Pressurized feeding control system suitable for reduction furnace

Abstract

The utility model discloses a pressurized feeding control system suitable for a reduction furnace, and belongs to the technical field of automatic control of polycrystalline silicon reduction furnaces. According to the pressurization feeding control system, based on the specific arrangement of all parts in the pressurization feeding system of the reduction furnace, a series of pressurization feeding procedures such as the cooling water amount, electric appliance closing pressurization, current adding, tail gas treatment, empty burning and preliminary feeding reaction are controlled through the logic relation of the human-computer interface, the controller, the data acquisition unit and the execution unit; according to the method, the problems of misoperation and / or omission and the like which are easily caused by manual operation are solved, uniform and stable process control and more accurate operation are ensured, the method is well matched with the pressurizing feeding process of the reduction furnace, finally, automatic and intelligent control of the blow-in pressurizing feeding process of the reduction furnace is realized, and the stability, controllability and orderliness of the process of the reduction furnace are improved.

Description

Technical Field

[0001] The utility model relates to a feed control system, in particular to a pressurized feed control system suitable for a reduction furnace, and belongs to the technical field of automatic control of polysilicon reduction furnaces. Background Art

[0002] The reduction furnace process is an important process link in the polysilicon production process. The reduction furnace process mainly includes three operating steps: furnace start-up replacement, operation reaction and furnace shutdown replacement. Among them, after the furnace start-up replacement is completed, it is necessary to go through a series of pressure feeding processes such as increasing the cooling water volume, electrical closing and pressure testing, adding current, recycling exhaust gas, current empty burning, preliminary feeding reaction, etc., before the operation reaction can be carried out.

[0003] Since the pressure feeding process involves multi-faceted control of water, electricity, and materials, the operation is cumbersome, requires high precision, and has a low fault tolerance. Any deviation in these links will not only affect the furnace start-up process, but may also cause contamination of the silicon core, thereby reducing the success rate of furnace start-up, thereby wasting a large amount of production time and materials, and even causing abnormal events such as overheating and overpressure. However, the current reduction furnace start-up is still operated by the main control, which has the following problems:

[0004] 1. Operations involving safety protection, such as adding cooling water and recovering exhaust gas, are manually operated and confirmed. This can lead to risks of insufficient cooling water, overheating, overpressure, and leakage in the system due to manual failure to confirm the operation. Furthermore, exhaust gas can flow back into the reduction furnace, contaminating the silicon core.

[0005] 2. The control of feed current parameters is unstable, and personnel are most likely to make misoperations: adding too much or too little current, and the power-on time and gradient are not uniform. High current causes silicon core melting, and low current causes silicon core delamination and other abnormalities, affecting furnace efficiency and product quality.

[0006] 3. The material control process is complicated and requires high precision. Manual control can easily cause excessive or insufficient amounts of trichlorosilane and hydrogen, affecting reaction efficiency.

[0007] 4. The operation is controlled by personnel, which leads to low efficiency and increased non-productive time.

[0008] Although the prior art CN104803387A discloses "a control device for the feed amount of raw gas of a polysilicon reduction furnace", CN117850485A discloses "a feed flow control method for a reduction furnace suitable for multiple feeds", CN109542003A discloses "a polysilicon reduction furnace automatic control method", CN107473229A discloses "a control method for fully automatic closed-loop feeding and power supply of a reduction furnace in polysilicon production", and CN113741599A discloses "a reduction furnace shutdown control process and its system and computer-readable storage medium". , but it mainly controls the feeding, operation and shutdown processes of the reduction furnace; and, the prior art CN115594182A discloses a "one-button furnace start-up control method for a polysilicon reduction furnace, its system and computer-readable storage medium", wherein the reduction furnace drum cooling water volume, reduction chassis cooling water volume and nitrogen intake volume are programmed according to the start of furnace opening and water supply stages, and then vacuuming and gas replacement are performed to complete the entire furnace opening process, in order to solve the problems of manual operation errors and omissions of important operations, but it does not involve the control of current, pressure in the reduction furnace, reaction material feeding, etc.

[0009] Therefore, how to control the pressurized feed of the reduction furnace is a technical problem that urgently needs to be solved. Summary of the Invention

[0010] In order to overcome the shortcomings of the existing technology, a pressurized feeding control system suitable for a reduction furnace is provided. In this technical solution, by controlling the process from the start of the reduction furnace to the formal feeding, including increasing the cooling water volume, closing the electrical switch to pressurize, adding current, exhaust gas treatment, empty burning, preliminary feeding reaction and other series of pressurized feeding process control, the problems of misoperation and / or missed operation that are prone to occur in manual operation are solved, and the process control is unified and stable, the operation is more precise, and it is better coordinated with the pressurized feeding process of the reduction furnace. Ultimately, the automation and intelligent control of the reduction furnace start-up pressurized feeding process is realized, and the stability, controllability and orderliness of the reduction furnace process are improved.

