Vacuum pressure stabilizing device at low temperature

Abstract

The utility model provides a vacuum pressure stabilizing device at low temperature, which relates to the technical field of vacuum pumps and comprises a vacuum container and a vacuum pump, a vacuum cavity is arranged between the inner wall and the outer wall in the vacuum container, two ends of the vacuum container are respectively provided with a cooling liquid inlet and a vacuumizing pipe which are communicated with the vacuum cavity, and one end of the vacuum cavity close to the vacuumizing pipe is provided with a sealing plate. A material guiding cavity is formed in one side of the sealing plate and the end of the vacuum cavity, drainage holes are formed in the circumference of the surface of the sealing plate, a flow dividing assembly is arranged on the inner wall of the vacuum container, the position between every two adjacent drainage holes penetrates through the end of the flow dividing assembly, a buffering cavity is formed outside the vacuumizing pipe, and an electric control valve is arranged at the position, located in the buffering cavity, of the vacuumizing pipe. The reasonable design of the structures of the vacuum cavity, the cooling liquid inlet, the flow dividing assembly, the material guiding cavity and the like enables cooling liquid to form a stable flowing path in the vacuum cavity, it is guaranteed that the inner space of the whole vacuum container can be fully cooled, and a uniform cooling vacuum environment can be maintained easily.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum pumps, in particular to a vacuum voltage stabilizing device at low temperature. Background Art

[0002] In low-temperature vacuum-related industrial applications, such as the low-temperature processing of certain special materials, the manufacturing or testing of electronic components in a low-temperature vacuum environment, and other processes, precise control of the vacuum environment and stable temperature conditions are required. For vacuum systems, existing vacuum devices often face pressure fluctuations during the vacuuming process. This is due to unstable pumping speeds and the lack of effective buffering mechanisms. Sudden pressure changes may damage the vacuum pump and the entire vacuuming system, affecting its service life and vacuum stability, and thus affecting the quality and efficiency of production or testing.

[0003] Cooling in a cryogenic vacuum environment is crucial for material processing. Conventional cooling methods struggle to achieve uniform coolant distribution within vacuum vessels. This is due to a lack of effective flow distribution structures, which can lead to excessive concentration of coolant in certain areas and insufficient flow in others, resulting in localized overheating or insufficient cooling. This uneven cooling not only fails to provide stable temperature conditions for material processing but can also affect material performance and quality, while also reducing the reliability and efficiency of the entire vacuum cooling system.

[0004] The prior art has the following technical problems:

[0005] 1. The coolant is distributed inside the vacuum pump, generally entering directly through the feed port. There is no internal diversion structure. The coolant may be overly concentrated in some areas, while the flow rate in other areas is insufficient, resulting in local overheating or insufficient cooling.

[0006] 2. During the vacuuming process, due to the problem of pressure fluctuation, the air pumping speed is unstable. The pressure changes suddenly during the vacuuming process and cannot be buffered, resulting in insufficient vacuum degree of the equipment and directly affecting the life of the equipment. Utility Model Content

[0007] The purpose of the utility model is to solve the shortcomings of the prior art that the cooling liquid cannot be evenly distributed in the vacuum container and the pressure picture during vacuuming causes damage to the equipment, and to propose a low-temperature vacuum pressure stabilizing device.

[0008] In order to achieve the above-mentioned purpose, the utility model adopts the following technical scheme: a vacuum voltage stabilizing device at low temperature, including a vacuum container and a vacuum pump, a vacuum cavity is provided between the inner wall and the outer wall of the vacuum container, a cooling liquid inlet and a vacuum pumping tube are respectively provided at both ends of the vacuum container and penetrate the vacuum cavity, a sealing plate is provided at one end of the vacuum cavity close to the vacuum pumping tube, a material guide cavity is provided at one side of the sealing plate and the end of the vacuum cavity, a leakage hole is opened on the circumference of the surface of the sealing plate, a diversion component is provided on the inner wall of the vacuum container, the position between adjacent leakage holes is penetrated by the end of the diversion component, a buffer cavity is provided on the outside of the vacuum pumping tube, and an electric control valve is provided at the position of the vacuum pumping tube inside the buffer cavity.

[0009] Preferably, the diversion assembly includes a flow guide main pipe and a material guide arc tube, the flow guide arc tubes are evenly distributed in an array on the surface of the flow guide main pipe, a discharge valve is opened on the surface of the guide arc tube, and the length of the flow guide main pipe is the same as the length of the inner wall of the vacuum container.

