Temperature detection device for vacuum high-temperature furnace

Abstract

The utility model provides a temperature detection device for a vacuum high-temperature furnace. The installation frame is fixed to the furnace wall of the high-temperature furnace and penetrates through the furnace wall of the high-temperature furnace. The sliding temperature measuring assembly can be arranged on the mounting frame in a sliding mode in the radial direction of the high-temperature furnace. And the sliding temperature measuring mechanism is used for measuring the temperature in the high-temperature furnace. And liquid is arranged in the pneumatic cylinder, so that the liquid is gasified when the temperature of the pneumatic cylinder reaches a preset temperature value. The air pressure driving part is configured to be driven by pressure intensity and is connected with the sliding temperature measuring assembly to drive the sliding assembly to slide. The pneumatic cylinder is connected with the pneumatic driving part through a pneumatic pipeline. The pneumatic cylinder is used for making contact with the high-temperature furnace when the sliding temperature measuring mechanism is installed on the installation frame. The sliding temperature measuring mechanism is arranged in a sliding mode and can be conveniently taken down from the mounting frame or slide out of the high-temperature furnace after multi-point temperature measurement of the high-temperature furnace is completed, so that the sliding temperature measuring mechanism is prevented from being damaged due to the fact that the sliding temperature measuring mechanism stays in the high-temperature furnace for a long time, and the service life of the device can be prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor vacuum furnace temperature measurement, in particular to a temperature detection device for a vacuum high-temperature furnace. Background Art

[0002] Existing temperature measurement methods for vacuum high-temperature furnaces typically involve inserting a temperature measuring device directly into the furnace at the desired location and securing it to a flanged tube within the furnace. This method exposes the temperature measuring device to a constant high temperature environment, shortening its service life and increasing its operating costs. Utility Model Content

[0003] In view of the above problems, the present invention is proposed to provide a vacuum high temperature furnace temperature detection device that overcomes the above problems or at least partially solves the above problems, which can solve the problem of high temperature measurement cost of the temperature detection device and achieve the purpose of detection cost.

[0004] Specifically, the present invention provides a temperature detection device for a vacuum high-temperature furnace, comprising:

[0005] a mounting frame, the mounting frame being fixed to the furnace wall of the high-temperature furnace and penetrating the furnace wall of the high-temperature furnace;

[0006] a sliding temperature measuring mechanism, the sliding temperature measuring mechanism being slidably disposed on the mounting frame along the radial direction of the high-temperature furnace; the sliding temperature measuring mechanism being used to measure the temperature inside the high-temperature furnace;

[0007] A driving assembly includes a pneumatic cylinder, a pneumatic driving member and a pneumatic pipeline; a liquid is provided in the pneumatic cylinder so that the liquid is vaporized when the temperature of the pneumatic cylinder reaches a preset temperature value; the pneumatic driving member is configured to be driven by pressure, and the pneumatic driving member is connected to the sliding temperature measuring mechanism to drive the sliding temperature measuring mechanism to slide; the pneumatic cylinder and the pneumatic driving member are connected by a pneumatic pipeline; the pneumatic cylinder is used to contact the high-temperature furnace when the sliding temperature measuring mechanism is installed on the mounting frame.

[0008] Optionally, the pneumatic drive member is provided with a telescopic shaft for telescoping;

[0009] The sliding temperature measuring mechanism includes:

[0010] a sliding sleeve, the sliding sleeve being slidably mounted on the mounting frame; the sliding sleeve being connected to the telescopic shaft so that the telescopic shaft drives the sliding sleeve to slide;

[0011] A temperature measuring component is installed in the sliding sleeve, and the sliding sleeve can drive the temperature measuring component to slide into the high-temperature furnace to measure the internal temperature of the high-temperature furnace.

[0012] Optionally, the sliding temperature measurement mechanism further includes:

[0013] A disassembly sleeve is detachably fixed on the mounting frame, with one end of the disassembly sleeve having a mounting opening and the other end being in the high-temperature furnace; the sliding sleeve is slidably inserted into the disassembly sleeve from the mounting opening of the disassembly sleeve;

[0014] A connecting frame, one end of which is fixedly connected to the disassembly sleeve, and the other end of which is fixedly connected to the pneumatic drive component.

[0015] Optionally, the mounting bracket includes a mounting tube; the mounting tube is fixedly mounted on the furnace wall of the high-temperature furnace via reinforcing ribs; and the disassembly sleeve is detachably inserted into the mounting tube.