[0011] In order to achieve the above technical objectives, the following technical solutions are proposed:

[0012] The first object of the present utility model is to provide: a pressurized feeding system suitable for a reduction furnace, comprising a reduction furnace, a feeding device, a cooling water device, a circuit device and an exhaust gas recovery device;

[0013] Reduction furnace: includes a furnace drum, a chassis located at the bottom of the furnace drum, electrodes mounted on the chassis, and a silicon core mounted on the electrodes. The reduction furnace is connected to an exhaust gas pipeline, which is provided with a pressure relief valve. The pressure relief valve is located near the end of the furnace drum.

[0014] Feeding device: including hydrogen feed pipe and silane feed pipe, the hydrogen feed pipe passes through the bottom plate and is connected to the furnace drum, the silane feed pipe passes through the bottom plate and is connected to the furnace drum; the hydrogen feed pipe is provided with a hydrogen feed regulating valve and a hydrogen flow meter, the silane feed pipe is provided with a silane feed regulating valve and a silane flow meter;

[0015] Cooling water device: including a furnace drum cooling water inlet pipe and a chassis cooling water inlet pipe, the furnace drum cooling water inlet pipe is connected to the furnace drum jacket, and the chassis cooling water inlet pipe is connected to the chassis jacket; the furnace drum cooling water inlet pipe is provided with a furnace drum cooling water regulating valve and a furnace drum cooling water flow meter, and the chassis cooling water inlet pipe is provided with a chassis cooling water regulating valve and a chassis cooling water flow meter;

[0016] Circuit device: including a circuit connected to the electrode, with a transformer and a voltage regulator;

[0017] Tail gas recovery device: connected with a tail gas discharge pipe, the tail gas discharge pipe passes through the chassis and is connected with the furnace, and a tail gas discharge valve is provided on the tail gas discharge pipe.

[0018] The second object of the present invention is to provide: a pressurized feeding control system suitable for a reduction furnace, which is arranged in the pressurized feeding system, and the pressurized feeding control system includes a controller, a human-machine interface, a data acquisition unit and an execution unit, wherein the controller is connected to the human-machine interface through a data input interface, the controller is connected to the data acquisition unit through a data feedback interface, and the controller is connected to the execution unit through a data output interface;

[0019] Among them, the controller includes a furnace cooling water control unit, a chassis cooling water control unit, a reduction furnace pressure control unit, a pressure control unit, a current addition control unit, an exhaust gas treatment control unit, a hydrogen feed control unit, an air burning control unit and a silane feed control unit;

[0020] A furnace cooling water flow control unit includes a furnace cooling water flow receiving module, a furnace cooling water temperature receiving module, a furnace cooling water flow calculation module, and a furnace cooling water flow communication module, which are connected in sequence. The furnace cooling water flow receiving module and the furnace cooling water temperature receiving module are both connected to the data acquisition unit, and the furnace cooling water flow communication module is connected to the execution unit.

[0021] Chassis cooling water flow control unit: includes a chassis cooling water flow receiving module, a chassis cooling water temperature receiving module, a chassis cooling water flow calculation module and a chassis cooling water flow communication module connected in sequence, the chassis cooling water flow receiving module and the chassis cooling water temperature receiving module are both connected to the data acquisition unit, and the chassis cooling water flow communication module is connected to the execution unit;

[0022] The reduction furnace pressure control unit includes a reduction furnace pressure signal receiving module, a reduction furnace pressure calculation module, and a reduction furnace pressure signal communication module connected in sequence. The reduction furnace pressure signal receiving module is connected to the data acquisition unit, and the reduction furnace pressure signal communication module is connected to the execution unit.

[0023] Suppression control unit: includes a suppression signal receiving module and a suppression signal communication module connected in sequence, the suppression signal receiving module is connected to the human-machine interface, and the suppression signal communication module is connected to the execution unit;

[0024] A current control unit includes a current signal receiving module and a current signal communication module connected in sequence, wherein the current signal receiving module is connected to a human-machine interface, and the current signal communication module is connected to an execution unit;

[0025] The exhaust gas treatment control unit includes an exhaust gas pressure receiving module, an exhaust gas pressure calculation module, and an exhaust gas pressure communication module connected in sequence. The exhaust gas pressure receiving module is connected to the data acquisition unit, and the exhaust gas pressure communication module is connected to the execution unit.

[0026] A hydrogen feeding control unit includes a hydrogen gas signal receiving module and a hydrogen gas signal communication module connected in sequence, wherein the hydrogen gas signal receiving module is connected to a human-machine interface, and the hydrogen gas signal communication module is connected to the execution unit;

[0027] Empty burning control unit: includes an empty burning signal receiving module and an empty burning signal communication module connected in sequence, the empty burning signal receiving module is connected to the human-machine interface, and the empty burning communication module is connected to the execution unit;

[0028] Silane feeding control unit: comprises a silane signal receiving module and a silane signal communication module connected in sequence, the silane signal receiving module is connected to the human-machine interface, and the silane signal communication module is connected to the execution unit.