[0010] Preferably, the diversion components are distributed along the circumference of the inner wall of the vacuum container, and the guide arc tubes of adjacent diversion components are staggered.

[0011] Preferably, the relief valves are distributed on the top surface, both ends and both sides of the guide arc tube, and the relief valves are evenly distributed in an array along the top surface and both sides of the guide arc tube.

[0012] Preferably, a vacuum pump is connected to the end of the vacuum pipe, and a sealing butterfly valve is provided at the connection position between the vacuum pipe and the vacuum pump.

[0013] Preferably, a feed port is provided on the back of the vacuum container, and a discharge port is provided on the bottom surface of the vacuum container.

[0014] Preferably, the edges of the connection positions between the sealing plate and the vacuum chamber are sealed, and the connection positions between the diversion component and the sealing plate are sealed.

[0015] Beneficial effects

[0016] In the utility model, a diversion component is arranged in the vacuum cavity inside the vacuum container, and the cooperation of the diversion main pipe, the diversion arc pipe and the relief valve is used to achieve uniform distribution of the cooling liquid in the vacuum cavity. The diversion arc pipes are staggered and the relief valves are arranged in multiple positions, which can accurately control the flow direction and flow of the cooling liquid, avoid local overheating or insufficient cooling, effectively improve the uniformity of cooling, and provide stable temperature conditions for material processing in a vacuum environment. The reasonable design of the vacuum cavity and the cooling liquid inlet, the diversion component and the material guide cavity allows the cooling liquid to form a stable flow path in the vacuum cavity, ensuring that the entire internal space of the vacuum container can be fully cooled, which is conducive to maintaining a uniform cooling vacuum environment and improving the reliability and efficiency of the device in vacuum cooling applications.

[0017] In the utility model, a buffer chamber arranged on the outside of the vacuum tube can effectively alleviate the sudden pressure change in the vacuum tube during the vacuum pumping process. When the vacuum pump starts or stops, the air in the buffer chamber can absorb or release the pressure, avoiding the instantaneous pressure change from damaging the vacuum pump and the vacuum tube, thereby extending the service life of the equipment. The buffer chamber works together with the electric control valve on the vacuum tube to accurately control the pumping speed and pressure change according to the actual situation of vacuum pumping. The opening and closing of the electric control valve can adjust the flow rate of the gas in the vacuum tube. Combined with the buffering effect of the buffer chamber, the vacuum pumping process is made smoother, the problem of unstable vacuum degree caused by pressure fluctuations is reduced, and the quality and stability of the vacuum pumping operation are improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a front sectional view of the vacuum container of the present utility model;

[0019] Figure 2 This is a diagram of the internal structure of the vacuum container of the present utility model;

[0020] Figure 3 This is a structural diagram of the internal part of the vacuum container of the present utility model;

[0021] Figure 4 It is a three-dimensional structural diagram of the utility model;

[0022] Figure 5 This is a structural diagram of the diversion component of the utility model;

[0023] Figure 6 This is an axonometric drawing of the diversion component of the present utility model.

[0024] Legend:

[0025] 1. Vacuum container; 2. Vacuum chamber; 3. Feed inlet; 4. Discharge port; 5. Cooling liquid inlet; 6. Vacuum tube; 7. Feed chamber; 8. Sealing plate; 9. Buffer chamber; 10. Sealing butterfly valve; 11. Vacuum pump; 12. Leakage hole; 13. Diversion assembly; 1301. Diversion main pipe; 1302. Diversion arc tube; 1303. Leakage valve; 14. Electric control valve. DETAILED DESCRIPTION

[0026] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific embodiments and drawings. However, the following embodiments are only preferred embodiments of the present invention and are not exhaustive. Based on the embodiments in the implementation manner, other embodiments obtained by those skilled in the art without creative work are all within the scope of protection of the present invention.

