Anti-vibration monocrystalline silicon differential pressure sensor

Abstract

The utility model relates to the related technical field of pressure sensors, in particular to an anti-vibration monocrystalline silicon differential pressure sensor, which is characterized in that a sintering base is embedded in a sleeve; an insulating base plate is laid at the upper port of the sleeve above the sintering base; an oil filling pipe is inserted into the sintering base; a ceramic pad is fixedly mounted in the groove; a brazing seat is mounted under the ceramic pad; the interior of the connecting pipe below the brazing seat is filled with heat insulation cotton; an upper-layer pressure guide mechanism and a lower-layer pressure guide mechanism are arranged in the base; the pressure guiding mechanism comprises an upper pressure guiding pipe and a lower pressure guiding pipe; the upper sides and the lower sides of the upper pressure guide pipe and the lower pressure guide pipe are mutually communicated through guide pipes and upwards penetrate through the pedestal; the pedestal is connected to a groove below the sintering base through a pipeline in a penetrating manner; an upper channel is arranged at the top of the groove below the sintering base and is communicated to the lower end part of the oil filling pipe; the vibration-proof monocrystalline silicon differential pressure sensor provided by the utility model has the advantages that the overall temperature is consistent, and the vibration resistance of a product can be improved.

Description

Technical Field

[0001] The utility model belongs to the technical field related to pressure sensors, and in particular relates to a vibration-proof single crystal silicon differential pressure sensor. Background Art

[0002] The pressure-sensitive core utilizes a high-performance silicon piezoresistive pressure chip to measure differential pressure. An external dedicated integrated circuit converts the sensor's millivolt signal into a standard, long-distance transmission current signal. Existing differential pressure sensors have two problems. First, when subjected to high-intensity vibration, the weld between the connecting tube and the base is prone to cracking. This is due to insufficient welding energy in the connecting tube. The process involves filling the connecting tube with oil first and then welding the connecting tube. This prevents excessive welding energy from penetrating the connecting tube, which can easily lead to oil leakage. Second, the chip is located above the base, with a brazing pad between the chip and the base forming a bridge. This results in poor temperature tracking between the chip and the base. Therefore, it is proposed that, first, the brazing pad should be wrapped with insulation cotton to enhance thermal properties and provide overall temperature consistency. Second, the connecting tube should be welded first, increasing the welding energy and strength, and then filling the oil. This change in the order of welding and filling the oil improves the product's vibration resistance. Utility Model Content

[0003] The utility model aims to provide a vibration-proof single-crystal silicon differential pressure sensor which has overall temperature consistency and can improve the vibration resistance of the product.

[0004] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a vibration-proof single crystal silicon differential pressure sensor, comprising a base, a connecting tube, a sleeve, a sintered base, an oil-filled tube, a brazing seat, a ceramic pad, a chip, thermal insulation cotton, an upper pressure-conducting tube, a left isolation diaphragm, a right isolation diaphragm, a center diaphragm, an upper channel, a pedestal, and a lower pressure-conducting tube; a pedestal is symmetrically embedded and installed on the upper surface of the base; a connecting tube is vertically connected to the upper part of the base; a sleeve is sleeved on the inner side wall of the connecting tube; a sintered base is embedded in the interior of the sleeve; an insulating pad is laid on the upper end of the sleeve above the sintered base; an oil-filled tube is inserted on the sintered base; a groove is provided at the bottom of the sintered base; a ceramic pad is fixedly installed in the groove; the ceramic A brazing seat is installed directly below the pad; the inside of the connecting tube below the brazing seat is filled with thermal insulation cotton; the inside of the base is arranged with upper and lower layers of pressure-guiding mechanisms; the pressure-guiding mechanism includes an upper pressure-guiding tube and a lower pressure-guiding tube; the upper and lower sides of the upper and lower pressure-guiding tubes are interconnected by a conduit and pass through the base upward; the base is connected to the groove below the sintered base through a pipeline; a chip is fixedly mounted on the ceramic pad; the chip is a pressure sensing chip; an upper channel is provided at the top of the groove below the sintered base and is connected to the lower end of the oil-filling tube; a central diaphragm is provided in the center of the interior of the base; a left isolation diaphragm is connected to the left side of the base; and a right isolation diaphragm is connected to the right side of the base.

[0005] As a further improvement of the present invention, the interior of the connecting pipe is coated with black glue.

