Damping device

Abstract

The utility model relates to the field of wafer detection, and discloses a damping device which comprises a bottom frame, and the top surface of the bottom frame is provided with a damping mechanism and a damping platform. The damping mechanism comprises damping assemblies symmetrically arranged at the four corners of the bottom frame. Each damping assembly comprises a damping block and a damper. The damper comprises a screw and an air bag, the top of the screw penetrates through the damping platform, and the bottom of the screw is fixedly connected with the air bag; a plurality of damping blocks are arranged around the damper; the damping platform is used for bearing the wafer detection mechanism; according to the damping assembly, the damping block and the damper are arranged in the damping assembly, the damper serves as a main damping unit, adverse effects caused by external vibration can be well reduced by inflating the air bag, the damping block serves as an auxiliary damping unit and can play a role in auxiliary damping, the damping effect is further improved, and the service life of the damping assembly is prolonged. And meanwhile, the damping pressure of the damper can be shared, the use loss of the damper is reduced, and the service life of the damper is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer detection, in particular to a shock absorbing device. Background Art

[0002] Wafer profile detection is an important process in the semiconductor production process. It can improve the quality of wafer products and production efficiency and reduce the defective rate of wafers. However, during the wafer profile detection process, if external interference factors such as vibration occur, the accuracy and consistency of wafer detection will be affected, and the results of wafer detection will fluctuate and become unstable, which will lead to lower efficiency and accuracy of wafer detection. Utility Model Content

[0003] The technical problem to be solved by the present invention is: how to reduce the influence of vibration on the wafer detection process. In order to solve the above technical problem, the present invention provides a shock absorption device, comprising a base frame, wherein a shock absorption mechanism and a shock absorption platform are sequentially arranged on the top surface of the base frame in a vertical direction;

[0004] The shock absorbing mechanism includes shock absorbing components symmetrically arranged at the four corners of the chassis, the shock absorbing components including shock absorbing blocks and shock absorbers; the shock absorbers include a screw and an airbag, the top of the screw passes through and is connected to the shock absorbing platform, and the bottom of the screw is fixedly connected to the airbag; a plurality of shock absorbing blocks are arranged around the shock absorber;

[0005] The shock-absorbing platform is used to carry the wafer detection mechanism.

[0006] Preferably, the base frame includes a rectangular lower beam frame and an upper beam frame, the lower beam frame includes a plurality of lower beam rods connected end to end, the upper beam frame includes a plurality of upper beam rods connected end to end, and the length and width dimensions of the upper beam frame are both smaller than the corresponding length and width dimensions of the lower beam frame;

[0007] The upper beam is fixedly connected to the shock absorbing assembly, a support column is provided between the upper beam and the lower beam, and a reinforcing beam is provided between the lower beam.

[0008] Preferably, the shock absorbing mechanism further includes a shock absorbing base plate, and the shock absorbing assembly and the upper beam are respectively arranged on both sides of the shock absorbing base plate.

[0009] Preferably, a non-slip pad is provided on one side of the shock-absorbing base plate close to the upper beam.

[0010] Preferably, a single shock absorbing assembly comprises two shock absorbing blocks symmetrically distributed about the shock absorber, and the shock absorbing blocks are arranged on a side of the shock absorber facing the adjacent shock absorber.

[0011] Preferably, the shock-absorbing block includes a cushion block and a shock-absorbing pad, and two sides of the cushion block are respectively fixedly connected to the shock-absorbing pad and the shock-absorbing base plate.

[0012] Preferably, the airbag is provided with an air nozzle, and the air nozzle is used to adjust the air pressure in the airbag to stabilize the height of the airbag.

[0013] Preferably, the side of the support column facing the center of the lower beam is flush with the side of the lower beam member facing the center of the lower beam, and the side of the support column away from the center of the upper beam is flush with the side of the upper beam member away from the center of the upper beam.

[0014] Preferably, a corner of the lower beam away from the upper beam is provided with a foot and a universal wheel.

[0015] Preferably, the shock-absorbing platform is made of marble.

