Molecular pump

Abstract

The utility model relates to the technical field of molecular pumps, and discloses a molecular pump which comprises a shell, a driving part, a movable impeller and a first static piece, the driving part is arranged in the shell and provided with a rotating shaft, the movable impeller comprises a movable impeller body and movable blades arranged on the movable impeller body, the movable impeller body is fixed to the rotating shaft, and the first static piece is fixed to the shell. The first static piece comprises a plurality of first static blades, and openings are formed in the ends of the first static blades in the axial direction of the rotating shaft. The technical problem that a movable impeller and a static piece are prone to rubbing is solved.

Description

Technical Field

[0001] The present application relates to the technical field of molecular pumps, and in particular to molecular pumps. Background Art

[0002] As an ultra-high vacuum acquisition device, the molecular pump has an increasingly wide range of application scenarios with the maturity and development of molecular pump technology, such as in the chip field, medical biology, and vacuum coating. The molecular pump includes a rotating shaft, which drives the impeller to rotate. The impeller and the stator cooperate to obtain a higher vacuum degree. However, in related technologies, since the impeller will deform under high temperature conditions, the impeller will rub against the stator, causing the impeller surface coating to fail or the impeller to break. Utility Model Content

[0003] The present application provides a molecular pump, which solves the technical problem of easy scratches between the moving impeller and the stator.

[0004] In order to achieve the above objectives, the main technical solutions adopted in this application include:

[0005] An embodiment of the present application provides a molecular pump, which includes a housing, a driving member, a moving impeller and a first static plate. The driving member is arranged in the housing, the driving member has a rotating shaft, the moving impeller includes a moving impeller body and moving blades arranged on the moving impeller body, the moving impeller body is fixed to the rotating shaft, the first static plate is fixed to the housing, the first static plate includes a plurality of first static blades, and an opening is provided at the end of the first static blade along the axial direction of the rotating shaft.

[0006] In the molecular pump proposed in the embodiment of the present application, an opening is provided at the end of the first static blade, which does not increase the gap between the first moving impeller and the first static plate, thereby ensuring the efficiency and performance of the molecular pump operation. Moreover, the setting of the opening greatly reduces the probability of scratches between the moving impeller and the first static plate, thereby ensuring the structural integrity of the moving impeller and the static plate, improving the stability and reliability of the molecular pump operation, and reducing the probability of failure of the molecular pump.

[0007] Optionally, there are multiple first static blades, and along the axial direction of the rotating shaft, the shell has an air inlet end. The multiple first static blades include a first sub-static blade and a second sub-static blade. The first sub-static blade is closer to the air inlet end than the second sub-static blade. Along the axial direction of the rotating shaft, openings are provided at both ends of the first static blade of the first sub-static blade.

[0008] Both ends of the first static blade of the first sub-static blade are provided with openings, which can greatly reduce the probability of scratching between the first sub-static blade and its adjacent impeller, ensure the structural integrity of the impeller and the first sub-static blade, improve the stability and reliability of the molecular pump operation, and reduce the probability of molecular pump failure.

[0009] Optionally, along the axial direction of the rotating shaft, an opening is provided at one end of the first static blade of the second sub-static blade facing away from the air inlet end.

[0010] An opening is provided at one end of the first static blade of the second sub-static blade facing the driving member, which can greatly reduce the probability of scratching between the second sub-static blade and its adjacent impeller, ensure the structural integrity of the impeller and the second sub-static blade, improve the stability and reliability of the molecular pump operation, and reduce the probability of failure of the molecular pump.

[0011] Optionally, the molecular pump also includes a second static plate, and along the axial direction of the rotating shaft, the first sub-static plate and the second static plate are respectively located on both sides of the second sub-static plate, the second static plate is fixed to the outer shell and includes a plurality of second static blades, and along the axial direction of the rotating shaft, no openings are provided at both ends of the second static blades of the second static plate.

[0012] Along the axial direction of the rotating shaft, both ends of the second static blade of the second static plate are not provided with openings. In this way, on the one hand, the second static blade does not need to be processed additionally, which reduces the process flow and process steps and improves production efficiency. On the other hand, the second static blade without openings can make the operation of the molecular pump more stable and improve the operating efficiency of the molecular pump.

