Temperature control system for base material without high temperature resistance in vacuum chamber coating

Abstract

The utility model discloses a temperature control system for a base material not resistant to high temperature in vacuum chamber coating, which comprises a heat exchange assembly arranged in a vacuum chamber and attached to the base material for heat exchange, and the heat exchange assembly is communicated with a cooling module and a heating module which are arranged outside the vacuum chamber and are arranged in parallel; the cooling module is arranged to cool the base material in the coating process, so that the temperature of the base material is taken away, the base material is coated at a low temperature, the base material which is not resistant to high temperature is protected in the coating process, the coating effect is prevented from being influenced by the high temperature, continuous operation can be achieved, meanwhile, the cooling time of the base material is shortened, and the production efficiency is improved; the temperature rising module is arranged, the temperature of the vacuum chamber and the temperature of the base material are adjusted to be flush with the environment temperature, and the problem that when the vacuum door is opened to take out the coated base material, water molecules in air are condensed into water drops, and the base material is affected is solved.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum coating, and in particular relates to a temperature control system for coating a substrate that is not resistant to high temperatures in a vacuum chamber. Background Art

[0002] Vacuum coating is commonly used to coat substrate surfaces and impart target material properties to substrates. Because vacuum coating increases the target's energy value, forming high-energy atomic or ion clusters, the process generates significant heat. Excessively high temperatures within the vacuum chamber can affect the performance and appearance of heat-sensitive substrates. Vacuum coating typically relies on natural cooling to ensure product quality, which is time-consuming and labor-intensive.

[0003] Vacuum coating refers to a type of coating that requires a high vacuum level. It includes vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, PLD laser sputtering deposition, and many other methods. The substrate to be coated is called the substrate, and the raw material is called the target. Vacuum coating typically involves increasing the energy of the target within a vacuum chamber, exciting it into high-energy atomic or ion clusters that are ultimately deposited on the substrate surface, forming a film. This process of energizing the target generates a significant amount of heat. The longer the vacuum coating process takes, the higher the temperature accumulated within the vacuum chamber, and the longer it takes to cool to room temperature.

[0004] Usually, materials used for vacuum chamber coating are heat-resistant substrates or require a relatively short coating time, so there is no need to spend time considering the cooling problem of vacuum chamber coating. However, with the increasing application of vacuum chamber coating in the market, some substrates that are not resistant to high temperatures or require longer vacuum chamber coating times have been developed. Among them, substrates that are not resistant to high temperatures refer to materials that will melt, deform, or change their properties at temperatures below 1000°C. Currently, vacuum chamber coating usually ensures product quality by reducing the single coating time and natural cooling. The long cooling time affects production efficiency.

[0005] When the cooling temperature is low, when the vacuum chamber door is opened, condensation water will be generated on the surface due to the temperature difference between the substrate temperature and the ambient temperature, causing problems affecting the substrate. Utility Model Content

[0006] The purpose of the present utility model is to provide a temperature control system for coating a substrate that is not resistant to high temperatures in a vacuum chamber, so as to solve the above-mentioned technical problems. A cooling module is provided to cool the substrate during the coating process, thereby taking away the temperature of the substrate and allowing the substrate to be coated at a lower temperature, thereby protecting the substrate that is not resistant to high temperatures during the coating process and avoiding high temperatures that affect the coating effect. Therefore, continuous operation can be achieved and the cooling time of the substrate is shortened, thereby improving production efficiency. A heating module is provided to adjust the temperature of the vacuum chamber and the temperature of the substrate to a state that is equal to the ambient temperature, so as to avoid the problem that when the vacuum door is opened to take out the coated substrate, the surface of the substrate is affected by condensation of water molecules in the air into water droplets.

[0007] In order to achieve the above-mentioned purpose of the utility model, the technical solution adopted by the utility model is as follows:

[0008] A temperature control system for coating a substrate that is not resistant to high temperatures in a vacuum chamber, comprising a heat exchange component disposed within the vacuum chamber and in contact with the substrate for heat exchange, the heat exchange component being connected to a cooling module and a heating module disposed outside the vacuum chamber and arranged in parallel;

[0009] The output end of the cooling module is connected to the output end of the heating module and outputs to the input end of the heat exchange component;

[0010] The input end of the cooling module is connected to the input end of the heating module and is connected to the output end of the heat exchange component;

[0011] Heat exchange fluids flow through the cooling module, heating module, and heat exchange assembly. The cooling module cools the substrate during the coating process, thereby reducing the substrate's temperature and allowing the substrate to be coated at a lower temperature. This protects substrates that are sensitive to high temperatures from being affected by high temperatures, allowing continuous operation while shortening the cooling time of the substrate, thereby improving production efficiency. The heating module adjusts the temperature of the vacuum chamber and the substrate to a state consistent with the ambient temperature, preventing the problem of water molecules in the air condensing into water droplets on the surface of the substrate when the vacuum door is opened to remove the coated substrate, which may affect the substrate. The parallel cooling module and heating module are connected to the heat exchange assembly and can be switched according to the need for heating or cooling. They have the same input and output terminals and use the same medium to adjust heat exchange fluids of different temperatures. After the temperature is adjusted, the temperature can be switched as needed. The switching speed is fast, the structure is compact, and the integration is high. The output temperature is adjusted by recirculating the internal heat exchange fluid, and the adjustment speed is fast, which facilitates the rapid switching of the output heat exchange fluid between the cooling module and the heating module according to the need for heating or cooling.