[0016] Compared with the prior art, the shock absorbing device provided in the embodiment of the present invention has the following beneficial effects:

[0017] In the present invention, the wafer detection mechanism is fixed on the shock-absorbing platform, and a shock-absorbing assembly is provided between the shock-absorbing platform and the base frame for shock absorption. The shock-absorbing assembly is provided at the four corners of the base frame, which can make the shock absorption effect more comprehensive and stable, and avoid the problem of reduced wafer detection accuracy caused by local instability. The shock-absorbing assembly is provided with two shock-absorbing units, a shock-absorbing block and a shock absorber. The shock absorber serves as the main shock-absorbing unit, and can effectively reduce the adverse effects of external vibrations by inflating the airbag. The shock-absorbing block serves as an auxiliary shock-absorbing unit and is arranged around the side of the shock absorber. It can play an auxiliary shock-absorbing role, further improve the shock absorption effect, reduce the adverse effects of vibration on wafer detection, and share the shock-absorbing pressure of the shock absorber, reduce the use loss of the shock absorber, and increase the service life of the shock absorber. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a three-dimensional view of the utility model;

[0019] Figure 2 This is a view of the internal structure of the utility model;

[0020] Figure 3 It is a structural schematic diagram of the shock absorbing assembly of the present utility model.

[0021] In the figure: 1, base frame; 11, lower beam frame; 12, upper beam frame; 13, reinforcement beam; 14, support column;

[0022] 2. Shock-absorbing mechanism; 21. Shock-absorbing assembly; 211. Shock-absorbing block; 2111. Shock-absorbing pad; 2112. Pad; 212. Shock absorber; 2121. Screw; 2122. Airbag; 2123. Air nozzle; 22. Shock-absorbing base plate; 221. Anti-slip pad;

[0023] 3. Shock-absorbing platform; 4. Anchors; 5. Universal wheels. DETAILED DESCRIPTION

[0024] The following embodiments are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0025] like Figures 1 to 3 As shown, a preferred embodiment of the present utility model provides a shock absorbing device, which includes a base frame 1, and a shock absorbing mechanism 2 and a shock absorbing platform 3 are sequentially arranged on the top surface of the base frame 1 along the vertical direction;

[0026] The shock absorbing mechanism 2 includes shock absorbing assemblies 21 symmetrically arranged at the four corners of the base frame 1. The shock absorbing assembly 21 includes a shock absorbing block 211 and a shock absorber 212. The shock absorber 212 includes a screw 2121 and an air bag 2122. The top of the screw 2121 is connected to the shock absorbing platform 3, and the bottom of the screw 2121 is fixedly connected to the air bag 2122. Multiple shock absorbing blocks 211 are arranged around the shock absorber 212.

[0027] The shock-absorbing platform 3 is used to support the wafer detection mechanism.

[0028] Specifically, during the wafer inspection process, it is often necessary to use high-precision devices such as lasers and cameras to detect the edge profile, thickness, diameter and surface state of the wafer. However, these high-precision detection mechanisms are very likely to have problems such as blurred detection images when facing vibrations, which in turn leads to a decrease in the efficiency and accuracy of wafer inspection. Existing wafer inspection equipment lacks effective shock-absorbing devices to reduce the adverse effects of external vibrations on wafer inspection. In this embodiment, a shock-absorbing assembly 21 is set between the base frame 1 and the shock-absorbing platform 3. The shock-absorbing assembly 21 is also set at the four corners of the base frame 1, so that the shock-absorbing effect is more comprehensive and stable, avoiding the problem of aggravated vibration caused by local support imbalance. The shock-absorbing assembly 21 includes two shock-absorbing units, a shock-absorbing block 211 and a shock absorber 212, to jointly absorb shock. The shock-absorbing block 211 is provided as an auxiliary shock-absorbing unit around the shock absorber 212, which can share the shock-absorbing pressure of the shock absorber 212 and increase the service life of the shock absorber 212. At the same time, it can also better disperse the fluctuations caused by external vibrations and improve the overall shock-absorbing effect. Among them, the shock absorber 212 uses an airbag 2122 for shock absorption. When the wafer detection device is subjected to mechanical fluctuations and pressure changes, it will be transmitted to the shock absorption platform 3, and then transmitted to the airbag 2122 through the screw 2121. The gas filled in the airbag 2122 can effectively reduce and disperse the mechanical fluctuations, thereby eliminating the adverse effects of vibration on the wafer detection mechanism. Its shock absorption effect is better, making the efficiency and accuracy of wafer detection higher.

[0029] In some embodiments, the base frame 1 includes a rectangular lower beam 11 and an upper beam 12, wherein the lower beam 11 includes a plurality of lower beam members connected end to end, and the upper beam 12 includes a plurality of upper beam members connected end to end, and the length and width of the upper beam 12 are both smaller than the corresponding length and width of the lower beam 11;

[0030] The upper beam 12 is fixedly connected to the shock absorbing assembly 21 . A support column 14 is provided between the upper beam 12 and the lower beam 11 . A reinforcing beam 13 is provided between the lower beams 11 .

