Glass substrate evaporation device
By using adsorption components and cross-set mask strip design in the glass substrate vapor deposition device, the problem of poor evaporation caused by the gap between the glass substrate and the mask plate is solved, the precise injection of the evaporated gas and the cleanliness of the mask strip are achieved, and the product quality is improved.
Patent Information
- Application Number
- CN202422755128.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-12
- Publication Date
- 2025-09-02
- Estimated Expiration
- 2034-11-12
AI Technical Summary
In traditional evaporation operations, the gap between the glass substrate and the mask plate increases, resulting in poor evaporation, forming a shadowed area, affecting product quality and color abnormalities, and residual substances are easily attached at the intersection of the mask strips, affecting the cleaning effect.
Adsorption components are used to adsorb the mask plate in the cover plate, so that it is always close to the glass substrate. Combined with the cross-set mask strip spacing design, it ensures that the mask plate is closely fitted with the glass substrate, and improves the fixing effect through magnetic absorbing members or elastic seals.
Effectively reduce the dissipation of evaporated gas, ensure that the evaporated gas falls into the corresponding position accurately, avoid color abnormalities, improve the yield rate of the glass substrate, and maintain the cleanliness of the mask strips to ensure the quality of the evaporated operation.
Smart Images
Figure CN223292618U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of electronic display substrate processing, in particular to a glass substrate evaporation device. Background Art
[0002] In the manufacturing process of electronic displays, it is necessary to perform evaporation on the glass substrate. Evaporation is also known as evaporation coating. It is an operation method in which the evaporation material is heated by an evaporation source, causing the atoms or molecules of the evaporation material to vaporize and escape from its surface to form a vapor flow. The vapor flow is incident on the surface of the substrate to be evaporated and condensed to form a solid thin film.
[0003] In the prior art, Figure 1 and Figure 2 As shown, during a conventional evaporation process, gravity causes the glass substrate 1′ and the mask 2′ to sag, increasing the gap between them. Consequently, when the evaporation nozzle 3′ sprays evaporation gas 31′ toward the glass substrate 1′ during the evaporation process, the evaporation gas 31′ passes through the gap between the glass substrate 1′ and the mask 2′ and adheres to areas of the glass substrate 1′ where evaporation is not desired, forming a first evaporation shadow area 11′. Furthermore, the sagging of the mask 2′ blocks the path of some of the evaporation gas 31′, preventing it from reaching the corresponding evaporation areas on the glass substrate 1′, forming a second evaporation shadow area 12′, thereby affecting the normal evaporation process on the surface of the glass substrate 1′. In conventional operations, the first evaporation shadow area 11′ and the second evaporation shadow area 12′ are too large, which will lead to poor evaporation of the glass substrate 1′. When the poorly evaporated glass substrate 1′ is used on a display device, a shadow effect will be generated, and a color mixing phenomenon with color differences will occur in visual performance, that is, abnormal display color will occur, affecting the normal use of the product.
[0004] In addition, combined Figures 1 to 3 As shown, in some operations, a mask plate 2′ having multiple mask strips 21′ is used, wherein two crossed mask strips 21′ are directly adhered to each other, resulting in a too small gap between the two mask strips 21′. During the evaporation process and the cleaning process of the mask plate 2′, the cross-connection of the two mask strips 21′ is prone to adhere to the evaporation medium and / or cleaning liquid substances, and the evaporation medium and / or cleaning liquid substances are not easy to volatilize, forming residual substances 4′. As a result, the residual substances 4′ will partially evaporate in the high temperature environment of the subsequent evaporation operation and adhere to the glass substrate 1′, resulting in poor evaporation of the glass substrate 1′. Utility Model Content
[0005] The purpose of the utility model is to provide a glass substrate evaporation device, which can ensure that the mask plate and the glass substrate are closely attached, reduce the gap between the mask plate and the glass substrate, thereby avoiding color abnormalities in the product and improving product quality.