[0012] Preferably, the cooling module includes a refrigeration section, a first control end connected to the refrigeration section and controlling whether a heat exchange fluid is input or not, and a second control end connected to the refrigeration section and controlling whether a heat exchange fluid is output or not;

[0013] The temperature rising module includes a temperature rising section, a third control end connected to the temperature rising section and controlling whether the heat exchange fluid is input or not, and a fourth control end connected to the temperature rising section and controlling whether the heat exchange fluid is output or not;

[0014] The first control end is connected to the third control end and is connected to the output end of the heat exchange component;

[0015] The second control end is connected to the fourth control end and is connected to the input end of the heat exchange component. A first control end and a third control end with the same input port, and a second control end and a fourth control end with the same output port are provided; they can be switched accordingly according to the need to heat up or cool down the substrate. If cooling is required, the heat exchange fluid flows back to the refrigeration section through the opened first control end to readjust the temperature, and is delivered to the heat exchange component through the opened second control end. At this time, the third control end and the fourth control end are both closed, and the temperature is readjusted by reflux and re-delivered to the heat exchange component in parallel, so that the substrate can be plated at a lower temperature to avoid the high temperature affecting the substrate coating effect, and cooling. The speed is fast, which is beneficial to improving production efficiency. Similarly, if heating or insulation is required, by closing the first control end and the second control end and opening the third control end and the fourth control end, the heat exchange fluid will flow back to the heating tank to adjust the temperature and then be delivered to the heat exchange component. This adjustment method can be switched according to needs, with high structural integration, and can quickly switch heat exchange fluids after different temperature controls. After the coating is completed, the switchable heat exchange fluid can be used to adjust the temperature of the vacuum chamber and the temperature of the substrate to a state that is equal to the ambient temperature, avoiding the problem that when the vacuum door is opened to take out the coated substrate, the surface of the substrate will be affected by the condensation of water molecules in the air into water droplets.

[0016] Preferably, the refrigeration section includes a refrigeration tank, a first conveying device, and a refrigeration controller that are connected to each other, and the output end of the refrigeration controller flows back into the refrigeration tank;

[0017] The second control end includes a first control valve connected to the output end of the refrigeration tank, and a second conveying device with two ends respectively connected to the first control valve and the heat exchange component;

[0018] The first control end includes a third control valve, which is connected to the output end of the heat exchange component and the input end of the refrigeration tank. A first conveying device and a refrigeration controller are provided so that the heat exchange fluid in the refrigeration tank can flow back to the refrigeration tank under the temperature control of the refrigeration controller to adjust the temperature of the heat exchange fluid; the third control valve is used to control the input of the refrigerated heat exchange fluid, and the first control valve is used to control the output of the heat exchange fluid, and the corresponding output power is provided by the second conveying device. This input and output method is conducive to rapid switching. Under the conveyance of the second conveying device, the heat exchange fluid is conveyed to the heat exchange component to cool the substrate, thereby improving the stability of the substrate during the coating process, shortening the cooling time, and improving production efficiency.

[0019] Preferably, the temperature rising section comprises a heating tank, and the heating tank is provided with a heating controller;

[0020] The fourth control end includes a second control valve connected to the output end of the heating tank, and a third conveying device with two ends respectively connected to the second control valve and the heat exchange component;

[0021] The third control end includes a fourth control valve, which is connected to the heat exchange assembly output and the heating tank input. The third and fourth control valves are interconnected, allowing the heat exchange assembly output to be diverted to the third and fourth control valves via the same pipeline, thereby allowing it to be diverted to the refrigeration tank or the heating tank. The second and third conveying device outputs are connected to the same pipeline and output to the heat exchange assembly input. A heating controller is set to control the temperature of the heat exchange fluid in the heating tank to a target temperature; a fourth control valve is used to control the input of the heat exchange fluid after reflux, and a second control valve is used to control the output of the heat exchange fluid, and corresponding output power is provided by a third conveying device. This input and output method is conducive to fast switching. Under the conveyance of the third conveying device, the heat exchange fluid is transported to the heat exchange component to perform heat exchange on the substrate and corresponding heating or insulation operation. When the cooling temperature of the substrate is lower than the ambient temperature, it is heated. When it is heated to the same temperature as the ambient temperature, it is continuously kept warm until the vacuum door is opened to take out the substrate, so as to improve the substrate temperature and keep the ambient temperature equal to the ambient temperature after the coating is completed, and the temperature of the vacuum chamber is equal to the ambient temperature, so as to avoid the problem that when the vacuum door is opened to take out the coated substrate, the surface of the substrate is affected by the condensation of water molecules in the air into water droplets.

[0022] Preferably, the output end of the heat exchange component is connected to a return pipe, and the return pipe is connected to both the input end of the cooling module and the input end of the heating module;

[0023] The input of the heat exchange assembly is connected to the delivery pipeline, as are the outputs of the cooling module and the heating module. Specifically, the third and fourth control valves are interconnected, allowing the output of the heat exchange assembly to be diverted to the third and fourth control valves in the return pipeline, allowing it to be diverted to either the refrigeration tank or the heating tank. The outputs of the second and third conveying devices are connected to the delivery pipeline and output to the input of the heat exchange assembly. The heat exchange fluid after heat exchange through the heat exchange component is returned to the same input end of the third control valve and the fourth control valve through the return pipe. The third control valve or the fourth control valve is opened as needed to return the heat exchange fluid to the refrigeration tank or the heating tank. A delivery pipe is provided and is connected to the same output end of the first control valve and the second control valve. The first control valve or the second control valve is opened as needed to deliver the heat exchange fluid of the corresponding temperature into the heat exchange component. This switching method is simple and easy to implement. The heat exchange fluid is delivered through the same return pipe and the delivery pipe, and the cycle heating state or cooling state is switched as needed. The overall structure is compact. After the coating is completed, the heat exchange fluid is output by switching to the heating tank. The output heat exchange fluid has a higher temperature and is delivered to the heat exchange component. The heat exchange fluid with a lower temperature that remains after the coating is completed is further pushed out and returned to the return pipe. The switching speed between the higher temperature heat exchange fluid and the lower temperature heat exchange fluid is fast, which is conducive to quickly entering the heating or insulation state and improving production efficiency.

