Dismounting device and equipment

Abstract

The utility model discloses a dismounting device which comprises a machine body, a piece taking mechanism and an unlocking mechanism, the piece taking mechanism and the unlocking mechanism are installed on the machine body, and an installation base is arranged on the machine body and used for placing a cover. The unlocking mechanism is used for being connected with the buckle and unlocking the clamping relation between the buckle and the part. And the part taking mechanism comprises a multi-shaft driving assembly and a clamping part, the clamping part is in driving connection with the multi-shaft driving assembly, under driving of the multi-shaft driving assembly, the clamping part gets close to the part and clamps and takes out the part, automatic part taking out is achieved, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the field of automation technology, in particular to a disassembly device and equipment. Background Art

[0002] Wafer boxes are mainly used to place and transport wafers in semiconductor production. In order to simplify transportation and minimize the risk of contamination, chip manufacturers use wafer boxes to move and store wafers. For the safety of the wafers, the lid of the wafer box is assembled from individual parts and is not easy to disassemble manually. Utility Model Content

[0003] The purpose of the utility model is to propose a disassembly device in response to the technical problems existing in the background technology.

[0004] In order to achieve the above technical objectives, the technical solutions adopted in the first aspect of the present invention are as follows:

[0005] A disassembly device is used to disassemble components from the lid of a wafer box. The lid is provided with a fastener for clamping the components. The disassembly device includes a body, a removal mechanism and an unlocking mechanism installed on the body. The body is provided with a mounting seat for placing the lid; the unlocking mechanism is used to connect with the fastener and unlock the clamping relationship between the fastener and the component; the removal mechanism includes a multi-axis drive assembly and a clamping member. The clamping member is driven and connected to the multi-axis drive assembly. Under the drive of the multi-axis drive assembly, the clamping member approaches the component and clamps and removes the component.

[0006] Preferably, the multi-axis drive assembly includes a frame, a first Y-axis drive unit and a Z-axis drive unit. The frame is installed on the machine body and placed above the mounting seat. The first Y-axis drive unit is installed on the frame. The Z-axis drive unit is driven and connected to the first Y-axis drive unit, and the clamping member is driven and connected to the Z-axis drive unit.

[0007] Preferably, the clamping member includes a first carrier plate, a first drive motor and two clamping plates. The first carrier plate is mounted on the Z-axis drive part and is driven and connected to the Z-axis drive part. The first drive motor is mounted on the first carrier plate. The two clamping plates are symmetrically mounted on the first drive motor and are driven and connected to the first drive motor. Under the drive of the first drive motor, the two clamping plates approach or move away from each other to clamp parts.

[0008] Preferably, a protrusion is provided at the end of the component, and a groove corresponding to the protrusion is provided at the end of the clamping plate.

[0009] Preferably, the unlocking mechanism includes a second Y-axis drive unit, a second carrier plate, a second drive motor and two support members. The second Y-axis drive unit is installed on the machine body, the second drive motor is installed on the second carrier plate and is driven and connected to the second Y-axis drive unit through the second carrier plate. The first ends of the two support members are symmetrically installed on the second drive motor and are driven and connected to the second drive motor. The second ends of the two support members extend to the top of the cover where components are installed.

[0010] Preferably, a limiting block is provided on the buckle, and a limiting groove corresponding to the limiting block is provided on the second end of the expansion member.

[0011] Preferably, a plurality of positioning blocks are provided on the mounting seat.

[0012] Preferably, the disassembly device further comprises a storage box for storing components, and the storage box is placed beside the mounting seat.

[0013] The technical solution adopted in the second aspect of the present invention is as follows:

[0014] A device comprising a disassembly device as described in any one of the above solutions.

[0015] Compared with the existing technology, the utility model has the following beneficial technical effects: it includes a body and a picking mechanism and an unlocking mechanism installed on the body, a mounting seat is provided on the body, and the mounting seat is used to place the cover; the unlocking mechanism is used to connect with the fastener and unlock the clamping relationship between the fastener and the component; the picking mechanism includes a multi-axis drive assembly and a clamping member, and the clamping member is driven and connected to the multi-axis drive assembly. Under the drive of the multi-axis drive assembly, the clamping member approaches the component and clamps and takes out the component, thereby realizing automatic removal of the component and improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic structural diagram of an embodiment of the present utility model;

[0017] Figure 2 This is a structural diagram of the pickup mechanism in an embodiment of the present utility model;

[0018] Figure 3 for Figure 2 A partial enlarged view of part A in the middle;

[0019] Figure 4 This is a structural diagram of the unlocking mechanism in an embodiment of the present utility model;

[0020] Figure 5 for Figure 4 A partial enlarged view of part B in the middle;

[0021] Figure 6 This is an exploded schematic diagram of the mounting base and the cover in an embodiment of the present utility model;

[0022] Figure 7 for Figure 6 A partial enlarged view of part C in the middle.

