Lever mechanism of motion platform

Abstract

The utility model discloses a lever mechanism of a motion platform. The lever mechanism comprises a lever, a lever seat, a driving source, a screw rod, a nut and two bearings, the front end of the lever is used for abutting against the lower end face of an ejector rod support, a supporting hole is formed in the middle of the lever and arranged in the direction perpendicular to the length direction of the lever, the two bearings are arranged at the two ends of the supporting hole respectively, the screw penetrates through the two bearings to be connected with the nut, and the screw and the nut axially extrude inner rings of the two bearings. The lever is clamped and fixed by the outer rings of the two bearings, the screw and the nut are fixed on the lever seat, the lever seat is used for being fixed on the bottom plate, and the driving source is used for providing driving force for the front end of the lever to move to a high position. The lever mechanism is more stable and reliable in operation, the condition that the lever shakes is avoided, and the service life is longer.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor detection equipment, and in particular relates to a lever mechanism of a motion platform. Background Art

[0002] When the inspected wafer is removed from the motion platform, the wafer needs to be separated from the electrostatic chuck on the motion platform. Usually, the push rod bracket is lifted up by a lever mechanism so that the upper surface of the push rod on the push rod bracket (wafer contact surface) is higher than a certain height of the electrostatic chuck, and the wafer is lifted off the electrostatic chuck by the push rod.

[0003] In the existing lever mechanism, the lever and the bearing seat are connected by only one bearing. Due to the axial clearance between the inner ring and the outer ring of the bearing, the lever is prone to shaking relative to the bearing seat when rotating. When the push rod pushes away from the wafer, the shaking of the lever will seriously affect the accuracy of the wafer movement, thereby reducing the positioning accuracy of the wafer. Utility Model Content

[0004] In view of the above problems, the present utility model discloses a lever mechanism of a motion platform to overcome the above problems or at least partially solve the above problems.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] The utility model discloses a lever mechanism of a motion platform, comprising a lever, a lever seat, a driving source, a screw rod, a nut and two bearings;

[0007] The front end of the lever is used to abut against the lower end surface of the top rod bracket. A support hole is opened in the middle of the lever, and the support hole is arranged in a direction perpendicular to the length of the lever. The two bearings are respectively arranged at both ends of the support hole. The screw passes through the two bearings and is connected to the nut. The screw and the nut axially squeeze the inner rings of the two bearings so that the outer rings of the two bearings clamp and fix the lever. The screw and the nut are fixed on the lever seat, and the lever seat is used to be fixed on the base plate. The driving source is used to provide a driving force for the front end of the lever to move to a high position.

[0008] Furthermore, bearing grooves are formed at both ends of the support hole, and the two bearings are respectively arranged in the two bearing grooves.

[0009] Further, it also includes a pressure ring;

[0010] The pressure ring is sleeved on the screw and located between the two bearings. The pressure ring is used to squeeze and fix the inner rings of the two bearings.

[0011] Furthermore, a mounting groove is provided on the lever seat, and the screw rod and the nut are both fixed in the mounting groove.

[0012] Furthermore, a pressure cover is provided on the mounting groove, and the pressure cover is used to press and fix the screw and the nut;

[0013] Alternatively, the lever seat is provided with a plurality of top screw holes communicated with the mounting groove, each of the top screw holes is provided with a top screw, and the top screw is used to tighten and fix the screw rod and the nut.

[0014] Furthermore, it also includes a reset member;

[0015] One end of the reset member is connected to the lever, and the other end of the reset member is connected to the lever seat or the bottom plate. The reset member is used to provide a reset force for the front end of the lever to return to a low position.

[0016] Furthermore, a buffer is provided on the lever between the front end of the lever and the lever seat, and a boss corresponding to the position of the buffer is provided on the bottom plate.

[0017] Furthermore, the boss and the base plate are connected via threads.

[0018] Furthermore, it also includes a pressure rod and an L-shaped connecting rod;

[0019] The long side end of the L-shaped connecting rod is fixedly connected to the rear end of the lever, the driving source is arranged below the rear end of the lever, the pressure rod is fixedly connected to the push rod shaft of the driving source, and a pressure groove is opened on the side of the pressure rod, and the short side end of the L-shaped connecting rod abuts against the upper groove wall of the pressure groove.

[0020] Furthermore, a first contact piece is provided at the front end of the lever, and the first contact piece is in point contact or line contact with the lower end surface of the push rod bracket. A second contact piece is provided at the short side end of the L-shaped connecting rod, and the second contact piece is in point contact or line contact with the upper groove wall of the pressing groove.

