System modularization vacuum leak detection system

Abstract

The utility model discloses a system modularization vacuum leak detection system, relates to helium leak detection equipment technical field, and comprises a vacuum module and a detection module, the detection module comprises a helium detector, a helium pumping and injecting pump set and an air pumping and injecting system, the helium detector is connected with the vacuum module, the helium pumping and injecting pump set is connected with the vacuum module, and the air pumping and injecting system is connected with the vacuum module. The vacuum module is connected with a helium pumping and injecting pump set and an air pumping and injecting system through a detachable first pipeline unit, and the helium pumping and injecting pump set is connected with a helium storage tank and a helium recycling tank through a detachable second pipeline unit. According to the utility model, through the combined arrangement of the first pipeline unit and the second pipeline unit, the vacuum module and the detection module can form a passage, and the helium pumping and injecting pump set and the air pumping and injecting system in the detection module are connected. The vacuum leak detection system has the advantages that all devices in the detection module can be independently replaced if the devices need to be replaced, normal use of the remaining devices in the detection module is not affected, the vacuum leak detection system is fast and convenient to replace, and the vacuum leak detection system can be fast suitable for workpieces of different models and types.

Description

Technical Field

[0001] The utility model relates to the technical field of helium leak detection equipment, in particular to a system modular vacuum leak detection system. Background Art

[0002] Vacuum box leak detection is a commonly used vacuum leak detection method. After the workpiece and the vacuum box outside the workpiece are evacuated, a certain amount of helium (or mixed gas) is filled into the workpiece. At this time, the vacuum box is connected to the leak detector. If there is a leak in the workpiece, the helium leaking into the vacuum box will be detected.

[0003] The widely used vacuum chamber helium leak detection system primarily consists of a vacuum chamber, a vacuum pump, a helium cylinder, and a helium mass spectrometer. The vacuum chamber houses the item being inspected, the vacuum pump evacuates the interior, the helium cylinder stores the helium, and the helium mass spectrometer detects leaks within the workpiece. When helium from the workpiece leaks into the vacuum chamber, it is first ionized at the ion source, generating ions. These ions are then accelerated and introduced into a magnetic field, forming distinct mass spectra. By analyzing these mass spectra, the helium mass spectrometer can determine the type and concentration of the substance being inspected, thereby determining whether the workpiece is leaking.

[0004] Existing vacuum helium leak detection systems require adaptive replacement of equipment in the system when performing detection operations on workpieces of different models and types. During the equipment replacement process, based on the different types of equipment, most of the other equipment connected to the original equipment through the air pipeline also needs to be adaptively replaced. The replacement process is time-consuming, which affects the working efficiency of the vacuum helium leak detection system when applied to workpieces of different models and types. Utility Model Content

[0005] In response to the above problems, the present application provides a modular vacuum leak detection system.

[0006] To achieve the above-mentioned objectives, the present application provides the following technical solutions: a modular vacuum leak detection system, comprising a vacuum module and a detection module, wherein the detection module comprises a helium detector, a helium extraction pump group and an air extraction system, wherein the helium detector is connected to the vacuum module, and the vacuum module is connected to the helium extraction pump group and the air extraction system through a detachable first pipe unit, and the helium extraction pump group is connected to a helium storage tank and a helium recovery tank through a detachable second pipe unit.

[0007] Furthermore, the vacuum module includes a plurality of accommodating boxes distributed in parallel, the top ends of the accommodating boxes are connected to box covers via hinges, and a movable cylinder is provided outside the accommodating boxes, the output end of the cylinder is connected to the box cover, and the accommodating boxes are provided with air inlets and helium inlets that can be connected to the pipelines.

[0008] Furthermore, the first pipeline unit includes an air extraction hose provided on the air inlet and outlet and a helium extraction hose provided on the helium inlet and outlet. The multiple air extraction hoses are connected to the same air extraction main pipe, and the helium extraction hose is connected to the helium extraction pump group. The air and helium required during the detection operation flow into and out of the accommodating box through the air extraction hose and the helium extraction hose respectively.

[0009] Furthermore, the air extraction system includes a positive and negative pressure switching pump connected to the air extraction main pipe, and a shunt pipe is provided on the positive and negative pressure switching pump. The other interface end of the shunt pipe is connected to an air compressor group, and the air is circulated in the air extraction hose, the air extraction main pipe and the positive and negative pressure switching pump.

