Top surface imprinting device

Abstract

The utility model discloses a top surface coining device, which belongs to the technical field of coining devices, and comprises a moving platform, a base and a compression roller component, a first driving component is arranged on the moving platform, the base is connected to the moving platform through the first driving component, and the first driving component comprises a first driving piece. The first driving piece can drive the base to move in the first direction, and the first direction is parallel to the extending direction of the stamping piece. The pressing roller assembly comprises an impressing piece and a rotating piece, the rotating piece is connected to the impressing piece and can drive the impressing piece to rotate, and the pressing roller assembly is connected to the base. The stamping device further comprises a first supporting piece which is connected to the base, and the first supporting piece is located between the stamping piece and the movable platform and used for supporting a material to be stamped. According to the top surface imprinting device, the movable platform is arranged, so that the position of the imprinting piece can be adjusted, the imprinting process is controllable and reliable, and the whole top surface imprinting device has good practical value and application prospect.

Description

Technical Field

[0001] The utility model belongs to the technical field of imprinting devices, and in particular relates to a top surface imprinting device. Background Art

[0002] Nanoimprint lithography is a novel pattern transfer device, distinct from traditional photolithography. It can replicate nanoscale patterns from a template onto a substrate, offering high throughput, low cost, and a simple process. In the future, this device may gradually replace traditional photolithography and become a key processing method in the fields of microelectronics and materials.

[0003] However, the nanoimprinting device requires complex process flow and parameter adjustment, and the operator needs to have professional skills and experience. The interaction between the imprinted material and the mold may not be ideal, and the pressure applied by the imprinting device is unevenly distributed, which will cause the nanostructure to become uneven during the imprinting process. Nanoimprinting results in an uneven surface, defects or uneven nanostructures.

[0004] Furthermore, during the stamping process, various issues can cause the stamping device to not follow the designed path, potentially leading to subsequent stamping deviations and unusable finished products. When a stamping device malfunctions, it is currently difficult to directly adjust the stamping device to restore it to normal operation. Utility Model Content

[0005] In response to one or more of the above-mentioned defects or improvement needs of the prior art, the present invention provides a top surface imprinting device, which can adjust the position of the imprinting device to ensure a good imprinting effect.

[0006] To achieve the above-mentioned object, the present invention provides a top surface stamping device, which includes a movable platform, a base, and a pressing roller assembly; a first driving assembly is provided on the movable platform, and the base is connected to the movable platform via the first driving assembly, and the first driving assembly includes a first driving member, and the first driving member is capable of driving the base to move along a first direction; the first direction is parallel to the extension direction of the stamping member;

[0007] The pressing roller assembly includes a pressing part and a rotating part, the rotating part is connected to the pressing part and can drive the pressing part to rotate, and the pressing roller assembly is connected to the base;

[0008] It also includes a first support member, which is connected to the base and is located between the stamping member and the moving platform, and is used to support the material to be stamped.

[0009] As a further improvement of the present invention, the first driving assembly further includes a second driving member, and the second driving member is capable of driving the base to move along the second direction;

[0010] The second direction is perpendicular to the first direction, and the second direction is also parallel to the plane where the base is located.

[0011] As a further improvement of the present invention, one first driving member is provided, and two second driving members are provided.

[0012] As a further improvement of the present invention, it further comprises a mounting member and a second drive assembly, wherein the mounting member is fixedly connected to the base, and the second drive assembly is connected to the mounting member;

[0013] The second driving assembly includes a third driving member, a guide rail, a connecting member, and an adjusting member, wherein the guide rail is fixedly connected to the mounting member, the guide rail is arranged parallel to the third direction, the connecting member is slidably connected to the guide rail, the connecting member is also connected to the third driving member, the connecting member is also connected to the adjusting member, the adjusting member abuts against the stamping member, the third driving member can drive the connecting member to move along the guide rail, and the connecting member can drive the adjusting member to move along the third direction;

[0014] The third direction is perpendicular to the plane where the base is located.

[0015] As a further improvement of the present invention, a plurality of second driving assemblies are provided, and at least one is provided at each end of the stamping member along the first direction.

[0016] As a further improvement of the present invention, at least one second driving assembly is provided on the top and bottom of the stamping member.

