Rotary cleaning equipment for semiconductor processing

Abstract

The utility model relates to the technical field of semiconductor cleaning devices, in particular to rotary cleaning equipment for semiconductor processing. The cleaning device comprises a cleaning machine body, a plurality of first supporting legs are arranged at the bottom of the cleaning machine body, a discharging valve pipe is further arranged at the bottom of the cleaning machine body, an inverted-L-shaped supporting plate is arranged on one side of the top of the cleaning machine body, a flushing assembly is arranged at the top of the inverted-L-shaped supporting plate, and a rotating assembly is arranged in the cleaning machine body; an adjusting and overturning assembly is arranged on the rotating assembly, and a pair of clamping assemblies is arranged on the adjusting and overturning assembly. Through the synergistic effect of the flushing assembly, the rotating assembly, the adjusting and overturning assembly and the clamping assembly, the semiconductor product can be comprehensively and carefully cleaned, the flushing assembly can accurately spray cleaning liquid, the rotating assembly enables the product to be continuously changed in angle to be flushed, and the adjusting and overturning assembly can conveniently clean the two faces of the product; and the cleaning efficiency and quality are greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor cleaning devices, in particular to a rotary cleaning device for semiconductor processing. Background Art

[0002] In the field of semiconductor manufacturing, cleaning of semiconductor products is a crucial step. Currently, there are many types of semiconductor cleaning equipment on the market, but these existing cleaning equipment generally have some shortcomings.

[0003] On the one hand, most existing cleaning equipment can only clean one side of semiconductor products. If you want to clean the other side, you need to manually flip it over, which not only increases the complexity and labor intensity of the operation, but may also cause damage to the product during the flipping process, affecting product quality and production efficiency.

[0004] On the other hand, existing cleaning equipment generally lacks the flexibility to adapt to the varying sizes of semiconductor products. Semiconductor products of varying specifications vary significantly in size, and existing cleaning equipment struggles to adapt to these variations. It cannot effectively secure and clean products of varying sizes, limiting the equipment's versatility and practicality.

[0005] In order to solve the above problems, the utility model provides a new type of semiconductor product cleaning device, which has an automatic flipping function and can be adjusted according to products of different sizes. It can improve the cleaning efficiency and quality and meet the cleaning needs of semiconductor products of different specifications. Utility Model Content

[0006] The purpose of the utility model is to provide a rotary cleaning device for semiconductor processing to solve the problems raised in the background technology.

[0007] To achieve the above-mentioned purpose, the utility model provides the following technical solution, which includes a cleaning body, several first supporting legs are arranged at the bottom of the cleaning body, a discharge valve pipe is also arranged at the bottom of the cleaning body, an inverted "L"-shaped support plate is arranged on one side of the top of the cleaning body, a flushing assembly is arranged on the top of the inverted "L"-shaped support plate, a rotating assembly is arranged in the cleaning body, an adjusting and flipping device is arranged on the rotating assembly, and a pair of clamping assemblies are arranged on the adjusting and flipping device.

[0008] As a preferred embodiment of the present invention, the flushing assembly includes a pump body arranged on the top of an inverted "L"-shaped support plate, a liquid tank is provided on one side of the pump body, the water suction port of the pump body is communicated with the interior of the liquid tank through a water pipe 1, and a water pipe 2 is provided on the water outlet of the pump body. After the other end of the water pipe 2 passes through the inverted "L"-shaped support plate, a diversion pipe is provided on the top thereof.

[0009] As a preferred embodiment of the present invention, the rotating assembly includes a base arranged on the bottom surface of the cleaning body, a movable groove is opened on the top of the base, a swivel seat is arranged above the base, and several second support legs are arranged at the bottom of the swivel seat, the second support legs are arranged in the movable groove, and the bottom of each second support leg is provided with a caster, and the caster is in contact with the inner bottom surface of the movable groove, a motor is arranged in the base, a transmission rod is provided on the transmission end of the motor, and the other end of the transmission rod is arranged at the bottom of the swivel seat, and the transmission rod is movably arranged on the base through a bearing seat.