[0013] Optionally, there are multiple second sub-static fins, and the sizes of the openings of the multiple second sub-static fins gradually decrease from the air inlet end to the first sub-static fin.

[0014] The opening sizes of the multiple second sub-static blades are gradually reduced, which is beneficial to maintaining the integrity of the second sub-static blades. The gradual reduction in the opening size can disperse the impact force and pressure of the airflow on the second sub-static blades, reduce the probability of scratches between the impeller and the static blades inside the molecular pump, and improve the stability and reliability of the molecular pump operation.

[0015] Optionally, the first stationary blade includes a first end face and a second end face, there are two first end faces, the two first end faces are arranged opposite to each other along the axial direction of the rotating shaft, the second end face connects the two first end faces, and the opening passes through the first end face and the second end face.

[0016] The opening passes through the first end surface and the second end surface, which can ensure the operating efficiency and efficacy of the molecular pump on the one hand, and reduce the probability of scratching between the impeller and the first static plate on the other hand, thereby improving the stability and reliability of the molecular pump operation.

[0017] Optionally, the maximum size of the opening is A1, and the maximum size of the first stationary blade is A2, satisfying: 8≤A2 / A1≤12.

[0018] The maximum size of the opening is A1, and the maximum size of the first static blade is A2, which satisfies: 8≤A2 / A1≤12. On the one hand, it can reduce the probability of the impeller deforming and colliding with the static blade, and on the other hand, it can ensure the stability and reliability of the molecular pump operation.

[0019] Optionally, along the axial direction of the rotating shaft, the maximum size of the opening is A3, satisfying: 80≤A2 / A3≤100.

[0020] Along the axial direction of the rotating shaft, the maximum size of the opening is A3, which satisfies: 80≤A2 / A3≤100. On the one hand, it can reduce the probability of the impeller deforming and colliding with the static piece, and on the other hand, it can ensure the stability and reliability of the molecular pump operation.

[0021] Optionally, the opening has a bottom wall and side walls, the bottom wall is perpendicular to the axial direction of the rotating shaft, and the side walls are connected to the inner circumference of the bottom wall along the radial direction of the rotating shaft. The angle between the bottom wall and the side wall is A, satisfying 130 degrees ≤ A ≤ 150 degrees.

[0022] The angle A between the bottom wall and the side wall satisfies 130 degrees ≤ A ≤ 150 degrees, which can further reduce the probability of collision between the stator and the impeller, and can also ensure the performance of the molecular pump operation, improve the stability and reliability of the molecular pump operation, and reduce the impact of the opening on the first stator blade.

[0023] Optionally, there are multiple impellers, and the multiple impellers are arranged at intervals along the axial direction of the rotating shaft.

[0024] There are multiple impellers, which are spaced apart along the axial direction of the rotating shaft. Multiple impellers are spaced apart along the axial direction, which can realize multi-stage compression of the gas. Each stage of impeller can accelerate and compress the gas molecules, thereby improving the overall pumping efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the specific implementation methods or the description of the prior art. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0026] Figure 1 A schematic diagram of the structure of a molecular pump provided in an embodiment of the present application;

[0027] Figure 2 for Figure 1 Front view of

[0028] Figure 3 for Figure 2 Cross-sectional view in the AA direction;

[0029] Figure 4 The top view structure of the impeller is shown;

[0030] Figure 5 for Figure 4 Cross-sectional view in the AA direction;

[0031] Figure 6 A schematic structural diagram of the first sub-stationary piece provided in an embodiment of the present application;

[0032] Figure 7 A schematic structural diagram of a second sub-stationary piece provided in an embodiment of the present application;

[0033] Figure 8 The structure of the first stationary blade is shown.

[0034] [Description of Reference Numerals]

[0035] Molecular pump 100; housing 110; air inlet end 111; driving member 120; rotating shaft 121; impeller 130; first static plate 140; first sub-static plate 141; second sub-static plate 142; first static blade 150; first end surface 151; second end surface 152; opening 160; bottom wall 161; side wall 162; inner circumference 163; second static plate 170; second static blade 171; static ring 180. DETAILED DESCRIPTION

[0036] To make the purpose, technical solutions, and advantages of the embodiments of the present application more clear, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without making creative efforts shall fall within the scope of protection of this application.