[0029] The data acquisition unit includes a sensor group for collecting and transmitting data in the pressurized feed control process;

[0030] The execution unit includes a group of equipment used for parameter control and execution in the pressurized feed control process.

[0031] Furthermore, the controller also includes a reduction furnace operation switching control unit, which is connected to the reduction furnace operation control system.

[0032] Furthermore, the controller also includes an alarm control unit, and the alarm control unit is connected to an audible and visual alarm.

[0033] Furthermore, the sensor group includes a furnace cooling water flow meter provided on the furnace cooling water inlet pipe, a temperature sensor I provided on the furnace jacket, a chassis cooling water flow meter provided on the chassis cooling water inlet pipe, a temperature sensor II provided on the chassis jacket, an exhaust gas pressure sensor provided on the exhaust gas pipeline, an exhaust gas pressure sensor provided on the exhaust gas discharge pipe, a hydrogen flow meter provided on the hydrogen feed pipe, and a silane flow meter provided on the silane feed pipe;

[0034] The furnace cooling water flow meter is connected to the furnace cooling water flow receiving module, and the furnace cooling water temperature receiving module is connected to the temperature sensor I; the chassis cooling water flow meter is connected to the chassis cooling water flow receiving module, and the chassis cooling water temperature receiving module is connected to the temperature sensor II; the pressure sensor is connected to the reduction furnace pressure signal receiving module, the exhaust gas pressure sensor is connected to the exhaust gas pressure receiving module, the hydrogen flow meter is connected to the hydrogen signal receiving module, and the silane flow meter is connected to the silane signal receiving module.

[0035] Furthermore, the equipment group includes a furnace cooling water regulating valve provided on the furnace cooling water inlet pipe, a chassis cooling water regulating valve provided on the chassis cooling water inlet pipe, a pressure relief valve provided on the exhaust gas pipeline, a transformer and a pressure regulator provided on the circuit, an exhaust gas discharge valve provided on the exhaust gas discharge pipe, a hydrogen feed regulating valve provided on the hydrogen feed pipe, and a silane feed regulating valve provided on the silane feed pipe;

[0036] The furnace cooling water regulating valve is connected to the furnace cooling water flow communication module, the chassis cooling water regulating valve is connected to the chassis cooling water flow communication module, the pressure relief valve is connected to the reduction furnace pressure signal communication module, the transformer is connected to the current signal communication module, the pressure regulator is connected to the pressure signal communication module, the exhaust gas discharge valve is connected to the exhaust gas pressure communication module, the hydrogen feed regulating valve is connected to the hydrogen signal communication module, and the silane feed regulating valve is connected to the silane signal communication module.

[0037] Furthermore, the hydrogen feed regulating valve is connected to the air-burning communication module.

[0038] The third object of the present invention is to provide: a computer-readable storage medium, wherein the computer-readable storage medium stores a computer program, wherein the computer program includes program instructions, and when the program instructions are executed by a processor, the above-mentioned pressurized feeding control method is implemented.

[0039] In this technical solution, the relevant execution parameters can be modified in real time based on operational optimization. Personnel can reconfirm the set parameters, automatic valve confirmation, and key operation steps, achieving double confirmation protection. Furthermore, important steps should be indicated with prompts and alarm reminders.

[0040] The positional relationships such as "bottom" and "top" involved in this technical solution are defined according to the actual usage conditions. They are conventional terms in this technical field and are also conventional terms used by technical personnel in this field in actual use.

[0041] In the description of this technical solution, it should be noted that, unless otherwise clearly specified and limited, the "setting" involved should be understood in a broad sense. For ordinary technicians in this field, they can understand the specific meaning of the above terms in this utility model according to specific circumstances.

[0042] The beneficial effects of adopting this technical solution are:

[0043] In the utility model, based on the specific arrangement of various components in the pressurized feeding system of the reduction furnace, through the logical relationship of the human-machine interface, the controller, the data acquisition unit and the execution unit, a series of pressurized feeding processes such as the cooling water volume, electrical closing and pressurizing, current addition, tail gas treatment, dry burning, and preliminary feeding reaction are controlled, thereby solving the problems of erroneous operation and / or missed operation that are prone to occur in manual operation, ensuring unified and stable process control, more precise operation, and better coordination with the pressurized feeding process of the reduction furnace. Ultimately, the automation and intelligent control of the reduction furnace opening and pressurized feeding process is realized, and the stability, controllability and orderliness of the reduction furnace process are improved.