[0010] Furthermore, the second pipeline unit includes a helium recovery main pipe and a helium injection main pipe provided on the helium extraction pump group, the outlet end of the helium recovery main pipe is connected to the helium recovery tank, and the inlet end of the helium injection main pipe is connected to the helium storage tank.

[0011] In summary, the technical effects and advantages of the utility model are:

[0012] The utility model, through the combination of the first and second pipe units, forms a passageway between the vacuum module and the detection module, connecting the helium extraction pump assembly and the air extraction system in the detection module. Because the first and second pipe units are independently removable and controllable pipes, if individual devices in the detection module need to be replaced, they can be replaced individually without affecting the normal use of the remaining devices in the detection module. This has the advantage of fast and portable replacement, allowing the vacuum leak detection system to quickly adapt to different models and types of workpieces. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative work.

[0014] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model.

[0015] Figure 2 This is a schematic diagram of the distribution structure of the first pipeline unit and the second pipeline unit of the utility model.

[0016] Figure 3 This is a schematic diagram of the connection between the first pipeline unit, the second pipeline unit and the vacuum box of the utility model.

[0017] Figure 4 This is a schematic diagram of the structure of the air extraction and injection system of the utility model.

[0018] Figure 5 This is a schematic diagram of the structure of the helium storage tank and helium recovery tank of the utility model.

[0019] Figure 6 This is a schematic diagram of the vacuum module structure of the present utility model.

[0020] In the figure: 1. Container body; 11. Cylinder; 12. Box cover; 13. Air inlet and outlet; 14. Helium inlet and outlet; 2. Air extraction hose; 21. Air extraction main pipe; 22. Positive and negative pressure switching pump; 23. Diverter pipe; 24. Air compressor unit; 3. Helium extraction hose; 31. Helium extraction pump unit; 32. Helium recovery main pipe; 33. Helium storage tank; 34. Helium recovery tank; 35. Helium injection main pipe; 4. Helium detector. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0022] Example: Reference Figure 1-6 The illustrated modular vacuum leak detection system includes a vacuum module and a detection module. The vacuum module is used to accommodate the workpiece to be inspected. When the detection module is in operation, it provides a vacuum detection environment suitable for the workpiece and can inject helium into the workpiece to detect whether there are any leaks. Specifically, the detection module includes a helium detector 4, a helium extraction pump group 31, and an air extraction system. The helium detector 4 is connected to the vacuum module and can determine whether the helium-filled workpiece has leaks. The helium extraction pump group 31 and the air extraction system can input and extract helium and oxygen into and out of the vacuum module to create a standard detection environment.

[0023] In order to connect the vacuum module with the helium extraction pump group 31 and the air extraction system to ensure the smooth operation of each module, the vacuum module is connected to the helium extraction pump group 31 and the air extraction system through a detachable first pipe unit, and the helium extraction pump group 31 is connected to the helium storage tank 33 and the helium recovery tank 34 through a detachable second pipe unit.

[0024] The arrangement of the first pipeline unit and the second pipeline unit can form a passage between the vacuum module and the detection module, connecting the helium extraction pump group 31 in the detection module and the air extraction system, so that the helium and air required for the detection work can flow smoothly.

[0025] Since the first pipeline unit and the second pipeline unit are both detachable pipelines and can be controlled separately, if the helium extraction pump group 31 and the air extraction system need to be replaced, they can be replaced separately without affecting the normal use of the remaining equipment in the detection module, which has the advantage of portable replacement.

[0026] Specifically, the vacuum module includes multiple parallel container boxes 1, each hingedly connected to a lid 12 at its top. A movable cylinder 11 is installed on the outside of the container box 1, with the output end of the cylinder 11 connected to the lid 12. When the workpiece to be inspected is placed inside the container box 1, the operating force of the cylinder 11 closes the lid 12 and the container box 1, maintaining the sealed state inside the container 1. To enable the installation of pipelines on the container box 1, the container box 1 is provided with an air inlet and outlet 13 and a helium inlet and outlet 14 that can connect to the pipelines.

[0027] The first pipeline unit includes an air extraction hose 2 provided on the air inlet and outlet 13 and a helium extraction hose 3 provided on the helium inlet and outlet 14. Multiple air extraction hoses 2 are connected to the same air extraction main pipe 21, and the helium extraction hose 3 is connected to the helium extraction pump group 31. Specifically, during the detection operation, it is first necessary to extract the air inside the accommodating box 1 to maintain the vacuum degree inside the accommodating box 1, and then flush helium into the workpiece. The helium detector 4 can monitor whether there is a leakage of helium inside the workpiece. If helium leaks into the accommodating box 1, it means that there is a leakage point in the workpiece, which does not meet the sealing requirements in the workpiece production standard.