[0023] Figure numbers: 100 body, 101 mounting base, 1011 positioning block, 200 picking mechanism, 201 multi-axis drive assembly, 2011 frame, 2012 first Y-axis drive unit, 2013 Z-axis drive unit, 202 clamping member, 2021 first carrier plate, 2022 first drive motor, 2023 clamping plate, 2024 slot, 300 unlocking mechanism, 301 second Y-axis drive unit, 302 second carrier plate, 303 second drive motor, 304 opening member, 3041 limiting slot, 400 parts, 401 protrusion, 500 buckle, 501 limiting block, 600 storage box. DETAILED DESCRIPTION

[0024] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features therein can be combined with each other.

[0025] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0026] In the description of this utility model, it should be noted that, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connection, connection, or specific connection; they can refer to mechanical connection or electrical connection; they can refer to direct connection or indirect connection through an intermediate medium; and they can refer to internal communication between two components. For those skilled in the art, the specific meanings of the above terms in this utility model can be understood based on specific circumstances.

[0027] The specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0028] like Figure 1-Figure 7As shown, the utility model proposes a disassembly device in the first aspect, which is used to disassemble the component 400 on the lid of the wafer box. The lid is provided with a fastener 500 for clamping the component 400. The disassembly device includes a body 100 and a picking mechanism 200 and an unlocking mechanism 300 installed on the body 100. The body 100 is provided with a mounting seat 101, and the mounting seat 101 is used to place the lid; the unlocking mechanism 300 is used to connect with the fastener 500 and unlock the clamping relationship between the fastener 500 and the component 400; the picking mechanism 200 includes a multi-axis drive assembly 201 and a clamping member 202, and the clamping member 202 is driven and connected to the multi-axis drive assembly 201. Under the drive of the multi-axis drive assembly 201, the clamping member 202 approaches the component 400 and clamps and removes the component 400.

[0029] The specific implementation is to place the lid of the wafer box on the mounting base 101, wherein the mounting base 101 is provided with an identification sensor, which is used to detect whether the lid is placed on the mounting base 101. If it is recognized that the lid has been placed, and an operation signal is transmitted to the picking mechanism 200 and the unlocking mechanism 300, the unlocking mechanism 300 and the picking mechanism 200 are operated in sequence and cooperate to remove the component 400 from the lid. First, the unlocking mechanism 300 unlocks the fastener that jams the component 400. After the unlocking is completed, the multi-axis driving component assembly 201 in the picking mechanism 200 drives the clamping component 202 to move to the component 400 and performs the grasping operation to remove the component 400.

[0030] Furthermore, the multi-axis drive assembly 201 includes a frame 2011, a first Y-axis drive unit 2012 and a Z-axis drive unit 2013. The frame 2011 is installed on the body 100 and placed above the mounting base 101. The first Y-axis drive unit 2012 is installed on the frame 2011. The Z-axis drive unit 2013 is driven and connected to the first Y-axis drive unit 2012. The clamping member 202 is driven and connected to the Z-axis drive unit 2013.

[0031] Specifically, the mounting base 101 is provided with a plurality of positioning blocks 1011, and the positioning blocks 1011 determine the position of the cover and the positions of the various structures of the cover on the mounting base 101. Therefore, the multi-axis drive assembly 201 only adopts a dual-axis drive structure to save development and design costs. The frame 2011 is erected above the mounting base 101 and spans the mounting base 101. It should be noted that this spanning position is just above the cover loaded with components 400. Therefore, when the multi-axis drive assembly 201 performs the work of grasping the components 400, it only needs to execute the drive in the Y-axis and Z-axis directions, while ensuring the work of grasping the components 400, reducing the design and R&D costs of the drive structure.

[0032] Furthermore, the clamping member 202 includes a first carrier plate 2021, a first drive motor 2022 and two clamping plates 2023. The first carrier plate 2021 is installed on the Z-axis drive unit 2013 and is driven and connected to the Z-axis drive unit 2013. The first drive motor 2022 is installed on the first carrier plate 2021. The two clamping plates 2023 are symmetrically installed on the first drive motor 2022 and are driven and connected to the first drive motor 2022. Under the drive of the first drive motor 2022, the two clamping plates 2023 approach or move away from each other to clamp the component 400.

[0033] A protrusion 401 is provided at the end of the component 400 , and a clamping groove 2024 corresponding to the protrusion 401 is provided at the end of the clamping plate 2023 .

[0034] See attached Figure 2 and attached Figure 3 The multi-axis drive assembly 201 drives the clamping member 202 to extend into the hole in the cover where the component 400 is installed, and drives the two clamping plates 2023 to approach each other through the first drive motor 2022 to clamp the component 400. In order to enhance the stability of clamping the component 400, a slot 2024 corresponding to the protrusion 401 is provided at the end of the clamping plate 2023, so that when the component 400 is clamped, the protrusion 401 on it is engaged with the slot 2024 on the clamping plate 2023.

