Evaporation boat clamping device

Abstract

The utility model discloses an evaporation boat clamping device which comprises a fixed clamping assembly, a movable clamping assembly and a rapid clamping mechanism. The movable clamping assembly and the fixed clamping assembly are suitable for being matched to clamp the evaporation boat. The quick clamping mechanism comprises a rack fixed on the vacuum coating equipment, a sliding rod and a first connecting rod; one end of the sliding rod is fixed with the movable clamping assembly; the sliding rod is mounted on the rack in a sliding manner along the connecting line direction of the movable clamping assembly and the fixed clamping assembly; the first connecting rod is hinged to one end of the sliding rod; one end of the second connecting rod is hinged to the rack, and the other end of the second connecting rod is hinged to the first connecting rod; the first connecting rod and the second connecting rod rotate under the action of the push-pull rod to pull the sliding rod and the movable clamping assembly to slide, so that the movable clamping assembly and the fixed clamping assembly are matched to clamp or loosen the evaporation boat. According to the design, the simple rapid clamping mechanism is adopted, rapid fixing and dismounting of the evaporation boat are achieved, and the maintenance and replacement efficiency of the evaporation boat is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating equipment, in particular to an evaporation boat clamping device. Background Art

[0002] In vacuum evaporation coating equipment, an evaporation boat is usually required to evaporate the material. Common evaporation boats need to maintain stable dimensions and not be easily broken at high temperatures. Therefore, the evaporation boats cannot be fixed by opening holes.

[0003] In existing technology, a clamping device is typically used to secure the evaporation boat between two conductive clamping plates. Voltage and current are applied to the boat via the two conductive clamping plates, causing the boat to generate high temperatures due to the resistance effect, melting the material to be deposited, and thus performing the evaporation operation. Currently, the conductive clamping plates are typically secured using threaded connections such as bolts. This threaded fastening method is cumbersome when disassembling and replacing the evaporation boat. Since the evaporation boat often requires frequent replacement and maintenance, this threaded fastening structure significantly reduces maintenance efficiency. Utility Model Content

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defects of the prior art in that the evaporation boat fixing method is inconvenient to disassemble and has low maintenance and replacement efficiency, thereby providing an evaporation boat clamping device.

[0005] In order to solve the above technical problems, the technical solutions of the present utility model are as follows:

[0006] An evaporation boat clamping device includes a fixed clamping assembly, a movable clamping assembly, and a quick clamping mechanism; the fixed clamping assembly is fixed in a vacuum coating device, the movable clamping assembly is arranged opposite to the fixed clamping assembly, and is suitable for cooperating with the fixed clamping assembly to conduct electricity and clamp the evaporation boat in the vacuum coating device; the quick clamping mechanism includes:

[0007] a frame fixed in the vacuum coating equipment and located on a side of the movable clamping assembly away from the fixed clamping assembly;

[0008] a sliding rod, one end of which is fixedly connected to the movable clamping assembly and is slidably mounted on the frame along a connecting line between the movable clamping assembly and the fixed clamping assembly;

[0009] The connecting rod assembly includes a first connecting rod and a second connecting rod hingedly connected at one end; the other end of the first connecting rod is hingedly connected to an end of the sliding rod away from the movable clamping assembly, and the other end of the second connecting rod is hingedly connected to the frame;

[0010] A push-pull rod is fixedly connected to the first connecting rod. The first connecting rod and the second connecting rod rotate under the action of the push-pull rod, thereby pulling the sliding rod and the movable clamping assembly to slide along the connecting line direction of the movable clamping assembly and the fixed clamping assembly, so that the movable clamping assembly and the fixed clamping assembly cooperate to clamp or release the evaporation boat.

[0011] Furthermore, the frame is provided with a U-shaped hollow part, and the frame is provided with a guide seat and a hinge seat located on opposite sides of the U-shaped hollow part, and the guide seat is located between the movable clamping assembly and the hinge seat; a guide hole is provided on the guide seat, and the sliding rod is connected to the guide seat by sliding along the axial direction of the guide hole; the first connecting rod and the second connecting rod are arranged above the U-shaped hollow part, and the other end of the second connecting rod is hinged to the hinge seat.