[0010] As a preferred embodiment of the present invention, a telescopic cylinder is provided in the swivel seat, and after the telescopic rod of the telescopic cylinder passes through the top of the swivel seat, a tray is provided on the top of the telescopic rod, a liquid blocking edge is provided under the wall of the swivel seat, and fixed side panels are symmetrically provided on both sides above the wall of the swivel seat, a mounting bracket is provided on the back of one of the fixed side panels, and a battery compartment is provided on one side of the outer wall of the swivel seat.

[0011] The two wheels are connected by a pair of sprockets, one of which is a wheel gear and the other is a gear. The two wheels are connected by a pair of sprockets, and the two wheels are connected by a pair of sprockets.

[0012] As a preferred embodiment of the present invention, the clamping assembly includes a bearing seat three arranged at the top of an inverted "T"-shaped frame, a rotating shaft is arranged in the bearing seat three, a mounting shell is arranged at the front end of the rotating shaft, a soft pad one is arranged on the inner bottom surface of the mounting shell, a pressure plate is arranged above the soft pad one, a soft pad two is arranged at the bottom of the pressure plate, a bearing is arranged at the top of the pressure plate, a threaded barrel is arranged at the top of the mounting shell, a screw is arranged in the inner thread of the threaded barrel, a handle is arranged at the top of the screw, and the bottom end of the screw is arranged in the bearing.

[0013] As a preferred embodiment of the present invention, the tail of the rotating shaft of one of the clamping assemblies is arranged on the transmission end of the motor three.

[0014] Compared with the prior art, the above technical solution of the present invention has the following beneficial technical effects:

[0015] 1. The utility model can perform comprehensive and detailed cleaning of semiconductor products through the coordinated action of the flushing component, the rotating component, the adjusting and flipping device and the clamping component. The flushing component can accurately spray the cleaning liquid, the rotating component enables the product to continuously change the angle for flushing, and the adjusting and flipping device facilitates the cleaning of both sides of the product, greatly improving the cleaning efficiency and quality.

[0016] 2. The utility model integrates multiple functions such as adjusting spacing, clamping and fixing, rotating flushing and flipping cleaning, etc., which can meet the various needs of semiconductor products of different sizes in different cleaning stages, reducing the complexity of the equipment and operating steps.

[0017] 3. The utility model can perform comprehensive cleaning without dead angles by setting a rotating component. The motor drives the rotating seat to rotate through the transmission rod, so that the semiconductor product can continuously change the angle during the cleaning process, so that the cleaning liquid can cover all parts of the product, avoiding the occurrence of cleaning dead angles and achieving comprehensive cleaning without dead angles. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0019] Figure 2 This is a schematic diagram of the cleaning machine structure of the utility model;

[0020] Figure 3 This is a side sectional view of the entire utility model;

[0021] Figure 4 A schematic structural diagram of the flushing assembly of the utility model;

[0022] Figure 5 A schematic diagram of the structure of the utility model after the cleaning body is completely dismantled;

[0023] Figure 6 A schematic diagram of the structure of the rotating assembly of the utility model;

[0024] Figure 7 This is a schematic structural diagram of the rotating assembly of the present invention when it is unfolded;

[0025] Figure 8 This is a schematic diagram of the structure of the rotating assembly of the present invention when it is unfolded from the bottom perspective;

[0026] Figure 9 This is a schematic structural diagram of the adjusting and flipping device of the present invention when assembling the clamping assembly;

[0027] Figure 10 This is a schematic diagram of the assembly of two inverted "T"-shaped frames and a clamping assembly of the present invention;

[0028] Figure 11This is a schematic diagram of the structure of the clamping assembly of the present utility model;

[0029] Figure 12 This is an exploded view of the clamping assembly of the present invention.

