Probe card protective cover alarm device

Abstract

The utility model provides a probe card protective cover alarm device. The probe card protection cover alarm device is arranged in a probe card structure, and the probe card structure comprises a circuit board, a probe head arranged on the surface of the circuit board, and a probe card protection cover which is arranged on the surface of the circuit board and covers the probe head. The device comprises a light-emitting element which is arranged on the surface of a circuit board in an area covered by a probe card protective cover; the reflective layer is arranged on one side, facing the probe head, of the probe card protection cover; the light receiving element is arranged on the surface of the circuit board in the area covered by the probe card protective cover, the light receiving element and the light emitting element are arranged on the two sides of the probe head respectively, and when the probe card structure is installed in a probe table and electrically connected with a test machine table, the light emitting element and the light receiving element can be electrically connected to a power supply port of the test machine table; an alarm electrically connected to the light receiving element; the device can give an alarm when the probe card protection cover is detected to be missed to be disassembled after the probe card structure is installed in a probe station and electrically connected with a test machine.

Description

Technical Field

[0001] The utility model relates to the field of semiconductors, in particular to an alarm device for a probe card protective cover. Background Art

[0002] During the wafer production process, a test device is required to inspect the wafer quality using a probe card. Probe cards typically use a plastic protective cover that covers the needle area on the front of the probe card to prevent damage to the needle during storage or transportation. During the wafer inspection process, if the protective cover is not removed, the wafer will directly hit the protective cover, causing damage to the wafer and even the probe card.

[0003] Therefore, how to avoid the damage to the wafer caused by the failure to remove the probe card protective cover is a problem that needs to be solved at present. Summary of the Invention

[0004] The technical problem to be solved by the utility model is how to prevent the wafer from being damaged due to the failure to remove the protective cover of the probe card, and provides an alarm device for the protective cover of the probe card.

[0005] In order to solve the above problems, the present invention provides a probe card protective cover alarm device, which is arranged in a probe card structure, and the probe card structure includes: a circuit board, a needle head arranged on the surface of the circuit board, and a probe card protective cover arranged on the surface of the circuit board and covering the needle head; the device includes: a light-emitting element, which is arranged on the surface of the circuit board in the area covered by the probe card protective cover, and when the probe card structure is installed in a probe station and electrically connected to a test machine, the light-emitting element can be electrically connected to the power supply port of the test machine to emit outgoing light; a reflective layer, which is arranged on the side of the probe card protective cover facing the needle head, and is used to receive and reflect the outgoing light; a light receiving element A component is arranged on the surface of the circuit board in the area covered by the probe card protective cover, and when the probe card structure is installed in the probe station and electrically connected to the test machine, the light receiving element can be electrically connected to the power supply port of the test machine to receive the outgoing light reflected by the reflective layer, and the light receiving element and the light emitting element are respectively arranged on both sides of the needle head; an alarm is electrically connected to the light receiving element, and the alarm can sound an alarm when the light receiving element receives the outgoing light reflected by the reflective layer; the probe card protective cover alarm device can sound an alarm when it is detected that the probe card protective cover is not removed after the probe card structure is installed in the probe station and electrically connected to the test machine.

[0006] In some embodiments, the output light is invisible light.

[0007] In some embodiments, the invisible light is infrared light.

[0008] In some embodiments, the light emitting element is an infrared emitting tube.

[0009] In some embodiments, the light receiving element is an infrared receiving tube.

[0010] In some embodiments, when the probe card structure is installed in a probe station and electrically connected to a test machine, one end of the light emitting element is electrically connected to a power supply port of the test machine, and the other end is electrically connected to a ground terminal on the circuit board.

[0011] In some embodiments, when the probe card structure is installed in a probe station and electrically connected to a test machine, one end of the light receiving element is electrically connected to a power supply port of the test machine, and the other end is electrically connected to the ground terminal on the circuit board through the alarm.

[0012] In some embodiments, the alarm is a buzzer, the positive electrode of the buzzer is electrically connected to the light receiving element, and the negative electrode of the buzzer is electrically connected to the ground terminal on the circuit board.