[0035] Furthermore, the unlocking mechanism 300 includes a second Y-axis drive unit 301, a second carrier plate 302, a second drive motor 303 and two support members 304. The second Y-axis drive unit 301 is installed on the body 100, the second drive motor 303 is installed on the second carrier plate 302 and is driven and connected to the second Y-axis drive unit 301 through the second carrier plate 302, the first ends of the two support members 304 are symmetrically installed on the second drive motor 303 and are driven and connected to the second drive motor 303, and the second ends of the two support members 304 extend to the top of the cover where the component 400 is installed.

[0036] A limiting block 501 is provided on the buckle 500 , and a limiting groove 3041 corresponding to the limiting block 501 is provided on the second end of the expansion member 304 .

[0037] Specifically, in order to reduce design and R&D costs, the overall position of the unlocking mechanism 300 is set on one side of the mounting base 101, and the positions of its two supporting parts 304 are just above the component 400. Therefore, the unlocking mechanism 300 is only designed with a second Y-axis drive part 301.

[0038] Furthermore, the disassembly device also includes a storage box 600 for storing the components 400 , and the storage box 600 is placed beside the mounting seat 101 .

[0039] Furthermore, the present invention also provides a device in the second aspect, which includes a disassembly device as described in any one of the above solutions.

[0040] The above descriptions provide one or more embodiments in conjunction with the specific content, and do not limit the specific implementation of the present invention to these descriptions. Any similarity or similarity with the methods, structures, etc. of the present invention, or any technical deduction or substitution based on the concept of the present invention, shall be deemed to be within the scope of protection of the present invention.

Claims

1. A disassembly device for disassembling a component (400) on a cover of a wafer box, wherein the cover is provided with a fastener (500) for clamping the component (400), characterized in that: It comprises a body (100), a piece-taking mechanism (200) and an unlocking mechanism (300) installed on the body (100); The body (100) is provided with a mounting seat (101), and the mounting seat (101) is used to place the cover; The unlocking mechanism (300) is used to connect with the buckle (500) and unlock the clamping relationship between the buckle (500) and the component (400); The component removal mechanism (200) comprises a multi-axis drive assembly (201) and a clamping member (202), wherein the clamping member (202) is drive-connected to the multi-axis drive assembly (201). Driven by the multi-axis drive assembly (201), the clamping member (202) approaches the component (400) and clamps and removes the component (400).

2. A disassembly device according to claim 1, characterized in that: The multi-axis drive assembly (201) comprises a frame (2011), a first Y-axis drive unit (2012) and a Z-axis drive unit (2013); the frame (2011) is mounted on the machine body (100) and placed above the mounting seat (101); the first Y-axis drive unit (2012) is mounted on the frame (2011); the Z-axis drive unit (2013) is drive-connected to the first Y-axis drive unit (2012); and the clamping member (202) is drive-connected to the Z-axis drive unit (2013).

3. A disassembly device according to claim 2, characterized in that: The clamping member (202) comprises a first carrier plate (2021), a first drive motor (2022) and two clamping plates (2023), wherein the first carrier plate (2021) is mounted on the Z-axis drive unit (2013) and is drive-connected to the Z-axis drive unit (2013), the first drive motor (2022) is mounted on the first carrier plate (2021), and the two clamping plates (2023) are symmetrically mounted on the first drive motor (2022) and are drive-connected to the first drive motor (2022). Under the drive of the first drive motor (2022), the two clamping plates (2023) move closer to or farther from each other to clamp the component (400).

4. A disassembly device according to claim 3, characterized in that: The end of the component (400) is provided with a protrusion (401), and the end of the clamping plate (2023) is provided with a clamping groove (2024) corresponding to the protrusion (401).

5. A disassembly device according to claim 1, characterized in that: The unlocking mechanism (300) comprises a second Y-axis driving unit (301), a second carrier plate (302), a second driving motor (303) and two propping members (304); the second Y-axis driving unit (301) is mounted on the machine body (100); the second driving motor (303) is mounted on the second carrier plate (302) and is drivingly connected to the second Y-axis driving unit (301) via the second carrier plate (302); the first ends of the two propping members (304) are symmetrically mounted on the second driving motor (303) and are drivingly connected to the second driving motor (303); the second ends of the two propping members (304) extend to the upper portion of the cover where the component (400) is mounted.

6. A disassembly device according to claim 5, characterized in that: The buckle (500) is provided with a limiting block (501), and the second end of the opening member (304) is provided with a limiting groove (3041) corresponding to the limiting block (501).

7. A disassembly device according to claim 1, characterized in that: The mounting seat (101) is provided with a plurality of positioning blocks (1011).

8. The disassembly device according to claim 1, characterized in that: It also includes a storage box (600) for storing the components (400), and the storage box (600) is placed beside the mounting seat (101).

9. A device, characterized in that The invention comprises a disassembly device as described in any one of claims 1 to 8.

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