[0012] Furthermore, under the action of the push-pull rod, the connecting rod assembly has a linear arrangement state in which the first connecting rod, the second connecting rod and the sliding rod are on the same straight line, and a folded state in which the first connecting rod and the second connecting rod are arranged at an angle; when the connecting rod assembly is in the linear arrangement state, the sliding rod pushes the movable clamping assembly to move toward the fixed clamping assembly to clamp the evaporation boat; when the connecting rod assembly is in the folded state, the sliding rod pulls the movable clamping assembly to move away from the fixed clamping assembly to release the evaporation boat.

[0013] Furthermore, when the connecting rod assembly is in the folded state, the opening at the angle formed by the first connecting rod and the second connecting rod faces the frame.

[0014] Furthermore, the included angle between the push-pull rod and the second connecting rod is greater than 90 degrees.

[0015] Furthermore, the push-pull rod and the second connecting rod are an integrated structure, and the length of the first connecting rod is greater than the length of the second connecting rod.

[0016] Furthermore, a guide limit assembly is provided between the movable clamping assembly and the sliding rod; the guide limit assembly includes a support frame and a slider; the support frame is fixedly connected to the frame, and a guide groove is provided on the support frame; one end of the slider is connected to the sliding rod and the other end is connected to the movable clamping assembly, and the slider is slidably connected to the guide groove and can approach or move away from the movable clamping assembly along the length direction of the guide groove.

[0017] Furthermore, the guide groove is an open groove arranged above the support frame, the opening of the open groove faces upward, and the guide limit assembly also includes a cover plate fixedly connected to the support frame and blocking the opening of the open groove, and the cover plate is used to prevent the slider from moving upward.

[0018] Furthermore, the interior of the slider is provided with an installation cavity that passes through from top to bottom, and the opposite sides of the slider are respectively provided with a first through hole and a second through hole that are connected to the installation cavity; the sliding rod passes through the first through hole and one end extends into the installation cavity, and the movable clamping assembly is fixedly connected to the slider through a locking rod passing through the second through hole.

[0019] Furthermore, a mounting hole opening toward the mounting cavity is provided inside the sliding rod, and a pressure head is fixedly connected in the mounting hole.

[0020] Furthermore, the fixed clamping assembly includes a fixed clamping seat fixed in the vacuum coating equipment and a fixed electrode head fixed on the fixed clamping seat; the movable clamping assembly includes a movable clamping seat fixedly connected to the sliding rod and a movable electrode head fixed on the movable clamping seat; the fixed electrode head and the movable electrode head have the same appearance, and both the fixed electrode head and the movable electrode head are provided with an L-shaped step for placing the evaporation boat; the movement stroke of the sliding rod is smaller than the width of the L-shaped step on the movable electrode head.

[0021] The evaporation boat clamping device provided by the utility model has the following advantages: during use, it is only necessary to push and pull the push-pull rod of the quick clamping mechanism, and the push-pull rod can drive the sliding rod and the movable clamping assembly to slide along the connecting line direction of the movable clamping assembly and the fixed clamping assembly through the connecting rod assembly composed of the first connecting rod and the second connecting rod, so that the movable clamping assembly and the fixed clamping assembly cooperate to clamp or release the evaporation boat, which can realize rapid fixing and disassembly of the evaporation boat and improve the maintenance and replacement efficiency of the evaporation boat. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0023] Figure 1 This is a schematic diagram of the three-dimensional structure of the evaporation boat clamping device in an embodiment of the present utility model;

[0024] Figure 2 This is a cross-sectional view of the evaporation boat clamping device in an embodiment of the present utility model;

[0025] Figure 3 This is a structural schematic diagram of the connecting rod assembly of the quick clamping mechanism in an embodiment of the present utility model when it is in a folded state.