[0017] As a further improvement of the present invention, a second support member is further included, wherein the second support member is connected to the mounting member, and the second support member abuts against the stamping member to support the stamping member.

[0018] As a further improvement of the present invention, a plurality of second support members are provided and are respectively arranged on both sides of the stamping member.

[0019] As a further improvement of the present invention, the third driving member is a cylinder.

[0020] As a further improvement of the present invention, the material used to manufacture the stamping part includes quartz.

[0021] The above-mentioned improved technical features can be combined with each other as long as they do not conflict with each other.

[0022] In general, the above technical solutions conceived by the present invention have the following beneficial effects compared with the prior art:

[0023] (1) The top surface stamping device of the present invention can adjust the position of the stamping part by setting a mobile platform, ensuring that the stamping process is controllable and reliable, and has good practical value and application prospects as a whole.

[0024] (2) The top surface stamping device of the present invention enables the stamping member to be adjusted in three directions by setting a support member and a second driving assembly, while preventing the stamping member from deviating from the specified position during the working rotation process, thereby ensuring a good stamping effect and a reliable stamping result.

[0025] (3) The top surface stamping device in the present invention can adjust the stamping part in real time during the stamping process, and can adjust the stamping part in three directions at the same time to ensure that the adjustment can meet the needs. At the same time, supporting parts and adjusting parts are provided to maintain the stability of the stamping part during the working process, ensuring the reliability of the working process of the stamping part. The overall device has good practical value and application prospects. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0027] Figure 1 This is a schematic diagram of the overall structure of the top surface imprinting device in an embodiment of the present utility model;

[0028] In all the drawings, the same reference numerals represent the same technical features, specifically:

[0029] 1. Mobile platform; 2. Base; 3. Imprinting member; 4. Rotating member; 5. First drive assembly; 6. Mounting member; 7. Second drive assembly; 8. Second support member;

[0030] 701, third driving member; 702, guide rail; 703, connecting member; 704, adjusting member;

[0031] a. First direction; b. Second direction; c. Third direction. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present invention and are not intended to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

[0033] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation to the present invention.

[0034] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature specified as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of this utility model, "plurality" means at least two, such as two, three, etc., unless otherwise specifically defined.

[0035] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0036] In the present invention, unless otherwise expressly specified or limited, when a first feature is "above" or "below" a second feature, it may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediary. Furthermore, when a first feature is "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0037] Example:

[0038] See also Figure 1 The top surface imprinting device in a preferred embodiment of the present invention includes a mobile platform 1, a base 2, and a pressure roller assembly. A first drive assembly 5 is provided on the mobile platform 1, and the base 2 is connected to the mobile platform 1 via the first drive assembly 5. It is understood that the mobile platform 1 can adopt an existing mature UVW platform. The first drive assembly 5 is the drive motor within the UVW platform. There can be multiple first drive assemblies 5, as long as they can drive the base 2 to move. Without further restriction, the base 2 can be a flat plate.

[0039] In a preferred embodiment, the pressing roller assembly includes a stamping member 3 and a rotating member 4. The rotating member 4 is connected to the stamping member 3 and can drive the stamping member 3 to rotate. The pressing roller assembly is connected to the base 2 and is relatively stationary relative to the base 2 in a first direction a and a second direction b. In a specific implementation, the rotating member 4 can be a DD module with existing mature technology, as long as it can drive the stamping member 3 to rotate. No further restrictions are imposed here.

[0040] Specifically, if Figure 1 As shown, in a preferred embodiment, the first driving assembly 5 includes a first driving member and a second driving member. The first driving member can drive the base 2 to move along a first direction a, and the second driving member can drive the base 2 to move along a second direction b. The first direction a is parallel to the extension direction of the stamping member 3, the second direction b is perpendicular to the first direction a, and the second direction b is also parallel to the plane of the base 2.

[0041] It is understood that the stamping member 3 can be specifically a roller, the extension direction of the stamping member 3 being the transverse direction of the roller, and the first direction a being also parallel to the plane of the base 2, that is, the plane formed by the first direction a and the second direction b is parallel to the base 2. The first driving member and the second driving member are arranged so that the base 2 can move along the first direction a or the second direction b. When adjustment is required, it can be adjusted according to actual conditions, thereby adapting to a wider range of situations.