[0016] Optionally, a rotating shaft is provided in the sliding sleeve; the rotating shaft is arranged to rotate vertically, and the rotating shaft is provided with rotating holes penetrating along both sides thereof in a radial direction;

[0017] The temperature measuring component includes a temperature measuring probe; the temperature measuring probe can be inserted into the rotating hole.

[0018] Optionally, the sliding sleeve is further provided with two thermal insulation plates; the two thermal insulation plates are symmetrically arranged on both sides of the rotating shaft, and the thermal insulation plates are sealed and fixed to the inner wall of the sliding sleeve and in sealing contact with the rotating shaft.

[0019] Optionally, the cross-section of the sliding sleeve is rectangular; a cover is fixed to the end of the sliding sleeve away from the high-temperature furnace; a swing groove is provided on the cover; the swing groove is a linear groove extending along the direction of rotation of the temperature probe; the groove width of the swing groove is equal to the diameter of the temperature measuring probe.

[0020] Optionally, a sliding plate is fixedly provided on the sliding sleeve; the sliding plate is connected to the telescopic shaft;

[0021] The connecting frame is provided with a plurality of position sensors spaced apart along the sliding direction of the sliding sleeve; the position sensors are used to enable the temperature measuring component to record the temperature in the high-temperature furnace corresponding to the position when the sliding plate passes.

[0022] Optionally, a pressure relief solenoid valve is provided on the air pressure pipe; the pressure relief solenoid valve is used to control the opening and closing of the air pressure pipe, so that the air pressure drive component is relieved of pressure when the pressure relief solenoid valve starts;

[0023] The plurality of position sensors include a pressure relief position sensor; the pressure relief position sensor is a position sensor close to the high-temperature furnace; when the sliding plate passes through the pressure relief position sensor, the pressure relief solenoid valve is opened.

[0024] The vacuum high-temperature furnace temperature detection device of the present invention comprises a mounting frame, a sliding temperature measuring mechanism, and a drive assembly, and the sliding temperature measuring mechanism is slidably arranged. The sliding arrangement of the sliding temperature measuring mechanism allows for easy removal from the mounting frame or sliding out of the high-temperature furnace after completing multi-point temperature measurement of the high-temperature furnace, thereby preventing damage caused by prolonged time in the high-temperature furnace and thereby increasing the service life of the device.

[0025] Furthermore, the pneumatic actuator is driven by pressure, and under the action of the pressure, the pneumatic actuator is activated, thereby pushing the sliding temperature measuring mechanism forward. Furthermore, the pneumatic cylinder is filled with liquid, and this liquid is easily vaporized to form high-pressure gas inside. The high-pressure gas is introduced into the pneumatic actuator through a pneumatic pipe, thereby activating the pneumatic actuator. Optionally, the pneumatic cylinder contains water. Due to the high temperature of the furnace wall, when the pneumatic cylinder contacts the wall of the high-temperature furnace, the water cup inside the pneumatic cylinder is heated to form high-pressure gas. In other words, the pneumatic actuator can achieve activation through the heat of the high-temperature furnace itself, thereby recovering heat and achieving energy saving.

[0026] Based on the following detailed description of specific embodiments of the present invention in conjunction with the accompanying drawings, those skilled in the art will become more aware of the above and other objects, advantages and features of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Hereinafter, some specific embodiments of the present invention will be described in detail in an exemplary and non-limiting manner with reference to the accompanying drawings. The same reference numerals in the accompanying drawings indicate the same or similar components or parts. It should be understood by those skilled in the art that these drawings are not necessarily drawn to scale. In the accompanying drawings:

[0028] Figure 1 This is a schematic structural diagram of a temperature detection device for a vacuum high-temperature furnace according to one embodiment of the present utility model;

[0029] Figure 2 This is a front view of a temperature detection device for a vacuum high-temperature furnace according to an embodiment of the present utility model;

[0030] Figure 3 yes Figure 2 Cross-sectional view at AA in the middle;

[0031] Figure 4 yes Figure 3 A partial enlarged view of point D in the middle;

[0032] Figure 5 This is a schematic structural diagram of a temperature detection device for a vacuum high-temperature furnace according to one embodiment of the present utility model;

[0033] Figure 6This is a schematic structural diagram of a temperature detection device for a vacuum high-temperature furnace according to one embodiment of the present utility model;

[0034] Figure 7 yes Figure 6 A cross-sectional view of the middle BB;

[0035] Figure 8 yes Figure 7 A partial enlarged view of point C in the middle;

[0036] Figure 9 The figure is a schematic structural diagram of a sliding sleeve in a temperature detection device for a vacuum high-temperature furnace according to an embodiment of the present invention.