[0024] Preferably, the heat exchange assembly includes a plurality of heat exchange plates that are sequentially arranged and disposed within spaces for heat exchange fluid circulation. The heat exchange fluids within adjacent heat exchange plates flow in opposite directions, and the outer surfaces of the outermost heat exchange plates are in contact with the substrate. If the heat exchange fluid within the heat exchange plates in contact with the substrate flows vertically upward, then the heat exchange fluid within the sequentially arranged heat exchange plates flows downward, upward, downward, and so on. The interiors of the plurality of heat exchange plates are interconnected. The heat exchange plates in contact with the substrate receive heat exchange fluids delivered from interconnected delivery pipes, and the heat exchange plates away from the substrate output heat exchange fluids to interconnected return pipes. The substrate is fitted with the heat exchange plate to exchange heat to complete the cooling of the substrate during the coating process or to perform heating and insulation operations after the coating is completed; the substrate is continuously cooled by the heat exchange plate during the coating process, thereby protecting the high-temperature-sensitive substrate during the coating process and avoiding high temperatures that affect the coating effect, so continuous operation can be achieved, while shortening the cooling time of the substrate, thereby improving production efficiency; the heating and insulation operations adjust the temperature of the vacuum chamber and the temperature of the substrate to a state that is equal to the ambient temperature, avoiding the problem that when the vacuum door is opened to take out the coated substrate, the surface of the substrate will be affected by the condensation of water molecules in the air into water droplets, and the heat exchange is carried out by contact with the heat exchange plate, which is simple to implement and has good heat transfer effect, and can meet the temperature control requirements during and after coating.

[0025] Preferably, the bonding surface between the cold and hot exchange plate and the substrate is a plane or an arc surface. The cold and hot exchange plate and the substrate are tightly bonded, and the bonding surface of the cold and hot exchange plate is changed to a plane or an arc surface or a roller state according to the bonding surface of the substrate, in order to achieve a tight fit, increase the direct or indirect contact area between hot and cold, and improve the temperature control efficiency. If it is a flat metal block substrate, such as an aluminum profile, a hard plastic sheet, etc., the cold and hot exchange plate can be made into a flat state; if it is a flexible substrate, such as a plastic film, including but not limited to PP, PET, PI, etc., the cold and hot exchange plate can be made into a roller state and bonded to the film, in order to increase the direct contact area between hot and cold or the indirect contact area with the cold and hot exchange plate on the side away from the substrate, and improve the temperature control efficiency;

[0026] A temperature control method using the temperature control system as described above, characterized in that it comprises the following steps:

[0027] S1. Temperature control of heat exchange fluid; the heat exchange fluid is cooled in the refrigeration tank and heated in the heating tank, respectively, for standby use;

[0028] S2, vacuum coating and cooling: laminating the substrate onto the heat exchange component and coating the substrate in a vacuum state;

[0029] The heat exchange fluid in the refrigeration tank is transported to the heat exchange component to continuously cool the substrate during coating;

[0030] S3, substrate insulation; after the vacuum coating is completed, the heat exchange component switches to the heat exchange fluid in the heating tank, so that the temperature of the substrate and the temperature in the vacuum chamber are kept at the same level as the ambient temperature, and the coating is completed. The heat exchange fluid in the refrigeration tank is transported to the heat exchange component to continuously cool the substrate in the coating process, thereby protecting the substrate that is not resistant to high temperatures during the coating process, avoiding high temperatures that affect the coating effect, so that continuous operation can be achieved, while shortening the cooling time of the substrate, thereby improving production efficiency; after the coating is completed, the heat exchange fluid in the heating tank is switched to be transported to the heat exchange component to heat up or keep the substrate or the vacuum chamber warm, and the temperature of the vacuum chamber and the substrate is adjusted to the same level as the ambient temperature, so as to avoid the problem that when the vacuum door is opened to take out the coated substrate, the surface of the substrate will be affected by the condensation of water molecules in the air into water droplets.

[0031] Preferably, the heating temperature of the heat exchange fluid inside the heating tank is set to 0°C to 80°C.

[0032] Preferably, the refrigeration temperature of the heat exchange fluid inside the refrigeration tank is controlled to be 20°C to minus 50°C.

[0033] Preferably, in step S1, before the film coating begins in the vacuum chamber, the first control valve, the third control valve, and the second conveying device are opened; the heat exchange fluid prepared in the refrigeration tank is passed into the heat exchange component in the vacuum chamber and the heat exchange fluid is returned to the refrigeration tank to form a circulation state, thereby reducing the temperature in the vacuum chamber;

[0034] In step S2, during the coating process, the heat exchange fluid prepared in the refrigeration tank is continuously passed into the heat exchange component in the vacuum chamber to cool the substrate, and the heat exchange fluid is returned to the refrigeration tank to form a circulation state;

[0035] In step S3, after the vacuum coating is completed, the refrigeration tank continuously delivers the heat exchange fluid to cool the coated substrate. When the temperature of the coated substrate is restored to the same level as the ambient temperature, the second conveying device, the first control valve and the third control valve are closed, and the second control valve, the fourth control valve and the third conveying device are opened. The heat exchange fluid in the heating tank is passed into the heat exchange component in the vacuum chamber to keep the substrate warm and the heat exchange fluid delivered by the refrigeration tank is discharged outside the vacuum chamber. The temperature inside the vacuum chamber is restored to the same level as the ambient temperature, and the temperature of the substrate after coating is maintained at the same level as the ambient temperature, thereby completing the coating.