[0027] The specific embodiments of the present utility model are described below with reference to the accompanying drawings. Specific embodiment one:

[0029] Reference Figure 1-6 , a vacuum pressure stabilizing device at low temperature, including a vacuum container 1 and a vacuum pump 11, a vacuum cavity 2 is provided between the inner wall and the outer wall of the vacuum container 1, a cooling liquid inlet 5 and a vacuum pipe 6 penetrating the vacuum cavity 2 are respectively provided at both ends of the vacuum container 1, a feed port 3 is provided on the back of the vacuum container 1, and a discharge port 4 is provided on the bottom surface of the vacuum air, the cooling liquid inlet 5 provides a channel for the coolant to enter the vacuum cavity 2, so that the coolant can smoothly enter the vacuum cavity 2 and start the flow and cooling process in the cavity, the vacuum pipe 6 connects the vacuum cavity 2 and the vacuum pump 11, and provides a gas flow path for the vacuum operation, when the vacuum pump 11 is working, the air in the vacuum cavity 2 is extracted, and stable vacuuming and pressure buffering are achieved under the action of the buffer cavity 9 and the electric control valve 1304, the vacuum cavity 2 is the key part to achieve the vacuum environment, and at the same time provides space for the flow and diversion of the coolant, and the coolant flows from the cold The coolant enters through the liquid inlet 5 and flows in the vacuum chamber 2. The structure near one end of the vacuum tube 6 cooperates with the sealing plate 8, the guide chamber 7, etc. to realize the coolant diversion and pressure buffering related functions. The coolant flows in the cavity and achieves a uniform cooling effect through interaction with the diversion component 13. During vacuuming, the pressure change in the cavity is adjusted by the buffer chamber 9 and other related components. The vacuum container 1 serves as the main structure of the entire device, accommodating the internal vacuum chamber 2, the diversion component 13 and other components, providing a spatial environment for the coolant and vacuuming operations. The vacuum chamber 2 inside it cooperates with the external vacuum pump 11 to realize a vacuum environment, and the material is input and output through the feed port 3 and the discharge port 4 arranged on its wall. During operation, the coolant enters the vacuum chamber 2 from the cooling liquid inlet 5, and the material can enter the internal space from the back feed port 3, and the processed material is discharged from the bottom discharge port 4.

[0030] A sealing plate 8 is provided at one end of the vacuum chamber 2 near the vacuum tube 6, and a guide cavity 7 is provided on one side of the sealing plate 8 and at the end of the vacuum chamber 2. The guide cavity 7 guides the coolant entering so that it flows along a predetermined path, further participates in the cooling process or pressure regulation, cooperates with the sealing plate 8, receives the coolant flowing out of the leakage hole 12, provides guidance for the subsequent flow of the coolant, and serves as a transition flow area for the coolant near the vacuum chamber 2 and the vacuum tube 6 to ensure the continuity and stability of the coolant flow. The sealing plate 8 is provided with a leakage hole 12 on the circumference of the surface, and a diversion component 13 is provided on the inner wall of the vacuum container 1. The position between adjacent leakage holes 12 is consistent with the diversion component 13. The end portion is penetrated, and the edges of the connection position between the sealing plate 8 and the vacuum chamber 2 are sealed. The connection position between the diverter component 13 and the sealing plate 8 is sealed. The sealing plate 8 plays a sealing and guiding role in the vacuum chamber 2 near the end of the vacuum tube 6. The guide cavity 7 on one side cooperates with the leakage hole 12 on the sealing plate 8 to guide the flow direction of the coolant. The coolant enters the guide cavity 7 from the vacuum chamber 2 through the leakage hole 12 opened on the circumference, and at the same time ensures the sealed isolation between the vacuum chamber 2 and the vacuum tube 6 to prevent air leakage from affecting the vacuum degree. It works in conjunction with the diverter component 13 and the guide cavity 7 to ensure the reasonable flow of the coolant in the vacuum chamber 2 and the stable pressure.

