetron sputtering thin film coating equipment. Utility Model Content

[0004] The purpose of the present utility model is to provide a vacuum magnetron sputtering thin film coating equipment, which drives the article to rotate around the rotating shaft inside the box while rotating at the same time by setting a gear disk. The planetary motion can ensure that the coated article is evenly bombarded from all directions during the coating process, and the planetary motion of the coated article can make all parts of its surface evenly receive the bombardment of sputtering particles, thereby improving the quality of the finished product of the coated article, and solving the problem that the existing sputtering angle is relatively single, resulting in uneven film coating on the surface of the article, easy formation of holes in thin areas, loss of protection for the substrate, and waste of coating metal in too thick areas.

[0005] In order to solve the above technical problems, the present invention is achieved through the following technical solutions:

[0006] The utility model is a vacuum magnetron sputtering thin film coating equipment, comprising a box body, the front side of the box body is rotatably connected to a box door, the right side of the box body is provided with an exhaust hole, the right side of the box body is fixedly connected to an exhaust pipe, the exhaust pipe is communicated with the exhaust hole, the top of the box body is fixedly connected to a motor, the output end of the motor is fixedly connected to a rotating shaft, the rotating shaft is rotatably connected to the inner wall of the box body, the exhaust pipe is connected to the vacuum pump equipment, and the interior of the box body is vacuumed to remove air and other impurities in the vacuum chamber, thereby ensuring that the influence of gas impurities on the quality of the film is minimized;

[0007] The outer surface of the rotating shaft is fixedly connected with a toothed disc, and the inner wall of the toothed disc is meshed with four gears, and the bottoms of the four gears are fixedly connected to a connecting shaft. A support frame is provided below the toothed disc, and the inner wall of the support frame is fixedly connected to the outer surface of the rotating shaft. The side of the support frame away from the rotating shaft is rotatably connected to the outer surface of the connecting shaft. By providing a toothed disc, the article is driven to rotate around the rotating shaft inside the box while rotating on its own, so that all parts of its surface can be evenly bombarded by sputtering particles, thereby improving the quality of the finished product of the coating of the article.

[0008] Furthermore, a clamping assembly is provided at the bottom of each of the four connecting shafts. The clamping assembly includes a frame fixedly connected to the end of the connecting shaft away from the gear. The inner wall of the frame is made of a flexible material to avoid scratching the surface of the object.

[0009] Furthermore, a threaded hole is provided on the side wall of the frame, a screw is threadedly connected to the inner wall of the threaded hole, a clamp is fixedly connected to one end of the screw close to the frame, the outer surface of the clamp is slidably connected to the inner wall of the frame, and the clamp contacts the object to complete the clamping and fixing. The clamping and fixing can reduce the direct contact between the object and the inside of the device during the coating process, reducing the risk of surface damage caused by friction, collision, etc.

[0010] Furthermore, a slide groove is provided on the outer surface of the rotating shaft, and a sliding frame is slidably connected to the inner wall of the slide groove. The sliding frame moves inside the slide groove and can be easily adjusted by the staff according to the length and volume of the article.

[0011] Furthermore, the sliding frame is rotatably connected to a swivel on one side close to the support frame, and the top of the swivel is rotatably connected to four support blocks. The surfaces of the four support blocks are notched, and the notches of the support blocks rest against the bottom of the article to prevent the article from being blown by the airflow generated by the sputtered particles during the coating process, thereby affecting the quality of the coating.

[0012] Furthermore, an elastic limiting ring is provided under the sliding frame, the inner wall of the elastic limiting ring contacts the outer surface of the rotating shaft, the inner wall of the elastic limiting ring is provided with a tooth groove, the outer surface of the elastic limiting ring is threadedly connected with a nut, and the elastic limiting ring is provided with a tooth groove inside, thereby increasing the friction between the elastic limiting ring and the rotating shaft, so that the sliding frame cannot move downward on the surface of the rotating shaft, thereby ensuring that the support block supports the bottom of the object.

[0013] The utility model has the following beneficial effects:

[0014] 1. The utility model sets a toothed disc, which drives the toothed disc to rotate as the rotating shaft rotates. As the toothed disc rotates, the gear meshing with the toothed disc rotates. The gear drives the frame to rotate through the connecting shaft, thereby driving the article to rotate around the rotating shaft inside the box while rotating. The planetary motion can ensure that the coated article is evenly bombarded from all directions during the coating process, and the planetary motion of the coated article can make all parts of its surface evenly receive the bombardment of sputtering particles, thereby improving the quality of the finished product of the coated article.

[0015] 2. The utility model sets a clamping assembly, specifically, places one end of the object inside the frame, rotates the screw clockwise, and pushes the clamping plate closer to the object as the screw rotates. The clamping plate contacts the object to complete the clamping and fixing. The objects are placed inside the remaining frames in turn to fix them. The distance and angle between the object and the target material can be controlled, thereby further ensuring the uniformity of the coating thickness. The clamping and fixation can reduce the direct contact between the object and the inside of the device during the coating process, reducing the risk of surface damage caused by friction, collision, etc.