[0013] In some embodiments, the buzzer is a piezoelectric ceramic buzzer.

[0014] In some embodiments, the reflective layer is a reflective sticker or a reflective coating attached to a side of the probe card protective cover facing the needle.

[0015] The above technical solution electrically connects the light-emitting element and the light-receiving element to the power supply port of the probe card, so that the probe card protective cover alarm device only works when the probe card structure is powered on, automatically detects whether the probe card protective cover is not removed and issues an alarm, without the need for additional operations. It can effectively detect whether the probe card protective cover is removed when the probe card is working, and the alarm system does not work during normal storage. The probe card protective cover alarm device only adds some small components to the original probe card structure, without the need to modify the probe card structure itself, and does not increase the difficulty of designing and manufacturing the probe card structure. A buzzer is used for automatic alarm. If the probe card protective cover is not removed, the buzzer will work and start to alarm, reminding the on-site engineer or technician to check whether the probe card protective cover is removed normally. This solves the problem of the probe card hitting the needle due to the failure to remove the probe card protective cover due to operational errors during use, causing damage to the probe card and wafer.

[0016] It should be understood that the above general description and the detailed description below are merely exemplary and explanatory and do not limit the present invention. Technologies, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such technologies, methods, and devices should be considered part of the specification. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions in the specific embodiments of the present invention, the following is a brief introduction to the drawings required for the description of the specific embodiments. Obviously, the drawings described below are only some specific embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without inventive work.

[0018] Figure 1 A schematic diagram of the structure of a probe card.

[0019] Figure 2 Schematic diagram of the probe card structure installed into the probe station.

[0020] Figure 3 Schematic diagram of the probe station alignment procedure when the probe card protective cover is removed.

[0021] Figure 4 This is a schematic diagram of the probe station alignment procedure when the probe card protective cover is not removed.

[0022] Figure 5 It is a structural schematic diagram of an embodiment of the probe card protection cover alarm device of the present invention.

[0023] Figure 6 This is an equivalent circuit diagram of an embodiment of the probe card protection cover alarm device of the present invention. DETAILED DESCRIPTION

[0024] The following is a clear and complete description of the technical solutions in the embodiments of the present invention, with reference to the accompanying drawings. Obviously, the described embodiments are only a portion of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments derived by those skilled in the art without inventive effort are within the scope of protection of the present invention.

[0025] See also Figure 1 , which is a schematic diagram of the structure of a probe card. Figure 1 As shown, the probe card structure 10 includes a probe card holder 11, a circuit board (PCB) 12, a probe head 13, and a probe card protective cover 14. The PCB 12 is mounted on the surface of the probe holder 11, the probe head 13 is mounted on the PCB 12, and the probe card protective cover 14 is mounted on the PCB 12 and covers the probe head 13. The probe card protective cover 14 is typically made of plastic and covers the probe head 13 to prevent damage during storage or transportation.

[0026] See also Figure 2 , which is a schematic diagram of the structure of the probe card installed in the probe station. Figure 2 As shown, during normal use, the probe card protective cover 14 must be removed first, and then the probe card structure 10 must be installed into the probe station 22 with its back facing upwards. The test head 23 is then pressed in to complete the installation of the probe card structure 10. Throughout this process, the probe card structure 10 remains facing upwards, making it impossible to visually confirm whether the probe card protective cover 14 has been removed properly.

[0027] See also Figures 3 and 4 ,in, Figure 3 Schematic diagram of the probe station alignment procedure when the probe card protective cover is removed; Figure 4 This is a schematic diagram of the probe station alignment procedure when the probe card protective cover is not removed. Figure 3 As shown, when the automatic needle alignment program of the probe station 22 is subsequently started, the wafer stage 221 in the probe station 22 will move and approach the probe card structure 10, and the camera 222 on the wafer stage 221 will check whether there are abnormal phenomena such as needle bending or foreign matter contamination on the needle head 13. Figure 4 As shown, if the probe card protective cover 14 is missed, due to the focusing height of the camera 222, the camera 222 and the wafer 223 will directly collide with the probe card protective cover 14, causing damage to the wafer 223, the camera 222 and even the probe card structure 10.