[0021] The advantages and beneficial effects of the utility model are:

[0022] In the lever mechanism of the utility model, bearings are respectively provided at both ends of the support hole on the lever, and the inner rings of the two bearings are axially squeezed by the screw and the nut, so that the outer rings of the two bearings clamp and fix the lever, thereby eliminating the gap between the inner ring and the outer ring of the bearing, realizing effective pre-tightening in the bearing, greatly reducing the shaking of the lever, and enabling the lever to move more smoothly and reliably, thereby improving the mechanical service life of the lever mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiment below. The accompanying drawings are for illustration purposes only and are not to be considered as limiting the present invention. The same reference symbols are used throughout the accompanying drawings to represent the same components. In the accompanying drawings:

[0024] Figure 1 This is a three-dimensional structural diagram of a lever mechanism in one embodiment of the present utility model;

[0025] Figure 2 A plan view of a lever mechanism in one embodiment of the present invention;

[0026] Figure 3 This is a diagram of the connection structure of a lever in one embodiment of the present utility model;

[0027] Figure 4 It is a three-dimensional cross-sectional view of the connection between the lever and the lever seat in one embodiment of the present utility model;

[0028] Figure 5 This is an axial cross-sectional view of the connection between the lever and the lever seat in one embodiment of the present utility model;

[0029] Figure 6 This is a cross-sectional view of the lever at the support hole in one embodiment of the present invention.

[0030] In the figure: 1. Lever; 2. Lever seat; 3. Driving source; 4. Screw; 5. Nut; 6. Bearing; 7. Push rod bracket; 8. Base plate; 9. Pressing ring; 10. Mounting groove; 11. Opening; 12. Push screw; 13. Reset member; 14. Buffer member; 15. Boss; 16. Press rod; 17. L-shaped connecting rod; 18. Pressing groove; 19. First contact member; 20. Second contact member; 21. Support hole; 22. Bearing groove. DETAILED DESCRIPTION

[0031] To make the purpose, technical solutions, and advantages of the present invention more clear, the following will provide a clear and complete description of the technical solutions of the present invention in conjunction with specific embodiments of the present invention and the corresponding drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0032] The technical solutions provided by various embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0033] In one embodiment of the present invention, a lever mechanism of a motion platform is provided, such as Figures 1 to 6As shown, the lever mechanism includes a lever 1, a lever base 2, a driving source 3, a screw 4, a nut 5 and two bearings 6. The driving source is a device capable of driving linear motion, such as an electric drive cylinder, a pneumatic drive cylinder or a linear motor.

[0034] Specifically, the front end of the lever 1 is used to abut against the lower end surface of the push rod bracket 7. When the front end of the lever 1 is in a high position, the front end of the lever 1 can lift the push rod bracket 7. When the front end of the lever 1 is in a low position, the push rod bracket 7 falls back as the front end of the lever 1 descends; a support hole 21 is opened in the middle of the lever 1, and the support hole 21 is arranged along a direction perpendicular to the length of the lever 1. The lever 1 can rotate around the support hole 21. The two bearings 6 are respectively arranged at both ends of the support hole 21. The screw 4 passes through the two bearings 6 and the support hole 21 and is connected to the nut 5. The screw 4 and the nut 5 can be tightened so that the screw 4 and the nut 5 axially squeeze the inner rings of the two bearings 6 from the outside of the two bearings 6, so that the outer rings of the two bearings 6 clamp and fix the lever 1, thereby eliminating the gap between the inner and outer rings of the bearings 6, and realizing effective pretightening in the bearing 6; wherein, the outer side of the bearing is the side of the bearing away from the lever, and the inner side of the bearing is the side of the bearing close to the lever.

[0035] Furthermore, screw rod 4 and nut 5 are fixed to lever base 2, which is fixed to base plate 8. The two can be fixedly connected by screws or bolts. Drive source 3 is used to provide the driving force for the front end of lever 1 to move to the upper position. It should be noted that when two bearings 6 are disposed at both ends of support hole 21, only the outer races of bearings 6 abut against lever 1, and only the inner races of bearings 6 abut against screw rod 4 or nut 5.

