Galvanometer mounting structure and laser processing equipment

Abstract

The utility model provides a galvanometer mounting structure and laser processing equipment. The galvanometer mounting structure comprises a bottom plate; the first adapter is adjustably mounted on the bottom plate, and the first adapter can rotate around a first axis relative to the bottom plate; the second adapter is adjustably mounted on the first adapter, and the second adapter can rotate around a second axis relative to the first adapter; the galvanometer is mounted on the second adapter; the first axis is perpendicular to the second axis. According to the utility model, after the first adapter and the second adapter are assembled, for the galvanometer and the field lens which are arranged on the second adapter, the galvanometer and the field lens can be rotationally adjusted around the first axis and the second axis; therefore, after the galvanometer and the field lens rotate around the first axis and the second axis to adjust the angle, the lens surface of the field lens can be parallel to the surface of a processed sample, the structure is simple, and operation is easy.

Description

Technical Field

[0001] The utility model relates to the technical field of laser processing, in particular to a galvanometer mounting structure and laser processing equipment. Background Art

[0002] Currently, laser processing optical systems based on high-speed galvanometers and telephoto field lenses are widely used at the light output end of laser equipment. In some processing scenarios, the field lens surface in the optical system must be precisely parallel to the surface of the sample being processed. Failure to do so will significantly impact the laser processing quality. However, due to factors such as component error accumulation and assembly errors, controlling the parallelism of the field lens is relatively difficult and inconvenient to calibrate. Utility Model Content

[0003] In view of the deficiencies in the prior art, one object of the present invention is to provide a galvanometer mounting structure that is simple in structure and easy to adjust.

[0004] Another object of the present invention is to provide a laser processing device that can effectively ensure processing efficiency and quality.

[0005] The embodiments of the present invention are achieved through the following technical solutions:

[0006] A galvanometer mounting structure includes: a base plate; a first adapter, which is adjustably mounted on the base plate and can rotate around a first axis relative to the base plate; a second adapter, which is adjustably mounted on the first adapter and can rotate around a second axis relative to the first adapter; a galvanometer is mounted on the second adapter; the first axis is perpendicular to the second axis.

[0007] According to a preferred embodiment, the first adapter includes a first adapter plate and a second adapter plate connected to each other, and the first adapter plate and the second adapter plate are perpendicular to each other; the first adapter plate is rotatably connected to the base plate through a first pin shaft, and the second adapter is installed on the second adapter plate.

[0008] According to a preferred embodiment, a first pin hole is provided on the first adapter plate, and the first pin shaft is embedded in the first pin hole; a first adjustment slot is provided on the first adapter plate, and the first adjustment slot extends in a circular arc shape, and the curvature center of the first pin hole coincides with that of the first adjustment slot; a first limiting pin is arranged in the first adjustment slot, and the first limiting pin slides and abuts against the inner wall of the first adjustment slot, and the first limiting pin is installed on the base plate.

[0009] According to a preferred embodiment, a first adjustment frame is provided on the base plate, a first adjustment surface is configured on the first adapter plate, two first adjustment screws are configured on the first adjustment frame, the first adjustment screws can approach or move away from the first adjustment surface, and the first pin shaft is located between the axes corresponding to the two first adjustment screws.

[0010] According to a preferred embodiment, a first adjustment gap is defined between the first adjustment frame plate and the first adjustment surface.

[0011] According to a preferred embodiment, there are at least two first adjustment slots, and the first adjustment slots are evenly distributed around the circumference of the first pin hole.

[0012] According to a preferred embodiment, the second adapter includes a third adapter plate and a fourth adapter plate connected to each other, and the third adapter plate and the fourth adapter plate are perpendicular to each other; the third adapter plate and the second adapter plate are rotatably connected via a second pin shaft, and the galvanometer is mounted on the fourth adapter plate.

[0013] According to a preferred embodiment, a second pin hole is provided on the second adapter plate, and the second pin shaft is embedded in the second pin hole; a second adjustment slot is provided on the second adapter plate, and the second adjustment slot extends in a circular arc shape, and the curvature center of the second pin hole coincides with that of the second adjustment slot; a second limiting pin is arranged in the second adjustment slot, and the second limiting pin slides and abuts against the inner wall of the second adjustment slot, and the second limiting pin is installed on the third adapter plate.