[0030] Figure 1: cleaning body 1, first support leg 10, discharge valve pipe 11, inverted "L" shaped support plate 12, flushing assembly 2, liquid tank 20, pump body 21, water pipe 1 22, water pipe 2 23, diverter pipe 24, rotating assembly 3, base 30, motor 1 31, transmission rod 32, bearing seat 1 33, movable groove 34, swivel seat 35, second support leg 36, caster 37, telescopic cylinder 38, tray 39, liquid retaining edge 310, battery compartment 311, fixed Fixed side plate 312, slide rail 313, mounting frame 314, adjusting and flipping device 4, bidirectional screw 40, sprocket 41, chain 42, bearing seat 2 43, motor 2 44, inverted "T"-shaped frame 45, nut 46, slide groove 47, triangular support 48, motor 3 49, clamping assembly 5, bearing seat 3 50, rotating shaft 51, mounting shell 52, cushion 1 53, threaded barrel 54, screw 55, pressure plate 56, bearing 57, cushion 2 58, turning handle 59. DETAILED DESCRIPTION

[0031] To make the objectives, technical solutions, and advantages of the present invention more clearly understood, the present invention is further described below in conjunction with specific embodiments and with reference to the accompanying drawings. It should be understood that these descriptions are merely illustrative and are not intended to limit the scope of the present invention. Furthermore, descriptions of known structures and technologies are omitted in the following description to avoid unnecessary confusion regarding the concepts of the present invention.

[0032] like Figures 1-12 As shown, the present invention proposes a rotary cleaning device for semiconductor processing. The semiconductor product cleaning device of the present invention mainly consists of a cleaning body 1, a flushing component 2, a rotating component 3, an adjusting and flipping device 4, and a clamping component 5. A plurality of first support legs 10 are provided at the bottom of the cleaning body 1 for supporting the entire device. A discharge valve pipe 11 is also provided at the bottom of the cleaning body 1 to discharge the cleaning liquid after cleaning is completed.

[0033] The flushing assembly 2 is located on the inverted "L"-shaped support plate 12 on one side of the top of the cleaning body 1. The pump body 21 is located on the top of the inverted "L"-shaped support plate 12. On one side of the pump body 21 is a liquid tank 20. The water inlet of the pump body 21 is connected to the interior of the liquid tank 20 through a water pipe 1 22. The water outlet of the pump body 21 is connected to a water pipe 23. The other end of the water pipe 23 passes through the inverted "L"-shaped support plate 12, and a diverter pipe 24 is provided on the top of the water pipe 23 for spraying the cleaning liquid onto the semiconductor product to be cleaned.

[0034] The rotating assembly 3 is arranged in the cleaning body 1, the base 30 is located on the inner bottom surface of the cleaning body 1, the top of the base 30 is provided with a movable groove 34, the swivel seat 35 is located above the base 30, and a plurality of second support legs 36 are provided at the bottom of the swivel seat 35. The second support legs 36 are arranged in the movable groove 34, and each second support leg 36 is provided with a caster 37 at the bottom, and the caster 37 is in contact with the inner bottom surface of the movable groove 34. A motor 31 is provided in the base 30, and a transmission rod 32 is provided on the transmission end of the motor 31. The other end of the transmission rod 32 is provided at the bottom of the swivel seat 35. The transmission rod 32 is movably provided on the base 30 through a bearing seat 33, and the motor 31 drives the swivel seat 35 to rotate through the transmission rod 32;

[0035] A telescopic cylinder 38 is disposed within the swivel base 35. After the telescopic rod of the telescopic cylinder 38 passes through the top of the swivel base 35, a tray 39 is provided on the top of the telescopic rod to support the semiconductor product. A liquid retaining edge 310 is provided below the wall of the swivel base 35 to prevent the cleaning liquid from splashing into the movable tank 34. Fixed side panels 312 are symmetrically provided on both sides of the wall above the swivel base 35. A mounting bracket 314 is provided on the back of one of the fixed side panels 312. A battery compartment 311 is provided on one side of the outer wall of the swivel base 35.

[0036] The adjustment and flipping device 4 is disposed between the two fixed side plates 312. A pair of bidirectional lead screws 40 are movably disposed between the two fixed side plates 312 via a pair of bearing blocks 43. Sprockets 41 are symmetrically disposed at the same end of the two bidirectional lead screws 40. The two sprockets 41 are connected by a chain 42. The end of one of the bidirectional lead screws 40, away from the sprocket 41, is disposed on the transmission end of a second motor 44. The second motor 44 is disposed on a mounting bracket 314. A pair of inverted "T"-shaped brackets 45 are disposed on the swivel base 35. Nuts 46 are disposed at the bottom of each side of the inverted "T"-shaped bracket 45. The nuts 46 are threaded onto the bidirectional lead screws 40. A slide groove 47 is defined in the middle of the bottom of the inverted "T"-shaped bracket 45. The slide rail 313 is disposed within the slide groove 47. A triangular support 48 is disposed on the back of one of the inverted "T"-shaped brackets 45. A third motor 49 is disposed on the top of the triangular support 48.