[0044] This utility model solves the problem of product quality degradation and overheating and overpressure caused by inaccurate control of various reduction furnace operations during the existing reduction furnace opening, pressure-pressing, and feeding processes. It effectively shortens the pressure-pressing and feeding time by approximately 30 minutes, increasing efficiency and production. Furthermore, it achieves stable and precise control of the reduction furnace pressure-pressing and feeding process. During the polysilicon production process, this helps improve the quality of polysilicon products, saves gas usage, and reduces the occurrence of silicon core anomalies and abnormalities such as overheating and overpressure. It also has significant advantages in saving non-productive time and ensuring system operation safety. BRIEF DESCRIPTION OF THE DRAWINGS

[0045] Figure 1 This is a structural diagram of the pressurized feeding control system of the utility model;

[0046] Figure 2 This is a schematic diagram of the working principle of the pressurized feeding system of the utility model;

[0047] Figure 3 This is a structural block diagram of a controller in a pressurized feed control system according to the present invention;

[0048] In the figure, 1, reduction furnace, 101, furnace drum, 102, chassis, 103, electrode, 104, silicon core;

[0049] 2. Feeding device, 21. Hydrogen feed pipe, 22. Silane feed pipe;

[0050] 3. Cooling water device, 31. Furnace cooling water inlet pipe, 32. Furnace cooling water outlet pipe, 33. Chassis cooling water inlet pipe, 34. Chassis cooling water outlet pipe;

[0051] 4. Circuit device, 41. Circuit;

[0052] 5. Exhaust gas recovery device, 51. Exhaust gas discharge pipe;

[0053] 6. Exhaust gas pipeline;

[0054] 8. Sensor group: 800, furnace cooling water flow meter, 801, temperature sensor I, 802, chassis cooling water flow meter, 803, temperature sensor II, 804, exhaust gas pressure sensor, 805, tail gas pressure sensor, 806, hydrogen flow meter, 807, silane flow meter;

[0055] 9. Equipment group: 900, furnace cooling water regulating valve, 901, chassis cooling water regulating valve, 902, pressure relief valve, 903, transformer, 904, pressure regulator, 905, tail gas discharge valve, 906, hydrogen feed regulating valve, 907, silane feed regulating valve;

[0056] 10. Human-machine interface,

[0057] 11. Controller, 110. Furnace cooling water volume control unit, 111. Chassis cooling water volume control unit, 112. Reduction furnace pressure control unit, 113. Pressure control unit, 114. Current addition control unit, 115. Tail gas treatment control unit, 116. Hydrogen feed control unit, 117. Air burning control unit, 118. Silane feed control unit, 119. Alarm control unit. DETAILED DESCRIPTION

[0058] The following is a clear and complete description of the technical solutions in the embodiments of the present invention. It is obvious that the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0059] Example 1

[0060] This embodiment provides: a pressurized feed control system suitable for a reduction furnace, such as Figure 1As shown, it is set in a pressurized feeding system, and the pressurized feeding control system includes a controller 11, a human-machine interface 10, a data acquisition unit and an execution unit. The controller 11 is connected to the human-machine interface 10 through a data input interface, the controller 11 is connected to the data acquisition unit through a data feedback interface, and the controller 11 is connected to the execution unit through a data output interface;

[0061] Among them, such as Figure 3 The controller 11 includes a furnace cooling water flow control unit 110, a chassis cooling water flow control unit 111, a reduction furnace pressure control unit 112, a pressure control unit 113, a current addition control unit 114, an exhaust gas treatment control unit 115, a hydrogen feed control unit 116, an air burning control unit 117, and a silane feed control unit 118.

[0062] The furnace cooling water flow control unit 110 includes a furnace cooling water flow receiving module, a furnace cooling water temperature receiving module, a furnace cooling water flow calculation module, and a furnace cooling water flow communication module connected in sequence. The furnace cooling water flow receiving module and the furnace cooling water temperature receiving module are both connected to the data acquisition unit, and the furnace cooling water flow communication module is connected to the execution unit.

[0063] Chassis cooling water flow control unit 111: includes a chassis cooling water flow receiving module, a chassis cooling water temperature receiving module, a chassis cooling water flow calculation module, and a chassis cooling water flow communication module connected in sequence. The chassis cooling water flow receiving module and the chassis cooling water temperature receiving module are both connected to the data acquisition unit, and the chassis cooling water flow communication module is connected to the execution unit;

[0064] The reduction furnace pressure control unit 112 includes a reduction furnace pressure signal receiving module, a reduction furnace pressure calculation module, and a reduction furnace pressure signal communication module connected in sequence. The reduction furnace pressure signal receiving module is connected to the data acquisition unit, and the reduction furnace pressure signal communication module is connected to the execution unit.

[0065] The suppression control unit 113 includes a suppression signal receiving module and a suppression signal communication module connected in sequence, the suppression signal receiving module is connected to the human-machine interface 10, and the suppression signal communication module is connected to the execution unit;

[0066] The current control unit 114 includes a current signal receiving module and a current signal communication module connected in sequence, wherein the current signal receiving module is connected to the human-machine interface 10, and the current signal communication module is connected to the execution unit;

[0067] The exhaust gas treatment control unit 115 includes an exhaust gas pressure receiving module, an exhaust gas pressure calculation module, and an exhaust gas pressure communication module connected in sequence. The exhaust gas pressure receiving module is connected to the data acquisition unit, and the exhaust gas pressure communication module is connected to the execution unit.