[0036] In summary, in the lever mechanism of this embodiment, bearings are respectively arranged at both ends of the support hole on the lever, and the inner rings of the two bearings are axially squeezed by the screw and the nut, so that the outer rings of the two bearings clamp and fix the lever, thereby eliminating the gap between the inner ring and the outer ring of the bearing, achieving effective pre-tightening in the bearing, greatly reducing the shaking of the lever, and enabling the lever to move more smoothly and reliably, thereby improving the mechanical service life of the lever mechanism.

[0037] In this embodiment, if Figures 4 to 6 As shown, bearing grooves 22 are formed at both ends of the support hole 21, and two bearings 6 are respectively disposed in the two bearing grooves 22. In this way, the bearing grooves 22 accommodate the bearings 6, preventing external dust particles from entering the bearings 6 and affecting the normal operation of the bearings 6. The bearing grooves 22 also position the bearings 6, preventing the bearings 6 from moving relative to the lever 1 during long-term use of the lever mechanism, thereby ensuring the accuracy of the lever mechanism's movement.

[0038] In addition, if Figure 4 and Figure 5 As shown, the lever mechanism further comprises a pressure ring 9 .

[0039] The pressure ring 9 is sleeved on the screw 4 and located between the two bearings 6. The pressure ring 9 is used to squeeze and fix the inner rings of the two bearings 6, that is, when the screw 4 and the nut 5 squeeze the outer sides of the inner rings of the two bearings 6, the pressure ring 9 squeezes the inner sides of the inner rings of the two bearings 6 to fix the inner rings of the bearings 6. The setting of the pressure ring 9 can effectively prevent the screw 4 and the nut 5 from excessively squeezing the inner rings of the bearings 6.

[0040] In addition, if Figure 3 and Figure 4 As shown, a mounting groove 10 is provided on the lever base 2, and the mounting groove 10 passes through the lever base 2 in a length direction perpendicular to the lever 1. An opening 11 is provided in the middle of the lever base 2 for accommodating the lever 1. The screw 4 and the nut 5 are respectively fixed in the mounting groove 10 on both sides of the opening 11, making it more convenient to assemble and disassemble the lever 1 and the lever base 2.

[0041] Further, if Figure 4 and Figure 5 As shown, the lever base 2 is provided with a plurality of jackscrew holes communicating with the mounting groove 10, each of which is provided with a jackscrew 12. The jackscrew 12 is used to tighten and fix the screw rod 4 and the nut 5. Specifically, the lever base 2 is provided with eight jackscrew holes, one on each side of the mounting groove 10, four of which are used to fix the screw rod 4, and four of which are used to fix the nut 5. This makes the screw rod 4 and the nut 5 more firmly fixed.

[0042] Of course, in other embodiments, a pressure cover may be provided on the mounting groove to compress and fix the screw rod and the nut. Specifically, the pressure cover may be fixed to the lever seat by screws or bolts.

[0043] In this embodiment, if Figure 1 and Figure 2 As shown, the lever mechanism further includes a reset member 13 ; wherein the reset member can be a coil spring.

[0044] One end of the reset member 13 is connected to the lever 1, and the other end of the reset member 13 is connected to the lever base 2. The reset member 13 is used to provide a reset force for the front end of the lever 1 to return to the low position. By adding the reset member 13, the lever 1 can be quickly returned to the low position, increasing the response speed and preventing the lever 1 from getting stuck. In other embodiments, the other end of the reset member can also be connected to the base plate.

[0045] In addition, if Figures 1 to 3 As shown, a buffer 14 is provided on the lever 1 between the front end of the lever 1 and the lever seat 2, and a boss 15 is provided on the base plate 8 corresponding to the position of the buffer 14, so as to prevent the front end of the lever 1 and the base plate 8 from colliding and vibrating, thereby extending the service life of the lever mechanism. The buffer can be made of rubber and the boss can be made of metal.

[0046] In addition, the boss 15 and the base plate 8 are connected by threads; in this way, the height of the boss 15 can be adjusted so that when the front end of the lever 1 is in a low position, the buffer member 14 can just contact the boss 15.

[0047] In this embodiment, if Figures 1 to 3 As shown, the lever mechanism further includes a pressure rod 16 and an L-shaped connecting rod 17 .

[0048] Specifically, the long side of L-shaped connecting rod 17 is fixedly connected to the rear end of lever 1. Drive source 3 is positioned below the rear end of lever 1. A pressure rod 16 is fixedly connected to the push rod shaft of drive source 3. A pressure groove 18 is formed on the side of pressure rod 16, and the short side of L-shaped connecting rod 17 abuts against the upper wall of pressure groove 18. Thus, when the push rod shaft of drive source 3 moves downward, it presses down on the rear end of lever 1, causing the front end of lever 1 to move upward. This structural arrangement makes the layout of the lever mechanism more compact, taking up less space.