[0031] Specifically, in this embodiment, the base frame 1 includes two layers, the upper and lower layers, and the shock-absorbing assembly 21 is not arranged on the lower beam 11, but on the upper beam 12. A buffer space is provided between the upper beam 12 and the lower beam 11 to avoid direct rigid contact between the shock-absorbing assembly 21 and the lower beam 11 and the ground, which can also achieve a certain shock-absorbing effect. In particular, when the material selected for the support column 14 is a material with shock-absorbing slow rebound properties, this structure of the base frame 1 can further improve the buffering and shock-absorbing effect. Among them, the reinforcement beam 13 is provided to strengthen the overall strength of the lower beam 11 and improve the load-bearing capacity of the lower beam 11. In other embodiments, reinforcement beams 13 can also be provided between the upper beam members, and the number and arrangement of the reinforcement beams 13 are not limited in this embodiment. In addition, the size of the upper beam 12 is smaller than that of the lower beam 11 to facilitate the subsequent installation of the outer frame shell. In this embodiment, the top surface of the lower beam member is provided with a mounting hole or a mounting groove and other structures, which facilitates the outer frame shell to be directly fixed on the lower beam 11 during the subsequent installation process.

[0032] In some embodiments, the shock-absorbing mechanism 2 further includes a shock-absorbing base plate 22, with the shock-absorbing assembly 21 and the upper beam 12 respectively disposed on either side of the shock-absorbing base plate 22. Since the upper beam 12 is a frame-type structure with a relatively small installation area at its corners, and the shock absorbers 212 and shock-absorbing blocks 211 being relatively large, the shock-absorbing base plate 22 is disposed between the upper beam 12 and the shock-absorbing assembly 21 to facilitate the layout and installation of the shock absorbers 212 and shock-absorbing blocks 211 in the shock-absorbing assembly 21.

[0033] In some embodiments, a non-slip pad 221 is provided on the side of the shock-absorbing base plate 22 near the upper beam 12. Specifically, during long-term use, due to external vibrations, the shock-absorbing base plate 22 and the upper beam 12 may become loose, causing the relative position of the shock-absorbing assembly 21 and the upper beam 12 to change. The provision of the non-slip pad 221 can stabilize the relative position relationship between the upper beam 12 and the shock-absorbing assembly 21, preventing the shock-absorbing base plate 22 from slipping and deviating from its original position. In addition, the non-slip pad 221 can also provide a certain shock-absorbing and buffering effect.

[0034] In some embodiments, a single shock-absorbing assembly 21 includes two shock-absorbing blocks 211 symmetrically distributed about a shock absorber 212, with the shock-absorbing blocks 211 disposed on the side of the shock absorber 212 facing the adjacent shock absorber 212. The distribution of the shock-absorbing blocks 211 provides clearance for the installation of the outer frame housing and also allows the shock-absorbing assembly 21 to be closer to the center of the shock-absorbing platform 3, thereby reducing the adverse effects of the hollowing of the middle portion of the upper beam 12 and improving the shock-absorbing effect of the shock-absorbing assembly 21.

[0035] In some embodiments, the shock absorber 211 includes a cushion block 2112 and a shock absorbing pad 2111. The cushion block 2112 is fixedly connected to the shock absorbing pad 2111 and the shock absorbing base plate 22 on both sides. The cushion block 2112 provides stable support for the shock absorbing pad 2111, while the shock absorbing pad 2111 shares the shock absorbing pressure of the shock absorber 212. It also disperses the mechanical fluctuations experienced by the wafer inspection mechanism, reduces the adverse effects of vibration, and improves the overall shock absorption effect. The height and material of the shock absorbing pad 2111 vary depending on the needs.

[0036] In some embodiments, the airbag 2122 is provided with an air nozzle 2123, which is used to adjust the air pressure within the airbag 2122 to stabilize the height of the airbag 2122. By filling the airbag 2122 with gas through the air nozzle 2123 and adjusting the gas pressure, the height of the shock absorber 212 is maintained constant, thereby reducing the adverse effects of height fluctuations of the shock absorbing platform 3. This provides a better and more stable shock absorption effect, and increases the accuracy of wafer inspection.

