Evaporation table sheet rack

Abstract

The utility model discloses an evaporation table sheet rack which comprises an evaporation table body, a plurality of containing grooves are formed in the upper portion in the evaporation table body, depth adjusting plates are arranged at the bottoms in the containing grooves in an inserted mode through vertical rods, a lifting plate is arranged in a first cavity through a lead screw, the lower ends of the vertical rods are fixedly connected with the upper portion of the lifting plate, and locking grooves are formed in the inner walls of the containing grooves. A locking groove is formed in the inner bottom of the containing groove, a positioning pressing piece is arranged in the locking groove through a connecting rod, an end plate extrusion mechanism is arranged in the middle of the interior of the second cavity, and the end plate extrusion mechanism is used for transversely extruding and pushing the positioning pressing piece, the connecting rod and the limiting end plate. And a lifting plate is arranged in the first cavity through a lead screw, so that the lifting plate is driven by the lead screw to lift and adjust, the use height of the depth adjusting plate in the accommodating groove can be adjusted, the depth of the accommodating groove is further adjusted, and coating evaporation use treatment of products with different insertion depths can be met.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating evaporation tables, in particular to an evaporation table sheet frame. Background Art

[0002] During the wafer processing process, the wafer needs to be evaporated and coated. As the main component of the evaporation table, the planetary frame has a vital impact on the yield of the product. An existing evaporation table planetary frame has a structure including a convex circular umbrella-shaped structure, and a number of receiving grooves are evenly arranged on the frame body in the circumferential direction, and the receiving grooves are correspondingly provided with cover plates. The evaporation table planetary frame of the above structure can play the role of evaporation coating on the wafer, but the edges of the wafer often have flat edges due to process requirements, and the receiving grooves are circular, which creates a gap between the flat edge of the wafer and the receiving groove. During evaporation, it is easy for metal to evaporate onto the back of the wafer and the cover plate, affecting the yield rate.

[0003] The prior art discloses a planetary frame for a wafer evaporation table with application number 202123311545.9. The planetary frame can fill the gaps through a cover plate, and the cover plate can be slid up and down to be removed and installed, effectively solving the problems raised in the background technology. It includes a frame body with an upward convex circular umbrella structure, and a plurality of accommodating grooves are evenly arranged on the circumference of the frame body. The accommodating grooves are fixedly provided with a cover assembly on one side close to the center of the circle, which can fill the gaps and can slide up and down. The cover assembly includes a vertical pole, the bottom of the vertical pole is fixedly connected to the frame body, and a collar is slidably sleeved on the vertical pole. The outer side of the collar is fixedly connected to the inner side of the cover plate, and a filling block that matches the gap is fixed on the outer edge of the bottom surface of the cover plate. It is simple to operate and easy to use, and is suitable for wafers of various specifications. However, it is not convenient to adjust the depth of the accommodating groove, and it is difficult to meet the coating evaporation use of products with different insertion depths. Utility Model Content

[0004] The purpose of the utility model is to provide an evaporation table rack to solve the problem in the prior art that it is inconvenient to adjust the depth of the accommodating groove and it is difficult to meet the coating evaporation use of products with different insertion depths.

[0005] To achieve the above-mentioned objectives, the present invention provides the following technical solutions: an evaporation table rack, comprising an evaporation table body, a plurality of accommodating grooves being provided in the upper portion of the evaporation table body, a depth adjustment plate being inserted into the bottom of the accommodating grooves through a vertical rod, a first cavity and a second cavity being provided inside the evaporation table body, a lifting plate being provided inside the first cavity through a lead screw, the lower end of the vertical rod being fixedly connected to the upper portion of the lifting plate, a locking groove being provided on the inner wall of the accommodating groove, and a positioning pressure piece being provided in the locking groove through a connecting rod, one end of the connecting rod being elastically slidably inserted into the second cavity through a spring and a limiting end plate, and an end plate extrusion mechanism being provided in the middle portion of the second cavity, and the end plate extrusion mechanism being used to laterally extrude and push the positioning pressure piece, the connecting rod and the limiting end plate.

[0006] Furthermore, a guide rod is provided inside the first cavity, and the lifting plate is slidably arranged with the plurality of guide rods.

[0007] Furthermore, the screw includes a screw rod rotatably arranged inside the first cavity through a bearing, the lower end of the screw rod is connected to the first motor through a first gear set, and the middle part of the lifting plate is threadedly connected to the screw rod.

[0008] Furthermore, the first gear set is a bevel gear set, and the first motor is fixedly arranged on the bottom wall of the first cavity.