[0028] In order to solve the problem of missing the probe card protective cover causing damage to the wafer and probe card structure, the utility model provides a probe card protective cover alarm device, which realizes the automatic alarm function of missing the probe card protective cover. Figures 5 and 6 ,in, Figure 5 This is a structural diagram of an embodiment of the probe card protection cover alarm device of the present invention; Figure 6 This is an equivalent circuit diagram of an embodiment of the probe card protection cover alarm device of the present invention. Figures 5 and 6As shown, the probe card protective cover alarm device is arranged in the probe card structure 50, and the probe card structure 50 includes: a circuit board 502, a needle head 503 arranged on the surface of the circuit board 502, and a probe card protective cover 501 arranged on the surface of the circuit board 502 and covering the needle head 503; the probe card protective cover alarm device includes: a light-emitting element 51, a reflective layer 52, a light-receiving element 53, and an alarm 54. The light-emitting element 51 is arranged on the surface of the circuit board 502 in the area covered by the probe card protective cover 501, and when the probe card structure 50 is installed in the probe station and electrically connected to the test machine, the light-emitting element 51 can be electrically connected to the power supply port 61 of the test machine to emit outgoing light. The reflective layer 52 is arranged on the side of the probe card protective cover 501 facing the needle head 503, for receiving and reflecting the outgoing light. The light receiving element 53 is arranged on the surface of the circuit board 502 in the area covered by the probe card protective cover 501, and when the probe card structure 50 is installed in the probe station and electrically connected to the test machine, the light receiving element 53 can be electrically connected to the power supply port 61 of the test machine to receive the outgoing light reflected by the reflective layer 52. The light receiving element 53 and the light emitting element 51 are respectively arranged on both sides of the needle head 503. The alarm 54 is electrically connected to the light receiving element 53, and the alarm 54 can sound an alarm when the light receiving element 53 receives the outgoing light reflected by the reflective layer 52. The probe card protective cover alarm device can sound an alarm when it detects that the probe card protective cover 501 has not been removed after the probe card structure 50 is installed in the probe station and electrically connected to the test machine.

[0029] In the above technical solution, the light emitting element and the light receiving element are electrically connected to the power supply port of the test machine only when the probe card structure is installed in the probe station and electrically connected to the test machine, so that the probe card protective cover alarm device only works when the probe card structure is installed in the probe station and electrically connected to the test machine, automatically detects whether the probe card protective cover is not removed and issues an alarm, without the need for additional operation, and can effectively detect whether the probe card protective cover is removed when the probe card is working, and the probe card protective cover alarm device does not work when the probe card structure is not installed in the probe station and electrically connected to the test machine; and the probe card protective cover alarm device only adds some small components to the original probe card structure, without the need to modify the probe card structure itself, and does not increase the design and manufacturing difficulty of the probe card structure; an alarm is used to automatically alarm, and when the probe card protective cover is not removed, the alarm works and starts to alarm, reminding the on-site engineer or technician to check whether the probe card protective cover is removed normally. This solves the problem of the probe card hitting the needle due to operational errors during use, which causes damage to the needle card and wafer.

[0030] In some embodiments, the output light is invisible light.

[0031] In some embodiments, the invisible light is infrared light.

[0032] In some embodiments, the light emitting element 51 is an infrared emitting tube.

[0033] In some embodiments, the light receiving element 53 is an infrared receiving tube.