[0006] To achieve this purpose, the present invention adopts the following technical solutions:
[0007] Provided is a glass substrate evaporation device, comprising a base, a mask, and an adsorption assembly. The base is provided with an evaporation chamber, and a cover plate is provided on the base for sealing the evaporation chamber. The glass substrate to be evaporated is fixed on a side of the cover plate facing the evaporation chamber. The evaporation chamber is provided with a plurality of evaporation nozzles facing the glass substrate.
[0008] The mask is arranged between the glass substrate and the evaporation nozzle, and the mask abuts against one side of the glass substrate. The mask includes a mask frame and a plurality of mask strips, the ends of the mask strips are respectively fixed to different sides of the mask frame, and at least two of the mask strips are arranged to cross each other, so that the mask forms a hollow structure with multiple evaporation openings, and the two mask strips arranged to cross each other are arranged at intervals;
[0009] The adsorption component is arranged in the cover plate, and is used for adsorbing the mask strip so that the mask strip always has a tendency to approach the glass substrate.
[0010] In one embodiment, the mask frame includes a supporting portion and a connecting portion, the supporting portion is arranged on the outside of the connecting portion, a supporting plate for fixing the supporting portion is provided on the base, and the mask strip is connected to the connecting portion.
[0011] In one embodiment, an elastic seal is further included, which is arranged between the base and the cover plate, one end of the elastic seal abuts against the lower bottom surface of the cover plate, and the other end of the elastic seal abuts against the upper end surface of the support portion.
[0012] In one embodiment, two mask strips are provided, and the two mask strips are arranged perpendicular to each other.
[0013] In one embodiment, the adsorption component is disposed on the cover plate at a position corresponding to the intersection of two mask strips.
[0014] In one embodiment, a spacer is further included, and the spacer is arranged at the intersection of two mask strips.
[0015] In one embodiment, the mask is a magnetic mask, and the adsorption assembly includes a magnetic attraction member disposed in the cover.
[0016] In one embodiment, a plurality of supporting columns are provided on a side of the mask facing the glass substrate, and the mask abuts against the glass substrate via the supporting columns.
[0017] In one embodiment, an elastic gasket is provided between the cover plate and the glass substrate.
[0018] In one embodiment, the spacer is arranged at a position corresponding to the mask.
[0019] Beneficial effects of the utility model:
[0020] The present invention provides a glass substrate evaporation device, which fixes a glass substrate on a cover plate, with the side of the glass substrate away from the cover plate abutting against a mask, so that an evaporation nozzle passes through multiple evaporation ports of the mask to form multiple evaporation areas at corresponding positions on the glass substrate. Furthermore, an adsorption component is provided within the cover plate to adsorb the mask, so that the mask always tends to approach the glass substrate and the mask always fits tightly against the glass substrate, thereby effectively reducing the gap between the mask and the glass substrate. This allows the evaporation gas ejected from the evaporation nozzle to accurately perform evaporation operations on the corresponding positions on the glass substrate according to the evaporation ports of the mask, preventing the evaporation gas from escaping to other positions on the glass substrate, thereby ensuring the yield rate of the glass substrate, avoiding color abnormalities in the final product, and improving product quality.
[0021] Furthermore, by spacing the two cross-set mask strips, a certain height gap is ensured between the two mask strips, which facilitates the volatilization of the evaporation medium and / or cleaning liquid, ensures the cleanliness of the mask strips, and is beneficial to ensuring the quality of the evaporation operation, thereby ensuring the quality of the product. BRIEF DESCRIPTION OF THE DRAWINGS
[0022] Figure 1 This is a schematic diagram of the positions of the glass substrate and the mask during the evaporation operation in the prior art;
[0023] Figure 2 This is a schematic diagram of the structure of the mask in the drooping state in the prior art;
[0024] Figure 3 This is a schematic diagram of the structure of residual material formed between two mask strips in the prior art;
[0025] Figure 4 is a structural schematic diagram of a glass substrate evaporation device in one embodiment;
[0026] Figure 5 is a schematic diagram showing a state in which the mask and the glass substrate are in close contact with each other in one embodiment;
[0027] Figure 6is a schematic structural diagram of a mask in one embodiment;
[0028] Figure 7 is a schematic structural diagram of a glass substrate in one embodiment;
[0029] Figure 8 Schematic diagram of a structure in which there is no residual material between two mask strips in one embodiment.