[0016] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0018] Figure 1 This is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 This is a schematic diagram of the box structure of the utility model;

[0020] Figure 3 For this utility model Figure 2 A schematic diagram of the structure of the middle part;

[0021] Figure 4 This is a schematic diagram of the toothed disc structure of the utility model;

[0022] Figure 5 For this utility model Figure 4 A magnified schematic diagram of the structure of middle B;

[0023] Figure 6 This is a schematic diagram of the structure of the elastic limiting ring of the utility model.

[0024] In the accompanying drawings, the components represented by the reference numerals are as follows:

[0025] 1. Box body; 101. Box door; 102. Exhaust pipe; 103. Motor; 104. Rotating shaft; 105. Support frame; 106. Slide groove; 107. Sliding frame; 201. Toothed disc; 202. Gear; 203. Connecting shaft; 3. Clamping assembly; 301. Frame; 302. Screw; 303. Clamping plate; 401. Rotating ring; 402. Support block; 403. Elastic limiting ring; 404. Tooth groove; 405. Nut. DETAILED DESCRIPTION

[0026] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0027] See also Figure 1-5 As shown, the utility model is a vacuum magnetron sputtering thin film coating equipment, including a box body 1, the front of the box body 1 is rotatably connected to a box door 101, the right side of the box body 1 is provided with an exhaust hole, the right side of the box body 1 is fixedly connected to an exhaust pipe 102, the exhaust pipe 102 is connected to the exhaust hole, the top of the box body 1 is fixedly connected to a motor 103, the output end of the motor 103 is fixedly connected to a rotating shaft 104, and the rotating shaft 104 is rotatably connected to the inner wall of the box body 1;

[0028] The outer surface of the rotating shaft 104 is fixedly connected with a toothed disc 201, and the inner wall of the toothed disc 201 is meshed with four gears 202. The bottoms of the four gears 202 are fixedly connected with a connecting shaft 203. A support frame 105 is provided below the toothed disc 201. The inner wall of the support frame 105 is fixedly connected to the outer surface of the rotating shaft 104. The side of the support frame 105 away from the rotating shaft 104 is rotatably connected to the outer surface of the connecting shaft 203. By providing the toothed disc 201, specifically, as the rotating shaft 104 rotates, the toothed disc 201 is driven Rotation: As the toothed disc 201 rotates, the gear 202 meshing with the toothed disc 201 rotates, and the gear 202 drives the frame 301 to rotate through the connecting shaft 203, thereby driving the object to rotate around the rotating shaft 104 inside the box 1 while rotating on its own. The planetary motion can ensure that the coated object is evenly bombarded from all directions during the coating process, and the planetary motion of the coated object can make all parts of its surface evenly receive the bombardment of sputtering particles, thereby improving the quality of the finished product of the coating of the object.

[0029] A clamping assembly 3 is provided at the bottom of each of the four connecting shafts 203 . The clamping assembly 3 includes a frame 301 fixedly connected to an end of the connecting shaft 203 away from the gear 202 .

[0030] A threaded hole is provided on the side wall of the frame 301, and a screw 302 is threadedly connected to the inner wall of the threaded hole. The end of the screw 302 close to the frame 301 is fixedly connected to a clamping plate 303, and the outer surface of the clamping plate 303 is slidably connected to the inner wall of the frame 301. By setting a clamping component 3, specifically placing one end of the object inside the frame 301, and rotating the screw 302 clockwise, the clamping plate 303 is pushed closer to the object as the screw 302 rotates. The clamping plate 303 contacts the object to complete the clamping and fixing of the object, and the object is placed in the remaining frames 301 in turn to be fixed. The distance and angle between the object and the target material can be controlled, thereby further ensuring the uniformity of the coating thickness. The clamping and fixing can reduce the direct contact between the object and the inside of the device during the coating process, and reduce the risk of surface damage caused by friction, collision, etc.

[0031] A sliding groove 106 is formed on the outer surface of the rotating shaft 104 , and a sliding frame 107 is slidably connected to the inner wall of the sliding groove 106 .

[0032] A swivel ring 401 is rotatably connected to one side of the sliding frame 107 close to the supporting frame 105 , and four supporting blocks 402 are rotatably connected to the top of the swivel ring 401 . The surfaces of the four supporting blocks 402 are notched.

[0033] An elastic limiting ring 403 is provided below the sliding frame 107 , and the inner wall of the elastic limiting ring 403 contacts the outer surface of the rotating shaft 104 .

[0034] The inner wall of the elastic limiting ring 403 is provided with a tooth groove 404 , and the outer surface of the elastic limiting ring 403 is threadedly connected with a nut 405 .

[0035] A specific application of this embodiment is: the staff opens the box door 101, puts the object to be coated into the interior of the box body 1, first puts one end of the object inside the frame 301, and rotates the screw 302 clockwise. As the screw 302 rotates, the clamping plate 303 is pushed close to the object. The clamping plate 303 contacts the object to complete the clamping and fixing. The objects are placed in the remaining frames 301 in turn to fix them. Through clamping and fixing, the distance and angle between the object and the target material can be controlled, thereby further ensuring the uniformity of the coating thickness. Clamping and fixing can reduce the direct contact between the object and the inside of the device during the coating process, reducing the risk of surface damage caused by friction, collision, etc.