[0009] Furthermore, the end plate extrusion mechanism includes a turntable rotatably arranged in the middle of the second cavity through a connecting shaft, a plurality of extrusion protrusions are provided on the outside of the turntable, and the extrusion protrusions are arranged in close correspondence with the limiting end plates one by one, and one end of the connecting shaft is connected to the second motor through a second gear set.

[0010] Furthermore, the positioning pressing piece is an arc-shaped pressing piece, and an anti-slip pad is provided on the inner side of the positioning pressing piece.

[0011] Compared with the prior art, the beneficial effects of the present invention are:

[0012] 1. In the present invention, a depth adjustment plate is inserted into the bottom of the accommodating groove through a vertical rod, and the lower end of the vertical rod is fixedly connected to the upper part of the lifting plate. A lifting plate is provided inside the first cavity through a lead screw, so that the lifting plate is driven to rise and fall by the lead screw, thereby adjusting the use height of the depth adjustment plate in the accommodating groove, and then adjusting the depth of the accommodating groove, which can meet the use and processing of coating evaporation of products with different insertion depths, and at the same time facilitates the upward discharge of the evaporated products for unloading processing, and the adjustment is convenient and fast, with high precision.

[0013] 2. The utility model provides a locking groove on the inner wall of the accommodating groove, and a positioning pressing piece is provided in the locking groove through a connecting rod. One end of the connecting rod is elastically slidably inserted into the second cavity through a spring and a limiting end plate, and an end plate squeezing mechanism is provided in the middle of the second cavity. The end plate squeezing mechanism is used to laterally squeeze and push the positioning pressing piece, the connecting rod and the limiting end plate, thereby locking the evaporation product inserted in the accommodating groove to prevent it from moving, thereby improving the safety of evaporation use. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The accompanying drawings are used to provide a further understanding of the present invention and constitute a part of the specification. Together with the embodiments of the present invention, they are used to explain the present invention and do not constitute a limitation of the present invention. In the accompanying drawings:

[0015] Figure 1 This is the main cross-sectional view of the overall structure of the utility model;

[0016] Figure 2This is a schematic diagram of the evaporation table structure of the utility model;

[0017] Figure 3 This is a cross-sectional view of the evaporation table structure of the present utility model.

[0018] In the figure: 1. Evaporation table; 2. Receiving groove; 3. Depth adjustment plate; 4. First cavity; 5. Vertical pole; 6. Lifting plate; 7. Guide rod; 8. Bearing; 9. Screw; 10. First gear set; 11. First motor; 12. Locking groove; 13. Positioning pressure piece; 14. Limiting end plate; 15. Second cavity; 16. Spring; 17. Turntable; 18. Connecting shaft; 19. Second gear set; 20. Second motor; 21. Connecting rod; 22. Extrusion protrusion. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0020] See also Figure 1 , Figure 2 , Figure 3 In the embodiment of the present utility model, an evaporation table rack includes an evaporation table body 1, a plurality of accommodating grooves 2 are provided on the upper part of the evaporation table body 1, a depth adjustment plate 3 is inserted into the bottom of the accommodating groove 2 through a vertical rod 5, and multiple groups of vertical rods 5 and depth adjustment plates 3 are provided. A first cavity 4 and a second cavity 15 are provided inside the evaporation table body 1, a lifting plate 6 is provided inside the first cavity 4 through a screw, the lower end of the vertical rod 5 is fixedly connected to the upper part of the lifting plate 6, the screw includes a screw rod 9 rotatably arranged inside the first cavity 4 through a bearing 8, and the lower end of the screw rod 9 is rotated by a first gear The group 10 is connected to the first motor 11 for transmission, and the middle part of the lifting plate 6 is threadedly connected to the screw 9. The first gear group 10 is a bevel gear group, and the first motor 11 is fixedly arranged on the bottom wall of the first cavity 4, so that the lifting plate 6 is driven to rise and fall by the screw, thereby adjusting the use height of the depth adjustment plate 3 in the accommodating groove 2, and then adjusting the depth of the accommodating groove 2, which can meet the use and processing of coating evaporation of products with different insertion depths, and at the same time facilitate the upward discharge of the evaporated products for unloading processing, and the adjustment is convenient and fast, with high precision.

[0021] like Figure 1 and Figure 3As shown, in order to lock the evaporation product inserted in the accommodating groove 2, a locking groove 12 is further provided on the inner wall of the accommodating groove 2, and a positioning pressure piece 13 is provided in the locking groove 12 through a connecting rod 21. One end of the connecting rod 21 is elastically slidably inserted into the second cavity 15 by a spring 16 and a limiting end plate 14, and an end plate squeezing mechanism is provided in the middle of the second cavity 15. The end plate squeezing mechanism includes a turntable 17 rotatably arranged in the middle of the second cavity 15 through a connecting shaft 18. A plurality of squeezing protrusions 22 are provided on the outer side of the turntable 17, and the squeezing protrusions 22 are closely arranged in a one-to-one correspondence with the limiting end plate 14. One end of the connecting shaft 18 is connected to a second motor 20 through a second gear set 19, and the end plate squeezing mechanism is used to laterally squeeze and push the positioning pressure piece 13, the connecting rod 21 and the limiting end plate 14, thereby locking the evaporation product inserted in the accommodating groove 2 to prevent it from moving and improve the safety of evaporation use.