[0030] Figures 1 to 3 middle:
[0031] 1′, glass substrate; 11′, first evaporation shadow area; 12′, second evaporation shadow area; 2′, mask; 21′, mask strip; 3′, evaporation nozzle; 31′, evaporation gas; 4′, residual material.
[0032] Figures 4 to 8 middle:
[0033] 1. Glass substrate; 11. First evaporation shadow area; 12. Second evaporation shadow area; 13. Evaporation area; 2. Base; 21. Evaporation chamber; 22. Cover plate; 23. Evaporation nozzle; 24. Evaporation gas; 25. Support plate; 3. Mask plate; 31. Mask frame; 311. Support part; 312. Connecting part; 32. Mask strip; 33. Evaporation port; 34. Support column; 4. Adsorption assembly; 5. Elastic seal; 6. Pad; 7. Gasket. DETAILED DESCRIPTION
[0034] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.
[0035] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.
[0036] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.
[0037] In the description of this embodiment, the terms "upper," "lower," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.
[0038] like Figures 4 to 8 As shown, a glass substrate evaporation device of this embodiment includes a base 2, a mask 3 and an adsorption assembly 4. The base 2 is provided with an evaporation chamber 21, and the base 2 is provided with a cover plate 22 for sealing the evaporation chamber 21. The glass substrate 1 to be evaporated is fixed on a side surface of the cover plate 22 facing the evaporation chamber 21. The evaporation chamber 21 is provided with a plurality of evaporation nozzles 23 facing the glass substrate 1; the mask 3 is arranged between the glass substrate 1 and the evaporation nozzles 23, and the mask 3 abuts against one side of the glass substrate 1. The mask 3 includes a mask frame 31 and a plurality of mask strips 32, the two ends of the mask strips 32 are respectively fixed on different sides of the mask frame 31, and at least two mask strips 32 are arranged crosswise to form a hollow structure with multiple evaporation openings 33 on the mask 3, and the two crosswise mask strips 32 are arranged at intervals; the adsorption assembly 4 is arranged in the cover plate 22, and the adsorption assembly 4 adsorbs the mask strips 32 so that the mask strips 32 always have a tendency to approach the glass substrate 1.
[0039] In this embodiment, the glass substrate 1 is fixed on the cover plate 22, and the side of the glass substrate 1 away from the cover plate 22 is in contact with the mask 3, so that the evaporation nozzle 23 passes through the multiple evaporation ports 33 of the mask 3 to form multiple evaporation areas 13 at corresponding positions on the glass substrate 1. Among them, by arranging an adsorption component 4 in the cover plate 22 to adsorb the mask 3, the mask 3 always has a tendency to approach the glass substrate 1, and the mask 3 is always closely attached to the glass substrate 1, thereby effectively reducing the gap between the mask 3 and the glass substrate 1, so that the evaporation gas 24 ejected by the evaporation nozzle 23 can accurately perform the evaporation operation on the corresponding position on the glass substrate 1 according to the evaporation ports 33 of the mask 3, thereby preventing the evaporation gas 24 from escaping to other positions of the glass substrate 1. Specifically, as Figure 5 As shown, the mask 3 is adsorbed by the adsorption component 4, so that the mask 3 and the glass substrate 1 are tightly fitted, so that during the evaporation operation, the evaporation gas 24 sprayed by the evaporation nozzle 23 toward the glass substrate 1 can accurately fall into the evaporation area 13 corresponding to the glass substrate 1, and can effectively reduce the range of the first evaporation shadow area 11 and the second evaporation shadow area 12, thereby ensuring the yield of the evaporation of the glass substrate 1, avoiding color abnormalities in the final product, and improving the quality of the product.
[0040] Furthermore, by spacing the two cross-set mask strips 32, a certain height gap is ensured between the two mask strips 32, which facilitates the volatilization of the evaporation medium and / or cleaning liquid, ensures the cleanliness of the mask strips 32, and is beneficial to ensuring the quality of the evaporation operation, thereby ensuring the quality of the product.