[0034] When the probe card structure is installed in the probe station and electrically connected to the test machine, after the light emitting element and the light receiving element are electrically connected to the power supply port of the test machine, if the probe card protective cover 501 is not removed, the signal emitted by the infrared emitting tube will be reflected back by the reflective layer 52 on the probe card protective cover 501, captured by the infrared receiving tube, and the alarm is turned on; this can ensure that the probe card protective cover alarm device will only turn on the alarm when the probe card protective cover 501 is not removed and the probe card structure 50 is installed on the probe station and connected to the test machine. This solves the problem that the probe card structure 50 fails to remove the probe card protective cover 501 due to operational errors during use, resulting in a collision with the needle and damage to the needle card and wafer. At the same time, since visible light has relatively little interference with the infrared emitting tube and the infrared receiving tube, the use of the infrared emitting tube and the infrared receiving tube can prevent the interference of light generated during the internal self-test or other functions of the probe station and introduced from the outside on the alarm system.

[0035] In some embodiments, when the probe card structure 50 is installed in a probe station and electrically connected to a test machine, one end of the light-emitting element 51 is electrically connected to the power supply port 61 of the test machine, and the other end is electrically connected to the ground terminal GND on the circuit board. The light-emitting element 51 forms a pathway only when the probe card structure 50 is installed in the probe station and electrically connected to the test machine, so that the probe card protective cover alarm device only works when the probe card structure 50 is installed in the probe station and electrically connected to the test machine; when the probe card structure 50 is not installed in the probe station and electrically connected to the test machine, the probe card protective cover alarm device does not work.

[0036] In some embodiments, when the probe card structure 50 is installed in a probe station and electrically connected to a test machine, one end of the light receiving element 53 is electrically connected to the power supply port 61 of the test machine, and the other end is electrically connected to the ground terminal GND on the circuit board 502 through the alarm 54. The light receiving element 53 forms a pathway only when the probe card structure 50 is installed in the probe station and electrically connected to the test machine, so that the probe card protective cover alarm device only operates when the probe card structure 50 is installed in the probe station and electrically connected to the test machine; when the probe card structure 50 is not installed in the probe station and electrically connected to the test machine, the probe card protective cover alarm device does not operate.

[0037] In some embodiments, the alarm 54 is a buzzer, the positive electrode of the buzzer is electrically connected to the light receiving element 53, and the negative electrode of the buzzer is electrically connected to the ground terminal GND on the circuit board.

[0038] In some embodiments, the buzzer 54 is a piezoelectric ceramic buzzer that automatically alarms when the probe card protective cover 501 is not removed. The buzzer 54 operates and starts an alarm to remind the on-site engineer or technician to check whether the probe card protective cover 501 is properly removed.

[0039] In some embodiments, the reflective layer 52 is a reflective sticker or reflective coating attached to the side of the probe card protective cover 501 facing the needle 503. If the probe card protective cover 501 is removed, the light emitted by the light emitting element 51 cannot reach the surface of the light receiving element 53, and the alarm 54 will not sound.

[0040] The probe card protective cover alarm device proposed in the present invention will not have much impact on the structure, processing and practical functions of the probe card structure 50. By adding the buzzer 54, which is a simple and low-cost solution, the self-check alarm function of the probe card protective cover 501 that is not removed after the probe card structure 50 is connected to the machine is completed. And the probe card protective cover alarm device will only trigger the alarm when the probe card structure 50 is in use (installed on the probe station and connected to the test machine) and the probe card protective cover 501 is not removed, so as to remind the on-site personnel that the probe card protective cover 501 is still in the installed state.

[0041] It should be noted that references in the specification to "one embodiment," "an embodiment," "an exemplary embodiment," "some embodiments," etc. indicate that the described embodiment may include a particular feature, structure, or characteristic, but every embodiment may not necessarily include the particular feature, structure, or characteristic. Moreover, such phrases do not necessarily refer to the same embodiment. In addition, when a particular feature, structure, or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the relevant art to implement such feature, structure, or characteristic in conjunction with other embodiments, whether or not explicitly described.