[0014] According to a preferred embodiment, a second adjustment frame is provided on the second adapter plate, a second adjustment surface is configured on the third adapter plate, two second adjustment screws are configured on the second adjustment frame, the second adjustment screws can approach or move away from the second adjustment surface, and the second pin shaft is located between the axes corresponding to the two second adjustment screws.

[0015] A laser processing device comprises the aforementioned galvanometer mounting structure.

[0016] The technical solution of the embodiment of the utility model has at least the following advantages and beneficial effects:

[0017] After the first adapter and the second adapter of the utility model are assembled, the galvanometer and the field lens installed on the second adapter can realize rotation adjustment around the first axis and the second axis. Since the first axis is perpendicular to the second axis, the lens surface of the field lens can be made parallel to the surface of the processed sample by rotating the galvanometer and the field lens around the first axis and the second axis to adjust the angle. The utility model has a simple structure and is easy to operate, and can effectively control costs while ensuring adjustment efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 A schematic diagram of the three-dimensional structure of the galvanometer mounting structure provided in an embodiment of the present utility model;

[0020] Figure 2 A schematic front view of the structure of the first adapter and the second adapter after assembly provided by an embodiment of the present utility model;

[0021] Figure 3 This is a schematic diagram of the right side structure of the first adapter and the second adapter after assembly provided by an embodiment of the present utility model.

[0022] Icons: 1. Base plate; 2. First adapter; 21. First adapter plate; 211. First adjustment slot; 212. First adjustment surface; 22. Second adapter plate; 221. Second adjustment slot; 3. Second adapter; 31. Third adapter plate; 311. Second adjustment surface; 32. Fourth adapter plate; 4. Galvanometer; 5. Field mirror; 6. First pin; 7. Second pin; 8. First adjustment frame; 81. First adjustment screw; 82. First fixing screw; 9. Second adjustment frame; 91. Second adjustment screw; 92. Second fixing screw; a. First axis; b. Second axis. DETAILED DESCRIPTION

[0023] For better understanding and implementation, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention.

[0024] In the description of the present invention, it should be noted that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art in the art of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0026] Please refer to Figures 1 to 3 A galvanometer 4 mounting structure includes a base plate 1, a first adapter 2, and a second adapter 3, wherein: the first adapter 2 is adjustably mounted on the base plate 1, and the first adapter 2 can rotate relative to the base plate 1 around a first axis a; the second adapter 3 is adjustably mounted on the first adapter 2, and the second adapter 3 can rotate relative to the first adapter 2 around a second axis b; the galvanometer 4 is mounted on the second adapter 3; the first axis a is perpendicular to the second axis b. In this embodiment, optionally, the first axis a and the second axis b are both parallel to the horizontal plane. Figure 1 As shown, after the first adapter 2 and the second adapter 3 are assembled, the galvanometer 4 and the field lens 5 installed on the second adapter 3 can realize rotation adjustment around the first axis a and the second axis b. Therefore, by rotating the galvanometer 4 and the field lens 5 around the first axis a and the second axis b to adjust the angle, the lens surface of the field lens 5 can be made parallel to the surface of the processed sample. The structure is simple, the operation is convenient, and the cost can be effectively controlled under the premise of ensuring the adjustment efficiency.

[0027] The first adapter 2 includes a first adapter plate 21 and a second adapter plate 22 connected to each other, with the first adapter plate 21 and the second adapter plate 22 being perpendicular to each other. The first adapter plate 21 is rotatably connected to the base plate 1 via a first pin 6, and the second adapter 3 is mounted on the second adapter plate 22. Optionally, the first adapter plate 21 and the second adapter plate 22 are integrally formed, forming an L-shaped plate.