[0037] In the figure: 100, mounting frame; 110, mounting tube; 120, reinforcing rib; 200, sliding temperature measuring mechanism; 210, sliding sleeve; 211, rotating shaft; 212, sliding plate; 213, swinging groove; 214, insulation plate; 221, temperature measuring probe; 222, temperature recording sheet; 230, disassembly sleeve; 240, connecting frame; 300, drive assembly; 310, air pressure pipe; 320, pressure relief solenoid valve; 330, position sensor; 350, pneumatic cylinder; 400, pneumatic drive component; 410, telescopic shaft; 500, high temperature furnace. DETAILED DESCRIPTION

[0038] Refer to the following Figures 1 to 9 To describe the temperature detection device of a vacuum high-temperature furnace in an embodiment of the present invention. In the description of this embodiment, it should be understood that the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features, that is, include one or more of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined. When a feature "includes or contains" one or some of the features it covers, unless otherwise specifically described, this indicates that other features are not excluded and may further include other features.

[0039] Unless otherwise expressly specified or limited, terms such as "disposed," "installed," "connected," "connected," "fixed," and "coupled" should be interpreted broadly. For example, they may refer to fixed or detachable connections, or integration; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two elements or interaction between two elements, unless otherwise expressly limited. A person of ordinary skill in the art should be able to understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0040] In addition, in the description of this embodiment, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or may include the first and second features not being in direct contact but being in contact via another feature between them. That is, in the description of this embodiment, the first feature being "above," "above," and "above" the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is higher in level than the second feature. The first feature being "below," "below," or "below" the second feature may mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0041] In the description of the present embodiment, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any appropriate manner in any one or more embodiments or examples.

[0042] Figure 1 This is a schematic structural diagram of the temperature detection device of a vacuum high temperature furnace, such as Figure 1 As shown, and reference Figures 2 to 9 The present invention provides a temperature detection device for a vacuum high-temperature furnace, including a mounting frame 100, a sliding temperature measuring mechanism 200, and a drive assembly 300. The mounting frame 100 is fixed to the wall of a high-temperature furnace 500 and extends through the wall. The sliding temperature measuring mechanism 200 is slidably disposed on the mounting frame 100 along the radial direction of the high-temperature furnace 500. The sliding temperature measuring mechanism 200 is used to measure the temperature within the high-temperature furnace 500. The drive assembly 300 includes a pneumatic cylinder 350, a pneumatic drive element 400, and a pneumatic pipe 310. The pneumatic cylinder 350 contains a liquid, which vaporizes when the temperature of the pneumatic cylinder 350 reaches a preset temperature value. The pneumatic drive element 400 is configured to be driven by pressure. The pneumatic drive element 400 is connected to the sliding temperature measuring mechanism 200 to drive the sliding temperature measuring mechanism 200 to slide. The pneumatic cylinder 350 and the pneumatic drive element 400 are connected by the pneumatic pipe 310. The pneumatic cylinder 350 is used to contact the high-temperature furnace 500 when the sliding temperature measuring mechanism 200 is installed on the mounting frame 100 .

[0043] Specifically, the mounting frame 100 can be integrally formed with the high-temperature furnace 500 or welded to the outer wall of the high-temperature furnace 500. Furthermore, the sliding temperature measuring mechanism 200 can be slidably arranged, enabling it to slide both inside and outside the high-temperature furnace 500. As the sliding temperature measuring mechanism 200 slides inward of the high-temperature furnace 500, it can measure the temperature at different radial locations within the high-temperature furnace 500. Furthermore, the sliding arrangement of the sliding temperature measuring mechanism 200 also facilitates removal from the mounting frame 100 or sliding it out of the high-temperature furnace 500 after completing the temperature measurement of the high-temperature furnace 500, thereby preventing damage caused by prolonged time within the high-temperature furnace 500.

[0044] Furthermore, the pneumatic actuator 400 is driven by pressure, and under the action of the pressure, the pneumatic actuator 400 is activated, thereby pushing the sliding temperature measuring mechanism 200 to slide forward. Furthermore, the pneumatic cylinder 350 is filled with liquid, and this liquid is easily vaporized to form high-pressure gas inside. The high-pressure gas is passed into the pneumatic actuator 400 through the pneumatic pipe 310 to activate the pneumatic actuator 400. Optionally, the pneumatic cylinder 350 contains water. Due to the high temperature of the furnace wall, when the pneumatic cylinder 350 contacts the furnace wall of the high-temperature furnace 500, the water cup inside the pneumatic cylinder 350 is heated to form high-pressure gas. In other words, the pneumatic actuator 400 can achieve activation through the heat of the high-temperature furnace 500 itself, thereby recovering heat and achieving energy saving.

