Automatic photomask switching machine device

Abstract

The utility model relates to an automatic photomask switching machine device in the technical field of semiconductor exposure, which comprises an arm clamping jaw capable of fixedly and transversely moving left and right and lifting up and down and used for clamping a photomask; the plane scanner is used for scanning the photomask after the photomask is placed at the fixed point so as to detect whether the photomask is damaged or not; a monitor which monitors whether there is an abnormality when the photomask is converted; the display is connected with the plane scanner, and the scanning condition of the photomask can be directly seen from the plane scanner; and the three-color warning lamp is used for directly jumping out to warn to stop the operation of the conversion machine table when the action of the conversion machine table is abnormal. By means of the automatic arm clamping jaw, transverse movement and fixed-point lifting of the photomask are achieved, fingers are prevented from being in direct contact with the photomask, the risks of fingerprint contamination and particle falling are reduced, the plane scanner ensures comprehensive inspection of the photomask, the working efficiency of the exposure machine is improved, and the working efficiency of the exposure machine is improved. Production interruption caused by pollution or damage of the photomask is reduced, and the yield is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor exposure, in particular to an automatic mask conversion device. Background Art

[0002] The exposure process is a crucial step in semiconductor manufacturing. Traditionally, operators manually remove and place the photomask into the exposure machine's pod. This manual operation is not only inefficient but also prone to fingerprint and particle contamination on the mask surface due to finger contact. This contamination not only increases the risk of mask damage but also potentially reduces the yield of the entire manufacturing process. Utility Model Content

[0003] The purpose of the utility model is to solve the shortcomings of the prior art and to propose an automatic mask conversion device.

[0004] In order to achieve the above-mentioned purpose, the present invention adopts the following technical solution: a mask automatic conversion machine device, comprising:

[0005] The arm gripper can be fixedly moved horizontally, left and right, and raised and lowered to hold the photomask;

[0006] A flatbed scanner scans the mask after it is placed on a fixed point to detect whether it is damaged;

[0007] Monitor to check if there are any abnormalities during mask conversion;

[0008] The display is connected to the flatbed scanner, and the mask scanning status can be directly viewed from the flatbed scanner;

[0009] The three-color warning light is used to directly pop up a warning and stop the converter when the converter operates abnormally.

[0010] As a further description of the above technical solution:

[0011] The arm gripper comprises:

[0012] The motor, as the power source, drives the reducer and transmission system to move;

[0013] A speed reducer is used to reduce the high-speed rotation output by the motor;

[0014] The transmission system transmits the power of the motor and reducer to the gripper body;

[0015] The gripper body is in direct contact with the photomask and can achieve a variety of actions such as closing and rotating, which are achieved by controlling the speed and direction of the motor.

[0016] As a further description of the above technical solution:

[0017] The flatbed scanner comprises:

[0018] The image sensor, using CMOS or CCD technology, is responsible for capturing the image of the mask and converting the optical signal into an electrical signal;

[0019] The lens is used to focus the light and project the image on the mask clearly onto the image sensor;

[0020] The control circuit is responsible for coordinating the operation of the flatbed scanner, including but not limited to exposure control of the image sensor, data reading and processing;

[0021] The interface circuit is used to connect the flatbed scanner with other systems and is responsible for data transmission and communication.

[0022] The utility model has the following beneficial effects: through the automated arm clamp, the lateral movement and fixed-point lifting of the mask are realized, and the direct contact of the fingers with the mask is avoided, thereby reducing the risk of fingerprint contamination and particle falling. Through the use of a flat scanner, a comprehensive inspection of the mask is ensured, and anomalies that may be missed during manual inspection are avoided. The overall design improves the working efficiency of the exposure machine, reduces production interruptions caused by mask contamination or damage, and thus significantly improves the product yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 The utility model is a structural schematic diagram of an automatic mask conversion device.

[0024] Legend:

[0025] 1. Arm gripper; 2. Planar scanner; 3. Monitor; 4. Display; 5. Three-color warning light; 11. Motor; 12. Speed ​​reducer; 13. Transmission system; 14. Gripper body; 21. Image sensor; 22. Lens; 23. Control circuit; 24. Interface circuit. DETAILED DESCRIPTION

[0026] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0027] Reference Figure 1 The present invention provides an embodiment of a mask automatic converter device, comprising:

[0028] The arm gripper 1 can be fixedly moved horizontally, left and right, and lifted up and down to hold the photomask;

[0029] Planar scanner 2, which scans the mask after it is placed at a fixed point to detect whether the mask is damaged;

[0030] Monitor 3, monitors whether there is any abnormality during mask conversion;

[0031] The display 4 is connected to the flatbed scanner 2, and the mask scanning status can be directly viewed from the flatbed scanner 2;

[0032] The three-color warning light 5 is used to directly pop up a warning to stop the operation of the converter when the converter operates abnormally.