[0037] In some embodiments, the side of the support column 14 facing the center of the lower beam 11 is flush with the side of the lower beam member facing the center of the lower beam 11, and the side of the support column 14 away from the center of the upper beam 12 is flush with the side of the upper beam member away from the center of the upper beam 12. The support column 14 is designed in this way to ensure that the support column 14 has a sufficient cross-sectional area while ensuring sufficient installation space for the outer frame housing to provide stable support between the upper beam 12 and the lower beam 11.

[0038] In some embodiments, a foot 4 and a universal wheel 5 are provided at the corner of the lower beam 11 away from the upper beam 12. The foot 4 is provided to stabilize the position of the lower beam 11 and prevent it from vibrating or shifting, while the universal wheel 5 facilitates the transfer and transportation of the entire device.

[0039] In some embodiments, the shock absorbing platform 3 is made of marble. Compared with other materials, the weight of the marble shock absorbing platform 3 is higher, and it is not easy to continue to fluctuate. Its shock absorbing effect is better and the price is cheaper.

[0040] In summary, the embodiment of the present invention provides a shock absorbing device, which provides a shock absorbing effect by setting a shock absorbing assembly 21 between the shock absorbing platform 3 and the base frame 1, wherein the shock absorbing assembly 21 is divided into two parts: a shock absorber 212 and a shock absorbing block 211. The shock absorber 212 provides the main shock absorbing effect through the airbag 2122, while the shock absorbing block 211 can play an auxiliary shock absorbing role, and its shock absorbing effect is better, more comprehensive, and has a longer service life. The double-layer structure adopted by the base frame 1 can also achieve a good shock absorbing effect, especially when the support column 14 is made of a material with a buffering effect, the shock absorbing effect is better, and the accuracy of wafer detection is improved by enhancing the shock absorbing effect of the entire device.

[0041] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and replacements can be made without departing from the technical principles of the present invention. These improvements and replacements should also be regarded as the scope of protection of the present invention.

Claims

1. A shock absorbing device comprising a chassis, characterized in that: The top surface of the base frame is provided with a shock absorbing mechanism and a shock absorbing platform in sequence along the vertical direction; The shock absorbing mechanism includes shock absorbing components symmetrically arranged at the four corners of the chassis, the shock absorbing components including shock absorbing blocks and shock absorbers; the shock absorbers include a screw and an airbag, the top of the screw passes through and is connected to the shock absorbing platform, and the bottom of the screw is fixedly connected to the airbag; a plurality of shock absorbing blocks are arranged around the shock absorber; The shock-absorbing platform is used to carry the wafer detection mechanism.

2. The shock absorbing device according to claim 1, characterized in that The base frame includes a rectangular lower beam frame and an upper beam frame, the lower beam frame includes a plurality of lower beam rods connected end to end, the upper beam frame includes a plurality of upper beam rods connected end to end, and the length and width dimensions of the upper beam frame are both smaller than the corresponding length and width dimensions of the lower beam frame; The upper beam is fixedly connected to the shock absorbing assembly, a support column is provided between the upper beam and the lower beam, and a reinforcing beam is provided between the lower beam.

3. The shock absorbing device according to claim 2, characterized in that: The shock absorbing mechanism further comprises a shock absorbing base plate, and the shock absorbing assembly and the upper beam are respectively arranged on both sides of the shock absorbing base plate.

4. The shock absorbing device according to claim 3, characterized in that: A non-slip pad is provided on one side of the shock-absorbing base plate close to the upper beam.

5. The shock absorbing device according to claim 3, characterized in that: A single shock absorbing assembly includes two shock absorbing blocks symmetrically distributed about the shock absorber, and the shock absorbing blocks are arranged on a side of the shock absorber facing the adjacent shock absorber.

6. The shock absorbing device according to claim 5, characterized in that: The shock-absorbing block includes a cushion block and a shock-absorbing pad, and two sides of the cushion block are respectively fixedly connected to the shock-absorbing pad and the shock-absorbing base plate.

7. The shock absorbing device according to claim 3, characterized in that: The airbag is provided with an air nozzle, and the air nozzle is used to adjust the air pressure in the airbag to stabilize the height of the airbag.

8. The shock absorbing device according to claim 2, characterized in that: The side of the support column facing the center of the lower beam is flush with the side of the lower beam member facing the center of the lower beam, and the side of the support column away from the center of the upper beam is flush with the side of the upper beam member away from the center of the upper beam.

9. The shock absorbing device according to claim 2, characterized in that: A corner portion of the lower beam away from the upper beam is provided with a foot and a universal wheel.

10. The shock absorbing device according to claim 1, characterized in that: The shock-absorbing platform is made of marble.

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