[0042] In a preferred embodiment, one first driving member is provided and two second driving members are provided, so that rotational motion (including infinity) can be achieved with any point on the mobile platform 1 as the center, thereby enabling multi-directional adjustment of the base 2. Similarly, two first driving members and one second driving member can also be provided to achieve multi-directional adjustment of the base 2.

[0043] Furthermore, in a preferred embodiment, the rotating member 4 is fixedly connected to the base 2 , the stamping member 3 is connected to the base 2 , and the rotating member 4 is connected to the stamping member 3 and can drive the stamping member 3 to rotate.

[0044] It can be understood that when the base 2 is moved, the base 2 can also move the stamping member 3 connected thereto, thereby enabling adjustment of the stamping member 3 according to actual conditions. The material to be stamped passes through the bottom of the stamping member 3, and the stamping member 3 stamps the top surface of the material to be stamped. Therefore, the rotating member 4 and the first drive assembly 5 can be adjusted according to actual conditions, thereby adjusting the position and operating state of the stamping member 3. The rotating member 4 provides power to the stamping member 3 and can control the rotational speed of the stamping member 3. The rotation of the stamping member 3 can be adjusted according to actual conditions, thereby achieving a better stamping effect.

[0045] In a preferred embodiment, the material for manufacturing the stamping member 3 includes quartz, that is, the stamping member 3 can be made of a quartz roller to facilitate subsequent curing or other processes.

[0046] Preferably, the top surface imprinting device in the preferred embodiment further includes a mounting member 6 and a second drive assembly 7, wherein the mounting member 6 is fixedly connected to the base 2, and the second drive assembly 7 is fixedly connected to the mounting member 6. The arrangement of the mounting member 6 is mainly used to integrate the various devices connected to the base 2 and facilitate installation.

[0047] In the preferred embodiment, the second drive assembly 7 includes a third drive member 701, a guide rail 702, a connecting member 703, and an adjusting member 704. The guide rail 702 is fixedly connected to the mounting member 6 and is arranged parallel to the third direction c. The connecting member 703 is slidably connected to the guide rail 702. The connecting member 703 is also connected to the third drive member 701. The connecting member 703 is also connected to the adjusting member 704. The adjusting member 704 abuts the stamping member 3. The third drive member 701 can drive the connecting member 703 to move along the guide rail 702, and the connecting member 703 can drive the adjusting member 704 to move along the third direction c. The third direction c is perpendicular to the plane of the base 2, that is, the third direction c is perpendicular to the plane formed by the first direction a and the second direction b, that is, the vertical direction.

[0048] In a specific implementation, the third drive member 701 can be a pneumatic cylinder, and the adjustment member 704 can be a clamp. A second drive assembly 7 is provided with a connecting member 703, to which the third drive member 701 and multiple adjustment members 704 are connected. The connecting member 703 is connected at both ends to the guide rail 702, ensuring that the connecting member 703 can only move along the direction in which the guide rail 702 is set, i.e., the third direction c. In this way, when the third drive member 701 drives the connecting member 703 to move along the third direction c, the adjustment member 704 also moves along the third direction c. The clamp-type adjustment member 704 can control the height position of the stamping member 3. The radial force of the upper bearing of the clamp presses down on the stamping member 3, rotating synchronously with the stamping member 3.

[0049] Specifically, in a preferred embodiment, multiple second drive assemblies 7 are provided, with at least one second drive assembly 7 provided at each end of the stamping member 3 along the first direction a. That is, a second drive assembly 7 is provided at each end of the stamping member 3 in the extension direction. This arrangement allows the axial force of the bearing on the clamping adjustment member 704 to control the expansion sleeve side of the stamping member 3, limiting the fore-and-aft movement of the stamping member 3, that is, limiting the movement of the stamping member 3 in the first direction a relative to the base 2.

[0050] Similarly, in the preferred embodiment, at least one second drive assembly 7 is provided at the top and bottom of the stamping member 3. This allows the movement of the stamping member 3 in the third direction c to be adjusted at both the top and bottom of the stamping member 3, avoiding poor adjustment on one side.