[0028] Furthermore, a first pin hole is provided on the first adapter plate 21, and the first pin shaft 6 is embedded in the first pin hole; a first adjustment slot 211 is provided on the first adapter plate 21, and the first adjustment slot 211 extends in an arc shape, and the curvature center of the first pin hole coincides with the first adjustment slot 211; a first limiting pin (not shown in the figure) is arranged in the first adjustment slot 211, and the first limiting pin slides against the inner wall of the first adjustment slot 211, and the first limiting pin is installed on the bottom plate 1. The first pin here is also installed on the bottom plate 1. Figure 1 and Figure 2 As shown, during use, the first adapter plate 21 rotates relative to the base plate 1 about the first axis a, and the first limiting pin slides relative to the inner wall of the first adjustment slot 211. The first limiting pin and the first adjustment slot 211 cooperate with the first pin 6 to achieve structural stability for the rotation of the first adapter plate 21 relative to the base plate 1.

[0029] like Figure 1 and Figure 2 As shown, a first adjustment frame plate 8 is provided on the base plate 1, and the first adjustment frame plate 8 is mounted on the base plate 1 by a first fixing screw 82; a first adjustment surface 212 is provided on the first adapter plate 21, and two first adjustment screws 81 are provided on the first adjustment frame plate 8. The first adjustment screw 81 can be close to or away from the first adjustment surface 212, and the first pin 6 is located between the axes corresponding to the two first adjustment screws 81. Specifically, there is a first adjustment gap between the first adjustment frame plate 8 and the first adjustment surface 212. In this embodiment, the first adjustment screw 81 is threadedly connected to the first adjustment frame plate 8. When in use, the two adjustment screws are used in combination to drive the first adapter plate 21 to rotate a certain angle around the first axis a relative to the base plate 1 and then limit it. For example, Figure 2 As shown, when the first adapter plate 21 needs to be rotated counterclockwise, the first adjusting screw 81 on the upper side is adjusted so that it moves to the left to drive the first adapter plate 21, and at the same time, the first adjusting screw 81 on the lower side is adjusted so that it moves to the right to make room for the first adapter plate 21 to rotate counterclockwise. During this process, the first adjusting screw 81 slides and abuts against the first adjusting surface 212.

[0030] In some embodiments, in order to maintain the stability of the first adapter plate 21 after adjustment, a compression nut may be assembled on the first pin 6. Alternatively, Figure 2 As shown, the first adjustment slot 211 is a stepped slot, and the first limiting pin is threadedly connected to the base plate 1. During use, the first limiting pin can be rotated to press it into the stepped slot. Alternatively, the first adjustment slot 211 is a stepped slot, and the first limiting pin is fixedly mounted on the base plate 1. A compression nut is assembled on the first limiting pin, and the compression nut is compressed into the stepped slot.

[0031] Furthermore, there are at least two first adjustment slots 211 , and the first adjustment slots are evenly distributed around the circumference of the first pin hole.

[0032] like Figure 1 As shown, the second adapter 3 includes a third adapter plate 31 and a fourth adapter plate 32 connected to each other, and the third adapter plate 31 and the fourth adapter plate 32 are perpendicular to each other; the third adapter plate 31 and the second adapter plate 22 are rotatably connected via a second pin 7, and the galvanometer 4 is mounted on the fourth adapter plate 32. Here, the third adapter plate 31 and the fourth adapter plate 32 are integrally formed.

[0033] The second adapter plate 22 is provided with a second pin hole, into which the second pin shaft 7 is embedded; the second adapter plate 22 is provided with a second adjustment slot 221, which extends in an arc shape, and the center of curvature of the second pin hole and the second adjustment slot 221 coincides; a second limiting pin is disposed in the second adjustment slot 221, which slides against the inner wall of the second adjustment slot 221 and is mounted on the third adapter plate 31. The second pin shaft 7 is fixedly mounted on the third adapter plate 31. The principle of rotation of the third adapter plate 31 relative to the second adapter plate 22 is the same as the principle of rotation of the first adapter plate 21 relative to the base plate 1, and will not be repeated here.