[0037] Unless otherwise defined, all technical and scientific terms used in this application have the same meanings as commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The terms "including" and "having" and any variations thereof in the specification and claims of this application and the above-mentioned drawings are intended to cover non-exclusive inclusions. The terms "first" and "second" in the specification and claims of this application or the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific order or a primary-secondary relationship.

[0038] References to "embodiments" in this application mean that a particular feature, structure, or characteristic described in connection with the embodiment may be included in at least one embodiment of the application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor does it constitute an independent or alternative embodiment that is mutually exclusive of other embodiments. It is understood, both explicitly and implicitly, by those skilled in the art that the embodiments described in this application may be combined with other embodiments.

[0039] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," "connected," and "attached" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to direct connections, indirect connections through an intermediate medium, or internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0040] The term "and / or" in this application simply describes an association between related objects, indicating that three possible relationships exist. For example, A and / or B can represent: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this application generally indicates that the related objects are in an "or" relationship.

[0041] The term "multiple" in this application refers to more than two (including two). Similarly, "multiple groups" refers to more than two groups (including two groups), and "multiple pieces" refers to more than two pieces (including two pieces).

[0042] As a device for obtaining ultra-high vacuum, molecular pumps are finding increasingly widespread application in fields such as chips, medical biology, and vacuum coating as molecular pump technology matures and develops. A molecular pump consists of a rotating shaft, a moving impeller, and a stator. The rotating shaft drives the moving impeller, while the stator's primary function is to coordinate with the moving impeller to achieve directional flow of gas molecules and pump air. The impeller and stator work together to achieve a high vacuum.

[0043] There will be a certain gap between the moving impeller and the static plate, which will reduce the deformation of the moving impeller and scrape the static plate. If the axial gap between the moving impeller and the static plate is too large, there will be more molecular backflow, affecting the vacuum limit of the air inlet and reducing the performance of the molecular pump.

[0044] However, in the related art, due to the low precision of production and processing of the impeller or the stator, or the material of the impeller or the stator does not meet the requirements, the molecular pump will generate a higher temperature during operation, the impeller will be deformed under the high temperature conditions, and the impeller will be scratched against the stator, causing the impeller surface coating to fail or the impeller to break.

[0045] In view of this, in order to solve the problem of easy scratches between the molecular pump impeller and the stator, while ensuring the stability and reliability of the molecular pump operation, some embodiments of the present application provide a molecular pump including a housing, a driving member, a movable impeller and a first stator.

[0046] The driving member is arranged in the outer shell, the driving member has a rotating shaft, the impeller includes an impeller body and moving blades arranged on the impeller body, the impeller body is fixed to the rotating shaft, the first static plate is fixed to the outer shell, the first static plate includes a plurality of first static blades, and an opening is provided at the end of the first static blade along the axial direction of the rotating shaft.

[0047] In the above scheme, an opening is provided at the end of the first static blade, which does not increase the gap between the first impeller and the first static plate, thereby ensuring the efficiency and performance of the molecular pump. Moreover, the setting of the opening greatly reduces the probability of scratches between the impeller and the first static plate, thereby ensuring the structural integrity of the impeller and the static plate, improving the stability and reliability of the molecular pump operation, and reducing the probability of failure of the molecular pump.

[0048] For the convenience of description, the following embodiments are described by taking a molecular pump according to an embodiment of the present application as an example.

[0049] Please refer to Figures 1 to 8 , Figure 1 This is a schematic diagram of the structure of the molecular pump 100 provided in an embodiment of the present application. Figure 2 for Figure 1 Front view of Figure 3 for Figure 2 The cross-sectional view in the AA direction, Figure 4 The top view of the impeller 130 is shown. Figure 5 for Figure 4 The cross-sectional view in the AA direction, Figure 6 This is a schematic structural diagram of the first sub-static piece 141 provided in an embodiment of the present application. Figure 7 This is a schematic structural diagram of the second sub-static piece 142 provided in an embodiment of the present application. Figure 8 The structure of the first stationary blade 150 is shown.