[0036] Preferably, the heat exchange components are arranged in a plurality of annular arrays. Specifically, the heat exchange components are arranged in a plurality of annular arrays with the vacuum ion source 7 as the center.

[0037] This application has achieved beneficial technical effects:

[0038] The utility model is provided with a cooling module to cool the substrate during the coating process, thereby taking away the temperature of the substrate and making the substrate be coated at a lower temperature, thereby protecting the substrate that is not resistant to high temperatures during the coating process and avoiding the influence of high temperature on the coating effect. Therefore, continuous operation can be achieved and the cooling time of the substrate can be shortened, thereby improving production efficiency. A heating module is provided to adjust the temperature of the vacuum chamber and the temperature of the substrate to a state that is equal to the ambient temperature, thereby avoiding the problem that when the vacuum door is opened to take out the coated substrate, the surface of the substrate is affected by the condensation of water molecules in the air into water droplets. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 Shown is a schematic diagram of the structure of the temperature control system;

[0040] Figure 2 Shown is a schematic diagram of the layout structure of the heat exchange component.

[0041] Reference numerals

[0042] 1-substrate; 2-heat exchange component; 3-cooling module; 4-heating module; 5-reflux pipe; 6-delivery pipe; 31-refrigeration section; 32-first control end; 33-second control end; 41-heating section; 42-third control end; 43-fourth control end; 310-refrigeration tank; 311-first delivery device; 312-refrigeration controller; 331-first control valve; 332-second delivery device; 410-heating tank; 411-heating controller; 431-second control valve; 432-third delivery device; 21-cold and heat exchange plate. DETAILED DESCRIPTION

[0043] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the specific implementation methods of the present invention will be described below with reference to the accompanying drawings. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings and other implementation methods can be obtained based on these drawings without inventive work.

[0044] The technical solution of the present utility model is described in detail below with reference to specific embodiments.

[0045] Reference Figure 1 and 2As shown, a temperature control system for coating a substrate that is not resistant to high temperatures in a vacuum chamber comprises a heat exchange component 2 disposed in the vacuum chamber and in contact with the substrate 1 for heat exchange, the heat exchange component 2 being connected to a cooling module 3 and a heating module 4 disposed outside the vacuum chamber and arranged in parallel;

[0046] The output end of the cooling module 3 is connected to the output end of the heating module 4 and outputs to the input end of the heat exchange component 2;

[0047] The input end of the cooling module 3 is connected to the input end of the heating module 4 and is connected to the output end of the heat exchange component 2;

[0048] Heat exchange fluid is circulated in the cooling module 3, the heating module 4 and the heat exchange assembly 2. The heat exchange fluid uses ethylene glycol, propylene glycol and the like as the heat exchange medium. A cooling module 3 is provided to cool the substrate 1 during the coating process, thereby removing the temperature of the substrate 1 and allowing the substrate 1 to be coated at a lower temperature. This protects the substrate that is not resistant to high temperatures during the coating process and prevents the coating effect from being affected by high temperatures. Continuous operation is thereby possible, while the cooling time of the substrate is shortened, thereby improving production efficiency. A heating module 4 is provided to adjust the temperature of the vacuum chamber and the substrate to a state that is equal to the ambient temperature. This prevents the problem of water molecules in the air condensing into water droplets on the surface of the substrate when the vacuum door is opened to remove the coated substrate, which may affect the substrate. The parallel cooling module 3 and the heating module 4 are connected to the heat exchange assembly 2 and can be switched according to the need for heating or cooling. They have the same input and output ends, use the same medium to adjust heat exchange fluids of different temperatures, and switch as needed after the temperature is adjusted. The switching speed is fast, the structure is compact, and the integration is high. The output temperature is adjusted by recirculating the internal heat exchange fluid, and the adjustment speed is fast, which facilitates the rapid switching of the output heat exchange fluid between the cooling module 3 and the heating module 4 according to the need for heating or cooling.

[0049] The cooling module 3 includes a cooling section 31, a first control end 32 connected to the cooling section 31 and controlling the input of the heat exchange fluid, and a second control end 33 connected to the cooling section 31 and controlling the output of the heat exchange fluid.

[0050] The temperature increasing module 4 includes a temperature increasing section 41, a third control terminal 42 connected to the temperature increasing section 41 and controlling the input of the heat exchange fluid, and a fourth control terminal 43 connected to the temperature increasing section 42 and controlling the output of the heat exchange fluid.

[0051] The first control end 32 is connected to the third control end 42 and is connected to the output end of the heat exchange component 2;

[0052] The second control end 33 is connected to the fourth control end 43 and is connected to the input end of the heat exchange component 2. A first control end 32 and a third control end 42 with the same input port, and a second control end 33 and a fourth control end 43 with the same output port are provided; they can be switched accordingly according to the need to heat up or cool down the substrate 1. If cooling is required, the heat exchange fluid flows back to the refrigeration section 31 through the opened first control end 32 to readjust the temperature, and is delivered to the heat exchange component 2 through the opened second control end 33. At this time, the third control end 42 and the fourth control end 43 are both closed, and the temperature is readjusted by reflux and re-delivered to the heat exchange component 2 in parallel, so that the substrate 1 can be plated at a lower temperature to avoid the influence of high temperature on the substrate plating. The film has an effect, and the cooling speed is fast, which is beneficial to improving production efficiency; similarly, if it is necessary to increase the temperature or keep warm, by closing the first control end 32 and the second control end 33, and opening the third control end 42 and the fourth control end 43, the heat exchange fluid will flow back to the heating tank to adjust the temperature and then be transported to the heat exchange component; this adjustment method can be switched according to needs, and the structural integration is high. It can quickly switch the heat exchange fluid after different temperature controls. After the coating is completed, the switchable heat exchange fluid can be used to adjust the temperature of the vacuum chamber and the temperature of the substrate to a state that is equal to the ambient temperature, so as to avoid the problem that when the vacuum door is opened to take out the coated substrate, the surface of the substrate will be affected by the condensation of water molecules in the air into water droplets.

