Dual-purpose vacuum rack plating equipment for magnetron sputtering and evaporation

Abstract

The utility model provides magnetron sputtering and evaporation dual-purpose vacuum rack plating equipment, and belongs to the technical field of film plating. The magnetron sputtering and evaporation dual-purpose vacuum rack plating equipment comprises a film plating machine and a supporting adjusting mechanism, a supporting frame is installed in the film plating machine, a closing door is installed on the front side of the film plating machine, supporting seats are fixedly connected to the top and the bottom of the two sides of the inner side of the supporting frame, supporting rods are movably connected to the inner sides of the supporting seats, and the supporting rods are movably connected to the inner sides of the supporting seats. The supporting and adjusting mechanism is arranged, so that a supporting medium for adjusting the interior of the supporting frame and a medium for adjusting the supporting spacing distance of an external workpiece can be provided for a user, the supporting medium is guided in the adjusting process, and therefore the user can conduct adjusting operation according to the actual supporting requirement of the workpiece conveniently; and the situation that the operation of supporting a workpiece by the supporting frame is tedious due to the fact that supporting adjustment of the supporting frame is inconvenient is avoided, and therefore the film coating supporting operation convenience and flexibility of the supporting frame are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, in particular to a vacuum rack plating device for magnetron sputtering and evaporation. Background Art

[0002] Magnetron sputtering and evaporation dual-purpose vacuum rack plating equipment is an advanced thin film deposition technology widely used in electronics, optics, materials science and other fields. Magnetron sputtering and evaporation dual-purpose vacuum rack plating equipment is divided into magnetron sputtering and evaporation. The basic principle of magnetron sputtering is that magnetron sputtering uses high-energy particles to bombard a target material, causing target atoms to sputter out and deposit onto a substrate in a vacuum environment to form a thin film. By applying a magnetic field, the residence time of the ions on the target surface is increased, thereby improving sputtering efficiency. Target material: Metals, alloys, or other materials can be used as targets. Gas: Argon is typically used as the working gas, which collides with the target material in a vacuum to achieve the sputtering process. The basic principle of evaporation: Thermal evaporation uses a heating source to heat the material to its evaporation point, causing it to be deposited onto the substrate in the form of vapor in a vacuum. After being heated, the material gradually changes to a gas phase and, after cooling, is deposited on the substrate to form a thin film. Evaporation source: Common evaporation sources include crucibles and coating power supplies, and are suitable for a variety of metal and non-metal materials. Since the workpiece's positional stability during the coating process directly affects the coating effect, it is necessary to support and stabilize the workpiece during operation.

[0003] In the related art, during the use of the dual-purpose vacuum hanging plating equipment of magnetron sputtering and evaporation, the workpiece is generally supported for coating by means of a support frame and a hook inside the coating chamber to ensure the stability of the workpiece during the coating process, so that it can be used.

[0004] However, in the current use of magnetron sputtering and evaporation dual-purpose vacuum rack plating equipment, due to the different support spacing requirements for workpieces of different sizes, the support frame is composed of a support rod and a hook, and is assembled by bolt connection during use. When adjusting, the bolts need to be repeatedly removed to complete the adjustment, resulting in the support frame coating support adjustment being relatively inconvenient and inflexible, affecting the convenience and flexibility of the workpiece coating support operation. Utility Model Content

[0005] In order to make up for the above deficiencies, the present invention provides a vacuum rack plating device for magnetron sputtering and evaporation that overcomes the above technical problems or at least partially solves the above problems.

[0006] The utility model is achieved in this way:

[0007] The utility model provides a vacuum rack plating device for magnetron sputtering and evaporation, comprising a coating machine, a support frame is installed inside the coating machine, and a closing door is installed on the front side of the coating machine;

[0008] A support adjustment mechanism, the support adjustment mechanism comprising:

[0009] Support seat; the support seat is fixedly connected to the top and bottom of both sides of the inner side of the support frame, the inner side of the support seat is movably connected to a support rod, and the surface of the support rod is fixedly connected to a support hook;

[0010] Adjustment slot; the adjustment slot is opened on the inner side of the support seat, the interior of the adjustment slot is movably connected to the adjustment seat, and the inner side of the adjustment seat is movably connected to the outer side of the support rod;

[0011] Adjusting and disassembling mechanism; the adjusting and disassembling mechanism is movably connected to the bottom of the support rod.

[0012] In a preferred embodiment, the adjustment and disassembly mechanism includes a disassembly seat, a disassembly groove and a disassembly column. The disassembly seat is movably connected to the bottom of the support rod, the disassembly groove is opened on the inner side of the adjustment seat, the disassembly column is movably connected to the inside of the disassembly groove, and the inner side of the disassembly column is fixedly connected to the outer side of the disassembly seat and the support rod respectively.