[0034] like Figure 1 and Figure 3 As shown, a second adjustment frame 9 is provided on the second adapter plate 22 and is mounted to the second adapter plate 22 via second fixing screws 92. A second adjustment surface 311 is provided on the third adapter plate 31. Two second adjustment screws 91 are provided on the second adjustment frame 9. The second adjustment screws 91 can move closer to or further away from the second adjustment surface 311. The second pin 7 is located between the axes corresponding to the two second adjustment screws 91. The working principles of the second adjustment screws 91 are the same as those of the first adjustment screws 81 described above and will not be further described here.

[0035] This embodiment also provides a laser processing device, including the aforementioned mounting structure of the galvanometer mirror 4. The field lens 5 of the laser processing device is easy to adjust in angle, which can effectively ensure processing efficiency and quality.

[0036] The technical means disclosed in the present invention are not limited to those disclosed in the above-mentioned embodiments, but also include technical solutions composed of any combination of the above-mentioned technical features. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of the present invention, and such improvements and modifications are also considered to be within the scope of protection of the present invention.

Claims

1. A galvanometer mounting structure, characterized in that: include: base plate; A first adapter is adjustably mounted on the base plate, and the first adapter is capable of rotating relative to the base plate around a first axis; a second adapter, adjustably mounted on the first adapter, the second adapter being capable of rotating relative to the first adapter about a second axis; The galvanometer is mounted on the second adapter; The first axis is perpendicular to the second axis.

2. The galvanometer mounting structure according to claim 1, wherein: The first adapter comprises a first adapter plate and a second adapter plate connected to each other, wherein the first adapter plate and the second adapter plate are perpendicular to each other; The first adapter plate is rotatably connected to the base plate via a first pin shaft, and the second adapter is mounted on the second adapter plate.

3. The galvanometer mounting structure according to claim 2, wherein: The first adapter plate is provided with a first pin hole, and the first pin shaft is embedded in the first pin hole; The first adapter plate is provided with a first adjustment slot hole, the first adjustment slot hole extends in an arc shape, and the first pin hole and the curvature center of the first adjustment slot hole coincide with each other; A first limiting pin is disposed in the first adjustment slot, the first limiting pin is in sliding contact with an inner wall of the first adjustment slot, and the first limiting pin is mounted on the bottom plate.

4. The galvanometer mounting structure according to claim 2, wherein: A first adjustment frame is provided on the base plate, a first adjustment surface is configured on the first adapter plate, and two first adjustment screws are configured on the first adjustment frame. The first adjustment screws can approach or move away from the first adjustment surface, and the first pin shaft is located between the axes corresponding to the two first adjustment screws.

5. The galvanometer mounting structure according to claim 4, characterized in that: A first adjustment gap is defined between the first adjustment frame and the first adjustment surface.

6. The galvanometer mounting structure according to claim 3, characterized in that: There are at least two first adjustment slots, and the first adjustment slots are evenly distributed around the circumference of the first pin hole.

7. The galvanometer mounting structure according to claim 2, wherein: The second adapter comprises a third adapter plate and a fourth adapter plate connected to each other, wherein the third adapter plate is perpendicular to the fourth adapter plate; The third adapter plate is rotatably connected to the second adapter plate via a second pin shaft, and the galvanometer is mounted on the fourth adapter plate.

8. The galvanometer mounting structure according to claim 7, wherein: The second adapter plate is provided with a second pin hole, and the second pin shaft is embedded in the second pin hole; The second adapter plate is provided with a second adjustment slot hole, the second adjustment slot hole extends in an arc shape, and the curvature center of the second pin hole coincides with that of the second adjustment slot hole; A second limiting pin is disposed in the second adjustment slot, the second limiting pin is in sliding contact with an inner wall of the second adjustment slot, and the second limiting pin is mounted on the third adapter plate.

9. The galvanometer mounting structure according to claim 7, wherein: A second adjustment frame is provided on the second adapter plate, a second adjustment surface is configured on the third adapter plate, two second adjustment screws are configured on the second adjustment frame, the second adjustment screws can approach or move away from the second adjustment surface, and the second pin shaft is located between the axes corresponding to the two second adjustment screws.

10. A laser processing device, characterized in that: It comprises the galvanometer mounting structure as described in any one of claims 1 to 9.

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