[0028] After the inspection is completed, the helium inside the workpiece needs to be recovered, and at the same time, the interior of the container body 1 needs to be refilled with air to ensure that the box cover 12 can be opened smoothly. Under the connection of the air extraction hose 2, the air extraction main pipe 21 and the helium extraction hose 3, the air and helium required for the inspection process flow into and out of the interior of the container body 1 through the air extraction hose 2 and the helium extraction hose 3 respectively.

[0029] The air extraction system includes a positive and negative pressure switching pump 22 connected to the air extraction main pipe 21. A diverter pipe 23 is provided on the positive and negative pressure switching pump 22. The other interface end of the diverter pipe 23 is connected to an air compressor unit 24. The air compressor unit 24 can be connected to air recovery equipment and air supply equipment. Under the operating force of the positive and negative pressure switching pump 22 and the air compressor unit 24, the air can flow through the diverter pipe 23, the air extraction main pipe 21 and the air extraction hose 2 until the air is extracted and injected into the interior of the accommodating box 1.

[0030] The second pipeline unit includes a helium recovery manifold 32 and a helium injection manifold 35, which are provided on the helium extraction and injection pump assembly 31. The outlet end of the helium recovery manifold 32 is connected to the helium recovery tank 34, and the inlet end of the helium injection manifold 35 is connected to the helium storage tank 33. During the process of filling the interior of the workpiece with helium, the operating force of the helium extraction and injection pump assembly 31 can transfer helium from the interior of the helium storage tank 33 to the interior of the workpiece until the helium filling operation is completed. After the inspection operation is completed, the operating force of the helium extraction and injection pump assembly 31 can cause the helium located inside the workpiece to be extracted into the interior of the helium recovery tank 34, completing the helium recovery operation.

[0031] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A modular vacuum leak detection system, characterized by: The invention comprises a vacuum module and a detection module, wherein the detection module comprises a helium detector (4), a helium extraction pump group (31) and an air extraction system, wherein the helium detector (4) is connected to the vacuum module, the vacuum module is connected to the helium extraction pump group (31) and the air extraction system via a detachable first pipeline unit, and the helium extraction pump group (31) is connected to a helium storage tank (33) and a helium recovery tank (34) via a detachable second pipeline unit.

2. The modular vacuum leak detection system according to claim 1, characterized in that: The vacuum module comprises a plurality of accommodating boxes (1) distributed in parallel, the top ends of the accommodating boxes (1) are connected to box covers (12) via hinges, and a movable cylinder (11) is provided outside the accommodating boxes (1), the output end of the cylinder (11) is connected to the box cover (12), and the accommodating boxes (1) are provided with air inlets and outlets (13) and helium inlets and outlets (14) that can be connected to pipelines.

3. The modular vacuum leak detection system according to claim 1, characterized in that: The first pipeline unit includes an air extraction hose (2) provided on the air inlet and outlet (13) and a helium extraction hose (3) provided on the helium inlet and outlet (14); a plurality of the air extraction hoses (2) are connected to the same air extraction main pipe (21); the helium extraction hose (3) is connected to a helium extraction pump group (31); and the air and helium required during the detection operation flow into and out of the interior of the accommodating box (1) through the air extraction hose (2) and the helium extraction hose (3), respectively.

4. The modular vacuum leak detection system according to claim 3, characterized in that: The air extraction system comprises a positive and negative pressure switching pump (22) connected to an air extraction main pipe (21); a shunt pipe (23) is provided on the positive and negative pressure switching pump (22); the other interface end of the shunt pipe (23) is connected to an air compressor unit (24); and air is circulated in the air extraction hose (2), the air extraction main pipe (21) and the positive and negative pressure switching pump (22).

5. The modular vacuum leak detection system according to claim 1, characterized in that: The second pipeline unit comprises a helium recovery main pipe (32) and a helium injection main pipe (35) provided on the helium extraction pump group (31); the outlet end of the helium recovery main pipe (32) is connected to the helium recovery tank (34), and the inlet end of the helium injection main pipe (35) is connected to the helium storage tank (33).

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