[0013] In a preferred solution, a telescopic slot is provided at the bottom of the support rod, a telescopic column is movably connected inside the telescopic slot, and the bottom of the telescopic column is fixedly connected to the top of the disassembly seat.

[0014] In a preferred solution, a positioning groove is provided on the top of the outer side of the telescopic column, and a positioning column is movably connected inside the positioning groove.

[0015] In a preferred solution, a sliding groove communicating with the positioning groove is provided on the outer side of the telescopic column, and a movable hole communicating with the sliding groove is provided on the outer side of the inner wall of the telescopic groove.

[0016] In a preferred solution, the bottom of the outer side of the support rod is fixedly connected to a screw barrel located outside the movable hole, the inner thread of the screw barrel is connected to a stud, and the inner side of the stud is fixedly connected to the outer side of the positioning column.

[0017] In a preferred solution, a receiving groove is provided on the inner side of the inner wall of the screw barrel, and the receiving groove is communicated with the movable hole.

[0018] In a preferred solution, a slot located at the bottom of the disassembly seat is provided on the outer side of the top of the support seat, and a plug-in rack is movably connected inside the slot, and the inner side of the plug-in rack is fixedly connected to the outer side of the disassembly seat.

[0019] The utility model provides a dual-purpose vacuum rack plating device for magnetron sputtering and evaporation, and its beneficial effects include:

[0020] 1. By setting up a support adjustment mechanism, the user can be provided with a medium for adjusting the internal support medium of the support frame and the support interval distance of the external workpiece, and the support medium can be guided during the adjustment process so that the user can adjust the operation according to the actual support requirements of the workpiece, avoiding the inconvenience of the support adjustment of the support frame, resulting in cumbersome operation of the support frame supporting the workpiece, thereby improving the convenience and flexibility of the coating support operation of the support frame.

[0021] 2. By setting up an adjustment and disassembly mechanism, space and medium can be provided for the support rod to be disassembled from the adjustment seat, so that the user can perform installation operations between the support rod and the adjustment seat, avoiding the situation where the support rod is difficult to connect with the adjustment seat during use, thereby improving the convenience of installation and connection between the support rod and the adjustment seat.

[0022] 3. By setting the telescopic slot and telescopic column, the disassembly seat and the support rod can be telescopically connected, so that the user can operate the disassembly seat to enter and exit the disassembly slot, avoiding the difficulty of telescopic operation when the disassembly seat is used, resulting in inconvenience in connecting and assembling the support rod and the adjustment seat, thereby improving the flexibility of the disassembly seat. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0024] Figure 1 It is an overall three-dimensional diagram provided by an embodiment of the present utility model.

[0025] Figure 2 This is a schematic diagram of the left-side stereoscopic structure of the support base provided in an embodiment of the utility model.

[0026] Figure 3 This is a schematic diagram of the three-dimensional cross-sectional structure of the support base provided in an embodiment of the present utility model.

[0027] Figure 4 This is a schematic diagram of the three-dimensional cross-sectional structure of the support rod provided in an embodiment of the present utility model.

[0028] In the figure: 1. Coating machine; 2. Support frame; 3. Closing door; 4. Support seat; 5. Support rod; 6. Support hook; 7. Adjustment slot; 8. Adjustment seat; 9. Disassembly seat; 10. Disassembly slot; 11. Disassembly column; 12. Telescopic slot; 13. Telescopic column; 14. Positioning slot; 15. Positioning column; 16. Slide; 17. Movable hole; 18. Screw barrel; 19. Stud; 20. Receiving slot; 21. Slot; 22. Plug rack. DETAILED DESCRIPTION

[0029] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0030] Reference Figures 1-4 The utility model provides a technical solution: a dual-purpose vacuum hanging plating equipment for magnetron sputtering and evaporation, including a coating machine 1 and a support adjustment mechanism. A support frame 2 is installed inside the coating machine 1, and a closing door 3 is installed on the front side of the coating machine 1. It can provide users with the ability to adjust the internal supporting medium of the support frame 2 and the medium for adjusting the support interval distance of the external workpiece, and guide the supporting medium during the adjustment process so that the user can adjust the operation according to the actual support requirements of the workpiece, avoiding the inconvenience of supporting the support frame 2 and the cumbersome operation of supporting the workpiece by the support frame 2, thereby improving the convenience and flexibility of the coating support operation of the support frame 2.