[0026] Explanation of the accompanying drawings: 1. Fixed clamping assembly; 11. Fixed clamping seat; 12. Fixed electrode head; 2. Movable clamping assembly; 21. Movable clamping seat; 22. Movable electrode head; 221. L-shaped step; 3. Quick clamping mechanism; 31. Frame; 311. Guide seat; 312. Articulated seat; 31a. U-shaped hollow part; 32. Sliding rod; 321. Mounting hole; 33. First connecting rod; 34. Second connecting rod; 35. Push-pull rod; 36. Pressure head; 4. Evaporation boat; 5. Guide limit assembly; 51. Support frame; 511. Guide groove; 52. Slider; 521. Mounting cavity; 522. First through hole; 523. Second through hole; 53. Cover plate; 6. Locking rod. DETAILED DESCRIPTION

[0027] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0028] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating positions or relationships, are based on the positions or relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0029] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0030] like Figure 1The evaporation boat clamping device shown in Figure 3 comprises a fixed clamping assembly 1, a movable clamping assembly 2, and a quick clamping mechanism 3. The movable clamping assembly 2 is arranged opposite the fixed clamping assembly 1 and is adapted to cooperate with the fixed clamping assembly 1 to conduct electricity and clamp the evaporation boat 4 within the vacuum coating equipment. The quick clamping mechanism 3 is connected to the movable clamping assembly 2 and is used to drive the movable clamping assembly 2 toward the fixed clamping assembly 1 to clamp the evaporation boat 4, or away from the fixed clamping assembly 1 to release the evaporation boat 4.

[0031] In this embodiment, the fixed clamping assembly 1 includes a fixed clamping seat 11 fixed in the vacuum coating equipment and a fixed electrode head 12 fixed on the fixed clamping seat 11. The movable clamping assembly 2 includes a movable clamping seat 21 fixedly connected to the quick clamping mechanism 3 and a movable electrode head 22 fixed on the movable clamping seat 21. The fixed electrode head 12 and the movable electrode head 22 have the same appearance, and both the fixed electrode head 12 and the movable electrode head 22 are provided with an L-shaped step 221 for placing the evaporation boat 4. When the movable clamping assembly 2 and the fixed clamping assembly 1 clamp the evaporation boat 4, the fixed electrode head 12 and the movable electrode head 22 can clamp the evaporation boat 4 to form a cathode and an anode, respectively. By clamping the evaporation boat 4 between the fixed electrode head 12 and the movable electrode head 22 to form a current path, the principle of resistance heating is used to generate heat in the evaporation boat 4 to melt the evaporated material.

[0032] In this embodiment, the quick clamping mechanism 3 includes a frame 31, a sliding rod 32, a connecting rod assembly and a push-pull rod 35. The frame 31 is located on the side of the movable clamping assembly 2 away from the fixed clamping assembly 1 and is directly or indirectly fixed in the vacuum coating equipment. One end of the sliding rod 32 is fixedly connected to the movable clamping seat 21 and is slidably installed on the frame 31 along the connecting line direction of the movable clamping assembly 2 and the fixed clamping assembly 1. The connecting rod assembly includes a first connecting rod 33 and a second connecting rod 34, the other end of which is hingedly connected to each other, the other end of the first connecting rod 33 is hinged to the end of the sliding rod 32 away from the movable clamping assembly 2, and the other end of the second connecting rod 34 is hinged to the frame 31. The push-pull rod 35 is fixedly connected to or integrally formed with the first connecting rod 33. The first connecting rod 33 and the second connecting rod 34 rotate under the action of the push-pull rod 35, thereby pulling the sliding rod 32 and the movable clamping assembly 2 to slide along the connecting line direction of the movable clamping assembly 2 and the fixed clamping assembly 1, so that the movable clamping assembly 2 and the fixed clamping assembly 1 cooperate to clamp or release the evaporation boat 4.

[0033] During use of this evaporation boat clamping device, it is only necessary to push and pull the push-pull rod 35. The push-pull rod 35 connecting rod assembly drives the sliding rod 32 and the movable clamping assembly 2 to slide along the connecting line direction of the movable clamping assembly 2 and the fixed clamping assembly 1, thereby making the movable clamping assembly 2 and the fixed clamping assembly 1 cooperate to clamp or release the evaporation boat 4, which can realize the rapid fixing and disassembly of the evaporation boat 4 and improve the maintenance and replacement efficiency of the evaporation boat 4.