[0050] In the embodiment of the present application, the molecular pump 100 includes a housing 110, a driving member 120, a moving impeller 130 and a first static plate 140. The driving member 120 is arranged in the housing 110. The driving member 120 has a rotating shaft 121. The moving impeller 130 includes a moving impeller 130 body and moving blades arranged on the moving impeller 130 body. The moving impeller 130 body is fixed to the rotating shaft 121. The first static plate 140 is fixed to the housing 110. The first static plate 140 includes a plurality of first static blades 150. An opening 160 is provided at the end of the first static blade 150 along the axial direction of the rotating shaft 121.

[0051] The driving member 120 is disposed inside the housing 110. The housing 110 may enclose at least a portion of the driving member 120. The driving member 120 has a rotating shaft 121, and thus at least a portion of the rotating shaft 121 is also located inside the housing 110. The impeller 130 includes an impeller body 130 and impeller blades disposed on the impeller body 130. The impeller body 130 is fixed to the rotating shaft 121. That is, when the rotating shaft 121 rotates, the rotating shaft 121 drives the impeller body 130 to rotate together, thereby rotating the impeller blades.

[0052] The first stator 140 is fixedly connected to the housing 110. For example, the first stator 140 can be fixed to the housing 110 via a stator ring 180. The first stator 140 includes a plurality of first stator blades 150, which can be evenly arranged around the circumference of the rotating shaft 121. The first stator 140 can be spaced apart from the impeller 130. Since the impeller 130's blades undergo deformation during high-temperature rotation, and this deformation generally occurs on the outer side of the blades (on the end near the housing 110), a certain gap is provided between the impeller 130 and the first stator 140. However, if the gap is too large, it will affect the normal operation of the molecular pump 100, reducing the operating efficiency and vacuum performance of the molecular pump 100. Therefore, an opening 160 is provided at the end of the first stator blade 150 along the axial direction of the rotating shaft 121. That is, at the end of the first stator blade 150 near the housing 110 and corresponding to the deformation point of the blade in the axial direction of the rotating shaft 121.

[0053] Furthermore, an opening 160 is provided at the end of the first stationary blade 150, which does not increase the gap between the first impeller 130 and the first stator 140, thereby ensuring the efficiency and performance of the molecular pump 100. Moreover, the provision of the opening 160 greatly reduces the probability of scratches between the impeller 130 and the first stator 140, thereby ensuring the structural integrity of the impeller 130 and the stator, improving the stability and reliability of the operation of the molecular pump 100, and reducing the probability of failure of the molecular pump 100.

[0054] Please refer to Figures 1 to 8 In this embodiment, there are multiple first static blades 140. Along the axial direction of the rotating shaft 121, the housing 110 has an air inlet end 111. The multiple first static blades 140 include a first sub-static blade 141 and a second sub-static blade 142. The first sub-static blade 141 is closer to the air inlet end 111 than the second sub-static blade 142. Along the axial direction of the rotating shaft 121, both ends of the first static blade 150 of the first sub-static blade 141 are provided with openings 160.

[0055] The plurality of first static vanes 140 include first sub-static vanes 141 and second sub-static vanes 142. The first sub-static vanes 141 and the second sub-static vanes 142 are sequentially arranged along the axial direction of the rotating shaft 121. The first sub-static vanes 141 are closer to the air inlet end 111 than the second sub-static vanes 142. That is, along the axial direction of the rotating shaft 121, the first sub-static vanes 141 are closer to the end of the housing 110, that is, closer to the air inlet end 111, than the second sub-static vanes 142. Openings 160 are provided at both ends of the first static blades 150 of the first sub-static vanes 141. Along the axial direction of the rotating shaft 121, the first static vanes 150 are provided with openings 160 at both ends, and the openings 160 of the first static vanes 150 face opposite directions. The molecular pump 100 includes a moving impeller 130 and a first sub-static plate 141. According to the actual deformation of the molecular pump 100, the deformation of the moving blades of the moving impeller 130 located at the end of the molecular pump 100 and away from the driving member 120 is toward the driving member 120, while the deformation direction of the moving blades of the adjacent moving impeller 130 is toward the air inlet end 111. The first sub-static plate 141 is arranged between the two moving impellers 130. Therefore, openings 160 are required to be provided at both ends of the first static plate 140 of the first sub-static plate 141. In other words, openings 160 are provided at both ends of the first static blade 150 facing the air inlet end 111 and away from the air inlet end 111.