[0053] The refrigeration section 31 includes a refrigeration tank 310, a first conveying device 311, and a refrigeration controller 312, which are connected to each other. The output end of the refrigeration controller 312 flows back into the refrigeration tank 310.

[0054] The second control end 33 includes a first control valve 331 connected to the output end of the refrigeration tank 310, and a second conveying device 332 with both ends respectively connected to the first control valve 331 and the heat exchange component 2;

[0055] The first control end 32 includes a third control valve, which is connected to the output end of the heat exchange component 2 and the input end of the refrigeration tank 310. A first conveying device 311 and a refrigeration controller 312 are provided so that the heat exchange fluid in the refrigeration tank 310 can flow back to the refrigeration tank 310 under the temperature control of the refrigeration controller 312 to adjust the temperature of the heat exchange fluid; the third control valve is used to control the input of the refrigerated heat exchange fluid after the return, and the first control valve 331 is used to control the output of the heat exchange fluid, and the corresponding output power is provided by the second conveying device 332. This input and output method is conducive to fast switching. Under the conveyance of the second conveying device 332, the heat exchange fluid is conveyed to the heat exchange component 2 to cool the substrate 1, thereby improving the stability of the substrate during the coating process, shortening the cooling time, and improving production efficiency.

[0056] The temperature rising section 41 includes a heating tank 410 , and the heating tank 410 is provided with a heating controller 411 ;

[0057] The fourth control end 43 includes a second control valve 431 connected to the output end of the heating tank 410, and a third conveying device 432 whose two ends are respectively connected to the second control valve 431 and the heat exchange component 2;

[0058] The third control terminal 42 includes a fourth control valve, which is connected to the output of the heat exchange assembly 2 and the input of the heating tank 410. The third and fourth control valves are interconnected, and the output of the heat exchange assembly 2 is diverted to the third and fourth control valves through the same pipeline, thereby diverting the flow to the refrigeration tank 310 or the heating tank 410. The output of the second conveying device 332 and the output of the third conveying device 432 are connected to the same pipeline and output to the input of the heat exchange assembly 2. A heating controller 411 is set to control the temperature of the heat exchange fluid in the heating tank 410 to a target temperature; a fourth control valve is used to control the input of the heat exchange fluid after reflux, and a second control valve 431 is used to control the output of the heat exchange fluid, and corresponding output power is provided by a third conveying device 432. This input and output method is conducive to fast switching. The heat exchange fluid is conveyed to the heat exchange component 2 under the conveyance of the third conveying device 432 to perform heat exchange or insulation operations on the substrate 1. When the cooling temperature of the substrate 1 is lower than the ambient temperature, it is heated. When it is heated to the same temperature as the ambient temperature, it is continuously kept warm until the vacuum door is opened to take out the substrate, so as to improve the substrate temperature and keep the ambient temperature equal to the ambient temperature after the coating is completed, and the temperature of the vacuum chamber is equal to the ambient temperature, so as to avoid the problem that when the vacuum door is opened to take out the coated substrate, the surface of the substrate will be affected by the condensation of water molecules in the air into water droplets.

[0059] The output end of the heat exchange component 2 is connected to the return pipe 5, and the return pipe 5 is connected to the input end of the cooling module 3 and the input end of the heating module 4;

[0060] The input end of the heat exchange assembly 2 is connected to the delivery pipe 6, and the output ends of the cooling module 3 and the heating module 4 are also connected to the delivery pipe 6. Specifically, the third control valve and the fourth control valve are interconnected, and the output end of the heat exchange assembly 3 is diverted to the third and fourth control valves in the return pipe 5, and then diverted to the refrigeration tank 310 or the heating tank 410. The output ends of the second conveying device 332 and the output ends of the third conveying device 432 are connected to the delivery pipe 6 and output to the input end of the heat exchange assembly 2. The heat exchange fluid after heat exchange through the heat exchange component 2 is returned to the same input end of the third control valve and the fourth control valve through the return pipe 5. The third control valve or the fourth control valve is opened as needed to return the heat exchange fluid to the refrigeration tank 310 or the heating tank 410; a delivery pipe 6 is provided and is connected to the same output end of the first control valve 331 and the second control valve 431. The first control valve 331 or the second control valve 431 is opened as needed to deliver the heat exchange fluid of the corresponding temperature to the heat exchange component 2. This switching method is simple and easy to implement. The heat exchange fluid is output from the heating tank 310 after the coating is completed. The output heat exchange fluid has a higher temperature and is delivered to the heat exchange component 2. The heat exchange fluid with a lower temperature that remains when the coating is completed is further pushed out and returned to the return pipe 5. The switching speed of the higher temperature heat exchange fluid and the lower temperature heat exchange fluid is fast, which is conducive to quickly entering the heating or insulation state and improving production efficiency.