[0037] The clamping assembly 5 is arranged at the top of the inverted "T"-shaped frame 45, the bearing seat three 50 is arranged at the top of the inverted "T"-shaped frame 45, the rotating shaft 51 is arranged in the bearing seat three 50, the front end of the rotating shaft 51 is arranged at the mounting shell 52, the inner bottom surface of the mounting shell 52 is arranged with a soft pad 1 53, the upper part of the soft pad 1 53 is arranged with a pressure plate 56, the bottom of the pressure plate 56 is provided with a soft pad 2 58, the top of the pressure plate 56 is provided with a bearing 57, the top of the mounting shell 52 is provided with a threaded barrel 54, the inner thread of the threaded barrel 54 is provided with a screw 55, the top of the screw 55 is provided with a turning handle 59, and the bottom end of the screw 55 is arranged in the bearing 57. The tail of the rotating shaft 51 of one of the clamping assemblies 5 is arranged on the transmission end of the motor three 49, and the motor three 49 can drive the rotating shaft 51 to flip, thereby realizing the flipping of the semiconductor product.

[0038] First, install the semiconductor product onto the adjustment and flipping device 4. Adjust the spacing between the two inverted "T"-shaped frames 45 according to the size of the product. Start the second motor 44 and control the forward and reverse rotation of the second motor 44 to drive a bidirectional screw 40 to rotate. The bidirectional screw 40 cooperates with the chain 42 through the tail sprocket 41 to synchronize the rotation of the other bidirectional screw 40. The two bidirectional screws 40 cooperate with the nut 46 on the inverted "T"-shaped frame 45 to achieve the simultaneous outward or inward movement of the two inverted "T"-shaped frames 45, thereby adjusting the spacing to the appropriate position;

[0039] After the spacing adjustment is completed, the product is placed on the soft pad 1 53 of the two mounting shells 52. Then, the handle is manually turned to rotate the screw 55 to lower the pressure plate 56, so that the soft pad 2 58 presses the two sides of the product to ensure that the product is firmly installed. Then, the telescopic cylinder 38 is started to extend the telescopic rod. When the supporting plate is supported at the bottom of the product, the telescopic cylinder 38 is closed. At this time, the product installation is completed.

[0040] Then pour the cleaning liquid into the liquid tank 20, and start the motor 1 31 and the pump body 21 at the same time. The pump body 21 will pump out the cleaning liquid in the liquid tank 20 and finally spray it out from the diversion pipe 24 to rinse the upper surface of the product. When the motor 1 31 is started, it will drive the turntable 35 to rotate, thereby comprehensively and carefully rinsing the upper surface of the product; after the upper surface of the semiconductor is completely cleaned, shut down all equipment, lower the telescopic rod of the telescopic cylinder 38, and then control the motor 3 49 to drive the rotating shaft 51 to flip 180°, thereby driving the semiconductor product to flip, and then extend the telescopic rod again to make the support plate support the product, and then the other side of the product can be rinsed.

[0041] It should be understood that the above-described specific embodiments of the present invention are merely illustrative of or explanation of the principles of the present invention and do not constitute limitations of the present invention. Therefore, any modifications, equivalent substitutions, improvements, etc. made without departing from the spirit and scope of the present invention shall be included within the scope of protection of the present invention. In addition, the appended claims of the present invention are intended to cover all changes and modifications that fall within the scope and metes and bounds of the appended claims, or equivalents of such scope and metes and bounds.