[0056] Specifically, both ends of the first static blade 150 of the first sub-static blade 141 are provided with openings 160, which can greatly reduce the probability of scratching between the first sub-static blade 141 and its adjacent impeller 130, ensure the structural integrity of the impeller 130 and the first sub-static blade 141, improve the stability and reliability of the operation of the molecular pump 100, and reduce the probability of failure of the molecular pump 100.

[0057] Please refer to Figures 1 to 8 In this embodiment, along the axial direction of the rotating shaft 121 , an opening 160 is provided at one end of the first static blade 150 of the second sub-static blade 142 away from the air inlet end 111 .

[0058] Except for the impeller 130 near the upper end of the molecular pump 100, which deforms downward, the ends of the other moving blades in the molecular pump 100 deform upward. It can be understood that the first sub-static blade 141 and the second sub-static blade 142 are arranged in sequence, and the impeller 130 can actually be arranged in sequence. The deformation of the ends of the blades of the impeller 130 adjacent to the second sub-static blade 142 is all toward the air inlet end 111 of the molecular pump 100. Therefore, an opening 160 can be provided on the side of the first static blade 150 of the second sub-static blade 142 away from the air inlet end 111, so that the opening 160 corresponds to the degree of deformation of the impeller 130.

[0059] Specifically, an opening 160 is provided on the end of the first stator blade 150 of the second sub-stator blade 142 that faces the driver 120. This significantly reduces the chance of scraping between the second sub-stator blade 142 and its adjacent impeller 130, ensuring the structural integrity of the impeller 130 and the second sub-stator blade 142, improving the operational stability and reliability of the molecular pump 100, and reducing the chance of failure of the molecular pump 100. Furthermore, compared to a method in which openings 160 are provided at both ends, the second sub-stator blade 142 significantly reduces manufacturing costs due to the reduced number of processing steps.

[0060] Please refer to Figures 1 to 8 In this embodiment, the molecular pump 100 further includes a second static plate 170. Along the axial direction of the rotating shaft 121, the first sub-static plate 141 and the second static plate 170 are respectively located on both sides of the second sub-static plate 142. The second static plate 170 is fixed to the housing 110 and includes a plurality of second static blades 171. Along the axial direction of the rotating shaft 121, no opening 160 is provided at either end of the second static blade 171 of the second static plate 170.

[0061] The molecular pump 100 further includes a second static blade 170. The first sub-static blade 141, the second sub-static blade 142, and the second static blade 170 are sequentially arranged along the axial direction of the rotating shaft 121. The second sub-static blade 142 is arranged between the first sub-static blade 141 and the second static blade 170. The second static blade 170 is fixed to the housing 110. For example, the second static blade 170 can be fixedly connected to the housing 110 via a static ring 180. Since a certain gap exists between the impeller 130 and the static blade in the molecular pump 100 at the beginning of the design, the deformation degree of the impeller 130 at different positions in the molecular pump 100 is also different. The impeller 130 in the molecular pump 100 includes an impeller 130 that deforms away from the air inlet end 111 and multiple impellers 130 that deform toward the air inlet end 111. The deformation degree of each impeller 130 that deforms toward the air inlet end 111 is also different. For impellers 130 whose axial deformation exceeds a preset value, the corresponding stator blades need to be provided with openings 160 to prevent scratches between the impeller 130 and the stator blades. However, for impellers 130 with a smaller deformation, for example, if the axial deformation of the impeller 130 is less than 5 mm, the corresponding stator blades do not need to be provided with openings 160. Therefore, the second stator blades 171 of the second stator blade 170 do not need to be provided with openings 160 at both ends in the axial direction.

[0062] Along the axial direction of the rotating shaft 121, the second stationary blade 171 of the second stationary plate 170 is not provided with an opening 160 at both ends. In this way, on the one hand, the second stationary blade 171 does not need to be processed additionally, which reduces the process flow and process steps and improves production efficiency. On the other hand, the second stationary blade 171 without an opening 160 can make the operation of the molecular pump 100 more stable and improve the operating efficiency of the molecular pump 100.

[0063] Please refer to Figures 1 to 8 In this embodiment, there are multiple second sub-static blades 142 , and the sizes of the openings 160 of the multiple second sub-static blades 142 gradually decrease from the air inlet end 111 to the first sub-static blade 141 .