[0031] The end of the vacuum tube 6 is connected to a vacuum pump 11, and a sealing butterfly valve 10 is provided at the connection position between the vacuum tube 6 and the vacuum pump 11. The vacuum pump 11 provides the power for vacuuming the device, extracts the air in the vacuum chamber 2, and makes the vacuum container 1 reach a vacuum state. The vacuum tube 6 is connected to the vacuum chamber 2, and the air pressure in the vacuum chamber 2 is reduced after startup. The electric control valve 1304 and the sealing butterfly valve 10 on the vacuum tube 6 work in cooperation. The electric control valve 1304 controls the on and off of the vacuum tube 6 in the buffer chamber 9. The sealing butterfly valve 10 ensures the sealing of the connection between the vacuum tube 6 and the vacuum pump 11. The buffer chamber 9 is provided on the outside of the vacuum tube 6. The electric control valve 1304 is provided at the position of the vacuum tube 6 inside the buffer chamber 9. When vacuuming, the vacuum tube 6 is vacuumed. The pressure inside the vacuum tube 6 is buffered to prevent sudden pressure changes from damaging the vacuum pump 11 and the entire device. It is arranged on the outside of the vacuum tube 6. When the vacuum pump 11 is evacuating air, the change in the air volume in the buffer chamber 9 can alleviate the pressure change. It cooperates with the electric control valve 1304 on the vacuum tube 6. When the electric control valve 1304 is opened or closed, the pressure in the buffer chamber 9 changes accordingly, stabilizing the pressure in the vacuum tube 6. The sealing butterfly valve 10 ensures the sealing of the connection between the vacuum tube 6 and the vacuum pump 11, prevents air leakage, and maintains a vacuum environment. The sealing structure of the butterfly valve prevents air from entering the vacuum tube 6 from the connection part when it is closed. Before and after the vacuum pump 11 works, it is ensured that it is in the correct open and closed state to ensure the normal progress of the vacuum process.

[0032] The diversion assembly 13 includes a diversion main pipe 1301 and a guide arc tube. The surface of the diversion main pipe 1301 is evenly distributed with diversion arc tubes 1302. The surface of the diversion arc tube 1302 is provided with a discharge valve 1303. The length of the diversion main pipe 1301 is the same as the length of the inner wall of the vacuum container 1. The diversion assembly 13 is distributed along the circumference of the inner wall of the vacuum container 1. The diversion arc tubes 1302 of adjacent diversion assemblies 13 are staggered. The discharge valves 1303 are distributed on the top surface, both ends and both sides of the diversion arc tube 1302. The discharge valves 1303 are evenly distributed along the top surface and both sides of the diversion arc tube 1302. The diversion main pipe 1301 serves as the main support and diversion structure of the diversion assembly 13. Its length is the same as the length of the inner wall of the vacuum container 1, providing an installation base and a main flow path for the coolant for the diversion arc tube 1302. The diversion arc tube 1302 serves as the main support and diversion structure of the diversion assembly 13. By uniformly distributing the coolant in an array on the surface, the coolant can be diverted and directed, so that the coolant can be more evenly distributed in the vacuum chamber 2, thereby improving the cooling effect. The relief valve 1303 is distributed on the top surface, both ends and both sides of the guide arc tube 1302, which can control the flow and outflow of the coolant in the guide arc tube 1302, thereby achieving more precise diversion and flow regulation. The coolant enters from the guide main pipe 1301, and is diverted to different positions in the vacuum chamber 2 through the guide arc tube 1302 and the relief valve 1303. The position between adjacent leakage holes 12 is penetrated by the end of the diversion component 13, ensuring that the coolant can cover all areas of the vacuum chamber 2, and is distributed along the circumference of the inner wall of the vacuum container 1, and adjacent guide arc tubes 1302 are staggered, so that the coolant is evenly distributed in the vacuum chamber 2, avoiding the occurrence of cooling blind spots, and effectively improving the cooling efficiency and uniformity. Specific embodiment two:

[0034] Reference Figure 1-6 , based on the contents in the above specific embodiments, the following contents are further disclosed:.

[0035] In the cooling liquid entry step, the cooling liquid enters the material guide cavity 7 through the cooling liquid inlet 5 at both ends of the vacuum container 1, and is divided through the material guide cavity 7 so that the cooling liquid directly enters the interior of the vacuum cavity 2 and the interior of the diversion component 13 along the leakage hole 12. Part of the cooling liquid flows directly in the vacuum cavity 2, and part of the cooling liquid enters the diversion component 13 for diversion. The cooling liquid interacts with the diversion component 13 in the vacuum cavity 2. The cooling liquid first enters the diversion main pipe 1301 of the diversion component 13, and then flows into the guide arc tube 1302 uniformly distributed in an array on the surface of the guide main pipe 1301. The discharge valve 1303 on the surface of the guide arc tube 1302 controls the outflow of the cooling liquid according to its distribution on the top surface, both ends and both sides and is uniformly distributed along the top surface and both sides, so that the cooling liquid is diverted to the position between adjacent leakage holes 12 and other areas of the vacuum cavity 2, thereby achieving uniform distribution of the cooling liquid in the vacuum cavity 2, thereby cooling the interior of the vacuum container 1.