[0041] In one embodiment, Figure 6 As shown, the mask frame 31 includes a support portion 311 and a connecting portion 312. The support portion 311 is disposed outside the connecting portion 312. The base 2 is provided with a support plate 25 for securing the support portion 311. The mask strip 32 is connected to the connecting portion 312. Specifically, the support plate 25 is disposed on a side of the base 2 adjacent to the cover plate 22. The mask plate 3 is entirely secured to the support plate 25 via the support portion 311. This allows the glass substrate 1 secured to the bottom of the cover plate 22 to abut and adhere to the mask plate 3 after the cover plate 22 and the base 2 are covered. The edge of the glass substrate 1 abuts the connecting portion 312 of the mask frame 31, and the corresponding position of the middle of the glass substrate 1 abuts the mask strip 32.
[0042] Furthermore, the glass substrate evaporation device also includes an elastic seal 5, which is arranged between the base 2 and the cover plate 22, with one end of the elastic seal 5 abutting against the lower bottom surface of the cover plate 22, and the other end of the elastic seal 5 abutting against the upper end surface of the support portion 311. Specifically, after the cover plate 22 is covered with the base 2, the evaporation chamber 21 is further sealed by the elastic seal 5 to prevent the evaporation gas 24 from escaping to the outside of the evaporation chamber 21, causing waste of the evaporation gas 24 and affecting the workshop environment. In addition, when the cover plate 22 is covered, the cover plate 22 generates a certain extrusion force on the elastic seal 5, so that the elastic seal 5 presses the support portion 311 downward, which is conducive to ensuring that the cover plate 22 is pressed and fixed to the mask plate 3.
[0043] In one embodiment, Figure 6 and Figure 7 As shown, two mask strips 32 are provided, and the two mask strips 32 are arranged crosswise so that the mask plate 3 as a whole forms four evaporation openings 33. In actual operation, the two mask strips 32 are arranged perpendicular to each other so that four rectangular evaporation openings 33 are formed on the mask plate 3, thereby completing four rectangular evaporation areas 13 on the glass substrate 1 during the evaporation operation.
[0044] Furthermore, the adsorption assembly 4 is disposed on the cover plate 22 at a location corresponding to the intersection of the two mask strips 32. This allows the adsorption assembly 4 to have adsorption force on both mask strips 32, ensuring that both mask strips 32 are as closely attached to the glass substrate 1 as possible, thereby facilitating reduction of the gap between the entire mask plate 3 and the glass substrate 1. Of course, in other embodiments, if there are multiple mask strips 32, multiple adsorption assemblies 4 can also be provided according to specific operational conditions, and are disposed at locations corresponding to the intersection of the multiple mask strips 32, to ensure that the adsorption assembly 4 has sufficient adsorption force on the mask strips 32 and ensures that the entire mask plate 3 is closely attached to the glass substrate 1.
[0045] like Figure 8 As shown, in this embodiment, a pad 6 is also included. The pad 6 is arranged at the intersection of the two mask strips 32 to ensure that the two mask strips 32 are spaced apart and a certain height of gap is provided between the two mask strips 32 to facilitate the volatilization of the evaporation medium and / or the cleaning liquid, thereby ensuring the cleanliness of the mask strip 32 and avoiding affecting the subsequent evaporation operation, which is beneficial to ensuring the quality of the evaporation operation and thus ensuring the quality of the product.
[0046] In one embodiment, the mask plate 3 is a magnetic mask plate, and the adsorption component 4 includes a magnetic attraction component provided in the cover plate 22. Through the magnetic adsorption method, the magnetic attraction component can adsorb the magnetic mask plate, so that the mask plate 3 can always have a tendency to move toward the glass substrate 1, ensuring that the mask plate 3 and the glass substrate 1 are tightly fitted.
[0047] In actual operation, the magnetic attraction member is a magnet, which has a simple structure and low acquisition cost, and can effectively realize the magnetic attraction function of the magnetic attraction member. Of course, in other embodiments, the magnetic attraction member can also be an electromagnet, so that the operator can control the magnetic force of the electromagnet to avoid the magnetic force being too weak, which may cause the mask 3 and the glass substrate 1 to not fit tightly together, and to avoid the magnetic force being too strong, which may cause the mask 3 to squeeze the glass substrate 1 and cause damage to the glass substrate 1.