[0064] The size of the openings 160 of the plurality of second sub-static blades 142 is gradually reduced, which is beneficial to maintaining the integrity of the second sub-static blades 142 and reducing the impact on the performance of the second static blades 170 caused by the excessive size of the openings 160. The gradual reduction in the size of the openings 160 can disperse the impact force and pressure of the airflow on the second sub-static blades 142, reduce the probability of scratches between the impeller 130 and the static blades inside the molecular pump 100, and improve the stability and reliability of the operation of the molecular pump 100.

[0065] Please refer to Figures 1 to 8 In this embodiment, the first stationary blade 150 includes a first end face 151 and a second end face 152. There are two first end faces 151. The two first end faces 151 are arranged opposite to each other along the axial direction of the rotating shaft 121. The second end face 152 connects the two first end faces 151. The opening 160 passes through the first end face 151 and the second end face 152.

[0066] The first stationary blade 150 includes a first end face 151 and a second end face 152. There are two first end faces 151. The two first end faces 151 are arranged opposite to each other along the axial direction of the rotating shaft 121. That is, the first end faces 151 are arranged at both ends of the axial direction of the first stationary blade 150. The second end face 152 connects the two first end faces 151. The second end face 152 is arranged at one end of the first stationary blade 150 along the radial direction of the rotating shaft 121 and away from the rotating shaft 121.

[0067] The opening 160 passes through the first end surface 151 and the second end surface 152 , which can ensure the operating efficiency and effectiveness of the molecular pump 100 on the one hand, and reduce the probability of scratches between the impeller 130 and the first stator 140 on the other hand, thereby improving the stability and reliability of the molecular pump 100 .

[0068] Please refer to Figures 1 to 8 In this embodiment, along the radial direction of the rotating shaft 121, the maximum size of the opening 160 is A1, and the maximum size of the first stationary blade 150 is A2, satisfying: 8≤A2 / A1≤12.

[0069] The maximum size of the opening 160 is A1, and the maximum size of the first static blade 150 is A2, which satisfies: 8≤A2 / A1≤12. On the one hand, it can reduce the probability of the impeller 130 deforming and colliding with the static blade, and on the other hand, it can ensure the stability and reliability of the molecular pump 100.

[0070] Please refer to Figures 1 to 8 In this embodiment, along the axial direction of the rotating shaft 121 , the maximum size of the opening 160 is A3, which satisfies the following relationship: 80≤A2 / A3≤100.

[0071] Along the axial direction of the rotating shaft 121 , the maximum size of the opening 160 is A3, which satisfies the following relationship: 80≤A2 / A3≤100. This can reduce the probability of deformation of the impeller 130 and collision with the stator, and ensure the stability and reliability of the molecular pump 100 .

[0072] Please refer to Figures 1 to 8 In this embodiment, the opening 160 has a bottom wall 161 and a side wall 162. The bottom wall 161 is perpendicular to the axial direction of the rotating shaft 121. Along the radial direction of the rotating shaft 121, the side wall 162 is connected to the inner circumferential edge 163 of the bottom wall 161. The angle between the bottom wall 161 and the side wall 162 is A, which satisfies 130 degrees ≤ A ≤ 150 degrees.

[0073] The opening 160 includes a bottom wall 161 and a side wall 162. The bottom wall 161 is perpendicular to the axial direction of the rotating shaft 121, that is, the bottom wall 161 extends in the radial direction of the rotating shaft 121, and the side wall 162 is connected to the inner peripheral edge 163 of the bottom wall 161. The side wall 162 extends in the axial direction of the rotating shaft 121. The angle between the bottom wall 161 and the side wall 162 is A, which satisfies 130 degrees ≤ A ≤ 150 degrees. This can further reduce the probability of collision between the stator and the impeller 130, and can also ensure the performance of the molecular pump 100, improve the stability and reliability of the molecular pump 100, and reduce the impact of the opening 160 on the first stator blade 150.

[0074] Please refer to Figures 1 to 8 There are multiple impellers 130, and the multiple impellers 130 are arranged at intervals along the axial direction of the rotating shaft 121.