[0061] The heat exchange component 2 includes a plurality of cold and heat exchange plates 21 that are sequentially arranged and internally provided with a space for the circulation of heat exchange fluid. The flow directions of the heat exchange fluid inside the adjacent cold and heat exchange plates 21 are opposite, and the outer surface of the cold and heat exchange plate 21 arranged on the outermost side is in contact with the substrate 1. The heat exchange components 2 are arranged in a ring array. Specifically, the heat exchange component 2 is centered on the vacuum ion source 7 and is arranged in a ring array. If the flow direction of the heat exchange fluid inside the cold and heat exchange plate 21 in contact with the substrate 1 is vertically upward, the flow direction of the heat exchange fluid inside the cold and heat exchange plates 21 arranged in sequence is downward, upward, downward, and so on; the interiors of the plurality of cold and heat exchange plates 21 are connected; the cold and heat exchange plates 21 in contact with the substrate 1 receive the heat exchange fluid transported from the connected delivery pipe 6, and the cold and heat exchange plates 21 away from the substrate 1 output the heat exchange fluid to the connected return pipe 5. The substrate 1 is fitted with the heat exchange plate 21 for heat exchange to complete the cooling of the substrate 1 during the coating process or to perform heating and insulation operations after the coating is completed; during the coating process, the substrate 1 is continuously cooled by the heat exchange plate 21, thereby protecting the high-temperature-sensitive substrate during the coating process to avoid high temperatures affecting the coating effect, so that continuous operation can be achieved, while shortening the cooling time of the substrate, thereby improving production efficiency; the heating and insulation operations adjust the temperature of the vacuum chamber and the temperature of the substrate to a state that is equal to the ambient temperature, avoiding the problem that when the vacuum door is opened to take out the coated substrate, the surface will be affected by the condensation of water molecules in the air into water droplets, thereby affecting the substrate. Heat exchange is performed by contact with the heat exchange plate 21, which is simple to implement and has good heat transfer effect, and can meet the temperature control requirements during and after coating.

[0062] The bonding surface between the cold and hot exchange plate 21 and the substrate 1 is a plane or an arc surface. The cold and hot exchange plate 21 and the substrate 1 are tightly bonded, and the bonding surface of the cold and hot exchange plate 21 is changed to a plane, an arc surface or a roller state according to the bonding surface of the substrate, in order to achieve a tight fit, increase the direct or indirect contact area between hot and cold, and improve the temperature control efficiency. If it is a flat metal block substrate, such as an aluminum profile, a hard plastic sheet, etc., the cold and hot exchange plate can be made into a flat state; if it is a flexible substrate, such as a plastic film, including but not limited to PP, PET, PI, etc., the cold and hot exchange plate can be made into a roller state and bonded to the film, in order to increase the direct contact area between hot and cold or the indirect contact area with the cold and hot exchange plate on the side away from the substrate, and improve the temperature control efficiency;

[0063] A temperature control method using any of the above temperature control systems comprises the following steps:

[0064] S1. Temperature control of heat exchange fluid; the heat exchange fluid is cooled in the refrigeration tank and heated in the heating tank, respectively, for standby use;

[0065] S2, vacuum coating and cooling: laminating the substrate onto the heat exchange component and coating the substrate in a vacuum state;

[0066] The heat exchange fluid in the refrigeration tank is transported to the heat exchange component to continuously cool the substrate during coating;

[0067] S3, substrate insulation; after the vacuum coating is completed, the heat exchange component switches to the heat exchange fluid in the heating tank, so that the temperature of the substrate and the temperature in the vacuum chamber are kept at the same level as the ambient temperature, and the coating is completed. The heat exchange fluid in the refrigeration tank is transported to the heat exchange component to continuously cool the substrate in the coating process, thereby protecting the substrate that is not resistant to high temperatures during the coating process, avoiding high temperatures that affect the coating effect, so that continuous operation can be achieved, while shortening the cooling time of the substrate, thereby improving production efficiency; after the coating is completed, the heat exchange fluid in the heating tank is switched to be transported to the heat exchange component to heat up or keep the substrate or the vacuum chamber warm, and the temperature of the vacuum chamber and the substrate is adjusted to the same level as the ambient temperature, so as to avoid the problem that when the vacuum door is opened to take out the coated substrate, the surface of the substrate will be affected by the condensation of water molecules in the air into water droplets.

[0068] The heating temperature of the heat exchange fluid inside the heating tank is set to 0°C to 80°C;

[0069] The refrigeration temperature of the heat exchange fluid inside the refrigeration tank is controlled to be 20°C to minus 50°C.

[0070] In step S1, before the film coating begins in the vacuum chamber, the first control valve, the third control valve, and the second conveying device are opened; the heat exchange fluid prepared in the refrigeration tank is passed into the heat exchange component in the vacuum chamber and the heat exchange fluid is returned to the refrigeration tank to form a circulation state, thereby reducing the temperature in the vacuum chamber;

[0071] In step S2, during the coating process, the heat exchange fluid prepared in the refrigeration tank is continuously passed into the heat exchange component in the vacuum chamber to cool the substrate, and the heat exchange fluid is returned to the refrigeration tank to form a circulation state;

[0072] In step S3, after the vacuum coating is completed, the refrigeration tank continuously delivers the heat exchange fluid to cool the coated substrate. When the temperature of the coated substrate is restored to the same level as the ambient temperature, the second conveying device, the first control valve and the third control valve are closed, and the second control valve, the fourth control valve and the third conveying device are opened. The heat exchange fluid in the heating tank is passed into the heat exchange component in the vacuum chamber to keep the substrate warm and the heat exchange fluid delivered by the refrigeration tank is discharged outside the vacuum chamber. The temperature inside the vacuum chamber is restored to the same level as the ambient temperature, and the temperature of the substrate after coating is maintained at the same level as the ambient temperature, thereby completing the coating.

