Wafer limiting device

Abstract

The utility model provides a wafer limiting device which comprises a plurality of wafer limiting column modules, a plurality of positioning modules, a plurality of bases and a platform, the bases are fixedly installed on the platform, and the wafer limiting column modules are installed on the bases through the positioning modules; the wafer limiting column module comprises a wafer limiting column and a limiting base, and the wafer limiting column is fixed above the limiting base; a positioning assembly is arranged below the left side of the limiting base, a connecting hole is formed in the positioning assembly, and the positioning assembly is inserted into the connecting hole to position and install the wafer limiting column module. The wafer limiting column module is positioned and installed through the positioning assembly, during replacement, only screws need to be loosened, the limiting columns are pulled out, then new limiting columns are inserted, the screws are tightened, re-positioning is not needed, the replacement time and labor cost can be effectively saved, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor processing equipment, and particularly relates to a wafer limiting device. Background Art

[0002] During the wafer transfer and horizontal cleaning process, the wafer needs to be limited to prevent the wafer from being overly deviated during the transfer process, causing an alarm or being thrown out during the cleaning process. Wafer limit posts are generally used for limiting. The existing wafer limit posts do not have a positioning function. Each replacement of the limit posts requires manual inspection and calibration to control the distance between the limit posts and the wafer to prevent the wafer from scratching the limit posts. The wafer limit posts can only be fixed directly to the base when the position is appropriate. The manpower and time costs of replacing the wafer limit posts are relatively high. At present, the wafer limit posts are directly fixed to the base with screws. The wafer limit posts can only be fixed after manual calibration. Four wafer limit posts are generally used in the cleaning mechanism, and replacing them all takes a lot of time.

[0003] Therefore, there is a need for a device that can conveniently and efficiently replace wafer limiting pillars, saving the manpower and time costs of replacing wafer limiting pillars. Utility Model Content

[0004] The purpose of the present invention is to solve all or part of the above problems and provide a wafer limiting device. The technical solution of the present invention is as follows: the wafer limiting device includes multiple wafer limiting column modules, multiple positioning modules, multiple bases and platforms. A positioning component is provided under the wafer limiting column module, which can be positioned and installed through the positioning module. When replacing the limiting column, there is no need for repeated manual calibration and inspection. It is only necessary to loosen the screws, pull out the original limiting column and insert the new limiting column, and then tighten the screws without re-positioning. Compared with the traditional method of replacing the limiting column, the present invention can effectively save the time and labor cost of replacement and improve work efficiency.

[0005] The utility model provides a wafer limiting device, comprising a plurality of wafer limiting column modules, a plurality of positioning modules, a plurality of bases, and a platform. The bases are fixedly mounted on the platform, and the wafer limiting column modules are mounted on the bases via the positioning modules. The wafer limiting column modules comprise wafer limiting columns and a limiting base, and the wafer limiting columns are fixed above the limiting base. A positioning assembly is provided at the lower left side of the limiting base, and the positioning module is provided with a connecting hole. The positioning assembly is inserted into the connecting hole to position and install the wafer limiting column module. Positioning and installation through the positioning module facilitates replacement of the wafer limiting column module, saves time and labor costs, and improves production efficiency.

[0006] The wafer limiting device also includes a wafer rotation drive mechanism. The platform is evenly provided with a number of mounting holes corresponding to the number of the wafer rotation drive mechanisms. The platform has a mounting cavity within which the drive mechanism is mounted. The drive mechanism's driving end is connected to a transmission mechanism. The transmission mechanism has multiple branches, each connected to the wafer rotation drive mechanism. The wafer rotation drive mechanism is mounted outside the mounting holes via the transmission mechanism. The drive mechanism drives the wafer rotation drive mechanism to open and close simultaneously via the transmission mechanism. Rotation of the wafer rotation drive mechanism simultaneously drives the wafer to rotate.

[0007] The limiting base is provided with a first pre-set hole, the positioning module is provided with a second pre-set hole and a third pre-set hole, and the base is provided with a fourth pre-set hole. The limiting base and the positioning module are screwed together via the first and second pre-set holes; the positioning module and the base are screwed together via the third and fourth pre-set holes. After positioning, the positioning module is fixed to the base. When the wafer limiting post needs to be replaced, only the screws in the first and second pre-set holes need to be loosened and a new wafer limiting post is installed without the need for re-positioning.

[0008] The positioning component is a positioning pin, and four positioning pins are arranged under the limiting base. The positioning pins are cylindrical; the shape and number of the connecting holes are consistent with the positioning pins, which facilitates the insertion of the positioning pins into the connecting holes and accurately installs the wafer limiting column.

[0009] The wafer limiting pillar is made of resin material, and the distance between the wafer limiting pillar and the wafer is 0.3mm-0.5mm, which reduces friction and scratches between the wafer and the wafer limiting pillar and protects the wafer.

