Diffusion furnace uniform in diffusion and efficient in diffusion

Abstract

The utility model relates to a uniform and efficient diffusion furnace which is characterized in that one end of a furnace body is coaxially and fixedly communicated with an air inlet pipe, the outlet end of the air inlet pipe is integrally communicated with the inlet end of a three-way pipe, the outlet end of the three-way pipe is fixedly communicated with diffusion pipes, each diffusion pipe is respectively provided with a plurality of diffusion holes which are uniformly distributed, and the diffusion holes are communicated with the air inlet pipe. The inner wall of the diffusion furnace is coaxially and fixedly connected with a supporting plate, the supporting plate is fixedly connected with two guide rods which are symmetrically arranged about the axis of the supporting plate, the two guide rods are jointly and fixedly connected with a supporting rod, the end, opposite to the supporting plate, of the supporting rod is rotationally connected with a reciprocating lead screw, and the upper end of the reciprocating lead screw penetrates out of the supporting rod and is coaxially and fixedly connected with a driven gear. The driven gear is meshed with a power device, a threaded sleeve in threaded connection with the reciprocating lead screw is integrally arranged in the middle of the moving shaft, sliding sleeves in sliding connection with the guide rods on the corresponding sides are integrally arranged at the two ends of the supporting rod respectively, and the moving shaft is rotationally connected with two impellers symmetrically arranged relative to the reciprocating lead screw.

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion furnace devices, in particular to a diffusion furnace with uniform diffusion and high efficiency. Background Art

[0002] A diffusion furnace consists of a control system, a boat entry and exit system, a furnace heating system, and a gas control system. The primary purpose of the diffusion process is to dope semiconductor wafers at high temperatures. This involves diffusing elements like phosphorus and boron into the silicon wafer, thereby changing and controlling the type, concentration, and distribution of impurities within the semiconductor to create regions with distinct electrical characteristics.

[0003] During use of the existing diffusion furnace, the diffusion gas enters from the middle position of the rear end of the furnace body and then gradually diffuses in the furnace body. However, when the diffusion gas enters the furnace body in this way, not only is the diffusion speed limited, but it also often leads to different diffusion gas concentrations in various parts of the furnace body. The diffusion gas concentration at the rear end of the furnace body is significantly higher than that in the gas part, which makes the reaction speed of the silicon wafers at the rear end of the furnace body higher than that in other parts, which easily leads to different quality of the silicon wafers in the furnace, thereby affecting the yield rate of the product. In this regard, the present application specifically proposes a diffusion furnace with uniform diffusion and high efficiency. Utility Model Content

[0004] In view of the above situation, in order to overcome the defects of the prior art, the present invention provides a diffusion furnace with uniform diffusion and high efficiency, and the technical solution to the problem is as follows: it includes a furnace body, characterized in that one end of the furnace body is coaxially fixedly connected to an air inlet pipe, the outlet end of the air inlet pipe is integrally connected to the inlet end of a three-way pipe, the outlet end of the three-way pipe is fixedly connected to a diffusion pipe, each of the diffusion pipes is respectively provided with a number of evenly distributed diffusion holes, a power device is arranged at one end of the furnace body, the inner wall of the diffusion furnace is coaxially fixedly connected to a support plate, the support plate is fixedly connected to two guide rods arranged symmetrically about its axis, and the two guide rods are commonly fixedly connected to a support rod The gear train is connected with the gear of the driven gear of the gear wheel, and the gear train is connected with the gear of the driven gear of the gear wheel.

[0005] Preferably, the power device includes a bracket fixedly connected to one end of the furnace body, the bracket is fixedly connected to a motor, the furnace body is rotatably connected to a driving shaft, one end of the driving shaft is coaxially fixedly connected to a driving gear meshing with a driven gear, and the other end of the driving shaft is fixedly connected to the output end of the motor.

[0006] Preferably, the two guide rods are arranged symmetrically about the reciprocating screw.

[0007] The beneficial effects of the utility model are:

[0008] When the present application is in use, the diffusion gas enters the diffusion tube through the air inlet pipe and the tee pipe, and then diffuses in the furnace body through the diffusion hole. Furthermore, in order to improve the diffusion efficiency and the uniformity of the diffusion, a power device and impeller and other components are provided. When the motor of the power device is started, the power of the motor will be transmitted to the reciprocating screw through the cooperation of the driving gear and the driven gear, so that the reciprocating screw rotates. The rotation of the reciprocating screw will drive the movable shaft to move back and forth along the guide rod. During the reciprocating movement of the movable shaft, the impeller connected to the movable shaft will also rotate under the action of the diffusion gear and the diffusion rack. Then, the impeller rotates around the movable shaft while moving in the furnace body along with the movable shaft. Then, the impeller can uniformly disturb the diffusion gas diffused from the diffusion hole, so that the diffusion gas diffuses evenly and efficiently in the furnace body. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 This is a three-dimensional sectional view of the utility model from the first perspective.

[0010] Figure 2 It is an enlarged view of area A in the first perspective stereoscopic sectional view of the present invention.

[0011] Figure 3 It is an enlarged view of area B in the first perspective stereoscopic sectional view of the present invention.

[0012] Figure 4 This is a partial three-dimensional cross-sectional view of the utility model from a second viewing angle.

[0013] Figure 5 This is a three-dimensional view from the third perspective of the present invention.

[0014] Figure 6 This is a partial stereoscopic view from the fourth perspective of the present invention.