[0042] Typically, a term can be understood at least in part from its usage in the context. For example, the term "one or more" as used herein depends at least in part on the context and can be used to describe any feature, structure or characteristic in a singular sense, or can be used to describe a feature, structure or combination of features in a plural sense. Similarly, depending at least in part on the context, terms such as "one", "a" or "the" can also be understood to express singular usage or to express plural usage. In addition, the term "based on" can be understood as not necessarily intended to express an exclusive set of factors, but can alternatively, also depending at least in part on the context, allow for the presence of other factors that are not necessarily explicitly described. It should also be noted in this specification that "connected / coupled" refers not only to the direct coupling of one component to another component, but also to the indirect coupling of one component to another component through an intermediate component.

[0043] It should be noted that the terms "including" and "having" and their variations involved in the documents of the present invention are intended to cover non-exclusive inclusions. The terms "first", "second", etc. are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. Unless the context clearly indicates otherwise, it should be understood that the data used in this way can be interchanged under appropriate circumstances. In addition, the embodiments of the present invention and the features in the embodiments can be combined with each other unless there is a conflict. In addition, in the above description, the description of well-known components and technologies has been omitted to avoid unnecessary confusion of the concepts of the present invention. In the above embodiments, each embodiment focuses on the differences from other embodiments, and the same / similar parts between the embodiments can be referred to each other.

[0044] The above is only a preferred embodiment of the present invention. It should be pointed out that ordinary technicians in this technical field can make several improvements and modifications without departing from the principles of the present invention. These improvements and modifications should also be regarded as within the scope of protection of the present invention.

Claims

1. A probe card protective cover alarm device, disposed in a probe card structure, the probe card structure comprising: A circuit board, a probe head disposed on a surface of the circuit board, and a probe card protective cover disposed on the surface of the circuit board and covering the probe head; wherein the device comprises: a light-emitting element disposed on the surface of the circuit board in the area covered by the probe card protective cover, and when the probe card structure is installed in a probe station and electrically connected to a test machine, the light-emitting element can be electrically connected to a power supply port of the test machine to emit light; a reflective layer, disposed on a side of the probe card protective cover facing the needle head, for receiving and reflecting the emitted light; a light receiving element disposed on the surface of the circuit board in the area covered by the probe card protective cover, and when the probe card structure is installed in a probe station and electrically connected to a test machine, the light receiving element can be electrically connected to a power supply port of the test machine to receive the outgoing light reflected by the reflective layer, the light receiving element and the light emitting element being respectively disposed on both sides of the needle head; an alarm, electrically connected to the light receiving element, the alarm being capable of sounding an alarm when the light receiving element receives the outgoing light reflected by the light reflecting layer; The probe card protection cover alarm device can issue an alarm when it detects that the probe card protection cover is not removed after the probe card structure is installed in the probe station and electrically connected to the test machine.

2. The probe card protective cover alarm device according to claim 1, wherein: The emitted light is invisible light.

3. The probe card protective cover alarm device according to claim 2, wherein: The invisible light is infrared light.

4. The probe card protective cover alarm device according to claim 1, wherein: The light emitting element is an infrared emitting tube.

5. The probe card protective cover alarm device according to claim 1, wherein: The light receiving element is an infrared receiving tube.

6. The probe card protective cover alarm device according to claim 1, wherein: When the probe card structure is installed in a probe station and electrically connected to a test machine, one end of the light emitting element is electrically connected to a power supply port of the test machine, and the other end is electrically connected to a ground terminal on the circuit board.

7. The probe card protective cover alarm device according to claim 1, wherein: When the probe card structure is installed in a probe station and electrically connected to a test machine, one end of the light receiving element is electrically connected to the power supply port of the test machine, and the other end is electrically connected to the ground terminal on the circuit board through the alarm.

8. The probe card protective cover alarm device according to claim 1, wherein: The alarm is a buzzer, the positive electrode of the buzzer is electrically connected to the light receiving element, and the negative electrode of the buzzer is electrically connected to the ground terminal on the circuit board.

9. The probe card protective cover alarm device according to claim 8, wherein: The buzzer is a piezoelectric ceramic buzzer.

10. The probe card protective cover alarm device according to claim 1, wherein: The reflective layer is a reflective sticker or a reflective coating film attached to the side of the probe card protective cover facing the needle.

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