[0010] The third reserved hole provided on the positioning module is a gourd hole, which ensures that the positioning module can be stably installed on the base.

[0011] The wafer rotation driving mechanism includes a wafer rotation driving wheel and a rotation motor. The wafer rotation driving wheel is installed above the rotation motor, and the rotation motor drives the wafer rotation driving wheel to rotate.

[0012] The wafer rotation driving wheel is in an hourglass shape, which is convenient for placing and fixing the wafer.

[0013] The height of the wafer limiting column is higher than the height of the thinnest part of the wafer rotation driving wheel, ensuring that the height of the wafer limiting column is higher than the height of the wafer, which can effectively limit the wafer.

[0014] The wafer limiting column modules are provided in four groups, and the wafer limiting column modules are evenly distributed on the outside of the wafer; the wafer rotation drive mechanism is provided in four groups, and the wafer rotation drive mechanism and the wafer limiting column modules are evenly and alternately distributed concentrically to ensure stable wafer placement.

[0015] Compared with the prior art, the beneficial effects of the present invention mainly include as follows: The present invention provides a wafer limiting device, including multiple wafer limiting column modules, multiple positioning modules and a base. The wafer limiting column module is positioned by a positioning assembly. When replacing, only the screws need to be loosened and the limiting column pulled out, and then the new limiting column is inserted and tightened. No re-positioning is required, which can effectively save replacement time and labor costs and improve work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the specific embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0017] Figure 1 Schematic diagram of the wafer limiting device structure.

[0018] Figure 2 This is a schematic diagram of the wafer limit column module and positioning module structure.

[0019] Figure 3 Schematic diagram of the wafer rotation drive mechanism in the closed state.

[0020] Figure 4 Schematic diagram of the wafer rotation drive mechanism in the open state.

[0021] Figure 5 This is a top view of the wafer limiting device. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0023] The utility model provides a wafer limiting device, such as Figure 1 As shown, it includes multiple wafer limiting column modules 1, multiple positioning modules 2, multiple bases 3, multiple wafer rotation driving mechanisms 4 and a platform 5.

[0024] The base 3 is fixedly mounted on the platform 5, and the wafer limiting column module 1 is mounted on the base 3 through the positioning module 2; Figure 2 As shown, the wafer limiting column module 1 includes a wafer limiting column 11 and a limiting base 12, and the wafer limiting column 11 is fixed above the limiting base 12; a positioning component 121 is provided at the lower left side of the limiting base 12, and a connecting hole 23 is provided on the positioning module 2. The positioning component 121 is inserted into the connecting hole 23 to position and install the wafer limiting column module 1, thereby achieving the purpose of convenient replacement of the wafer limiting column module and improving production efficiency.

[0025] The wafer rotation drive mechanism 4 is installed on the platform 5. The platform 5 is evenly provided with mounting holes corresponding to the number of the wafer rotation drive mechanism 4. There is a mounting cavity in the platform 5. The drive mechanism is installed in the mounting cavity. The driving end of the drive mechanism is connected to the transmission mechanism; the transmission mechanism is provided with multiple branches, which are respectively connected to the wafer rotation drive mechanism 4. The wafer rotation drive mechanism 4 is installed outside the mounting hole through the transmission mechanism; the drive drives the wafer rotation drive mechanism 4 to open and close at the same time through the transmission mechanism; the rotation of the wafer rotation drive mechanism 4 drives the wafer to rotate.

[0026] The limiting base 12 is provided with a first reserved hole 122, the positioning module 2 is provided with a second reserved hole 21 and a third reserved hole 22, and the base 3 is provided with a fourth reserved hole 31; the limiting base 12 and the positioning module 2 are connected with screws through the first reserved hole 122 and the second reserved hole 21 to ensure that the limiting base 12 and the positioning module 2 are stably connected; the positioning module 2 and the base 3 are connected with screws through the third reserved hole 22 and the fourth reserved hole 31, and the third reserved hole 22 is a gourd hole, so that the positioning module 2 can be stably fixed on the base 3, ensuring that the position of the wafer limiting column 11 is accurately installed.

[0027] The positioning assembly 121 is a positioning pin. Four positioning pins are provided under the limiting base 12 and are cylindrical. The shape and number of the connecting holes 23 are consistent with those of the positioning pins, ensuring accurate positioning of the wafer limiting column 11 .

[0028] The wafer limiting pillars 11 are made of resin material, and the distance between the wafer limiting pillars 11 and the wafer is 0.3mm-0.5mm, which reduces the friction between the wafer and the wafer limiting pillars 11 and reduces damage to the wafer.

[0029] The wafer rotation drive mechanism 4 includes a wafer rotation drive wheel 41 and a rotation motor 42. The wafer rotation drive wheel 41 is installed above the rotation motor 42, and the rotation motor 42 drives the wafer rotation drive wheel 41 to rotate; the wafer rotation drive wheel 41 rotates to drive the wafer to rotate; the shape of the wafer rotation drive wheel 41 is hourglass-shaped, and the height of the wafer limit column 11 is higher than the height of the thinnest part of the wafer rotation drive wheel 41, ensuring that the wafer limit column 11 can effectively limit the position.