[0022] like Figure 1 As shown, in order to ensure the stability of the lifting and lowering adjustment of the depth adjustment plate 3, a guide rod 7 is further provided inside the first cavity 4, and the lifting plate 6 and multiple guide rods 7 are slidingly arranged to guide the lifting plate 6 when it is lifted and lowered, which is beneficial to improving the stability of the lifting and lowering adjustment of the depth adjustment plate 3.

[0023] like Figure 3 As shown, in order to improve the stability of the product clamped and fixed in the receiving groove 2, the positioning pressure plate 13 is also set as an arc-shaped pressure plate, and an anti-slip pad is provided on the inner side of the positioning pressure plate 13, which increases the contact area and anti-slip property of the positioning pressure plate 13 and the product, thereby improving the stability of the product clamped and fixed in the receiving groove 2.

[0024] The working principle and usage process of the present invention are as follows: when in use, the lower part of the product to be evaporated is inserted into the accommodating tank 2, and the evaporation table body 1 is placed in the evaporation chamber to perform evaporation and solidification treatment on the coated product, and a depth adjustment plate 3 is inserted into the bottom of the accommodating tank 2 through a vertical rod 5, and a first cavity 4 and a second cavity 15 are provided inside the evaporation table body 1. A lifting plate 6 is provided inside the first cavity 4 through a screw, and the lower end of the vertical rod 5 is fixedly connected to the upper part of the lifting plate 6, so that the lifting plate 6 is driven to rise and fall by the screw, so that the use height of the depth adjustment plate 3 in the accommodating tank 2 can be adjusted, and then the depth of the accommodating tank 2 can be adjusted, which can meet the use and evaporation of products with different insertion depths, and at the same time facilitate the upward discharge of the evaporated product for unloading treatment, and the adjustment is convenient and fast, with high precision.

[0025] Finally, it should be noted that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein with equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. An evaporation table rack, comprising an evaporation table body (1), characterized in that: The evaporation table body (1) is provided with a plurality of accommodating grooves (2) at the upper part thereof, a depth adjustment plate (3) is inserted into the bottom of the accommodating grooves (2) through a vertical rod (5), a first cavity (4) and a second cavity (15) are provided inside the evaporation table body (1), a lifting plate (6) is provided inside the first cavity (4) through a lead screw, the lower end of the vertical rod (5) is fixedly connected to the upper part of the lifting plate (6), a locking groove (12) is provided on the inner wall of the accommodating groove (2), and a positioning pressing piece (13) is provided in the locking groove (12) through a connecting rod (21), one end of the connecting rod (21) is elastically slidably inserted into the second cavity (15) through a spring (16) and a limiting end plate (14), and an end plate extrusion mechanism is provided in the middle part of the second cavity (15), and the end plate extrusion mechanism is used to laterally extrude and push the positioning pressing piece (13), the connecting rod (21) and the limiting end plate (14).

2. The evaporation table rack according to claim 1, characterized in that: A guide rod (7) is further provided inside the first cavity (4), and the lifting plate (6) and the plurality of guide rods (7) are slidably arranged.

3. The evaporation table rack according to claim 1, characterized in that: The screw comprises a screw rod (9) rotatably arranged inside the first cavity (4) via a bearing (8); the lower end of the screw rod (9) is connected to a first motor (11) via a first gear set (10); and the middle portion of the lifting plate (6) is threadedly connected to the screw rod (9).

4. The evaporation table rack according to claim 3, characterized in that: The first gear set (10) is a bevel gear set, and the first motor (11) is fixedly arranged on the inner bottom wall of the first cavity (4).

5. The evaporation table rack according to claim 1, characterized in that: The end plate extrusion mechanism includes a turntable (17) rotatably arranged in the middle of the second cavity (15) via a connecting shaft (18), a plurality of extrusion protrusions (22) are provided on the outer side of the turntable (17), and the extrusion protrusions (22) are arranged in close contact with the limiting end plate (14) in a one-to-one correspondence, and one end of the connecting shaft (18) is connected to the second motor (20) via a second gear set (19).

6. The evaporation table rack according to claim 1, characterized in that: The positioning pressing piece (13) is an arc-shaped pressing piece, and an anti-slip pad is provided on the inner side of the positioning pressing piece (13).

Images