[0015] Reference numerals

[0016] 1. Furnace body, 2. Air inlet pipe, 3. T-tube, 4. Diffuser, 5. Diffuser hole, 6. Power unit, 7. Support plate, 8. Guide rod, 9. Support rod, 10. Reciprocating screw, 11. Driven gear, 12. Moving shaft, 13. Screw sleeve, 14. Sliding sleeve, 15. Impeller, 16. Diffuser gear, 17. Diffuser rack, 18. Bracket, 19. Motor, 20. Driving shaft, 21. Driving gear. DETAILED DESCRIPTION

[0017] The following is combined with Figure 1-6 The specific implementation methods of the present invention are further described in detail.

[0018] Embodiment 1, its technical solution is that, when the present application is in use, the diffusion gas enters the diffusion pipe 4 through the air inlet pipe 2 and the tee pipe 3, and then diffuses in the furnace body 1 through the diffusion hole 5. Furthermore, in order to improve the diffusion efficiency and the uniformity of diffusion, a power device 6 and an impeller 15 and other components are provided. When the motor 19 of the power device 6 is started, the power of the motor 19 will be transmitted to the reciprocating screw 10 through the cooperation of the driving gear 21 and the driven gear 11, so that the reciprocating screw 10 rotates. The rotation of the reciprocating screw 10 will drive the movable shaft 12 to reciprocate along the guide rod 8. During the reciprocating movement of the movable shaft 12, the impeller 15 connected to the movable shaft 12 will also rotate under the action of the diffusion gear 16 and the diffusion rack 17. Then, the impeller 15 rotates around the movable shaft 12 while moving with the movable shaft 12 in the furnace body 1. Then, the impeller 15 can uniformly disturb the diffusion gas diffused from the diffusion hole 5, so that the diffusion gas is evenly and efficiently diffused in the furnace body 1.

[0019] Example 2, based on Example 1, specifically, when the present application is in use, the diffusion gas enters from the air inlet pipe 2, and then enters the diffusion pipe 4 through the tee pipe 3, and diffuses into the interior of the furnace body 1 from the diffusion hole 5 on the diffusion pipe 4. When the diffusion gas enters the furnace body 1, the motor 19 on the bracket 18 should be started. The output end of the motor 19 will drive the driving shaft 20 to rotate accordingly. The rotation of the driving shaft 20 will drive the driving gear 21 through the driving gear 21, thereby causing the driving gear 21 to rotate synchronously with the reciprocating screw 10. The reciprocating screw 10 is rotatably installed between the support rod 9 and the support plate 7. The process of the reciprocating screw 10 rotating The movable shaft 12 will be driven by the screw sleeve 13, and the movable shaft 12 will be restricted by the sliding connection between the sleeve 14 and the guide rod 8. Then, under the action of the rotating reciprocating screw 10, the movable shaft 12 will reciprocate along the length direction of the guide rod 8. During the reciprocating movement of the movable shaft 12, the impeller 15 will also reciprocate synchronously. During the reciprocating movement of the impeller 15, the diffusion gear 16 will also interact with the diffusion rack 17, so that the impeller 15 rotates around the movable shaft 12. The rotating impeller 15 will disturb the diffusion gas diffused from the diffusion hole 5, so that the diffusion gas is evenly and efficiently dispersed in the furnace body 1.

Claims

1. A diffusion furnace with uniform and efficient diffusion, comprising a furnace body (1), characterized in that: One end of the furnace body (1) is coaxially fixedly connected to an air inlet pipe (2), the outlet end of the air inlet pipe (2) is integrally connected to the inlet end of a three-way pipe (3), the outlet end of the three-way pipe (3) is fixedly connected to a diffusion pipe (4), and each of the diffusion pipes (4) is provided with a plurality of evenly distributed diffusion holes (5). One end of the furnace body (1) is provided with a power device (6), the inner wall of the diffusion furnace is coaxially fixedly connected to a support plate (7), the support plate (7) is fixedly connected to two guide rods (8) symmetrically arranged about its axis, the two guide rods (8) are commonly fixedly connected to a support rod (9), the support rod (9) and the support plate (7) are rotatably connected to a reciprocating screw (10), the upper end of the reciprocating screw (10) passes through the support rod (9) and is coaxially fixedly connected to the support rod (9). A driven gear (11) is connected, and the driven gear (11) is meshed with the power device (6). A moving shaft (12) is arranged between the two guide rods (8). A screw sleeve (13) threadedly connected to the reciprocating screw (10) is arranged in an integrated manner in the middle of the moving shaft (12). Slide sleeves (14) slidably connected to the guide rod (8) on the corresponding side are arranged in an integrated manner at both ends of the support rod (9). The moving shaft (12) is rotatably connected to two impellers (15) symmetrically arranged about the reciprocating screw (10). Each impeller (15) is coaxially fixedly connected to a diffusion gear (16). The support rod (9) and the support plate (7) are fixedly connected to a diffusion rack (17). The diffusion gear (16) and the diffusion rack (17) are meshed one-to-one.

2. A diffusion furnace with uniform and high efficiency according to claim 1, characterized in that: The power device (6) comprises a bracket (18) fixedly connected to one end of the furnace body (1), the bracket (18) being fixedly connected to a motor (19), the furnace body (1) being rotatably connected to a driving shaft (20), one end of the driving shaft (20) being coaxially fixedly connected to a driving gear (21) meshing with a driven gear (11), and the other end of the driving shaft (20) being fixedly connected to an output end of the motor (19).

3. A diffusion furnace with uniform and high efficiency according to claim 1, characterized in that: The two guide rods (8) are symmetrically arranged with respect to the reciprocating screw (10).

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