[0068] The hydrogen feeding control unit 116 includes a hydrogen gas signal receiving module and a hydrogen gas signal communication module connected in sequence, wherein the hydrogen gas signal receiving module is connected to the human-machine interface 10, and the hydrogen gas signal communication module is connected to the execution unit;

[0069] The empty burning control unit 117 includes an empty burning signal receiving module and an empty burning signal communication module connected in sequence, the empty burning signal receiving module is connected to the human-machine interface 10, and the empty burning communication module is connected to the execution unit;

[0070] The silane feeding control unit 118 includes a silane signal receiving module and a silane signal communication module connected in sequence. The silane signal receiving module is connected to the human-machine interface 10 , and the silane signal communication module is connected to the execution unit.

[0071] The data acquisition unit includes a sensor group 8 for collecting and transmitting data in the pressurized feed control process;

[0072] The execution unit includes a device group 9 for parameter control and execution in the pressurized feed control process.

[0073] Furthermore, the controller 11 also includes a reduction furnace operation switching control unit, which is connected to the reduction furnace 1 operation control system.

[0074] Furthermore, the controller 11 further includes an alarm control unit 119 , and the alarm control unit 119 is connected to an audible and visual alarm.

[0075] Further, such as Figure 2 As shown, the sensor group 8 includes a furnace cooling water flow meter 800 provided on the furnace cooling water inlet pipe 31, a temperature sensor I 801 provided on the jacket of the furnace 101, a chassis cooling water flow meter 802 provided on the chassis cooling water inlet pipe 33, a temperature sensor II 803 provided on the jacket of the chassis 102, an exhaust gas pressure sensor 804 provided on the exhaust gas pipeline 6, an exhaust gas pressure sensor 805 provided on the exhaust gas discharge pipe 51, a hydrogen flow meter 806 provided on the hydrogen feed pipe 21, and a silane flow meter 807 provided on the silane feed pipe 22;

[0076] The furnace cooling water flow meter 800 is connected to the furnace cooling water flow receiving module, and the furnace cooling water temperature receiving module is connected to the temperature sensor I 801; the chassis cooling water flow meter 802 is connected to the chassis cooling water flow receiving module, and the chassis cooling water temperature receiving module is connected to the temperature sensor II 803; the pressure sensor is connected to the reduction furnace pressure signal receiving module, the exhaust gas pressure sensor 805 is connected to the exhaust gas pressure receiving module, the hydrogen flow meter 806 is connected to the hydrogen signal receiving module, and the silane flow meter 807 is connected to the silane signal receiving module.

[0077] Further, such as Figure 2 As shown, the equipment group 9 includes a furnace cooling water regulating valve 900 provided on the furnace cooling water inlet pipe 31, a chassis cooling water regulating valve 901 provided on the chassis cooling water inlet pipe 33, a pressure relief valve 902 provided on the exhaust gas pipeline 6, a transformer 903 and a pressure regulator 904 provided on the circuit 41, an exhaust gas discharge valve 905 provided on the exhaust gas discharge pipe 51, a hydrogen feed regulating valve 906 provided on the hydrogen feed pipe 21, and a silane feed regulating valve 907 provided on the silane feed pipe 22;

[0078] The furnace cooling water regulating valve 900 is connected to the furnace cooling water flow communication module, the chassis cooling water regulating valve 901 is connected to the chassis cooling water flow communication module, the pressure relief valve 902 is connected to the reduction furnace pressure signal communication module, the transformer 903 is connected to the current addition signal communication module, the pressure regulator 904 is connected to the pressure signal communication module, the exhaust gas discharge valve 905 is connected to the exhaust gas pressure communication module, the hydrogen feed regulating valve 906 is connected to the hydrogen signal communication module, and the silane feed regulating valve 907 is connected to the silane signal communication module.

[0079] Furthermore, the hydrogen feed regulating valve 906 is connected to the air-burning communication module.

[0080] Example 2

[0081] Based on Example 1, this embodiment provides: a pressurized feeding system suitable for a reduction furnace 1, such as Figure 2 As shown, it includes a reduction furnace 1, a feeding device 2, a cooling water device 3, a circuit device 4 and an exhaust gas recovery device 5;

[0082] Reduction furnace 1: includes a furnace drum 101, a base plate 102 provided at the bottom end of the furnace drum 101, an electrode 103 sleeved on the base plate 102, and a silicon core 104 sleeved on the electrode 103. The reduction furnace 1 is connected to an exhaust gas pipeline 6, which is provided with a pressure relief valve 902. The pressure relief valve 902 is provided near the end of the furnace drum 101.