[0036] Vacuuming steps: start the vacuum pump 11, open the sealing butterfly valve 10 at the connection position between the vacuum tube 6 and the vacuum pump 11, open the electric control valve 1304 at the internal position of the buffer chamber 9 of the vacuum tube 6, and the vacuum pump 11 begins to extract the air in the vacuum chamber 2 through the vacuum tube 6. During the vacuuming process, the buffer chamber 9 buffers the pressure changes in the vacuum tube 6. When the vacuuming speed changes or the vacuum pump 11 starts and stops, the air volume in the buffer chamber 9 changes accordingly, absorbing or releasing pressure, stabilizing the pressure in the vacuum tube 6, and preventing sudden pressure changes from causing damage to the equipment. Continue to pump air until the vacuum chamber 2 reaches the required vacuum degree. During the whole process, the sealing plate 8 ensures the seal between the vacuum chamber 2 and the vacuum tube 6 to prevent air leakage from affecting the vacuum degree. At the same time, the sealing treatment at the connection position of the diversion component 13 and the sealing plate 8 also ensures the sealing of the entire system and maintains the stability of the vacuum environment. Specific embodiment three:

[0038] Reference Figure 1-6 ,Based on the contents in the above specific embodiments, the following contents are further disclosed:.

[0039] In actual use, the diversion component 13 may adopt the following structural contents to increase its diversion functionality and controllability:

[0040] The overall structure of the diversion assembly 13 is optimized: the diversion main pipe 1301 and the diversion arc pipe 1302 are made of high-strength, corrosion-resistant metal materials to ensure structural stability in vacuum and coolant environments. A diversion baffle is provided inside the diversion main pipe 1301 to divide its internal space into multiple independent diversion channels, each of which is connected to a corresponding diversion arc pipe 1302. This allows for more precise control of the flow direction of the coolant.

[0041] The number and distribution of the guide arc tubes 1302 are optimized according to the shape and size of the vacuum container 1. The density of the guide arc tubes 1302 is increased in areas requiring intensive cooling; the number of the guide arc tubes 1302 is appropriately reduced in areas with lower cooling requirements. At the same time, the shape of the guide arc tubes 1302 is designed to be adjustable, so that the spray angle of the coolant can be changed within a certain range.

[0042] Improved structure of relief valve 1303: Each relief valve 1303 utilizes an electric valve structure, equipped with an independent micromotor and transmission mechanism. The valve core is made of wear-resistant and high-temperature-resistant ceramic material to ensure the valve's sealing and service life during frequent opening and closing. A flow sensor is installed on the relief valve 1303 to monitor the coolant flow through the valve in real time. The flow sensor feeds flow data back to the control system for precise control of the coolant flow.

[0043] Control method of the relief valve 1303

[0044] Uniform flow control: The control system sends control signals to the discharge valves 1303 on all the guide arc tubes 1302 simultaneously according to a preset uniform flow mode. In the uniform flow mode, the opening of each discharge valve 1303 is adjusted based on the data fed back by the flow sensor, so that the coolant flow through each discharge valve 1303 is substantially equal. For example, the control system can use a PID proportional-integral-differential control algorithm to adjust the valve opening in real time according to the flow deviation to achieve uniform distribution of the coolant in the vacuum chamber 2.

[0045] The top, ends, and sides of the drain valve 1303 at various locations on the arc tube 1302 can be fine-tuned based on the temperature distribution within the vacuum chamber 2. If the temperature sensor in a certain area detects a slightly higher temperature, the opening of the drain valve 1303 near that area can be appropriately increased to allow more coolant to flow to that area, thereby maintaining temperature uniformity throughout the vacuum chamber 2.

[0046] Centralized flow control: When a specific location needs to be concentrated with coolant flowing in, the control system determines the guide arc tube 1302 and the drain valve 1303 associated with that location based on the coordinate information of the target location. Then, it sends an opening signal to these specific drain valves 1303, while closing other unrelated drain valves 1303 or reducing their openings.

[0047] To achieve more precise centralized flow diversion, the opening of the discharge valve 1303 on the guide arc tube 1302 related to the target location can be controlled to achieve different coolant flow rates. For example, for the discharge valve 1303 closer to the target location, its opening can be increased to allow more coolant to flow to the target location; for the discharge valve 1303 farther away but still having an impact, the opening can be appropriately reduced to assist in the centralized flow of coolant to the target location.