[0031] Reference Figures 1-4The support rod 5 is fixedly connected to the top and bottom of the inner sides of the support frame 2, and the inner side of the support seat 4 is movably connected to the support rod 5. The surface of the support rod 5 is fixedly connected to the support hook 6. The adjustment slot 7 is opened on the inner side of the support seat 4, and the adjusting seat 8 is movably connected inside the adjusting slot 7. The inner side of the adjusting seat 8 is movably connected to the outer side of the support rod 5. The adjustment and disassembly mechanism is movably connected to the bottom of the support rod 5. According to the actual size of the external coating workpiece and the coating support requirements, the handheld support rod 5 is moved inside the support seat 4 to adjust the support spacing distance between the support rod 5 and the support hook 6. At this time, the adjusting seat 8 follows the support rod 5 to move inside the adjusting slot 7, The support seats 4 are used for adjustment, connection and guiding. Generally, users adjust the support position inside the support frame 2 according to the coating requirements of the workpiece. The adjustment and disassembly mechanism includes a disassembly seat 9, a disassembly groove 10 and a disassembly column 11. The disassembly seat 9 is movably connected to the bottom of the support rod 5, and the disassembly groove 10 is opened on the inner side of the adjustment seat 8. The disassembly column 11 is movably connected to the inside of the disassembly groove 10. The inner side of the disassembly column 11 is fixedly connected to the outer side of the disassembly seat 9 and the support rod 5 respectively, which can provide space and medium for the support rod 5 to be disassembled and connected with the adjustment seat 8, so that the user can perform installation operations between the support rod 5 and the adjustment seat 8, avoiding the situation where the support rod 5 is difficult to connect with the adjustment seat 8 during use, thereby improving the convenience of installation and connection between the support rod 5 and the adjustment seat 8.

[0032] Reference Figure 2-Figure 4 In a preferred embodiment, a telescopic slot 12 is provided at the bottom of the support rod 5, and a telescopic column 13 is movably connected inside the telescopic slot 12. The bottom of the telescopic column 13 is fixedly connected to the top of the disassembly seat 9, and the disassembly seat 9 and the support rod 5 can be telescopically connected to each other, so that the user can operate the disassembly seat 9 to enter and disengage the disassembly slot 10, avoiding the difficulty in telescopic operation when the disassembly seat 9 is used, which makes it inconvenient to connect and assemble the support rod 5 and the adjustment seat 8. Therefore, the flexibility of use of the disassembly seat 9 is improved, and a positioning slot 14 is provided at the top of the outer side of the telescopic column 13. A positioning column 15 is movably connected inside the positioning slot 14, which can position the telescopic column 13 and the telescopic slot 12 after extension, thereby ensuring the working stability of the disassembly seat 9, thereby improving the stability and convenience of positioning of the telescopic column 13 and the disassembly seat 9.

[0033] Reference Figure 2-Figure 4In a preferred embodiment, a sliding groove 16 connected to the positioning groove 14 is opened on the outer side of the telescopic column 13, and a movable hole 17 connected to the sliding groove 16 is opened on the outer side of the inner wall of the telescopic groove 12, which can provide space for the positioning column 15 to movably disengage from the positioning groove 14, and after disengaging from the positioning groove 14, the telescopic column 13 and the telescopic groove 12 are slidably connected, thereby improving the flexibility of use of the positioning column 15, and the bottom of the outer side of the support rod 5 is fixedly connected to a screw barrel 18 located on the outer side of the movable hole 17, and the internal thread of the screw barrel 18 is connected to a stud 19, and the inner side of the stud 19 is fixedly connected to the outer side of the positioning column 15, which can provide the user with a medium for plugging and positioning the mobile positioning column 15, thereby improving the convenience of the plug-in and positioning operation of the positioning column 15.

[0034] Reference Figure 2-Figure 4 In a preferred embodiment, a receiving groove 20 is opened on the inner side of the inner wall of the screw barrel 18, and the receiving groove 20 is connected to the movable hole 17, which can provide a receiving space for the positioning column 15 to be separated from the positioning groove 14, thereby improving the smoothness of use of the positioning column 15, and a slot 21 is opened on the outer side of the top of the support seat 4, which is located at the bottom of the disassembly seat 9. The inside of the slot 21 is movably connected with a bracket 22, and the inner side of the bracket 22 is fixedly connected to the outer side of the disassembly seat 9. The support rod 5 and the support seat 4 can be adjusted and positioned by the disassembly seat 9, thereby improving the convenience of adjusting and positioning of the support rod 5.