[0006] As a further improvement of the present invention, the oil-filled pipe is sequentially interspersed with an insulating pad and an anti-static plate from bottom to top; and the upper surface of the insulating pad is installed with an anti-static plate.

[0007] As a further improvement of the present invention, tube legs are vertically installed on the insulating pad and the anti-static plate.

[0008] As a further improvement of the present invention, the left side ports of the upper pressure guiding tube and the lower pressure guiding tube are in close contact with the left isolation diaphragm.

[0009] As a further improvement of the present invention, the right side ports of the upper pressure guiding tube and the lower pressure guiding tube are in close contact with the right isolation diaphragm.

[0010] Compared with the prior art, the beneficial effects of the present invention are: in response to the problems existing in the prior art, the inventor of the present technical solution thought of wrapping the outer periphery of the brazing seat of the inner core with thermal insulation cotton to reduce the heat conduction loss of the medium, and then increasing the energy of the welding connecting pipe to increase the vibration resistance; the present technical solution has good thermal characteristics, and the outer periphery of the brazing seat is wrapped with thermal insulation cotton to improve the temperature tracking of the chip and the base, and ensure the overall temperature consistency of the product; the present technical solution also has good vibration resistance, first strengthen the welding connecting pipe, and then fill it with oil, change the order of welding and oil filling, and improve the vibration resistance of the product. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 It is a schematic diagram of the overall structure of the utility model.

[0012] In the figure: 1. Base; 2. Connecting pipe; 3. Sleeve; 4. Sintered base; 5. Insulating pad; 6. Anti-static plate; 7. Oil-filled pipe; 8. Tube leg; 9. Brazing seat; 10. Ceramic pad; 11. Chip; 12. Black glue; 13. Insulation cotton; 14. Upper pressure-conducting pipe; 15. Left isolation diaphragm; 16. Right isolation diaphragm; 17. Center diaphragm; 18. Upper channel; 19. Base; 20. Lower pressure-conducting pipe. DETAILED DESCRIPTION

[0013] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0014] See also Figure 1 The utility model provides a technical solution: a vibration-proof single crystal silicon differential pressure sensor, including a base 1, a connecting pipe 2, a sleeve 3, a sintered base 4, an oil-filled pipe 7, a brazing seat 9, a ceramic pad 10, a chip 11, thermal insulation cotton 13, an upper pressure pipe 14, a left isolation diaphragm 15, a right isolation diaphragm 16, a center diaphragm 17, an upper channel 18, a pedestal 19, and a lower pressure pipe 20; the upper surface of the base 1 is symmetrically embedded with the pedestal 19; the upper part of the base 1 is vertically connected to the connecting Tube 2; the inner wall of the connecting tube 2 is sleeved with a sleeve 3; a sintered base 4 is embedded in the interior of the sleeve 3; an insulating pad 5 is laid on the upper end of the sleeve 3 above the sintered base 4; an oil-filled tube 7 is plugged into the sintered base 4; a groove is provided below the sintered base 4; a ceramic pad 10 is fixedly installed in the groove; a brazing seat 9 is installed directly below the ceramic pad 10; the interior of the connecting tube 2 below the brazing seat 9 is filled with thermal insulation cotton 13; the interior of the base 1 is arranged with upper and lower layers of pressure-guiding mechanisms.

[0015] The pressure-guiding mechanism includes an upper pressure-guiding tube 14 and a lower pressure-guiding tube 20; the upper and lower sides of the upper pressure-guiding tube 14 and the lower pressure-guiding tube 20 are interconnected by a conduit and pass upward through the base 19; the base 19 is connected to the groove below the sintered base 4 through a pipeline; a chip 11 is fixedly mounted on the ceramic pad 10; the chip 11 is a pressure sensing chip; an upper channel 18 is provided at the top of the groove below the sintered base 4 and is connected to the lower end of the oil-filling tube 7; a central diaphragm 17 is provided in the center of the interior of the base 1; a left isolation diaphragm 15 is connected to the left side of the base 1; and a right isolation diaphragm 16 is connected to the right side of the base 1.

[0016] The inside of the connecting pipe 2 is coated with black glue 12; the oil-filled pipe 7 is sequentially interspersed with an insulating pad 5 and an anti-static plate 6 from bottom to top; the upper surface of the insulating pad 5 is installed with an anti-static plate 6; and a pipe leg 8 is also vertically installed through the insulating pad 5 and the anti-static plate 6.