[0048] In one embodiment, a plurality of support columns 34 are provided on the side of the mask 3 facing the glass substrate 1. The mask 3 and the glass substrate 1 are in contact with each other via the support columns 34, thereby reducing the contact area between the mask 3 and the glass substrate 1 and minimizing contamination of the glass substrate 1 by the mask 3. Of course, in actual operation, the height of the support columns 34 should not be set too high to avoid an excessive gap between the mask 3 and the glass substrate 1, which would affect the normal evaporation operation of the glass substrate 1.
[0049] In one embodiment, an elastic gasket 7 is provided between the cover plate 22 and the glass substrate 1 to prevent the cover plate 22 from damaging the glass substrate 1. Furthermore, the contact between the cover plate 22 and the glass substrate 1 via the gasket 7 can reduce the contact area between the glass substrate 1 and the cover plate 22, thereby reducing contamination of the glass substrate 1 by the cover plate 22.
[0050] Furthermore, the spacer 7 is positioned corresponding to the position of the mask 3, thereby effectively reducing the impact of the mask 3 on the glass substrate 1 after the cover plate 22 is closed, thereby preventing damage to the glass substrate 1. In actual operation, the spacer 7 is an adhesive film, which allows the glass substrate 1 to be bonded and fixed to the cover plate 22 through the film. This not only reduces the impact, but also ensures a stable connection between the glass substrate 1 and the cover plate 22, ensuring the installation and fixation stability of the glass substrate 1.
[0051] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.
Claims
1. A glass substrate evaporation device, characterized in that: include: A base, wherein an evaporation chamber is provided in the base, a cover plate for sealing the evaporation chamber is provided on the base, a glass substrate to be evaporated is fixed on a side of the cover plate facing the evaporation chamber, and a plurality of evaporation nozzles facing the glass substrate are provided in the evaporation chamber; A mask plate, the mask plate is arranged between the glass substrate and the evaporation nozzle, and the mask plate abuts against one side of the glass substrate, the mask plate includes a mask frame and a plurality of mask strips, the ends of the mask strips are respectively fixed to different sides of the mask frame, and at least two of the mask strips are arranged to cross each other so that the mask plate forms a hollow structure with multiple evaporation openings, and the two mask strips arranged to cross each other are arranged at intervals; An adsorption component is provided in the cover plate and is used for adsorbing the mask strip so that the mask strip always tends to approach the glass substrate.
2. The glass substrate evaporation device according to claim 1, wherein: The mask frame includes a supporting portion and a connecting portion. The supporting portion is arranged on the outside of the connecting portion. A supporting plate for fixing the supporting portion is provided on the base. The mask strip is connected to the connecting portion.
3. The glass substrate evaporation device according to claim 2, wherein: It also includes an elastic seal, which is arranged between the base and the cover plate, one end of the elastic seal abuts against the lower bottom surface of the cover plate, and the other end of the elastic seal abuts against the upper end surface of the support portion.
4. The glass substrate evaporation device according to any one of claims 1 to 3, characterized in that: There are two mask strips, and the two mask strips are arranged perpendicular to each other.
5. The glass substrate evaporation device according to claim 4, characterized in that: The adsorption component is arranged on the cover plate at a position corresponding to the intersection of two mask strips.
6. The glass substrate evaporation device according to claim 4, wherein: It also includes a spacer block, which is arranged at the intersection of two mask strips.
7. The glass substrate evaporation device according to any one of claims 1 to 3, characterized in that: The mask is a magnetic mask, and the adsorption component includes a magnetic attraction member arranged in the cover.
8. The glass substrate evaporation device according to any one of claims 1 to 3, characterized in that: A plurality of supporting columns are provided on a side of the mask facing the glass substrate, and the mask abuts against the glass substrate through the supporting columns.
9. The glass substrate evaporation device according to any one of claims 1 to 3, characterized in that: An elastic gasket is arranged between the cover plate and the glass substrate.
10. The glass substrate evaporation device according to claim 9, wherein: The gasket is arranged corresponding to the position of the mask.