[0036] When the support block 402 moves and contacts the bottom of the article, the notch of the support block 402 presses against the bottom of the article to prevent the article from being blown by the airflow generated by the sputtered particles during the coating process, thereby affecting the quality of the coating. The elastic limiting ring 403 moves on the surface of the rotating shaft 104 toward the sliding frame 107. When the elastic limiting ring 403 contacts the bottom of the sliding frame 107, the nut 405 is turned clockwise, and the elastic limiting ring 403 is contracted. The tooth groove 404 is provided inside the elastic limiting ring 403, thereby increasing the friction between the elastic limiting ring 403 and the rotating shaft 104, so that the sliding frame 107 cannot move downward on the surface of the rotating shaft 104, thereby ensuring that the support block 402 supports the bottom of the article.

[0037] After the object is clamped and fixed, the box door 101 is closed, the exhaust pipe 102 is connected to the vacuum pump equipment, and the interior of the box 1 is vacuumed to remove the air and other impurities in the vacuum chamber. The motor 103 is started to drive the rotating shaft 104 to rotate. As the rotating shaft 104 rotates, the gear disc 201 is driven to rotate. As the gear disc 201 rotates, the gear 202 engaged with the gear disc 201 rotates. The gear 202 drives the frame 301 to rotate through the connecting shaft 203, thereby driving the object to rotate around the rotating shaft 104 inside the box 1 while rotating on its own. The planetary motion can ensure that the coated object is evenly bombarded from all directions during the coating process, and the planetary motion of the coated object can make all parts of its surface evenly bombarded by sputtering particles, thereby avoiding the problem of uneven coating caused by a single bombardment angle, thereby improving the quality of the finished product of the coated object.

[0038] Throughout this specification, references to terms such as "one embodiment," "example," or "specific example" indicate that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0039] The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the present invention to the specific embodiments described. Obviously, many modifications and variations are possible based on the contents of this specification. These embodiments are selected and described in detail in this specification to better explain the principles and practical applications of the present invention, thereby enabling those skilled in the art to better understand and utilize the present invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A vacuum magnetron sputtering thin film coating device, comprising a box (1), the front of the box (1) is rotatably connected to a box door (101), the right side of the box (1) is provided with an exhaust hole, the right side of the box (1) is fixedly connected to an exhaust pipe (102), the exhaust pipe (102) is connected to the exhaust hole, the top of the box (1) is fixedly connected to a motor (103), the output end of the motor (103) is fixedly connected to a rotating shaft (104), and the rotating shaft (104) is rotatably connected to the inner wall of the box (1), characterized in that; The outer surface of the rotating shaft (104) is fixedly connected to a toothed disc (201), the inner wall of the toothed disc (201) is meshedly connected to four gears (202), the bottoms of the four gears (202) are fixedly connected to a connecting shaft (203), a support frame (105) is provided below the toothed disc (201), the inner wall of the support frame (105) is fixedly connected to the outer surface of the rotating shaft (104), and the side of the support frame (105) away from the rotating shaft (104) is rotatably connected to the outer surface of the connecting shaft (203).

2. The vacuum magnetron sputtering thin film coating equipment according to claim 1, characterized in that: A clamping assembly (3) is provided at the bottom of each of the four connecting shafts (203), and the clamping assembly (3) comprises a frame (301) fixedly connected to an end of the connecting shaft (203) away from the gear (202).

3. The vacuum magnetron sputtering thin film coating equipment according to claim 2, characterized in that: A threaded hole is provided on the side wall of the frame (301), a screw rod (302) is threadedly connected to the inner wall of the threaded hole, and a clamping plate (303) is fixedly connected to one end of the screw rod (302) close to the frame (301), and the outer surface of the clamping plate (303) is slidably connected to the inner wall of the frame (301).

4. The vacuum magnetron sputtering thin film coating equipment according to claim 3, characterized in that: The outer surface of the rotating shaft (104) is provided with a sliding groove (106), and the inner wall of the sliding groove (106) is slidably connected to a sliding frame (107).

5. The vacuum magnetron sputtering thin film coating equipment according to claim 4, characterized in that: The sliding frame (107) is rotatably connected to a rotating ring (401) on one side close to the supporting frame (105), and the top of the rotating ring (401) is rotatably connected to four supporting blocks (402), and the surfaces of the four supporting blocks (402) are notched.

6. The vacuum magnetron sputtering thin film coating equipment according to claim 5, characterized in that: An elastic limiting ring (403) is provided below the sliding frame (107), and the inner wall of the elastic limiting ring (403) is in contact with the outer surface of the rotating shaft (104).

7. The vacuum magnetron sputtering thin film coating equipment according to claim 6, characterized in that: The inner wall of the elastic limiting ring (403) is provided with a tooth groove (404), and the outer surface of the elastic limiting ring (403) is threadedly connected with a nut (405).

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