[0017] The left side ports of the upper pressure guiding pipe 14 and the lower pressure guiding pipe 20 are in close contact with the left isolation diaphragm 15 ; the right side ports of the upper pressure guiding pipe 14 and the lower pressure guiding pipe 20 are in close contact with the right isolation diaphragm 16 .

[0018] In the first step, we will fill the inner position of the upper connecting pipe of the prepared base 1 with insulation cotton 2.

[0019] Step 2: Laser welding the connecting pipe 3 and the base 1 at the welding surface 7.

[0020] Step 3: Fill the inner side wall of the base 1 with black glue 4.

[0021] Step 4: Fill the silicone oil into the base 1 through the oil filling pipe 7.

[0022] Step 5: Flatten the oil filling pipe 7 and then weld it.

[0023] This technical solution uses the left isolation diaphragm and the right isolation diaphragm on both sides of the base 1 and the central diaphragm in the center to sense the pressure signal in the scene, and then uses the internal upper pressure pipe 14 and lower pressure pipe 20 to transmit the pressure to the chip between the upper sintered base and the brazing seat, and converts the pressure signal into an electrical signal through the chip sensor and outputs it to the external device through the line.

[0024] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein with equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A vibration-proof single crystal silicon differential pressure sensor, characterized in that: The invention comprises a base (1), a connecting pipe (2), a sleeve (3), a sintered base (4), an oil-filled pipe (7), a brazing seat (9), a ceramic pad (10), a chip (11), thermal insulation cotton (13), an upper pressure-guiding pipe (14), a left isolation diaphragm (15), a right isolation diaphragm (16), a central diaphragm (17), an upper channel (18), a pedestal (19), and a lower pressure-guiding pipe (20); the pedestal (19) is symmetrically embedded and installed on the upper surface of the base (1); the base (1) The upper part is vertically connected to a connecting pipe (2); the inner side wall of the connecting pipe (2) is sleeved with a sleeve (3); a sintered base (4) is embedded in the interior of the sleeve (3); an insulating pad (5) is laid on the upper end of the sleeve (3) above the sintered base (4); an oil filling pipe (7) is plugged into the sintered base (4); a groove is opened below the sintered base (4); a ceramic pad (10) is fixedly installed in the groove; and a ceramic pad (10) is installed directly below the ceramic pad (10). There is a brazing seat (9); the interior of the connecting pipe (2) below the brazing seat (9) is filled with heat insulation cotton (13); the interior of the base (1) is provided with upper and lower pressure-guiding mechanisms; the pressure-guiding mechanisms include an upper pressure-guiding pipe (14) and a lower pressure-guiding pipe (20); the upper and lower sides of the upper pressure-guiding pipe (14) and the lower pressure-guiding pipe (20) are interconnected through a conduit and pass upward through the base (19); the base (19) is connected to the sintered base through a pipeline. (4) below; a chip (11) is fixedly mounted on the ceramic pad (10); the chip (11) is a pressure sensing chip; an upper channel (18) is provided at the top of the groove below the sintered base (4) and is connected to the lower end of the oil filling pipe (7); a central diaphragm (17) is provided in the center of the interior of the base (1); a left isolation diaphragm (15) is connected to the left side of the base (1); and a right isolation diaphragm (16) is connected to the right side of the base (1).

2. The vibration-proof single crystal silicon differential pressure sensor according to claim 1, characterized in that: The interior of the connecting pipe (2) is coated with black glue (12).

3. The vibration-proof single crystal silicon differential pressure sensor according to claim 1, characterized in that: The oil-filled pipe (7) is sequentially penetrated with an insulating pad (5) and an anti-static plate (6) from bottom to top; the anti-static plate (6) is installed on the upper surface of the insulating pad (5).

4. The vibration-proof single crystal silicon differential pressure sensor according to claim 3, characterized in that: Tube legs (8) are also vertically installed through the insulating pad (5) and the antistatic plate (6).

5. The vibration-proof single crystal silicon differential pressure sensor according to claim 1, characterized in that: The left side ports of the upper pressure-guiding pipe (14) and the lower pressure-guiding pipe (20) are in close contact with the left isolation diaphragm (15).

6. The vibration-proof single crystal silicon differential pressure sensor according to claim 1, characterized in that: The right side ports of the upper pressure-guiding pipe (14) and the lower pressure-guiding pipe (20) are in close contact with the right isolation diaphragm (16).

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