[0083] Feeding device 2: includes a hydrogen feed pipe 21 and a silane feed pipe 22. The hydrogen feed pipe 21 passes through the bottom plate 102 and is connected to the furnace drum 101. The silane feed pipe 22 passes through the bottom plate 102 and is connected to the furnace drum 101. The hydrogen feed pipe 21 is provided with a hydrogen feed regulating valve 906 and a hydrogen flowmeter 806. The silane feed pipe 22 is provided with a silane feed regulating valve 907 and a silane flowmeter 807.

[0084] Cooling water device 3: includes a furnace cooling water inlet pipe 31 and a chassis cooling water inlet pipe 33. The furnace cooling water inlet pipe 31 is connected to the jacket of the furnace 101, and the chassis cooling water inlet pipe 33 is connected to the jacket of the chassis 102. The furnace cooling water inlet pipe 31 is provided with a furnace cooling water regulating valve 900 and a furnace cooling water flow meter 800. The chassis cooling water inlet pipe 33 is provided with a chassis cooling water regulating valve 901 and a chassis cooling water flow meter 802.

[0085] Circuit device 4: includes a circuit 41 connected to the electrode 103, and a transformer 903 and a voltage regulator 904 are provided on the circuit 41;

[0086] The tail gas recovery device 5 is connected to a tail gas discharge pipe 51 , which passes through the chassis 102 and is in communication with the furnace 101 . A tail gas discharge valve 905 is provided on the tail gas discharge pipe 51 .

[0087] Example 3

[0088] Based on Examples 1-2, this embodiment provides: a pressurized feeding control process applicable to a reduction furnace, wherein there are 40 pairs of silicon cores in the reduction furnace, specifically comprising the following steps:

[0089] S1 confirms that the impurities in the reduction furnace to be started have been replaced and qualified;

[0090] S2 Increase cooling water volume: Control the cooling water volume in the furnace drum and the cooling water volume in the chassis of the reduction furnace, and increase them to above the pressurized operation value;

[0091] In 60 seconds, the furnace cooling water regulating valve is opened to 30%, and the chassis cooling water regulating valve is opened to 25%; and the furnace cooling water flow is controlled to be greater than 80m 3 / h, chassis cooling water flow rate is greater than 40m 3 / h to cool down the excess heat generated by subsequent pressing;

[0092] The pressurized operation value is set to 588kPa, which is about 10kPa higher than the tail gas pressure of the rear pipeline. The automatic pressure relief of the set pressure is mainly used for the pressure and current adding process. The pressure rises with the temperature, and the overpressure is automatically relieved.

[0093] The S3 reduction furnace pressure is automatically set: during the pressurization (power on to break down the silicon core, the voltage is set to about 2500V. After the breakdown, the current begins to increase. The current always has three stages: ① the current rises from 0A to 50A, half an hour; ② the current rises from 50A to 280A, 1 hour; ③ from 280A to 2200A, the growth process is about 90 hours;

[0094] If the pressure is greater than 593kPa (pressure reference value +5), open the pressure relief valve to release the pressure; if the pressure is less than 583kPa (pressure reference value -5), close the pressure relief valve to maintain the pressure; until the cycle ends when pressurized feeding is completed (before feeding, the reduction furnace is connected to the exhaust gas pipeline for pressure relief. After feeding, the exhaust gas pipeline is disconnected and connected to the exhaust gas recovery device pipeline);

[0095] Among them, 40 pairs of silicon cores in one furnace are all pressurized and broken down for about 20-30 minutes, and the pressure reference value is 588kPa;

[0096] S4 current addition: After the electrical appliance is switched on and pressure is applied, current is added evenly according to the time setting value and current setting value;

[0097] The time setting value is 10 minutes, and the current setting value is 280A (different silicon core sizes have different currents), that is, the end current is 280A - the initial current is 50A) / 10 minutes;

[0098] Control the 6-phase current to simultaneously meet the following requirements: greater than the current setting value - 1 A. The reduction furnace has a total of 40 pairs of rods, which are combined with 6 phases and controlled separately (40 pairs consisting of 6 pairs, 8 pairs, 8 pairs, 8 pairs, and 8 pairs respectively);

[0099] S5 cooling water automatic: after the current supplement is completed, the furnace drum cooling water regulating valve and the chassis cooling water regulating valve are controlled to ensure that the cooling return water temperature in the furnace drum jacket is 172°C and the cooling return water temperature in the chassis jacket is 151°C;

[0100] S6 hydrogen inlet: According to the pipeline connecting the reduction furnace and the front section of the reduction furnace (i.e., a small amount of hydrogen is introduced), the reduction furnace is controlled to connect to the hydrogen inlet pipe;

[0101] Among them, within 2 seconds, the hydrogen feed valve is opened to 1.2%;

[0102] S7 is integrated into the tail gas system: the hydrogen feed valve is closed, and when the tail gas pressure of the reduction furnace alone minus the tail gas pressure of the reduction furnace rear end main pipe is greater than 10KPa, the tail gas discharge valve is controlled to connect the reduction furnace to the tail gas system;