[0073] The present technical solution adopts a vacuum ion source to perform the coating operation; after the vacuum ion source is turned off, the vacuum coating is completed, and the heat exchange fluid is continuously supplied through the refrigeration tank to cool the substrate after the coating is completed. The temperature of the vacuum chamber lacks a heat source because the ion source that has a heating effect is turned off, but the vacuum chamber is heated for a long time, and its internal temperature is at a high level, and the substrate after the coating is still at a high temperature level. Therefore, after the ion source is turned off, the heat exchange fluid output by the refrigeration tank is continued to be introduced to continuously cool the substrate after the coating is completed, so as to prevent the substrate after the coating from being heated to a temperature above its heat resistance level by the residual heat in the vacuum chamber, and at the same time cool the temperature in the vacuum chamber;

[0074] When the temperature of the substrate to be coated is reduced to the same level as or close to the ambient temperature, the temperature in the vacuum chamber is at a low level due to the long-term flow of the heat exchange fluid transported from the refrigeration tank, and its temperature is lower than the ambient temperature. Even if the flow of the cooled heat exchange fluid is stopped, the substrate after coating will be cooled by the temperature in the vacuum chamber, causing the temperature of the substrate after coating to continue to drop. Therefore, the heat exchange fluid from the heating tank is switched to be passed in, and the temperature in the vacuum chamber is adjusted while the substrate after coating is kept warm, so that the temperature in the vacuum chamber is kept equal to or close to the ambient temperature. This avoids the problem of condensation on the surface of the substrate due to the temperature of the substrate being equal to the ambient temperature while the temperature in the vacuum chamber is lower than the ambient temperature. At the same time, the substrate after coating is kept warm so that its temperature is equal to the ambient temperature, avoiding the problem of condensation on the surface of the substrate due to the low temperature of the substrate when the vacuum chamber door is opened to take out the substrate after coating.

[0075] After the substrate temperature and the temperature inside the vacuum chamber are equal to the ambient temperature, the vacuum chamber door is opened and the coated substrate is taken out; while achieving rapid cooling, the surface performance stability of the coated substrate can be controlled; the heat of the substrate during the coating process is removed by continuously introducing heat exchange fluid to cool the substrate.

[0076] The introduction of low-temperature refrigerant is intended to protect heat-sensitive substrates from damage during the vacuum coating process. After the coating process is complete, the heating ion source is turned off, and the heat exchange fluid from the refrigeration tank continues to be introduced to improve cooling efficiency within the vacuum chamber, allowing the coated substrate inside to quickly return to ambient temperature. Once the vacuum chamber temperature reaches a desired level, such as below or near ambient, the introduction of heat exchange fluid from the heating tank is switched to rapidly expel the low-temperature refrigerant from the vacuum chamber and return the chamber to ambient temperature. This process time control minimizes the impact on substrate performance and ensures the feasibility of vacuum coating for heat-sensitive substrates. If only the heat exchange fluid from the refrigeration tank is introduced, a large amount of condensate would be generated when the vacuum chamber door is opened, potentially damaging the substrate. The introduction of heat exchange fluid from the heating tank, which removes the heat exchange fluid from the refrigeration tank during the cooling process, ensures a dry environment within the vacuum chamber, protecting the substrate. The introduction of high-temperature refrigerant, which removes the low-temperature refrigerant, ensures a dry environment within the vacuum chamber, protecting the substrate. The ambient temperature refers to the ambient temperature outside the vacuum chamber.

[0077] During the heat exchange fluid standby process, the refrigeration controller and the first conveying device are turned on to provide the refrigeration tank with heat exchange fluid at a lower temperature, or the heating controller is turned on to control the heating tank to heat the heat exchange fluid.

[0078] The first control valve, the second control valve, the third control valve and the fourth control valve are all electronic ball valves; the first conveying device, the second conveying device and the third conveying device are all pumps.

[0079] Table 1 is a temperature change record table of the vacuum coating temperature control method, which records the temperature change process of the substrate being cooled by the heat exchange fluid in the cooling module to the heat exchange component. 3 / h, and the result is obtained under the flow rate of 116521Kcal / Hr. In the actual process, the faster the flow rate, the more stable the temperature control value and the better the process control effect.

[0080] Table 1:

[0081]

[0082]

[0083] In this technical solution, the temperature in the vacuum chamber is controlled by cooling in a refrigeration tank, heating in a heating tank and correspondingly delivering heat exchange fluid, thereby protecting the substrate and coating effect of the vacuum chamber coating;

[0084] The efficiency of temperature control is increased by increasing the direct contact area between the heat exchange plate and the coated substrate in the vacuum chamber or the indirect contact area with the heat exchange plate on the side away from the substrate. In addition, since the heat exchange fluid exchanges heat through the heat exchange component, thereby affecting the temperature in the vacuum chamber, the coating substrate can be heat exchanged by the overall temperature of the vacuum chamber, thereby controlling the temperature of the substrate.

[0085] For some heat-sensitive substrates, high temperatures can cause changes in the substrate's properties, which is detrimental to product quality control. This technical solution allows the temperature inside the vacuum chamber to be controlled, effectively protecting the coated substrate and the coating effect inside the vacuum chamber.

[0086] At the same time, the cooling module provided in this technical solution can quickly remove the high temperature generated during the vacuum chamber coating, adjust the temperature inside the vacuum chamber, and improve the efficiency of the vacuum chamber coating.