[0034] In some embodiments, the frame 31 is provided with a U-shaped hollow portion 31a. A guide seat 311 and an articulated seat 312 are provided on opposite sides of the U-shaped hollow portion 31a. The guide seat 311 is located between the movable clamping assembly 2 and the articulated seat 312. A guide hole is provided in the guide seat 311, and the sliding rod 32 is slidably connected to the guide seat 311 along the axial direction of the guide hole. A first connecting rod 33 and a second connecting rod 34 are disposed above the U-shaped hollow portion 31a, with the other end of the second connecting rod 34 hinged to the articulated seat 312. The hinge axis between the first connecting rod 33 and the sliding rod 32 and the hinge axis between the second connecting rod 34 and the articulated seat 312 are located at the same height, and both hinge axes are perpendicular to the central axis of the sliding rod 32. Under the action of the push-pull rod 35, the connecting rod assembly can be arranged in a straight line, with the first connecting rod 33, the second connecting rod 34, and the sliding rod 32 aligned on the same straight line, or in a folded state, with the first connecting rod 33 and the second connecting rod 34 arranged at an angle. When the connecting rod assembly is in the straight line, the sliding rod 32 pushes the movable clamping assembly 2 toward the fixed clamping assembly 1 to clamp the evaporation boat 4. When the connecting rod assembly is in the folded state, the sliding rod 32 pulls the movable clamping assembly 2 away from the fixed clamping assembly 1 to release the evaporation boat 4. This method of clamping or releasing the evaporation boat 4 by driving the sliding rod 32 in a horizontal linear motion using the connecting rod assembly requires only pushing and pulling the push-pull rod 35, making it simple and quick to operate. Furthermore, when the evaporation boat 4 is clamped, the sliding rod 32, the first connecting rod 33, and the second connecting rod 34 are aligned, allowing the boat 4 to be clamped using linear force transmission between the rods, ensuring the reliability of the clamping device. The evaporation boat 4 is clamped very effectively and is not prone to loosening.

[0035] In some embodiments, when the link assembly is in the folded state, the opening formed by the angle between the first link 33 and the second link 34 faces the frame 31 .

[0036] In some embodiments, to make the operation of pushing and pulling the push-pull rod 35 more labor-saving, the length of the first connecting rod 33 is greater than the length of the second connecting rod 34, the length of the push-pull rod 35 is greater than the length of the first connecting rod 33, and the angle between the push-pull rod 35 and the second connecting rod 34 is greater than 90 degrees. Preferably, the angle between the push-pull rod 35 and the second connecting rod 34 is 135 degrees.

[0037] In some embodiments, the push-pull rod 35 and the second connecting rod 34 may be fixedly connected together or may be an integrally formed structure.

[0038] In some embodiments, a guide and stop assembly 5 is further provided between the movable clamping assembly 2 and the sliding rod 32. The guide and stop assembly 5 includes a support frame 51 and a slider 52. The support frame 51 is fixedly connected to the frame 31 and is provided with a guide slot 511. One end of the slider 52 is connected to the sliding rod 32, and the other end is connected to the movable clamping assembly 2. The slider 52 is slidably connected to the guide slot 511 and can move toward or away from the movable clamping assembly 2 along the length of the guide slot 511. The length of the guide slot 511 is the same as the axial direction of the sliding rod 32. By providing a guide limit assembly 5 between the sliding rod 32 and the movable clamping assembly 2, not only can the movable clamping assembly 2 be isolated from the sliding rod 32 to ensure safety, but it can also ensure that the movable clamping assembly 2 cooperates with the fixed clamping assembly 1 to stably and reliably clamp and fix the evaporation boat 4. In particular, it can prevent the lack of a guide limit during long-term use, which may cause the clamping force direction of the movable clamping assembly 2 and the fixed clamping assembly 1 to deviate from the length direction of the evaporation boat 4, resulting in lateral overflow of the molten metal in the evaporation boat 4, causing current instability, unstable coating and other problems.

[0039] Furthermore, the guide groove 511 is an open groove provided above the support frame 51, with the opening of the open groove facing upward. The guide and stop assembly 5 also includes a cover plate 53 fixedly connected to the support frame 51 and blocking the opening of the open groove. The cover plate 53 is used to prevent the slider 52 from moving upward. The guide groove 511 and the cover plate 53 enclose the slider 52 to form a guide and stop structure, which not only facilitates processing and manufacturing, but also facilitates the assembly of the slider 52 and the connection and fixation between the slider 52 and the movable clamping seat 21.