[0103] S8 empty burning: After connecting to the tail gas system, control the hydrogen intake to 400m 3 / h (i.e. increase the amount of hydrogen introduced), and when the empty burning time is greater than the set value of 10min, empty burning is performed; empty burning can increase the silicon core temperature and remove impurities in the reduction furnace and silicon core (impurities and moisture adsorbed by the graphite seat, gas / solid impurities remaining in the space, etc.);

[0104] S9 feeding: After the empty burning is completed, silane is introduced into the reduction furnace according to the set opening of the silane feeding regulating valve and the feeding time;

[0105] Among them, the setting opening of the silane feed valve is 40% (set according to different material amounts), and the feeding time is 30 minutes;

[0106] S10 reaction: The electrical system is controlled to be automatic, the timing program is started, the reaction begins, and the operation control system of the reduction furnace is switched to;

[0107] The hydrogen feed regulating valve is in automatic mode, and the silane feed regulating valve is in automatic mode.

[0108] Also, after 1 hour of silane feeding, open the sight hole to check for hydrogen and ammonia leaks.

Claims

1. A pressurized feed control system suitable for a reduction furnace, characterized in that: The pressurized feeding system includes a reduction furnace (1), a feeding device (2), a cooling water device (3), a circuit device (4), and an exhaust gas recovery device (5); The pressurized feeding control system includes a controller (11), a human-machine interface (10), a data acquisition unit and an execution unit, wherein the controller (11) is connected to the human-machine interface (10) via a data input interface, the controller (11) is connected to the data acquisition unit via a data feedback interface, and the controller (11) is connected to the execution unit via a data output interface; The controller (11) includes a furnace cooling water flow control unit (110), a chassis cooling water flow control unit (111), a reduction furnace pressure control unit (112), a pressure control unit (113), a current supply control unit (114), an exhaust gas treatment control unit (115), a hydrogen feed control unit (116), an air burning control unit (117), and a silane feed control unit (118); The data acquisition unit includes a sensor group (8) for collecting and transmitting data in the pressurized feed control process; The execution unit includes a device group (9) for parameter control and execution in the pressurized feed control process.

2. The pressurized feed control system for a reduction furnace according to claim 1, characterized in that: The furnace cooling water flow control unit (110) comprises a furnace cooling water flow receiving module, a furnace cooling water temperature receiving module, a furnace cooling water flow calculation module and a furnace cooling water flow communication module which are connected in sequence, the furnace cooling water flow receiving module and the furnace cooling water temperature receiving module are both connected to the data acquisition unit, and the furnace cooling water flow communication module is connected to the execution unit; A chassis cooling water flow control unit (111) comprises a chassis cooling water flow receiving module, a chassis cooling water temperature receiving module, a chassis cooling water flow calculation module and a chassis cooling water flow communication module connected in sequence, the chassis cooling water flow receiving module and the chassis cooling water temperature receiving module are both connected to the data acquisition unit, and the chassis cooling water flow communication module is connected to the execution unit; The reduction furnace pressure control unit (112) comprises a reduction furnace pressure signal receiving module, a reduction furnace pressure calculation module and a reduction furnace pressure signal communication module which are connected in sequence, the reduction furnace pressure signal receiving module is connected to the data acquisition unit, and the reduction furnace pressure signal communication module is connected to the execution unit; The suppression control unit (113) includes a suppression signal receiving module and a suppression signal communication module connected in sequence, the suppression signal receiving module is connected to the human-machine interface (10), and the suppression signal communication module is connected to the execution unit; The current adding control unit (114) comprises a current adding signal receiving module and a current adding signal communication module connected in sequence, the current adding signal receiving module is connected to the human-machine interface (10), and the current adding signal communication module is connected to the execution unit; The exhaust gas treatment control unit (115) comprises an exhaust gas pressure receiving module, an exhaust gas pressure calculation module and an exhaust gas pressure communication module connected in sequence, the exhaust gas pressure receiving module is connected to the data acquisition unit, and the exhaust gas pressure communication module is connected to the execution unit; The hydrogen feeding control unit (116) includes a hydrogen gas signal receiving module and a hydrogen gas signal communication module connected in sequence, the hydrogen gas signal receiving module is connected to the human-machine interface (10), and the hydrogen gas signal communication module is connected to the execution unit; The empty burning control unit (117) includes an empty burning signal receiving module and an empty burning signal communication module connected in sequence, the empty burning signal receiving module is connected to the human-machine interface (10), and the empty burning communication module is connected to the execution unit; The silane feeding control unit (118) comprises a silane signal receiving module and a silane signal communication module which are connected in sequence, the silane signal receiving module is connected to the human-machine interface (10), and the silane signal communication module is connected to the execution unit.