[0048] During the centralized diversion process, flow sensors continuously monitor coolant flow. The control system promptly adjusts the opening of drain valve 1303 based on this feedback, ensuring that coolant flows accurately and centrally to the target location to meet local cooling needs. Simultaneously, a temperature sensor monitors temperature changes around the target location. When the temperature reaches a preset value, the control system adjusts the opening of drain valve 1303 to maintain a stable temperature in that area. Specific embodiment four:

[0050] Reference Figure 1-6 ,Based on the contents in the above specific embodiments, the following contents are further disclosed:.

[0051] When using vacuum pumps, in order to increase functionality and controllability, the following structural contents can be used:

[0052] Pressure sensor setup

[0053] Distribution position: Pressure sensors are installed in the vacuum chamber 2 of the vacuum container 1, the buffer chamber 9 and the vacuum tube 6. In the vacuum chamber 2, the pressure sensors can be evenly distributed at different positions of the inner wall to fully sense the pressure changes in the chamber. In the buffer chamber 9, the pressure sensors are installed near the entrance of the vacuum tube 6 and around the chamber wall to accurately monitor the pressure dynamics during the buffering process; the pressure sensors in the vacuum tube 6 are installed at intervals along the length of the tube to detect the pressure changes in the tube during the pumping process.

[0054] Type selection: Choose a high-precision, high-sensitivity pressure sensor that can measure low pressures in a vacuum environment, such as a capacitive pressure sensor or a piezoresistive pressure sensor. These sensors offer excellent linearity and stability, allowing them to accurately measure small pressure changes.

[0055] Pressure sensing and vacuum pressure adaptation principle

[0056] Data acquisition and transmission: The pressure sensor collects the pressure data of the location in real time and transmits it to the control system, which can be an integrated PLC programmable logic controller or a specially designed electronic control unit.

[0057] Pressure analysis and judgment: The control system analyzes the data from each pressure sensor. During the vacuuming process, the current vacuuming status is judged by comparing the pressure values ​​in the vacuum chamber 2, the buffer chamber 9 and the vacuum tube 6. For example, if the pressure in the vacuum chamber 2 drops too quickly or too slowly, it may indicate an abnormal pumping speed; if the pressure fluctuation in the buffer chamber 9 exceeds the normal range, it indicates that the buffering function may be affected.

[0058] Pressure adaptation adjustment

[0059] Pumping speed adjustment: Based on the pressure analysis results, the control system can adapt the pumping speed by adjusting the opening of the electric control valve 1304 on the vacuum tube 6. If the pressure in the vacuum chamber 2 drops too quickly, the opening of the electric control valve 1304 is reduced to reduce the pumping speed and avoid damage to the structure of the vacuum container 1 or other components. Conversely, if the pressure drops too slowly, the opening of the electric control valve 1304 is appropriately increased to speed up the pumping process.

[0060] Buffer chamber 9 control optimization: For the buffer chamber 9, when the pressure sensor detects an abnormal change in the pressure in the cavity, the control system can adjust the auxiliary regulating device connected to the buffer chamber 9, such as a small gas replenishment or discharge valve. If the pressure in the buffer chamber 9 is too high, the discharge valve can be opened in time to release some gas; if the pressure is too low, an appropriate amount of gas is introduced through the gas replenishment valve to maintain the pressure buffering function of the buffer chamber 9.

[0061] Fault Warning and Protection: When the pressure detected by the pressure sensor exceeds the preset safety range, the control system triggers an alarm and automatically stops the vacuum pump 11 or takes other protective measures to prevent equipment failure or safety accidents caused by abnormal pressure. For example, if the pressure in the vacuum line 6 is too high, which may indicate a blockage, the control system will stop the vacuum operation and display a fault message for maintenance personnel to check and resolve.

[0062] By improving the above-mentioned pressure sensing and adaptation mechanism, the vacuuming process can be controlled more accurately, ensuring that the vacuum container 1 operates in a stable pressure environment, and improving the reliability and safety of the entire low-temperature vacuum pressure stabilization device.