[0051] Furthermore, in a preferred embodiment, the top surface imprinting device further includes a second support member 8, which is connected to the mounting member 6 and abuts against the imprinting member 3 to support the imprinting member 3. Preferably, a plurality of second support members 8 are provided and are respectively provided on both sides of the imprinting member 3. Figure 1 As shown, in the specific implementation, the second support member 8 can be a roller, and one is provided on each side of the stamping member 3 along the second direction b, or multiple rollers can be provided on each side, as long as they can play a good supporting role. Without making too many restrictions here, the setting of the second support member 8 can not only support the stamping member 3 but also control the position of the stamping member 3 to prevent it from moving relative to the base 2 along the second direction b, thereby ensuring the reliability of the stamping process.

[0052] Similarly, in a preferred embodiment, the top surface imprinting device further includes a first support member, which is fixedly connected to the base 2 and located at the bottom of the imprinting member 3, for supporting the material to be imprinted. That is, the first support member is located below the imprinting member 3. Since the material to be imprinted is also located below the imprinting member 3 to achieve imprinting of the imprinted material, the first support member for supporting the material to be imprinted is disposed below the material to be imprinted. Rollers may be used, and two rollers may be provided on either side of the material to be imprinted, depending on the material to be imprinted, to facilitate feeding, pressing, and ejection of the material to be imprinted.

[0053] The top surface stamping device of the present invention can adjust the stamping part in real time during the stamping process, and can adjust the stamping part in three directions to ensure that the adjustment can meet the needs. At the same time, the support and adjustment parts are provided to maintain the stability of the stamping part during operation, ensuring the reliability of the stamping part. The overall device has good practical value and application prospects.

[0054] It will be easily understood by those skilled in the art that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention shall be included in the scope of protection of the present invention.

Claims

1. A top surface imprinting device, characterized in that: The invention comprises a mobile platform, a base and a pressing roller assembly; a first driving assembly is provided on the mobile platform, the base is connected to the mobile platform via the first driving assembly, the first driving assembly comprises a first driving member, and the first driving member can drive the base to move along a first direction; the first direction is parallel to the extension direction of the stamping member; The pressing roller assembly includes a pressing part and a rotating part, the rotating part is connected to the pressing part and can drive the pressing part to rotate, and the pressing roller assembly is connected to the base; It also includes a first support member, which is connected to the base and is located between the stamping member and the moving platform, and is used to support the material to be stamped.

2. The top surface imprinting device according to claim 1, characterized in that: The first driving assembly further includes a second driving member, the second driving member being capable of driving the base to move along a second direction; The second direction is perpendicular to the first direction, and the second direction is also parallel to the plane where the base is located.

3. The top surface imprinting device according to claim 2, characterized in that: There is one first driving member and two second driving members.

4. The top surface imprinting device according to claim 3, characterized in that: Also included is a mounting member and a second drive assembly, wherein the mounting member is fixedly connected to the base, and the second drive assembly is connected to the mounting member; The second driving assembly includes a third driving member, a guide rail, a connecting member, and an adjusting member, wherein the guide rail is fixedly connected to the mounting member, the guide rail is arranged parallel to the third direction, the connecting member is slidably connected to the guide rail, the connecting member is also connected to the third driving member, the connecting member is also connected to the adjusting member, the adjusting member abuts against the stamping member, the third driving member can drive the connecting member to move along the guide rail, and the connecting member can drive the adjusting member to move along the third direction; The third direction is perpendicular to the plane where the base is located.

5. The top surface imprinting device according to claim 4, characterized in that: There are multiple second driving assemblies, and at least one is provided at each end of the stamping member along the first direction.

6. The top surface imprinting device according to claim 5, characterized in that: At least one second driving assembly is provided on the top and bottom of the stamping member.

7. The top surface imprinting device according to claim 4, characterized in that: It also includes a second supporting member, which is connected to the mounting member and abuts against the stamping member to support the stamping member.

8. The top surface imprinting device according to claim 7, characterized in that: A plurality of second supporting members are provided and are respectively arranged on both sides of the stamping member.

9. The top surface imprinting device according to claim 4, characterized in that: The third driving member is a cylinder.

10. The top surface imprinting device according to any one of claims 1 to 9, characterized in that: The material from which the stamping member is made includes quartz.

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