[0045] During operation, the sliding temperature measurement mechanism 200 is first mounted on the mounting frame 100, and the pneumatic cylinder 350 is brought into contact with the high-temperature furnace 500. When the high-temperature furnace 500 and the pneumatic cylinder 350 come into contact, the heat from the furnace 500 vaporizes the liquid inside the cylinder 350, increasing its internal pressure. The high-pressure gas enters the pneumatic actuator 400 through a pressure pipe, activating the pneumatic actuator 400 under the influence of the high pressure. This forces the sliding temperature measurement mechanism 200 to slide on the mounting frame 100 into the high-temperature furnace 500, thereby measuring the temperature inside the furnace 500.

[0046] Alternatively, in the initial state, the sliding temperature measuring mechanism 200 is installed on the mounting frame 100, and the sliding temperature measuring mechanism 200 is at the innermost side to directly measure the temperature inside the high-temperature furnace 500. When the pneumatic driving member 400 is started, it drives the sliding temperature measuring mechanism 200 to slide outward.

[0047] In some embodiments of the present invention, Figure 5As shown, the pneumatic drive element 400 is provided with a telescopic shaft 410 for extension and retraction. The sliding temperature measurement mechanism 200 includes a sliding sleeve 210 and a temperature measurement assembly. The sliding sleeve 210 is slidably mounted on the mounting frame 100. The sliding sleeve 210 is connected to the telescopic shaft 410, so that the telescopic shaft 410 drives the sliding sleeve 210 to slide. The temperature measurement assembly is mounted within the sliding sleeve 210. The sliding sleeve 210 can drive the temperature measurement assembly to slide into the high-temperature furnace 500 to measure the internal temperature of the high-temperature furnace 500.

[0048] Specifically, the sliding sleeve 210 is used to drive the temperature measurement assembly to slide. Furthermore, when the pneumatic drive 400 is activated, its telescopic shaft 410 extends outward or contracts inward. Furthermore, the sliding sleeve 210 is connected to the telescopic shaft 410, so that the telescopic shaft 410 drives the sliding sleeve 210 to slide.

[0049] In some embodiments of the present invention, Figure 3 and Figure 4 As shown, the temperature measurement mechanism also includes a disassembly sleeve 230 and a connecting bracket 240. The disassembly sleeve 230 is detachably fixed to the mounting bracket 100, with one end of the disassembly sleeve 230 having a mounting opening, and the other end being located within the high-temperature furnace 500. The sliding sleeve 210 is slidably inserted from the mounting opening into the disassembly sleeve 230. The connecting bracket 240 is fixedly connected to the disassembly sleeve 230 at one end and to the pneumatic drive element 400 at the other end.

[0050] Specifically, the disassembly sleeve 230 is fixedly connected to the mounting frame 100, allowing the sliding sleeve 210 to slide on the mounting frame 100. Simultaneously, the connection frame 240 facilitates the fixed installation location of the pneumatic actuator 400 and, after the disassembly sleeve 230 is fixedly installed, provides a force application point for the pneumatic actuator 400. Furthermore, to disassemble the sliding temperature measurement mechanism 200, simply remove the disassembly pipe from the mounting frame 100. Furthermore, the mounting frame 100 and the disassembly sleeve 230 are fixedly connected by threads.

[0051] In this embodiment, connecting flanges are provided at the outer ends of the disassembly sleeve 230 and the outer ends of the mounting bracket 100 so that the mounting bracket 100 and the disassembly sleeve 230 are threadedly fixedly connected.

[0052] In some embodiments of the present invention, Figure 5 As shown, the mounting frame 100 includes a mounting tube 110, which is fixed to the furnace wall of the high-temperature furnace 500 via reinforcing ribs 120. The disassembly sleeve 230 is detachably inserted into the mounting tube 110. Specifically, the mounting frame 100 is a rectangular sleeve structure, with reinforcing ribs 120 provided on the upper and lower sides.