[0063] In summary:

[0064] 1. A diverter assembly 13 is provided in the vacuum chamber 2 inside the vacuum container 1, and the diverter main pipe 1301, the diverter arc pipe 1302 and the relief valve 1303 are used to achieve uniform distribution of the coolant in the vacuum chamber 2. The diverter arc pipes 1302 are staggered and the relief valves 1303 are provided in multiple positions, which can accurately control the flow direction and flow rate of the coolant, avoid local overheating or insufficient cooling, effectively improve the uniformity of cooling, and provide stable temperature conditions for material processing in a vacuum environment. The reasonable design of the vacuum chamber 2, the cooling liquid inlet 5, the diverter assembly 13 and the material guide chamber 7 enables the coolant to form a stable flow path in the vacuum chamber 2, ensuring that the entire internal space of the vacuum container 1 can be fully cooled, which is conducive to maintaining a uniform cooling vacuum environment and improving the reliability and efficiency of the device in vacuum cooling applications.

[0065] 2. The buffer chamber 9 set outside the vacuum tube 6 can effectively alleviate the sudden pressure change in the vacuum tube 6 during the vacuum process. When the vacuum pump 11 starts or stops, the air in the buffer chamber 9 can absorb or release pressure to avoid damage to the vacuum pump 11 and the vacuum tube 6 caused by instantaneous pressure changes, thereby extending the service life of the equipment. The buffer chamber 9 works together with the electric control valve 1304 on the vacuum tube 6 to accurately control the pumping speed and pressure changes according to the actual vacuum situation. The opening and closing of the electric control valve 1304 can adjust the flow rate of the gas in the vacuum tube 6. Combined with the buffering effect of the buffer chamber 9, the vacuum process is smoother, the problem of unstable vacuum caused by pressure fluctuations is reduced, and the quality and stability of the vacuum operation are improved.

[0066] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0067] The above shows and describes the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely preferred examples of the present invention and are not intended to limit the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention, and such changes and improvements fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. A low-temperature vacuum pressure stabilizing device, comprising a vacuum container (1) and a vacuum pump (11), characterized in that: A vacuum chamber (2) is provided between the inner wall and the outer wall of the vacuum container (1), and a cooling liquid inlet (5) and a vacuum pumping tube (6) are provided at both ends of the vacuum container (1) and penetrate the vacuum chamber (2). A sealing plate (8) is provided at one end of the vacuum chamber (2) close to the vacuum pumping tube (6), and a material guide chamber (7) is provided at one side of the sealing plate (8) and at the end of the vacuum chamber (2). A leakage hole (12) is provided on the circumference of the surface of the sealing plate (8), and a diversion component (13) is provided on the inner wall of the vacuum container (1), and the position between adjacent leakage holes (12) penetrates the end of the diversion component (13). A buffer chamber (9) is provided outside the vacuum pumping tube (6), and an electric control valve (1304) is provided at a position of the vacuum pumping tube (6) inside the buffer chamber (9).

2. The low-temperature vacuum voltage stabilizing device according to claim 1, characterized in that: The diversion assembly (13) comprises a flow guide main pipe (1301) and a material guide arc pipe. The surface of the flow guide main pipe (1301) is provided with flow guide arc pipes (1302) distributed in a uniform array. The surface of the flow guide arc pipe (1302) is provided with a discharge valve (1303). The length of the flow guide main pipe (1301) is the same as the length of the inner wall of the vacuum container (1).

3. The low-temperature vacuum voltage stabilizing device according to claim 2, characterized in that: The diversion components (13) are distributed along the circumference of the inner wall of the vacuum container (1), and the guide arc tubes (1302) of adjacent diversion components (13) are staggered.

4. The low-temperature vacuum voltage stabilizing device according to claim 2, characterized in that: The discharge valves (1303) are distributed on the top surface, both ends and both sides of the guide arc tube (1302), and the discharge valves (1303) are evenly distributed in an array along the top surface and both sides of the guide arc tube (1302).

5. The low-temperature vacuum voltage stabilizing device according to claim 1, characterized in that: The end of the vacuum pump (6) is connected to a vacuum pump (11), and a sealing butterfly valve (10) is provided at the connection position between the vacuum pump (6) and the vacuum pump (11).

6. The low-temperature vacuum voltage stabilizing device according to claim 1, characterized in that: The back surface of the vacuum container (1) is provided with a material inlet (3), and the bottom surface of the vacuum container is provided with a material outlet (4).

7. The low-temperature vacuum voltage stabilizing device according to claim 1, characterized in that: The edges of the connection positions between the sealing plate (8) and the vacuum chamber (2) are both sealed, and the connection positions between the diversion component (13) and the sealing plate (8) are both sealed.

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