[0087] After the vacuum chamber coating is completed, this technical solution can also adjust the temperature inside the vacuum chamber through the heating module, avoiding the situation where the temperature of the internal substrate is too low after the vacuum chamber door is opened. When the substrate temperature is too low, it will come into contact with the air, causing the water molecules in the air to condense into water droplets, thereby affecting the substrate. This technical solution can effectively prevent the occurrence of this problem.

[0088] This technical solution is designed to solve the problem of temperature control in the vacuum coating process, specifically for substrates that are not resistant to high temperatures, specifically materials that will melt, deform, or change performance within 1000°C, including aluminum alloys, plastic products, and plastic films, including but not limited to PP, PET, PI, etc. This technical solution can solve the temperature control problem in the vacuum coating process, improve the efficiency of vacuum coating, and stabilize the coating effect.

[0089] This technical solution can help high-temperature-sensitive materials to be cooled quickly in a vacuum chamber, thereby improving vacuum coating efficiency and stabilizing the coating effect.

[0090] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0091] The above-described embodiments merely represent several implementations of the present invention. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that a person skilled in the art would be able to make various modifications and improvements without departing from the concept of the present invention, and these modifications and improvements fall within the scope of protection of the present invention. Therefore, the scope of protection of the present utility model patent shall be determined by the appended claims.

[0092] The above is a detailed description of an embodiment of a temperature control system for coating a substrate that is not resistant to high temperatures in a vacuum chamber, provided by the present invention. Specific examples are used herein to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only intended to help understand the core idea of ​​the present invention. It should be pointed out that, for those skilled in the art, without departing from the principles of the present invention, the present invention can also be improved and modified in a number of ways, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A temperature control system for coating a substrate that is not resistant to high temperatures in a vacuum chamber, comprising a heat exchange component (2) disposed in the vacuum chamber and in contact with the substrate (1) for heat exchange, characterized in that: The heat exchange component (2) is connected to a cooling module (3) and a heating module (4) which are arranged outside the vacuum chamber and in parallel; The output end of the cooling module (3) is connected to the output end of the heating module (4) and outputs to the input end of the heat exchange component (2); The input end of the cooling module (3) is connected to the input end of the heating module (4) and is connected to the output end of the heat exchange component (2); Heat exchange fluid flows inside the cooling module (3), the heating module (4), and the heat exchange component (2).

2. The temperature control system according to claim 1, characterized in that: The cooling module (3) comprises a refrigeration section (31), a first control end (32) connected to the refrigeration section (31) and controlling whether a heat exchange fluid is input, and a second control end (33) connected to the refrigeration section (31) and controlling whether the heat exchange fluid is output; The temperature increasing module (4) comprises a temperature increasing section (41), a third control end (42) connected to the temperature increasing section (41) and controlling whether a heat exchange fluid is input or not, and a fourth control end (43) connected to the temperature increasing section (41) and controlling whether the heat exchange fluid is output or not; The first control end (32) is connected to the third control end (42) and is also connected to the output end of the heat exchange component (2); The second control end (33) is connected to the fourth control end (43) and is also connected to the input end of the heat exchange component (2).

3. The temperature control system according to claim 2, characterized in that: The refrigeration section (31) includes a refrigeration tank (310), a first conveying device (311), and a refrigeration controller (312) that are connected to each other, and the output end of the refrigeration controller (312) flows back into the refrigeration tank (310); The second control end (33) comprises a first control valve (331) connected to the output end of the refrigeration tank (310), and a second conveying device (332) with two ends respectively connected to the first control valve (331) and the heat exchange component (2); The first control end (32) includes a third control valve, and the third control valve is connected to the output end of the heat exchange component (2) and the input end of the refrigeration tank (310).

4. The temperature control system according to claim 2, characterized in that: The temperature rising section (41) includes a heating tank (410), and the heating tank (410) is provided with a heating controller (411); The fourth control end (43) includes a second control valve (431) connected to the output end of the heating tank (410), and a third conveying device (432) with two ends respectively connected to the second control valve (431) and the heat exchange component (2); The third control end (42) includes a fourth control valve, and the fourth control valve is connected to the output end of the heat exchange component (2) and the input end of the heating tank (410).

5. The temperature control system according to claim 2, characterized in that: The output end of the heat exchange component (2) is connected to the return pipe (5), and the return pipe (5) is connected to the input end of the cooling module (3) and the input end of the heating module (4); The input end of the heat exchange component (2) is connected to the delivery pipeline (6), and the output end of the cooling module (3) and the output end of the heating module (4) are both connected to the delivery pipeline (6).

6. The temperature control system according to claim 1, characterized in that: The heat exchange assembly (2) comprises a plurality of cold and heat exchange plates (21) which are arranged in sequence and provided with a space for the circulation of a heat exchange fluid therein. The flow directions of the heat exchange fluids in the adjacent cold and heat exchange plates (21) are arranged in opposite directions. The outer surface of the cold and heat exchange plate (21) arranged on the outermost side is in contact with the substrate (1).

7. The temperature control system according to claim 6, characterized in that: The bonding surface between the cold and heat exchange plate (21) and the base material (1) is a plane or a curved surface.

8. The temperature control system according to claim 4, characterized in that: The heating temperature of the heat exchange fluid inside the heating tank is set to 0°C to 80°C.

9. The temperature control system according to claim 3, characterized in that: The refrigeration temperature of the heat exchange fluid inside the refrigeration tank is controlled to be 20°C to minus 50°C.

10. The temperature control system according to claim 6, characterized in that: A plurality of heat exchange components (2) are provided in an annular array.

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