[0030] like Figure 5 As shown, four groups of wafer limiting column modules 1 are provided, and the wafer limiting column modules 1 are evenly distributed on the outside of the wafer; four groups of wafer rotation drive mechanisms 4 are provided, and the wafer rotation drive mechanisms 4 and the wafer limiting column modules 1 are evenly and alternately distributed concentrically to ensure stable wafer placement.

[0031] The working method of the utility model is as follows: before installing the wafer limit column 11, adjust the positioning module 2 to the appropriate position and fix it on the base 3 with screws, insert the positioning pin of the wafer limit column module 1 into the connecting hole, and tighten the screws on the limit base 12; when the wafer limit column 11 needs to be replaced, loosen the screws on the limit base 12, pull out the wafer limit column 11, and there is no need to re-position it. Insert the positioning pin of the newly replaced wafer limit column module 1 into the connecting hole 23 on the positioning module 2, tighten the screws, and complete the replacement of the wafer limit column 11.

[0032] For the sake of clarity, some commonly used English nouns or letters used in this application are only used for illustrative purposes and are not intended to be limiting or specific. Their possible Chinese translations or specific letters should not be used to limit the scope of protection of this application. It should also be noted that, in this article, relational terms such as "first" and "second" are merely used to distinguish one entity or operation from another, and do not necessarily require or imply any actual relationship or order between these entities or operations.

Claims

1. A wafer limiting device, characterized in that: The invention comprises a plurality of wafer limiting column modules (1), a plurality of positioning modules (2), a plurality of bases (3) and a platform (5), wherein the bases (3) are fixedly mounted on the platform (5); the wafer limiting column module (1) is mounted on the base (3) through the positioning module (2); the wafer limiting column module (1) comprises a wafer limiting column (11) and a limiting base (12), wherein the wafer limiting column (11) is fixed above the limiting base (12); a positioning component (121) is provided at the lower left side of the limiting base (12), a connecting hole (23) is provided on the positioning module (2), and the positioning component (121) is inserted into the connecting hole (23) to position and install the wafer limiting column module (1).

2. The wafer limiting device according to claim 1, characterized in that: The invention also includes a plurality of wafer rotation drive mechanisms (4), the platform (5) is evenly provided with mounting holes corresponding to the number of the wafer rotation drive mechanisms (4), the platform (5) has a mounting cavity, the mounting cavity is provided with a drive mechanism, and the driving end of the drive mechanism is connected to a transmission mechanism; the transmission mechanism is provided with a plurality of branches, which are respectively connected to the wafer rotation drive mechanisms (4), and the wafer rotation drive mechanisms (4) are installed outside the mounting holes through the transmission mechanism; the drive drives the wafer rotation drive mechanisms (4) to open and close at the same time through the transmission mechanism.

3. The wafer limiting device according to claim 1, characterized in that: The limiting base (12) is provided with a first reserved hole (122), the positioning module (2) is provided with a second reserved hole (21) and a third reserved hole (22), and the base (3) is provided with a fourth reserved hole (31); the limiting base (12) and the positioning module (2) are screwed together via the first reserved hole (122) and the second reserved hole (21); the positioning module (2) and the base (3) are screwed together via the third reserved hole (22) and the fourth reserved hole (31).

4. The wafer limiting device according to claim 1, wherein: The positioning assembly (121) is a positioning pin. Four positioning pins are provided under the limiting base (12). The positioning pins are cylindrical. The shape and number of the connecting holes are consistent with those of the positioning pins.

5. The wafer limiting device according to claim 1, characterized in that: The wafer limiting column (11) is made of resin material, and the distance between the wafer limiting column (11) and the wafer is 0.3 mm-0.5 mm.

6. The wafer limiting device according to claim 3, characterized in that: The third reserved hole (22) provided on the positioning module (2) is a gourd hole.

7. The wafer limiting device according to claim 2, characterized in that: The wafer rotation driving mechanism (4) comprises a wafer rotation driving wheel (41) and a rotation motor (42), and the wafer rotation driving wheel (41) is installed above the rotation motor (42).

8. The wafer limiting device according to claim 7, characterized in that: The wafer rotation driving wheel (41) is in the shape of an hourglass.

9. The wafer limiting device according to claim 7, characterized in that: The height of the wafer limiting column (11) is higher than the height of the thinnest part of the wafer rotation driving wheel (41).

10. The wafer limiting device according to claim 2, wherein: The wafer limiting column modules (1) are provided in four groups, and the wafer limiting column modules (1) are evenly distributed outside the wafer; the wafer rotation drive mechanisms (4) are provided in four groups, and the wafer rotation drive mechanisms (4) and the wafer limiting column modules (1) are evenly and alternately distributed concentrically.

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