[0033] The arm gripper 1 comprises:

[0034] The motor 11 acts as a power source to drive the reducer 12 and the transmission system 13;

[0035] The reducer 12 is used to reduce the high-speed rotation output by the motor 11;

[0036] The transmission system 13 transmits the power of the motor 11 and the reducer to the clamp body 14;

[0037] The clamp body 14 is in direct contact with the photomask and can perform various actions such as closing and rotating by controlling the speed and direction of the motor 11 .

[0038] The flat scanner 2 includes:

[0039] The image sensor 21, which uses CMOS or CCD technology, is responsible for capturing the image of the mask and converting the optical signal into an electrical signal;

[0040] The lens 22 is used to focus the light and project the image on the mask clearly onto the image sensor 21;

[0041] The control circuit 23 is responsible for coordinating the work of the flatbed scanner 2, including but not limited to exposure control of the image sensor 21, and reading and processing of data;

[0042] The interface circuit 24 is used to connect the flatbed scanner 2 with other systems and is responsible for data transmission and communication.

[0043] Working principle:

[0044] Arm gripper 1 operation:

[0045] The arm clamp 1 drives the reducer and the transmission system 13 through the motor 11 to achieve the functions of horizontal movement and vertical movement to clamp the mask.

[0046] The clamp body 14 is in direct contact with the photomask and can perform actions such as closing and rotating, which are achieved by controlling the speed and direction of the motor 11 .

[0047] This design avoids finger contamination and particle drop during manual operation, and improves the cleanliness of mask processing.

[0048] Plane scanning detection:

[0049] After the mask is placed at the designated position, the flatbed scanner 2 uses an image sensor 21 (CMOS or CCD technology) to capture the mask image and focuses the light through a lens 22 to project the image clearly onto the sensor.

[0050] The control circuit 23 coordinates the operation of the scanner, including exposure control, data reading and processing.

[0051] Scanning can reduce human error and improve the yield and stability of the mask.

[0052] Monitor 3 records:

[0053] Monitor 3 is used to record the real-time situation during the mask conversion process so that it can be checked and handled in time when an abnormality occurs.

[0054] Display 4 shows:

[0055] The display 4 is connected to the flatbed scanner 2 and can directly display the scanning status of the mask, so that the operator can observe the status of the mask in real time.

[0056] Three-color warning light 5 warnings:

[0057] When the converter operates abnormally, the three-color warning light 5 will light up immediately to remind the operator that the machine has stopped operating to ensure safety.

[0058] Mask processing flow:

[0059] The mask is first placed in the incoming mask box placement area, and then the arm gripper 1 will open the mask box and clamp the mask.

[0060] The reticle is moved to the flatbed scanner 2 for scanning to detect whether there is any damage.

[0061] After confirming that there is no damage, the mask is moved to the exposure machine box and prepared for the exposure process.

[0062] During the whole process, the monitor 3 continuously monitors and the display 4 displays the mask status in real time to ensure the accuracy and safety of the operation.

[0063] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent replacements for some of the technical features therein. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A mask automatic converter device, characterized in that: include: The arm clamp (1) can be fixedly moved horizontally left and right and lifted up and down for clamping the photomask; A flat scanner (2) scans the mask after the mask is placed at a fixed point to detect whether the mask is damaged; Monitor (3), monitors whether there is any abnormality during mask conversion; A display (4) is connected to the flat scanner (2) so that the mask scanning status can be directly viewed from the flat scanner (2); The three-color warning light (5) is used to directly pop up a warning to stop the operation of the converter when the converter operates abnormally.

2. The automatic mask converter device according to claim 1, characterized in that: The arm clamp (1) comprises: The motor (11) acts as a power source to drive the reducer (12) and the transmission system (13) to move; A speed reducer (12) for reducing the high-speed rotation output by the motor (11); a transmission system (13) for transmitting power from the motor (11) and the reducer to the clamping jaw body (14); The clamping claw body (14) is in direct contact with the light shield and can realize closing and rotating actions, which are realized by controlling the speed and direction of the motor (11).

3. The automatic mask converter device according to claim 2, characterized in that: The flat scanner (2) comprises: The image sensor (21), which adopts CMOS or CCD technology, is responsible for capturing the image of the mask and converting the optical signal into an electrical signal; a lens (22) for focusing light to clearly project the image on the mask onto the image sensor (21); A control circuit (23) is responsible for coordinating the operation of the flatbed scanner (2), including but not limited to exposure control of the image sensor (21), and reading and processing of data; The interface circuit (24) is used to connect the flatbed scanner (2) and the system and is responsible for data transmission and communication.

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