[0053] In some embodiments of the present invention, Figure 4 and Figure 8 As shown, a rotating shaft 211 is provided in the sliding sleeve 210; the rotating shaft 211 is arranged to rotate vertically, and a rotating hole is provided on the rotating shaft 211 that passes through both sides along its radial direction. The temperature measuring assembly includes a temperature measuring probe 221. The temperature measuring probe 221 can be inserted into the rotating hole. Specifically, one end of the temperature measuring probe 221 can extend into the high-temperature furnace 500, and the other end is located outside the sliding sleeve 210. The rotating arrangement of the rotating shaft 211 can cause the temperature measuring probe 221 to rotate when the temperature measuring probe 221 is inserted, thereby causing the end of the rotating probe located in the high-temperature furnace 500 to rotate horizontally, thereby providing a wide-angle temperature measurement range. Furthermore, the rotation range of the drive shaft is between 0-90°.

[0054] In this embodiment, the rotating shaft 211 may be connected to a driving device to drive the rotating shaft 211 to rotate.

[0055] In some embodiments of the present invention, Figure 4 As shown, the sliding sleeve 210 is further provided with two thermal insulation plates 214; the two thermal insulation plates 214 are symmetrically arranged on either side of the rotating shaft 211. The thermal insulation plates 214 are sealed and fixed to the inner wall of the sliding sleeve 210, and are in sealing contact with the rotating shaft 211. Specifically, the thermal insulation plates 214 are used to prevent the high temperature in the high-temperature furnace 500 from escaping.

[0056] In some embodiments of the present invention, Figure 9 As shown, the sliding sleeve 210 has a rectangular cross-section. A cover is fixed to the end of the sliding sleeve 210 facing away from the high-temperature furnace 500. The cover is provided with a swing groove 213. The swing groove 213 is a linear groove extending in the direction of rotation of the temperature probe. The width of the swing groove 213 is equal to the diameter of the temperature probe 221. Specifically, the linear groove can clamp and constrain the temperature probe 221, preventing the outer end of the temperature probe 221 from moving up and down, so that the temperature probe 221 can only move horizontally. Furthermore, a blocking ring is provided at the outer end of the sliding sleeve 210 to prevent the sliding sleeve 210 from sliding completely into the disassembly sleeve 230.

[0057] In some embodiments of the present invention, Figure 8 and Figure 9 As shown, a sliding plate 212 is fixedly mounted on the sliding sleeve 210, and the sliding plate 212 is connected to the telescopic shaft 410. A plurality of position sensors 330 are mounted on the connecting frame 240, spaced apart along the sliding direction of the sliding sleeve 210. The position sensors 330 are used to enable the temperature measurement assembly to record the temperature within the high-temperature furnace 500 at the corresponding position when the sliding plate 212 passes by.

[0058] Specifically, the connecting bracket 240 is located below the telescopic shaft 410 and is fixed relative to the telescopic shaft 410. Therefore, when the telescopic shaft 410 moves, it can sequentially pass by the position sensor 330. The position sensor 330 records the position of the telescopic shaft 410 to obtain the temperature of the temperature measuring probe 221 within the high-temperature furnace 500, thereby obtaining temperature values ​​at different positions within the high-temperature furnace 500. Furthermore, the outer end of the temperature measuring probe 221 is connected to a temperature recording meter 222, which can record the temperature value of the temperature measuring probe 221 at the corresponding position of the position sensor 330.

[0059] In some embodiments of the present invention, Figure 8 As shown, a pressure relief solenoid valve 320 is installed on the air pressure pipe 310. The pressure relief solenoid valve 320 is used to control the opening and closing of the air pressure pipe, thereby releasing pressure from the pneumatic drive 400 when the pressure relief solenoid valve 320 is opened. The multiple position sensors 330 include a pressure relief position sensor 330; the pressure relief position sensor 330 is located near the high-temperature furnace 500. When the sliding plate 212 passes the pressure relief position sensor 330, the pressure relief solenoid valve 320 opens.

[0060] Specifically, when the telescopic shaft 410 slides to the position corresponding to the pressure relief position sensor 330, it drives the sliding sleeve 210 to its innermost end. At this point, the pressure relief position sensor 330 activates the pressure relief solenoid valve 320, preventing the high pressure in the pneumatic cylinder 350 from entering the pneumatic actuator 400 through the pneumatic conduit 310. This causes the pneumatic actuator 400 to release pressure, causing the telescopic shaft 410 of the pneumatic actuator 400 to retract and retract, thereby retracting the temperature probe 221.

[0061] At this point, those skilled in the art should recognize that, although multiple exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications consistent with the principles of the present invention can be directly determined or deduced from the contents disclosed herein without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and deemed to cover all such other variations or modifications.