[0040] In some embodiments, the slider 52 has a vertically extending mounting cavity 521 formed therein. A first through-hole 522 and a second through-hole 523 communicating with the mounting cavity 521 are provided on opposite sides of the slider 52. The sliding rod 32 passes through the first through-hole 522, with one end extending into the mounting cavity 521. The movable clamping seat 21 is fixedly connected to the slider 52 via a locking rod 6 passing through the second through-hole 523. The provision of the mounting cavity 521, the first through-hole 522, and the second through-hole 523 within the slider 52 facilitates the connection and fixation between the slider 52 and the movable clamping seat 21, and between the slider 52 and the sliding rod 32.

[0041] In some embodiments, the sliding rod 32 is provided with a mounting hole 321 opening toward the mounting cavity 521 , and a pressing head 36 is fixedly connected to the mounting hole 321 . The mounting hole 321 is a blind hole with internal threads, and the pressing head 36 is threadedly connected to the mounting hole 321 . When the sliding rod 32 is installed on the slider 52, the pressure head 36 is fixed in the mounting hole 321 in the sliding rod 32. On the one hand, the pressure head 36 can be used to tighten the sliding rod 32, thereby achieving a tight connection and fixation between the sliding rod 32 and the first through hole 522 on the slider 52, preventing the sliding rod 32 and the slider 52 from being unable to be tightly connected due to inevitable slight errors between the sliding rod 32 and the first through hole 522 on the slider 52, thereby affecting the locking effect of the evaporation boat 4; on the other hand, the pressure head 36 and the locking rod 6 on the other side of the slider 52 can also be fixedly connected together, and the sliding rod 32 is connected to the movable clamping seat 21 through the pressure head 36, the locking rod 6 and the movable clamping seat 21, and the sliding rod 32 can better transmit force to the movable clamping seat 21, thereby improving the locking effect of the evaporation boat 4.

[0042] In some embodiments, to prevent the evaporation boat 4 from falling when released, the travel of the sliding rod 32 is smaller than the width of the L-shaped step 221 on the movable electrode head 22. Furthermore, as an integral supporting and fixing component of the entire evaporation boat clamping device, the frame 31 and support frame 51 of the quick clamping mechanism 3 are secured together to a fixed block and secured to the interior of the vacuum coating apparatus via other fixing structures.

[0043] To sum up, the evaporation boat clamping device provided by the utility model only needs to push and pull the push-pull rod 35 of the quick clamping mechanism 3 during use. The push-pull rod 35 can drive the sliding rod 32 and the movable clamping assembly 2 to slide along the connecting line direction of the movable clamping assembly 2 and the fixed clamping assembly 1 through the connecting rod assembly composed of the first connecting rod 33 and the second connecting rod 34, so that the movable clamping assembly 2 and the fixed clamping assembly 1 cooperate to clamp or release the evaporation boat 4, which can realize the rapid fixing and disassembly of the evaporation boat 4 and improve the maintenance and replacement efficiency of the evaporation boat 4.

[0044] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will readily appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. An evaporation boat clamping device, characterized in that: The invention comprises a fixed clamping component (1), a movable clamping component (2) and a quick clamping mechanism (3); the fixed clamping component (1) is fixed in a vacuum coating device, the movable clamping component (2) is arranged relative to the fixed clamping component (1) and is suitable for cooperating with the fixed clamping component (1) to conduct electricity and clamp an evaporation boat (4) in the vacuum coating device; the quick clamping mechanism (3) comprises: A frame (31) is fixed in the vacuum coating device and is located on a side of the movable clamping assembly (2) away from the fixed clamping assembly (1); A sliding rod (32), one end of which is fixedly connected to the movable clamping assembly (2) and is slidably mounted on the frame (31) along a connecting line between the movable clamping assembly (2) and the fixed clamping assembly (1); A connecting rod assembly comprises a first connecting rod (33) and a second connecting rod (34) which are hingedly connected at one end; the other end of the first connecting rod (33) is hingedly connected to an end of a sliding rod (32) away from the movable clamping assembly (2), and the other end of the second connecting rod (34) is hingedly connected to the frame (31); A push-pull rod (35) is fixedly connected to the first connecting rod (33). The first connecting rod (33) and the second connecting rod (34) rotate under the action of the push-pull rod (35) and thereby pull the sliding rod (32) and the movable clamping assembly (2) to slide along the connecting line of the movable clamping assembly (2) and the fixed clamping assembly (1), so that the movable clamping assembly (2) and the fixed clamping assembly (1) cooperate to clamp or release the evaporation boat (4).