[0035] When the workpiece is in the working order, the support rod 5 is moved to the bottom of the workpiece 9, and the support rod 5 is moved to the bottom of the workpiece 9. When the workpiece is in the working order, the support rod 5 is moved to the bottom of the workpiece 9, and the support rod 5 is moved to the bottom of the workpiece 9. When the workpiece is in the working order, the support rod 5 is moved to the bottom of the workpiece 9, and the support rod 5 is moved to the bottom of the workpiece 9. When the workpiece is in the working order, the support rod 5 is moved to the bottom of the workpiece 9, and the support rod 5 is moved to the bottom of the workpiece 9. When the workpiece is in the working order, the support rod 5 is moved to the bottom of the workpiece 9, and the support rod 5 is moved to the bottom of the workpiece 9. When the workpiece is in the working order, the support rod 5 is moved to the bottom of the workpiece 9 After the adjustment is completed, the disassembly seat 9 is held by hand to drive the insertion frame 22 to move downward into the corresponding slot 21, and the adjusted support rod 5 and the support seat 4 are plugged in and positioned. When the insertion frame 22 has completed entering the slot 21, it means that the positioning column 15 is aligned with the positioning groove 14. Subsequently, the handheld stud 19 is rotated to cooperate with the screw barrel 18 to push the positioning column 15 to move inward, so that the positioning column 15 passes through the movable hole 17 and the slide groove 16 to enter the positioning groove 14, and the telescopic rod and the support rod 5 are plugged in and positioned stably to ensure the adjustment and positioning stability of the support rod 5 and the support seat 4. Then, the support hooks 6 fixed around the support rod 5 can be used to support the external workpiece for coating.

[0036] It should be noted that the coating machine 1, the support frame 2 and the closing door 3 are all devices or equipment existing in the prior art, or are devices or equipment that can be realized in the prior art. Their power supply, specific composition and principles are clear to those skilled in the art, so they will not be described in detail.

Claims

1. A vacuum hanging plating device for magnetron sputtering and evaporation, comprising a coating machine (1), a support frame (2) installed inside the coating machine (1), a closing door (3) installed on the front side of the coating machine (1), characterized in that ； A support adjustment mechanism, the support adjustment mechanism comprising: Support seat (4); the support seat (4) is fixedly connected to the top and bottom of both sides of the inner side of the support frame (2); the inner side of the support seat (4) is movably connected to a support rod (5); the surface of the support rod (5) is fixedly connected to a support hook (6); An adjustment groove (7); the adjustment groove (7) is provided on the inner side of the support seat (4); the adjustment seat (8) is movably connected to the interior of the adjustment groove (7); and the inner side of the adjustment seat (8) is movably connected to the outer side of the support rod (5); Adjusting and disassembling mechanism; the adjusting and disassembling mechanism is movably connected to the bottom of the support rod (5).

2. The magnetron sputtering and evaporation dual-purpose vacuum rack plating equipment according to claim 1, characterized in that: The adjustment and disassembly mechanism comprises a disassembly seat (9), a disassembly groove (10) and a disassembly column (11); the disassembly seat (9) is movably connected to the bottom of the support rod (5); the disassembly groove (10) is opened on the inner side of the adjustment seat (8); the disassembly column (11) is movably connected inside the disassembly groove (10); the inner side of the disassembly column (11) is fixedly connected to the outer sides of the disassembly seat (9) and the support rod (5), respectively.

3. The vacuum rack plating equipment for magnetron sputtering and evaporation according to claim 2, characterized in that: A telescopic slot (12) is provided at the bottom of the support rod (5), a telescopic column (13) is movably connected inside the telescopic slot (12), and the bottom of the telescopic column (13) is fixedly connected to the top of the disassembly seat (9).

4. The magnetron sputtering and evaporation dual-purpose vacuum rack plating equipment according to claim 3, characterized in that: A positioning groove (14) is provided on the top of the outer side of the telescopic column (13), and a positioning column (15) is movably connected inside the positioning groove (14).

5. The magnetron sputtering and evaporation dual-purpose vacuum rack plating equipment according to claim 4, characterized in that: A sliding groove (16) communicating with the positioning groove (14) is provided on the outer side of the telescopic column (13), and a movable hole (17) communicating with the sliding groove (16) is provided on the outer side of the inner wall of the telescopic groove (12).

6. The vacuum rack plating equipment for magnetron sputtering and evaporation according to claim 5, characterized in that: The bottom of the outer side of the support rod (5) is fixedly connected to a screw barrel (18) located outside the movable hole (17), the inner thread of the screw barrel (18) is connected to a stud (19), and the inner side of the stud (19) is fixedly connected to the outer side of the positioning column (15).

7. The vacuum rack plating equipment for magnetron sputtering and evaporation according to claim 6, characterized in that: An accommodating groove (20) is provided on the inner side of the inner wall of the screw barrel (18), and the accommodating groove (20) is communicated with the movable hole (17).

8. The vacuum rack plating equipment for magnetron sputtering and evaporation according to claim 2, characterized in that: The outer side of the top of the support seat (4) is provided with a slot (21) located at the bottom of the disassembly seat (9), the interior of the slot (21) is movably connected to a plug-in rack (22), and the inner side of the plug-in rack (22) is fixedly connected to the outer side of the disassembly seat (9).

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