[0075] There are multiple impellers 130, which are spaced apart along the axial direction of the rotating shaft 121. The multiple impellers 130 are spaced apart along the axial direction, which can achieve multi-stage compression of the gas. Each stage of the impeller 130 can accelerate and compress the gas molecules, thereby improving the overall pumping efficiency. The design of the multi-stage impeller 130 helps to reduce the backflow of gas molecules in the pump, allowing the gas molecules to be more smoothly pumped out of the pump body. The multiple impellers 130 disperse the stress generated by the rotating shaft 121 during high-speed rotation, help reduce wear and deformation of the rotating shaft 121, and improve the stability and service life of the molecular pump 100.

[0076] It should also be noted that the terms "comprises," "includes," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, commodity, or apparatus that includes a series of elements includes not only those elements but also other elements not explicitly listed, or includes elements inherent to such process, method, commodity, or apparatus. In the absence of further limitations, an element defined by the phrase "comprises a ..." does not exclude the presence of other identical elements in the process, method, commodity, or apparatus that includes the element.

[0077] The various embodiments in this specification are described in a progressive manner. Similar parts between the various embodiments can be referred to in conjunction with each other. Each embodiment focuses on the differences between the other embodiments. In particular, the system embodiments are generally similar to the method embodiments, so the description is relatively simple. For relevant parts, refer to the description of the method embodiments.

[0078] The foregoing is merely an embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various changes and variations. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application should all be included within the scope of the claims of the present application.

[0079] Although the embodiments of the present application have been described with reference to the accompanying drawings, those skilled in the art may make various modifications and variations without departing from the spirit and scope of the present application, and such modifications and variations shall fall within the scope defined by the appended claims.

Claims

1. A molecular pump, characterized in that: include: shell; A driving member is disposed in the housing, and the driving member has a rotating shaft; The impeller comprises an impeller body and impeller blades provided on the impeller body, wherein the impeller body is fixed to the rotating shaft; The first static piece is fixed to the housing. The first static piece includes a plurality of first static blades. An opening is provided at an end of the first static blade along the axial direction of the rotating shaft.

2. The molecular pump according to claim 1, wherein There are a plurality of first static blades, and the housing has an air inlet end along the axial direction of the rotating shaft. The plurality of first static blades include a first sub-static blade and a second sub-static blade, and the first sub-static blade is closer to the air inlet end than the second sub-static blade; Along the axial direction of the rotating shaft, both ends of the first stationary blade of the first sub-stationary blade are provided with the openings.

3. The molecular pump according to claim 2, wherein Along the axial direction of the rotating shaft, the opening is provided at one end of the first stationary blade of the second sub-stationary blade facing away from the air inlet end.

4. The molecular pump according to claim 2, wherein The molecular pump further includes a second static plate, and along the axial direction of the rotating shaft, the first sub-static plate and the second sub-static plate are respectively located on both sides of the second sub-static plate; The second stationary piece is fixed to the housing and includes a plurality of second stationary blades. Along the axial direction of the rotating shaft, both ends of the second stationary blades of the second stationary piece are not provided with the openings.

5. The molecular pump according to claim 2, wherein: There are a plurality of second sub-static fins, and sizes of the openings of the plurality of second sub-static fins gradually decrease from the air inlet end to the first sub-static fin.

6. The molecular pump according to claim 1, wherein The first stationary blade includes a first end face and a second end face. There are two first end faces. The two first end faces are arranged opposite to each other along the axial direction of the rotating shaft. The second end face connects the two first end faces. The opening passes through the first end face and the second end face.

7. The molecular pump according to claim 1, wherein Along the radial direction of the rotating shaft, the maximum size of the opening is A1, and the maximum size of the first stationary blade is A2, satisfying: 8≤A1 / A2≤12.

8. The molecular pump according to claim 7, wherein: Along the axial direction of the rotating shaft, the maximum size of the opening is A3, satisfying: 80≤A2 / A3≤100.

9. The molecular pump according to claim 1, wherein: The opening has a bottom wall and a side wall, the bottom wall is perpendicular to the axial direction of the rotating shaft, and the side wall is connected to the inner circumference of the bottom wall along the radial direction of the rotating shaft; An included angle A between the bottom wall and the side wall satisfies 130 degrees ≤ A ≤ 150 degrees.

10. The molecular pump according to claim 1, wherein There are multiple impellers, and the multiple impellers are arranged at intervals along the axial direction of the rotating shaft.

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