Claims

1. A vacuum high temperature furnace temperature detection device, characterized in that: include: a mounting frame, the mounting frame being fixed to the furnace wall of the high-temperature furnace and penetrating the furnace wall of the high-temperature furnace; a sliding temperature measuring mechanism, the sliding temperature measuring mechanism being slidably disposed on the mounting frame along the radial direction of the high-temperature furnace; the sliding temperature measuring mechanism being used to measure the temperature inside the high-temperature furnace; A drive assembly comprising a pneumatic cylinder, a pneumatic drive member, and a pneumatic pipeline; a liquid is provided in the pneumatic cylinder so as to vaporize the liquid when the temperature of the pneumatic cylinder reaches a preset temperature value; The pneumatic driving member is configured to be driven by pressure, and the pneumatic driving member is connected to the sliding temperature measuring mechanism to drive the sliding temperature measuring mechanism to slide; the pneumatic cylinder and the pneumatic driving member are connected by a pneumatic pipeline; the pneumatic cylinder is used to contact the high-temperature furnace when the sliding temperature measuring mechanism is installed on the mounting frame.

2. The vacuum high temperature furnace temperature detection device according to claim 1, characterized in that: The pneumatic drive member is provided with a telescopic shaft for telescoping; The sliding temperature measuring mechanism includes: a sliding sleeve, the sliding sleeve being slidably mounted on the mounting frame; the sliding sleeve being connected to the telescopic shaft so that the telescopic shaft drives the sliding sleeve to slide; A temperature measuring component is installed in the sliding sleeve, and the sliding sleeve can drive the temperature measuring component to slide into the high-temperature furnace to measure the internal temperature of the high-temperature furnace.

3. The vacuum high temperature furnace temperature detection device according to claim 2, characterized in that: The sliding temperature measuring mechanism also includes: a disassembly sleeve, the disassembly sleeve being detachably fixedly mounted on the mounting frame; the sliding sleeve being slidably inserted into the disassembly sleeve from the mounting opening of the disassembly sleeve; A connecting frame, one end of which is fixedly connected to the disassembly sleeve, and the other end of which is fixedly connected to the pneumatic drive component.

4. The vacuum high temperature furnace temperature detection device according to claim 3, characterized in that: The mounting frame includes a mounting tube; the mounting tube is fixedly mounted on the furnace wall of the high-temperature furnace through reinforcing ribs; the disassembly sleeve is detachably inserted into the mounting tube.

5. The vacuum high temperature furnace temperature detection device according to claim 3, characterized in that: A rotating shaft is provided in the sliding sleeve; the rotating shaft is arranged to rotate vertically, and the rotating shaft is provided with rotating holes penetrating along both sides of the rotating shaft in the radial direction; The temperature measuring component includes a temperature measuring probe; the temperature measuring probe can be inserted into the rotating hole.

6. The vacuum high temperature furnace temperature detection device according to claim 5, characterized in that: The sliding sleeve is further provided with two thermal insulation plates; the two thermal insulation plates are symmetrically arranged on both sides of the rotating shaft, and the thermal insulation plates are sealed and fixed to the inner wall of the sliding sleeve and are in sealing contact with the rotating shaft.

7. The vacuum high temperature furnace temperature detection device according to claim 5, characterized in that: The cross section of the sliding sleeve is rectangular; a cover is fixed to one end of the sliding sleeve away from the high-temperature furnace; a swing groove is provided on the cover; the swing groove is a linear groove extending along the direction of rotation of the temperature probe; the groove width of the swing groove is equal to the diameter of the temperature measuring probe.

8. The vacuum high temperature furnace temperature detection device according to claim 3, characterized in that: A sliding plate is fixedly provided on the sliding sleeve; the sliding plate is connected to the telescopic shaft; The connecting frame is provided with a plurality of position sensors spaced apart along the sliding direction of the sliding sleeve; the position sensors are used to enable the temperature measuring component to record the temperature in the high-temperature furnace corresponding to the position when the sliding plate passes.

9. The vacuum high temperature furnace temperature detection device according to claim 8, characterized in that: The air pressure pipe is provided with a pressure relief solenoid valve; the pressure relief solenoid valve is used to control the opening and closing of the air pressure pipe, so that the air pressure drive component is relieved of pressure when the pressure relief solenoid valve starts; The plurality of position sensors include a pressure relief position sensor; the pressure relief position sensor is a position sensor close to the high-temperature furnace; when the sliding plate passes through the pressure relief position sensor, the pressure relief solenoid valve is opened.

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