3. The pressurized feed control system for a reduction furnace according to claim 2, characterized in that: The sensor group (8) includes a furnace cooling water flow meter (800) provided on the furnace cooling water inlet pipe (31), a temperature sensor I (801) provided on the jacket of the furnace (101), a chassis cooling water flow meter (802) provided on the chassis cooling water inlet pipe (33), a temperature sensor II (803) provided on the jacket of the chassis (102), an exhaust gas pressure sensor (804) provided on the exhaust gas pipeline (6), an exhaust gas pressure sensor (805) provided on the exhaust gas discharge pipe (51), a hydrogen flow meter (806) provided on the hydrogen feed pipe (21), and a silane flow meter (807) provided on the silane feed pipe (22); The furnace drum cooling water flow meter (800) is connected to the furnace drum cooling water flow receiving module, and the furnace drum cooling water temperature receiving module is connected to the temperature sensor I (801); the chassis cooling water flow meter (802) is connected to the chassis cooling water flow receiving module, and the chassis cooling water temperature receiving module is connected to the temperature sensor II (803); the pressure sensor is connected to the reduction furnace pressure signal receiving module, the tail gas pressure sensor (805) is connected to the tail gas pressure receiving module, the hydrogen flow meter (806) is connected to the hydrogen signal receiving module, and the silane flow meter (807) is connected to the silane signal receiving module.

4. The pressurized feed control system for a reduction furnace according to claim 3, characterized in that: The equipment group (9) includes a furnace cooling water regulating valve (900) provided on the furnace cooling water inlet pipe (31), a chassis cooling water regulating valve (901) provided on the chassis cooling water inlet pipe (33), a pressure relief valve (902) provided on the exhaust gas pipeline (6), a transformer (903) and a pressure regulator (904) provided on the circuit (41), an exhaust gas discharge valve (905) provided on the exhaust gas discharge pipe (51), a hydrogen feed regulating valve (906) provided on the hydrogen feed pipe (21), and a silane feed regulating valve (907) provided on the silane feed pipe (22); The furnace cooling water regulating valve (900) is connected to the furnace cooling water flow communication module, the chassis cooling water regulating valve (901) is connected to the chassis cooling water flow communication module, the pressure relief valve (902) is connected to the reduction furnace pressure signal communication module, the transformer (903) is connected to the current signal communication module, the pressure regulator (904) is connected to the pressure signal communication module, the tail gas discharge valve (905) is connected to the tail gas pressure communication module, the hydrogen feed regulating valve (906) is connected to the hydrogen signal communication module, and the silane feed regulating valve (907) is connected to the silane signal communication module.

5. The pressurized feed control system for a reduction furnace according to claim 4, characterized in that: The hydrogen feed regulating valve (906) is connected to the air-burning communication module.

6. The pressurized feed control system for a reduction furnace according to claim 1, characterized in that: The controller (11) further includes a reduction furnace operation switching control unit, which is connected to the reduction furnace operation control system.

7. The pressurized feed control system for a reduction furnace according to claim 1, characterized in that: The controller (11) further comprises an alarm control unit (119), and the alarm control unit (119) is connected to an audible and visual alarm.

8. The pressurized feed control system for a reduction furnace according to any one of claims 1 to 7, characterized in that: The reduction furnace (1) includes a furnace drum (101), a bottom plate (102) provided at the bottom end of the furnace drum (101), an electrode (103) sleeved on the bottom plate (102), and a silicon core (104) sleeved on the electrode (103). The reduction furnace (1) is connected to an exhaust gas pipeline (6), and a pressure relief valve (902) on the exhaust gas pipeline (6) is provided near the end of the furnace drum (101). The feeding device (2) includes a hydrogen feeding pipe (21) and a silane feeding pipe (22), wherein the hydrogen feeding pipe (21) passes through the bottom plate (102) and is in communication with the furnace drum (101), and the silane feeding pipe (22) passes through the bottom plate (102) and is in communication with the furnace drum (101); a hydrogen feeding regulating valve (906) and a hydrogen flow meter (806) are provided on the hydrogen feeding pipe (21), and a silane feeding regulating valve (907) and a silane flow meter (807) are provided on the silane feeding pipe (22); The cooling water device (3) includes a furnace drum cooling water inlet pipe (31) and a chassis cooling water inlet pipe (33), wherein the furnace drum cooling water inlet pipe (31) is in communication with the jacket of the furnace drum (101), and the chassis cooling water inlet pipe (33) is in communication with the jacket of the chassis (102); a furnace drum cooling water regulating valve (900) and a furnace drum cooling water flow meter (800) are provided on the furnace drum cooling water inlet pipe (31), and a chassis cooling water regulating valve (901) and a chassis cooling water flow meter (802) are provided on the chassis cooling water inlet pipe (33); The circuit device (4) includes a circuit (41) connected to the electrode (103), and the circuit (41) is provided with a transformer (903) and a voltage regulator (904); The tail gas recovery device (5) is connected to a tail gas discharge pipe (51), which passes through the chassis (102) and is in communication with the furnace drum (101). A tail gas discharge valve (905) is provided on the tail gas discharge pipe (51).

Images