[0049] Further, if Figures 1 to 3 As shown, the front end of the lever 1 is provided with a first contact member 19, which is in point contact or line contact with the lower end surface of the push rod bracket 7. The short side end of the L-shaped connecting rod 17 is provided with a second contact member 20, which is in point contact or line contact with the upper groove wall of the pressing groove 18. The first contact member and the second contact member can be a sphere or a cylinder. The first contact member can be fixed to the front end of the lever by bolts, or the first contact member and the lever adopt an integral structure, and the second contact member can be fixed to the L-shaped connecting rod by bolts, or the second contact member and the L-shaped connecting rod adopt an integral structure. By providing the first contact member and the second contact member, the lateral force of the driving source on the lever and the lateral force of the lever on the push rod bracket can be effectively reduced, thereby ensuring the stable and reliable operation of the motion platform.

[0050] The above description is only a specific embodiment of the present invention. Based on the above teachings of the present invention, those skilled in the art may make other improvements or modifications based on the above embodiments. Those skilled in the art should understand that the above description is only a better explanation of the purpose of the present invention, and the scope of protection of the present invention shall be based on the scope of protection of the claims.

Claims

1. A lever mechanism of a motion platform, characterized in that: It includes a lever, a lever seat, a driving source, a screw, a nut and two bearings; The front end of the lever is used to abut against the lower end surface of the top rod bracket. A support hole is opened in the middle of the lever, and the support hole is arranged in a direction perpendicular to the length of the lever. The two bearings are respectively arranged at both ends of the support hole. The screw passes through the two bearings and is connected to the nut. The screw and the nut axially squeeze the inner rings of the two bearings so that the outer rings of the two bearings clamp and fix the lever. The screw and the nut are fixed on the lever seat, and the lever seat is used to be fixed on the base plate. The driving source is used to provide a driving force for the front end of the lever to move to a high position.

2. The lever mechanism of the motion platform according to claim 1, characterized in that: Bearing grooves are respectively formed at both ends of the support hole, and the two bearings are respectively arranged in the two bearing grooves.

3. The lever mechanism of the motion platform according to claim 1, characterized in that: Also included is a press ring; The pressure ring is sleeved on the screw and located between the two bearings. The pressure ring is used to squeeze and fix the inner rings of the two bearings.

4. The lever mechanism of the motion platform according to claim 1, characterized in that: The lever seat is provided with a mounting groove, and the screw rod and the nut are both fixed in the mounting groove.

5. The lever mechanism of the motion platform according to claim 4, characterized in that: A pressure cover is provided on the mounting groove, and the pressure cover is used to press and fix the screw and the nut; Alternatively, the lever seat is provided with a plurality of top screw holes communicated with the mounting groove, each of the top screw holes is provided with a top screw, and the top screw is used to tighten and fix the screw rod and the nut.

6. The lever mechanism of the motion platform according to claim 1, characterized in that: Also includes a reset member; One end of the reset member is connected to the lever, and the other end of the reset member is connected to the lever seat or the bottom plate. The reset member is used to provide a reset force for the front end of the lever to return to a low position.

7. The lever mechanism of the motion platform according to claim 1, characterized in that: A buffer is provided on the lever between the front end of the lever and the lever seat, and a boss corresponding to the position of the buffer is provided on the bottom plate.

8. The lever mechanism of the motion platform according to claim 7, characterized in that: The boss and the base plate are connected via threads.

9. The lever mechanism of the motion platform according to any one of claims 1 to 8, characterized in that: It also includes a compression rod and an L-shaped connecting rod; The long side end of the L-shaped connecting rod is fixedly connected to the rear end of the lever, the driving source is arranged below the rear end of the lever, the pressure rod is fixedly connected to the push rod shaft of the driving source, and a pressure groove is opened on the side of the pressure rod, and the short side end of the L-shaped connecting rod abuts against the upper groove wall of the pressure groove.

10. The lever mechanism of the motion platform according to claim 9, characterized in that: A first contact piece is provided at the front end of the lever, and the first contact piece is in point contact or line contact with the lower end surface of the push rod bracket. A second contact piece is provided at the short side end of the L-shaped connecting rod, and the second contact piece is in point contact or line contact with the upper groove wall of the pressing groove.

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