2. The evaporation boat clamping device according to claim 1, characterized in that: The frame (31) is provided with a U-shaped hollow portion (31a), and the frame (31) is provided with a guide seat (311) and a hinge seat (312) located on opposite sides of the U-shaped hollow portion (31a), and the guide seat (311) is located between the movable clamping assembly (2) and the hinge seat (312); a guide hole is provided on the guide seat (311), and the sliding rod (32) is connected to the guide seat (311) by sliding along the axial direction of the guide hole; the first connecting rod (33) and the second connecting rod (34) are arranged above the U-shaped hollow portion (31a), and the other end of the second connecting rod (34) is hinged to the hinge seat (312).

3. The evaporation boat clamping device according to claim 2, characterized in that: Under the action of the push-pull rod (35), the connecting rod assembly has a linear arrangement state in which the first connecting rod (33), the second connecting rod (34) and the sliding rod (32) are in the same straight line, and a folded state in which the first connecting rod (33) and the second connecting rod (34) are arranged at an angle; when the connecting rod assembly is in the linear arrangement state, the sliding rod (32) pushes the movable clamping assembly (2) to move in a direction close to the fixed clamping assembly (1) to clamp the evaporation boat (4); when the connecting rod assembly is in the folded state, the sliding rod (32) pulls the movable clamping assembly (2) to move in a direction away from the fixed clamping assembly (1) to release the evaporation boat (4).

4. The evaporation boat clamping device according to claim 3, characterized in that: When the connecting rod assembly is in the folded state, the opening formed by the first connecting rod (33) and the second connecting rod (34) at an angle faces the frame (31).

5. The evaporation boat clamping device according to claim 3, characterized in that: The included angle between the push-pull rod (35) and the second connecting rod (34) is greater than 90 degrees.

6. The evaporation boat clamping device according to claim 1, characterized in that: A guide and limit assembly (5) is further provided between the movable clamping assembly (2) and the sliding rod (32); the guide and limit assembly (5) comprises a support frame (51) and a slider (52); the support frame (51) is fixedly connected to the frame (31), and a guide groove (511) is provided on the support frame (51); one end of the slider (52) is connected to the sliding rod (32), and the other end is connected to the movable clamping assembly (2); the slider (52) is slidably connected to the guide groove (511) and can approach or move away from the movable clamping assembly (2) along the length direction of the guide groove (511).

7. The evaporation boat clamping device according to claim 6, characterized in that: The guide groove (511) is an open groove arranged above the support frame (51), with the opening of the open groove facing upward. The guide limit assembly (5) further comprises a cover plate (53) fixedly connected to the support frame (51) and blocking the opening of the open groove. The cover plate (53) is used to prevent the slider (52) from moving upward.

8. The evaporation boat clamping device according to claim 7, characterized in that: The interior of the slider (52) is provided with an installation cavity (521) which passes through from top to bottom, and the opposite sides of the slider (52) are respectively provided with a first through hole (522) and a second through hole (523) which are connected to the installation cavity (521); the sliding rod (32) passes through the first through hole (522) and one end extends into the installation cavity (521), and the movable clamping assembly (2) is fixedly connected to the slider (52) via a locking rod (6) which passes through the second through hole (523).

9. The evaporation boat clamping device according to claim 8, characterized in that: The interior of the sliding rod (32) is provided with a mounting hole (321) opening toward the mounting cavity (521), and a pressure head (36) is fixedly connected in the mounting hole (321).

10. The evaporation boat clamping device according to claim 1, characterized in that: The fixed clamping assembly (1) comprises a fixed clamping seat (11) fixed in the vacuum coating equipment and a fixed electrode head (12) fixed on the fixed clamping seat (11); the movable clamping assembly (2) comprises a movable clamping seat (21) fixedly connected to the sliding rod (32) and a movable electrode head (22) fixed on the movable clamping seat (21); the fixed electrode head (12) and the movable electrode head (22) have the same appearance, and both the fixed electrode head (12) and the movable electrode head (22) are provided with an L-shaped step (221) for placing the evaporation boat (4); the movement stroke of the sliding rod (32) is smaller than the width of the L-shaped step (221) on the movable electrode head (22).

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