Claims

1. A rotary cleaning device for semiconductor processing, comprising a cleaning body (1), a plurality of first supporting legs (10) being provided at the bottom of the cleaning body (1), a discharge valve pipe (11) being provided at the bottom of the cleaning body (1), and an inverted "L"-shaped support plate (12) being provided at one side of the top of the cleaning body (1), characterized in that: A flushing assembly (2) is provided on the top of the inverted "L"-shaped support plate (12), a rotating assembly (3) is provided in the cleaning machine body (1), an adjusting and flipping device (4) is provided on the rotating assembly (3), and a pair of clamping assemblies (5) are provided on the adjusting and flipping device (4); The rotating assembly (3) includes a base (30) arranged on the inner bottom surface of the cleaning body (1), a movable groove (34) is provided on the top of the base (30), a rotating seat (35) is provided above the base (30), and a plurality of second supporting legs (36) are provided at the bottom of the rotating seat (35), the second supporting legs (36) are arranged in the movable groove (34), and a caster (37) is provided at the bottom of each second supporting leg (36), and the caster (37) is fitted with the inner bottom surface of the movable groove (34), a motor (31) is provided in the base (30), a transmission rod (32) is provided on the transmission end of the motor (31), and the other end of the transmission rod (32) is provided at the bottom of the rotating seat (35), and the transmission rod (32) is movably provided on the base (30) through a bearing seat (33); A telescopic cylinder (38) is provided in the rotating seat (35), and after the telescopic rod of the telescopic cylinder (38) passes through the top of the rotating seat (35), a tray (39) is provided on the top of the telescopic rod. A liquid retaining edge (310) is provided below the wall of the rotating seat (35), and fixed side panels (312) are symmetrically provided on both sides above the wall of the rotating seat (35), and a mounting frame (314) is provided on the back of one of the fixed side panels (312). A battery compartment (311) is provided on one side of the outer wall of the rotating seat (35); The adjusting and flipping device (4) includes a pair of bidirectional screws (40) arranged between two fixed side plates (312), the two bidirectional screws (40) are respectively arranged on both sides of the fixed side plates (312), the bidirectional screws (40) are movably arranged between the two fixed side plates (312) through a pair of bearing seats (43), sprockets (41) are symmetrically arranged at the same end of the two bidirectional screws (40), and the two sprockets (41) are connected to each other through a chain (42), and one end of the bidirectional screws (40) away from the sprocket (41) is arranged on the transmission of the motor (44). On the end, the motor 2 (44) is set on the mounting frame (314), and a pair of inverted "T"-shaped frames (45) are set on the rotating seat (35), and nuts (46) are set in the bottom of both sides of the inverted "T"-shaped frame (45), and the nuts (46) are threadedly set on the bidirectional screw (40), and a slide groove (47) is opened in the middle of the bottom of the inverted "T"-shaped frame (45), and a slide rail (313) is set in the slide groove (47), and a triangular support frame (48) is set on the back of one of the inverted "T"-shaped frames (45), and a motor 3 (49) is set on the top of the triangular support frame (48); The clamping assembly (5) includes a bearing seat three (50) arranged on the top of the inverted "T"-shaped frame (45), a rotating shaft (51) is arranged in the bearing seat three (50), a mounting shell (52) is arranged at the front end of the rotating shaft (51), a soft pad one (53) is arranged on the inner bottom surface of the mounting shell (52), a pressure plate (56) is arranged above the soft pad one (53), a soft pad two (58) is arranged at the bottom of the pressure plate (56), a bearing (57) is arranged at the top of the pressure plate (56), a threaded barrel (54) is arranged at the top of the threaded barrel (54), a screw (55) is arranged on the inner thread of the screw (55), a turning handle (59) is arranged at the top of the screw (55), and the bottom end of the screw (55) is arranged in the bearing (57); The tail of the rotating shaft (51) of one of the clamping assemblies (5) is arranged on the transmission end of the motor three (49).

2. The rotary cleaning device for semiconductor processing according to claim 1, characterized in that: The flushing assembly (2) includes a pump body (21) arranged on the top of an inverted "L"-shaped support plate (12), a liquid tank (20) is arranged on one side of the pump body (21), a water inlet of the pump body (21) is communicated with the interior of the liquid tank (20) through a first water delivery pipe (22), a second water delivery pipe (23) is arranged on the water outlet of the pump body (21), and the other end of the second water delivery pipe (23) passes through the inverted "L"-shaped support plate (12), and a diversion pipe (24) is arranged on the top of the second water delivery pipe (23).

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